GOST R ISO 14644-8-2014 Cleanrooms and associated controlled environments Part 8 Classification of air cleanliness by chemical concentration《洁净室和相关控制环境 第8部分 采用化学浓度法对空气清洁度的分类》.pdf

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6、,1. 3.2 3.2.1 (acid): , , . 3.2.2 (base): , -, . 3.2.3 (biotoxic): , - , , . 3.2.4 (condensable): , - . 3.2.5 - (corrosive): , . 3.2.6 (dopant): , / - , ( ). 3.2.7 (organic): -. 3.2.8 (oxidant): , . 4 4.1 4.2. - - , . 4.2 (-) - -, -, - -. : - N (X), X , : - (ac); - (ba); - (bt); - (cd); - - (cr), -

7、(dp); - (or); - (ox); - . N -, c, /3, 0 12. N = log10c 0,1. 14644-82014 3 1 N- (NMP) (-) 810-7/3200 ; M 100 Tb 200 C; L , Tb 100 . 14644-82014 14 C () .1 .1.1 . .1.2 , .1, , . .2 .2.1 : - , ; - , . .2.2 . - , . .2.3 ( ). .2.4 (DIFF) - , . - . .2.5 - . . - , . .2.6. : - (SOR), - , 1), , .; - , ; - (IMP), - , -; - (SB), - , . - (SB)