GOST R ISO 14644-9-2013 Cleanrooms and associated controlled environments Part 9 Classification of surface cleanliness by particle concentration《洁净室和相关控制环境 第9部分 采用颗粒浓度法对洁净度的分类》.pdf

1、 14644-9 2013 9 ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration (IDT) 2014 14644-9 2013 II 27 2002 . 184- , 1.02004 . 1 () , 4 2 184 3 22 2013 . 1657- 4 14644-9:2012 . 9. (ISO 14644-9:2012 Cleanrooms and assoc

2、iated controlled environments Part 9: Classification of surface cleanliness by particle concentration) , 5 1.02012 ( 8). ( 1 ) , - . () - - . , (gost.ru) , 2014 , 14644-9 2013 III . , , , , , . 14644-9 / 209 . 14644 : - 1. ; - 2. 14644-1; - 3. ; - 4. , ; - 5. ; - 6. ; - 7. ( , , -); - 8. ; - 9. ; -

3、10. . 14698 . , : - 1. ; - 2. . 14644-9 2013 1 9 Cleanrooms and associated controlled environments. Part 9. Classification of surface cleanliness by particle concentration 20141201 1 . A D. , , , , , , . (SCP) 0,05 500 . : - , ; - ; - ; - , , , , , ; - ; - , , , / . . 2 : 14644-6:2007 . (ISO 14644-6

4、:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary). , 1 , , , . , , (). , , , , , . , , , , . 14644-9 2013 2 3 , 14644-6:2007, : 3.1 (descriptor for specific particle size range): , (SCP) . , , , . ( SCP). 3.2 (direct measurement method): - . 3.3 (indirect measurement method

5、): , . 3.4 (solid surface): . 3.5 (surface particle): / , , , . / . 3.6 , SCP (surface cleanliness by particle concentration, SCP): . , ( , ), . 3.7 , (surface cleanliness by particle concentration class, SCP class): , (/) ( 1 8). 3.8 , SCP (surface cleanliness by particle concentration classificati

6、on, SCP classification): , (/) . SCP N. 3.9 (surface particle concentration): . 4 : AFM - ; CNC ; EDX ; ESCA , ; ESD ; IR () ( ); OPC ; PET ; SEM ; SPC ; UV () ; WDX . 14644-9 2013 3 5 5.1 SCP ( SCP) N, , (/ ), , D: , (1) , D (/ ). ;N SCP, (SCP) 1 8 ( SCP 1 SCP 8), SCP N , ; N 10 1 .D , ;k , 1, . :1

7、. SCP, , - .2. , . (1) . 1 SCP . 1 . 1 SCP /2 SCP , 0,05 0,1 0,5 1 5 10 50 100 500SCP 1(200) 100 20 (10)SCP 2(2 000) 1 000 200 100 (20) (10)SCP 3(20 000) 10 000 2 000 1 000 (200) (100)SCP 4(200 000) 100 000 20 000 10 000 2 000 1 000 (200) (100)SCP 51 000 000 200 000 100 000 20 000 10 000 2 000 1 000

8、 (200)SCP 6(10 000 000)2 000 000 1 000 000 200 000 100 000 20 000 10 000 2 000SCP 710 000 0002 000 000 1 000 000 200 000 100 000 20 000SCP 810 000 0002 000 000 1 000 000 200 000, 1, . SCP , 1 ( )., , . . . (. . ) SCP . 14644-9 2013 4 X , D, ; Y D, , / ;1 SCP 1; 2 SCP 2; 3 SCP 3; 4 SCP 4; 5 SCP 5;6 SCP 6; 7 SCP 7; 8 SCP 8 1 SCP SCP . . , , , , , , , . . ( A). : SCP 5 (1 ) , 1 2 105 1 (D = 1). SCP 5 (10 ) , 1 2 104 10 (D = 10). (D = x), , SCP 5 ( ), SCP. , , , - , ( B).5.2 ( SCP) : SCP N (D ).