JEDEC JESD86A-2009 Electrical Parameters Assessment.pdf

1、JEDEC STANDARD Electrical Parameters Assessment JESD86A (Revision of JESD86, August 2001) OCTOBER 2009 (Reaffirmed: MAY 2014) JEDEC SOLID STATE TECHNOLOGY ASSOCIATION NOTICE JEDEC standards and publications contain material that has been prepared, reviewed, and approved through the JEDEC Board of Di

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7、s for alternative contact information. Published by JEDEC Solid State Technology Association 2014 3103 North 10th Street Suite 240 South Arlington, VA 22201-2107 This document may be downloaded free of charge; however JEDEC retains the copyright on this material. By downloading this file the individ

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9、iation 3103 North 10th Street Suite 240 South Arlington, VA 22201-2107 or refer to www.jedec.org under Standards-Documents/Copyright Information. JEDEC Standard No. 86A Page 1 ELECTRICAL PARAMETERS ASSESSMENT (From JEDEC Board Ballot JCB-09-48, formulated under the cognizance of the JC-14.3 Subcommi

10、ttee on Silicon Device Reliability Qualification and Monitoring.) 1 Scope This standard describes test methods for assessing Electrical Parameter Distributions (ac, dc, functional and timing) of devices or test structures* measured at pre stress or subsequent readouts of testing process. This standa

11、rd is intended to describe methods for obtaining electrical variate data. The intent is to assess the devices response function for specific parameters over time and under defined application environment (operating temperature, voltage, humidity, input/output levels, noise, power supply stability et

12、c.). * For the purpose of this document the term “devices” is used for both, “devices” and “test structures”. 2 Terms and definitions electrical characterization: The description of behavior of the Electrical Parameters of a device based on statistical analysis of experimental data and under predefi

13、ned operating conditions. NOTE This includes the distribution of an electrical parameter as a function of other parameter(s) variation. process corner characterization: For the purpose of testing the functional robustness, the varied parameters should be operated through their design limits. NOTE Th

14、ese varied parameters usually involve the operating extremes of the device with respect to power supplies, frequency, and temperature, but other input ac and dc parameters could also be varied. The samples for process corner characterization could either be taken from the extremes of a random distri

15、bution or created intentionally generating the corner parameters by varying the input parameter of a process technology. electrical distribution(s): The distribution of electrical parameters measured on a random sample of devices from a population. electrical parameter drift: The absolute change in

16、an electrical parameter over a period of time NOTE 1 The change may be measured as a shift from the original value of a single device or as a shift in the statistical distribution for a group of devices. When changes are to be studied on an individual device basis the study is called Parametric Drif

17、t of individuals (serialization of individual units is required). When changes are studied on a group of devices the study is referred to as Parametric Drift of distributions (serialization of individual units is not required). The cause of the change may be use and/or environmental conditions (in t

18、he field application or as simulated by accelerated stress testing). NOTE 2 Multiple structures can be constructed within a single device; in this type of design, each structure (array or chain) can be characterized independently, and measured against a pre-determined design specification. JEDEC Sta

19、ndard No. 86A Page 2 2 Terms and definitions (contd) excursion: A sudden recordable electrical event that falls outside (above or below) the characteristic response of its electrical distribution. NOTE This electrical non-conformity is repeatedly observed a given period of time. Gauge Repeatability

20、and Reproducibility (GR DaimlerChrysler Corporation, Ford Motor Corporation and General Motors Corporation, available from Automotive Industry Action Group (AIAG) at www.AIAG.org JEDEC Standard No. 86A Page 3 4 Process requirements 4.1 Characterization Plan The characterization plan should cover at

21、least Device name Test equipment Parameters Failure criterion Test condition Sample size 4.2 Equipment Equipment used for electrical parameter assessment shall be capable as demonstrated by Gauge Repeatability and Reproducibility (GR&R) for the Electrical Parameters being measured. The tools shall b

22、e calibrated regularly and the tolerances verified to be within specification. An adequate qualified tool shall be used and measurements shall be taken within tool resolution. 4.3 Parameters The supplier is not required to perform Electrical Distributions on every electrical parameter detailed in th

23、e suppliers data sheet. The parameters tested should be those whose abnormal excursions (outliers) may impact quality and/or reliability, or those that are essential to the operation of the device. If a package configuration affects certain electrical parameters these parameters need to be character

24、ized independently using the device package configuration. For ICs this list of parameters may be established by the supplier based on knowledge of the technology, design, manufacturing and testing process, or could be negotiated between the user and supplier, usually through a user application spec

25、ification. 4.4 Procedure An overview of the procedure is given in figure 1. Figure 1 Process Flow Test sample Test program Data collection Data assessment JEDEC Standard No. 86A Page 4 4.4 Procedure (contd) 4.4.1 Test sample selection For electrical distribution determination select a random set of

26、devices from a given population or select devices consistent with the characterization plan. The sample plan must include sample size and acceptance for attribute, or minimum sample size for statistical significance of which is specified in JESD 47 or the corresponding stress test method. These devi

27、ces must come from the production process and be manufactured on production tooling, with all processing as product to be delivered to user (e.g., Burn In if used, pre and post stress test etc.). If electrical parameter drift on individual devices is to be determined, devices shall be serialized. Th

28、is will enable determining the absolute device-specific drift as well as the sample (distribution) drift. 4.4.2 Test Conditions Test these devices using test equipment (e.g. automatic test equipment and handler) and a test program that enables variate data to be taken on each device or a group of de

29、vices. The test program shall be unchanged during qualification stress testing. Testing shall be performed according to characterization plan. The accuracy and precision of the test equipment shall be sufficient to detect changes in the distribution of the applicable electrical parameters. 4.4.3 Dat

30、a Collection Collected data must be tabulated in a format where capability can be easily analyzed. For example visual aids such as distribution fits, bar charts and box plots facilitate understanding of the data. The data fields should include parameter, mean and/or median, standard deviation, minim

31、um and maximum values and fail criteria. Other limits may be applied internally by the supplier. The supplier has the option of including the detailed device data in any report to the user, but should be available upon request. 4.4.4 Data Assessment If electrical parameter drift is to be performed o

32、n individual devices, perform characterization either in situ or repeat the above at predetermined read points and after stress testing (e.g. life test per JESD22-A108) is completed on the devices under consideration. For any electrical parameters that do not meet the requirements the supplier is re

33、quired to develop corrective and/or preventive action plans to address the discrepancy. The corrective action is then validated through re-testing. JEDEC Standard No. 86A Page 5 5 Results report The following details shall be reported: 1) The type of study, characterization, electrical distributions

34、, parametric drift curve (individuals or distributions) 2) Sample size 3) List of characterized electrical parameters 4) List minimum and maximum operating device conditions (e.g. temperature voltage, frequency). 5) List of stress and characterization conditions. 6) Acceptance / fail criteria 7) Dat

35、a Fields per section 4.4.3. JEDEC Standard No. 86A Page 6 Annex A (informative) Differences between JESD86A and JESD86 This table briefly describes most of the changes made in this standard JESD86A, compared to its predecessor, JESD86 (August 2001). Some minor editorial changes like punctuation chan

36、ges are not included. Clause Description of change 1 Extension of scope 2 changed definitions of “electrical characterization”, “electrical parameter drift”, “production tooling” 2 new definitions of “process corner characterization”, “excursion”, “Gauge Repeatability and Reproducibility (GR&R)”, “f

37、ailure” 3 new clause on references 4.1 new sub clause on characterization plan 4.2 details on gauging and tool specification added 4.4 figure added, headlines for secondary sub clauses and details added 5 some reporting topics changed and added Standard Improvement Form JEDEC JESD86A The purpose of

38、this form is to provide the Technical Committees of JEDEC with input from the industry regarding usage of the subject standard. Individuals or companies are invited to submit comments to JEDEC. All comments will be collected and dispersed to the appropriate committee(s). If you can provide input, pl

39、ease complete this form and return to: JEDEC Attn: Publications Department 3103 North 10th Street Suite 240 South Arlington, VA 22201-2107 Fax: 703.907.7583 1. I recommend changes to the following: Requirement, clause number Test method number Clause number The referenced clause number has proven to be: Unclear Too Rigid In Error Other 2. Recommendations for correction: 3. Other suggestions for document improvement: Submitted by Name: Phone: Company: E-mail: Address: City/State/Zip: Date: