KS B 6861-2009 Turbo molecular pumps－Acceptance test code《涡轮分子泵 验收试验方法》.pdf

1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS B 6861 KS B 6861:2009 2009 6 26 http:/www.kats.go.krKS B 6861:2009 : ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ： 1999 12 31 ： 2009 6 26 2009-0296 ： ： ( 02-509-7290) (http:/www.kats.go.kr). 10 5 , . KS B 6861:2009 Turbo molecular pumps Acceptance test cod

2、e 1 , ( .) . 2 . . ( ) . KS A 3017, ( ) KS A 3018, ( ) KS B 0081, KS B 1540, KS B 6314, KS B 6382, 3 , KS B 0081, KS A 3017, KS A 3018 . 3.1 . . 3.2 . 3.3 . 3.4 . KS B 6861:2009 2 3.5 . 3.6 . 3.7 . 3.8 , . 3.9 48 . 3.10 . 3.11 . 3.12 90 % . 3.13 10 % . 4 . C conductance m3/s d orifice diameter m D n

3、ominal diameter of test dome m Keff compression ratio of vacuum pump Keff, Keff, special values of compression ratio KS B 6861:2009 3 K0 0 compression ratio at zero throughput L thickness of orifice plate m M gas molecular mass kg/mol P0 ultimate operational pressure on inlet Pa Pa0 Pa Pb0 Pa P1 vac

4、uum pressure on inlet Pa P1max maximum operational pressure on inlet Pa P2 vacuum pressure in backing line Pa Pa, Pb special values of pressure Pa Pbc critical backing pressure Pa Q throughput of vacuum pump Pa L/s mbar L/s Qmax maximum throughput Pa L/s mbar L/s Q1, Q2 special values of throughput

5、Pa L/s mbar L/s R ideal gas constant N m(mol K) S pumping speed L/s Sn nominal pumping speed(Keff 1) L/s S pumping speed of backing pump L/s Sx maximum expected pumping speed L/s T absolute temperature K 5 . a) b) c) d) e) f) 6 . a) , , . b) , . 020KSSx(1) c) 10 4 Pa 5 %, 10 % . d) . e) 15 25 3 . f)

6、 99.9 wt% . g) . KS B 6861:2009 4 7 7.1 10 4 Pa , . a) D , 1.5 D . , 1.5 D . , 1 45 , 0.5 D . b) 0.5 D , 25 mm . 0.1 D , D . c) D KS B 1540 100 . 100 , 1 . d) 120 . 7.2 10 4 Pa , . a) 2 2 . 10 4 Pa , D, 1.5 D 0.5 D 2.5 mm , 0.1 D . 1 KS B 6861:2009 5 2 b) D , 1 45 , 0.5 D . c) D 100 . d) . , Pa Pb 3

7、 50 . e) . . , Pa Pb . , Pa Pb . f) 300 . 8 . 8.1 10 4 Pa a) 1 . b) 1 , 120 3 . c) (bakeout device) . . d) . . e) , 2 . . f) 48 P1 . . 501baPPKS B 6861:2009 6 8.2 10 4 Pa a) 2 . . b) 1 300 . . . c) 100 , 48 . . d) , 2 . . e) 48 . . 9 S , (steady) m3/h L/s . 9.1 9.1.1 . a) . b) . c) . d) 10 80 , 0.00

8、3 m3/ s . 9.1.2 . a) . b) 1100 . 9.1.3 A . 9.2 9.2.1 10 4 Pa Q , 1 P1 , S . KS B 6861:2009 7 01PPQS= (2) P0： 9.2.2 10 4 Pa S “ ” , 2 . . = 100bbaaPPPPCS (3) Pa, Pa0 , Pb, Pb0 . C . 2/1132ddLMRTc+=(4) L, d , . . ： R 8.314 J/(mol K) Mair 28.810 3 kg/mol T (20 ) 293 K Cair m3/s 9.3 9.3.1 10 4 Pa a) 3 .

9、 B C . )/1(1dL+)( dLd/1912+KS B 6861:2009 8 3 b) A . c) A . . , 5 . 5 5 % . . ( ) ( ) . d) 60 60 . 5 % . . e) (decade) 3 , S S 2 . S Q P1 , Sv Q P2 , P2 2P1 . 9.3.2 10 4 Pa a) 4 . C D . KS B 6861:2009 9 4 b) . c) A . 2 . 5 5 % , . . d) P2 Pa Pb P1 . 5 % . . 3 , Pb 10 3 Pa d 10 . 9.3.3 S P1 Pb 5 (sem

10、i logarithmic graph) . S P2 . X P1 P2 . . KS B 6861:2009 10 5 10 . 10.1 . P210 4 Pa) (P 10 4 Pa) . 1 , . . 120 , 300 . 5.4 ( 8.) 48 . 120 3 , 300 48 . 5.5 ( 9.) . , Q P PQS = . , Q P1, P2 Q C (P1 P2) , =121PPCS . C . . . 5.6 ( 10.) . KS B 6861:2009 18 . P2 10 2 Pa , . 5.7 ( 11.) . , . 5.8 ( 12.) . ,

11、 . , . . 2( 2, 3 .) , . 5.9 ( 13.) 1 . 5.10 ( 14.) 90 % , 10 % . 5.11 ( 15.) . 10 Hz 3 , . 5.12 ( 16.) 135513 7017 (02)60094114 (02)600948878 http:/ Korean Agency for Technology and Standards http:/www.kats.go.kr KS B 6861:2009 KSKSKS SKSKS KSKS SKS KS SKS KSKS SKSKS KSKSKS Turbo molecular pumps Acceptance test code ICS 23.100.10