KS C 6111-4-2007 Homogeneity in the surface resistance of large high-Tc superconductor films at microwave frequencies《超高频带中大面积高温超导薄膜的表面电阻均匀性》.pdf

1、 KS C 6111 4KSKSKSKSSKSKSKS KSKSKS SKSKS KSKS SKS KS KS C 6111 4： 2007 (2012 ) 2007 10 30 http:/www.kats.go.krKS C 6111 4： 2007 : ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ：2007 10 30 ：2012 12 31 2012-0854 ： ： ( 02-509-7294) (http:/www.kats.go.kr). 10 5 , . KS C 6111 4： 2007 i ii iii 1 1 2 1 3 .1 4

2、 1 5 .2 5.1 2 5.2 .2 5.3 .6 5.4 .6 5.5 .7 6 7 6.1 7 6.2 .7 6.3 .7 6.4 .9 6.5 tan 10 6.6 .10 7 11 7.1 11 7.2 .11 7.3 .12 7.4 12 8 .12 8.1 .12 8.2 RS 12 8.3 12 KS C 6111 4： 2007 ii , , . , (77 K, PCS 1/500 , 50 mm .) . KS C 6111 4： 2007 iii . YBa2Cu3O7 (YBCO) YBCO . (RS) . RS 77 K, 10 GHz 200 300 (oxy

3、gen-free high-purity copper, OFHC .) RS 1/1001/50 . RS , , , , RS . 2002 IEC RS 3 , 3 . , . . RS , . KS C 6111 4： 2007 (2012 ) Homogeneity in the surface resistance of large high-Tc superconductor films at microwave frequencies 1 . . ： 8 GHz50 GHz ： 10 GHz 0.01 m ： 100 mm ： 5 mm 2 . . ( ) . KS C IEC

4、 60050 815： 2004, 3 ( ) ZS Et Ht . ZS= Et / Ht= RS j XS (1) RS： XS： 4 RSeff Q . 30 K80 K 10 % . KS C 6111 4： 2007 2 5 5.1 1 . (network analyzer), (cryocooler), . (scalar network analyzer) (vector network analyzer) . 1 2 3 4 5 6 7 8 9 10 11 12 1 5.2 10 12119 8 7 6 5 4 3 2 1 1 1 KS C 6111 4： 2007 3 2

5、(open-ended) . . (Opticlean) . , Be-Cu . / TE , . X Y Z (step motor) , . 2 2 (10 m) . 2 (switch for thermal connection) / . 3 . . 4 X Y Z X Y Z 3 1 m . m Be-Cu KS C 6111 4： 2007 4 3 Be-Cu KS C 6111 4： 2007 5 1 (frame) 10Y (Y stage base) 22.75 inch (flange) 11X (X state base) 3 (Rotary feedthrough) 1

6、2m (m stage base) 4 13m (m stage shaft guide) 5 14 6 (Stage shaft boss) 15m 7 16 8Z (Z stage base) 17 (block) 9 18 4 3(X-Y-Z) 14 13 12 1234 67578910 18 17 16 1511 7KS C 6111 4： 2007 6 5.3 RS tan (77 K, 10 GHz 10 6 ) (tan 77 K, 10 GHz 10 6). 1 . , TE011 . , tan TE021 TE012 Q . 1 B B tan . (batch) f1

7、tan tan f f2 tan . RS , . 1 TE011 TE021 mm mm TE011 GHz A 5 5 19.6 B 5 2.86 25.3 A 3.88 2.73 8.5 B 3.9 2.2 9.6 5.4 , (hollow cylinder) 3 . TE021 3 . , 0.1 mm . 2 19.6 GHz 8.5 GHz . KS C 6111 4： 2007 7 2 mm mm mm mm A 5 5 15 5.1 B 5 2.86 12 2.96 A 3.88 2.73 9 2.83 B 3.9 2.2 9 2.3 5.5 3 . , 0.1 mm . 2

8、 19.6 GHz 8.5 GHz . 6 6.1 88 K 400 nm500 nm 50 mm100 mm YBCO MgO(001) LaAlO3(001) CeO2 r (co-evaporation method), (laser ablation) , (dc magnetron-sputtering) . 6.2 1 . Q , . . . (thermocouple) . , , . 6.3 RS TE011 f0 Q0 ( tan TE012 TE021 Q0 tan f f0 scale .) . 6.3.1 KS C 6111 4： 2007 8 a) ( 1) (thr

9、ough-connector) . b) . c) , S21ref 80 K . d) . 6.3.2 a) ( 1). ( 2 3), (semi-rigid) . . . b) . c) TE011 . d) TE011 ( 5). 5 S21 e) f0 f . Q(QL) . ffQL=0 (2) f) Q(Q0) QL . IL(dB) IL(dB) 6.2.1 . f0 IL0(dB) IL0(dB) = 20 log10(S21) , S21ref ILref(dB)= 20 log10(S21ref) IA 3.01 dB f3dBdB f0KS C 6111 4： 2007

10、 9 ILref(dB) IL(dB)(= IL0(dB) ILref(dB) . Q0 . 200101ILLQQ= (3) (IL 30 dB) . . (IL10 dB) Q0 . Q0 (reflection scattering parameter) . )1(210 +=LQQ 221122222111111,1SSSSSS+=+= S11 S22 , 1 2 (coupling coefficient) . S11 S22 6 . . , Q0 . , (NA) . Q0 S 4 KS C 6111 3( ) . a) f0 Q0 . 6 S11 S22 6.4 (4) S11

11、S220 1 f0KS C 6111 4： 2007 10 p- Q(Q0) p- RS, tan . ppsSpptSppbSppPkRCRBRAQtan10+= (5) RSpt , RSpb , RSps , kp , tan p , Ap (geometrical factor) , Bp , Cp . Ap, Bp, Cp, kp p- (Ohm) . KS C 6111 3 . (5) , Q0p p- RSps . tanp . TE011 , TE012 TE021 RSps RS0s, RS1s RS2s . p = 0, 1, 2 TE011 , TE012 TE021 .

12、 6.5 tan p- tan . TE012 f01 TE021 f02 tan, RSpt, RSpb . tSptSpbSpbSpppRffRRffRff20200,tantan= (6) f0m = (f01 f02 )/2 tan RSt . +=2221211221120210122112)(1tanStSttSttttttttttRCARCARBABAQAQAkAkAf (7) +=211222121120120212112)(1StSttStttttttttttSRCkRCkRkBkBQkQkkAkAR (8) ffkkffBBffAApptppptppptp01o1o, =

13、. RSb = RSt 6.3 RS1S RS2S Q01 Q02 f0m tan RSt . TE011 f00 tan (6) f0m tan (tanm) . TE011 f00 tan (tan0) TE011 RSb(RS0b) TE011 Q0 (5) (reference) . 6.6 KS C 6111 4： 2007 11 p- 6.4 p- Q0p RSpb, RSpS tanp (5) (6) . RSt , RSt . KS C 6111 3 . 7 7.1 Q . 3 . 3 70 dB 10 GHz 1 Hz 0.1 dB 17 dBm 77 K 10 6 tan 1/3 , . 4 0.05 mm 0.05 mm 0.005 mm ： 10 nm r.m.s. ： 0.001 mm r.m.s. 0.1 c- (0.3 ) 7.2 . , .