KS D ISO 14595-2012 Microbeam analysis－Electron probe microanalysis－Guidelines for the specification of certified reference materials(CRMs)《微电子束分析 电子探测微量分析 检定标样(CRMs)的规范指南》.pdf

1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS D ISO 14595 KS D ISO 14595:2012 2012 7 27 http:/www.kats.go.krKS D ISO 14595:2012 : ( ) ( ) () () ( ) : (http:/www.standard.go.kr) ： ：2004 12 30 ：2012 7 27 2012-0337 ： ： ( 02-509-7274) (http:/www.kats.go.kr). 10 5 , . KS D ISO 14595:2012 i ii 1 1 2 1 3 .1

2、 4 2 4.1 2 4.2 .2 5 2 5.1 2 5.2 3 5.3 3 5.4 4 5.5 5 5.6 .7 6 8 7 8 7.1 .8 7.2 8 7.3 .9 7.4 9 8 , , 9 8.1 9 8.2 .9 8.3 .9 8.4 9 9 .9 9.1 .9 9.2 10 A( ) .11 B( ) 13 C( ) .14 15 KS D ISO 14595:2012 ii 2003 1 ISO 14595, Microbeam analysis Electron probe microanalysisGuidelines for the specification of c

3、ertified reference materials(CRMs) , . (CRM： Certified Reference Materials) . . , . KS D ISO 14595:2012 Microbeam analysis Electron probe microanalysis Guidelines for the specification of certified reference materials(CRMs) 1 . . . 2 . . ( ) . KS A ISO Guide 31： 2005, 3 . 3.1 . 3.2 , , , , 3.3 , KS

4、D ISO 14595:2012 2 3.4 . , X 3.5 4 4.1 , , ( .), . . 20 m . X . 200 . . , . 4.2 , . (1 m .), . . . , , . , . 5 5.1 . (charging) . . . KS D ISO 14595:2012 3 . , . . 5.2 , . , . 200 . . 1 % , . 5 20 . . . . 5.3 , 1 m . 5 m . . X (WDX) . X . X (EDX) X . . X X . , X 2.5 . 1.5 X . X X . (RM) . , , . . WD

5、S . 1.2 s . EDS 30 % . . XKS D ISO 14595:2012 4 X , N . 10 000 1 % . . 100 000 0.3 % . EDS . . , . . (R), (), (T) T 1/2R . , RTRTNN / = . 5.4 , . , . , , , . . , . , . . 50 100 m . , . . . . ASCII . , 7 10 X . . , X . . . . KS A ISO Guide 356 . , . , . 5.5 . , 5 m 50 100 m . 2 . 1 2 cm , 2 2 . X . 9

6、9 % 3 ( X ) . KS D ISO 14595:2012 5 5.5 , . 1 4 . . 5, 6, 8 . NIST(National Institute of Stanards and Technology) NPL(National Physical Laboratory) . . w0 . , w( ) ( ), ( ), w0 . w w0, . w w0 S P E (1) w0 S ： w0 S P ： E ： 2E2P2S,www S, P, E . (w) (2w ) . 2E2P2S2wwww += (2) (nE) (nS) (nP) . wijk i j

7、k . . =S PE111ESP1ninjnkijkwnnnw (3) . EPS2EPS2PS2S2nnnnnnwwww += (4) w 2Sw , 2Pw , 2Ew . 95 % 99 % . 2/1EPS2EPS2PS2S2+nnnnnnwwww (5A) 2/1EPS2EPS2PS2S3+nnnnnnwwww (5B) KS D ISO 14595:2012 6 2Sw , 2Pw , 2Ew . Yijk i j k , Yijk Bijk . , Yijk Bijk . CBYwijkijkijk)( = (6) C , . B =E1E1nkijkijYnY i j (7)

8、 =P1P1njijiYnY i (8) =S1S1niiYnY (9) =S12EPS)(niiYYnnS (10) =S P112EP)(ninjiijYYnS (11) =S PE1112E)(ninjnkijijkYYS . (12) . ：1SSMS=nSS (13) ：)1(PSPMP=nnSS (14) (residual)：)1(EPSEME=nnnSS (15) . (i) 22E2MEEPS1112)1()(S PEBninjnkijijkwCSnnnYY = = (ii) 22PE2E2MPPS112E)( )1()(S PBninjiijwwnCSnnYYn += =

9、KS D ISO 14595:2012 7 (iii) 22SEP2PE2E2MSS12EP)( )1()(SBniiwwwnnnCSnYYnn += = 2B ： . 2EPSE2ME2E)1(CBnnnSCBSw+=+= (16) 2EEPSEPSP2EMEMP2P)1()1(CnnnnSnnSCnSSw= (17) 2EPPSPSS2EPMPMS2S)1(1CnnnnSnSCnnSSw= (18) C . 0/)(wBYC = (19) w0 . (w ) nS 1 . += BnSCnnnw)1(1SS2EPS2 (20) (4) . . , 2Sw 2Pw . (4) (20) 0

10、. C . C , . , . . A . . 5.6 95 % 99 % , . + BnSCnnn112SS2EPS KS D ISO 14595:2012 8 + BnSCnnn113SS2EPS , w 1 % 2 % . , , X , . . . A . 6 . , , , . 10 100 s , X , . X 10 s . X 1 0.5 % , . , , . , . 5 10 m . , . 7 7.1 , . . B . 7.2 , 6, 9 . , . 1 , . . KS D ISO 14595:2012 9 . 7.3 . , . , . 7.4 , . , . 1 . 8 , , 8.1 . . , 400 . 5.2 . 8.2 . 8.3 . . , . 8.4 .