KS D ISO 15471-2005 Surface chemical analysis－Auger electron spectroscopy－Description of selected instrumental performance parameters《表面化学分析 俄歇电子光谱法 选定的仪器性能参数的描述》.pdf

1、 KSKSKSKS KS D ISO 15471SKSKSKS KSKSKS SKSKS KSKS SKS KS KS D ISO 15471： 2005 2005 12 28 D ISO 15471： 2005 ( ) ( ) ( ) ： ： 2005 12 28 2005 1007 ： ： ( ) ( 02 509 72925) . 7 5 , . ICS 71.040.40 KS D ISO 15471：2005 Surface chemical analysis Auger electron spectroscopy Description of selected instrument

2、al performance parameters 2004 ISO 15471 Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters . 1. . 2. . , . KS D ISO 18115 3. KS D ISO 18115 . 4. AES FWHM ( ) rms SAM ( , ) SEM FL VL AES VL , XPS AES/XPS FL . FL VL . AES SAM , FL 4.5 eV

3、. 5. 5.1 , ( ) . 5.2 . , , . D ISO 15471：2005 5.3 . 1 . 5.4 5.4.1 . , (LaB6), (110) (Schottky). 5.4.2 5.5 . 5.5 . , . . 5.5 5.5.1 . a) SEM b) AES 5.5.2, 5.5.3, 5.5.4 . 5 keV 10 keV . (FWHM) 12 88 % . AES (halo) . , 20 80 % . 71.5 % . . 5.5.2 1 30 % . FWHM . 50100 % 50 % . 1. 30 % . 2. . 5.5.3 2 2 ,

4、. 90 , 2 . 20 88 % . 1. , FWHM 71.5 % . 2. , 1 . 5.5.4 3 5 , . 90 , . 20 80 % . 2 D ISO 15471：2005 1. : FWHM 71.5 % . 2. , 2 . 5.6 5.6.1 918 eV Cu L3VV ( ) 950 eV () ( .) . nA (a) (b) . , , FWHM . 918 eV 950 eV 1 5.6.2 5.6.3 . . 5.6.2 1 ( ) 0.2 eV 1 970 eV 994 eV 121 . . 5.6.3 2 1 , 975 eV 121 . 5.7

5、 , , Cu L3VV , Cu L3VV . KS D ISO 17973 . , KS D ISO 17974 . 5.8 ( 2 %) . 5.9 . . 5.10 5.10.1 X, Y Z mm 918 eV Cu L3VV ( ) . 5.10.2 . 918 eV Cu L3VV 62 eV Cu M23VV 95 % . 5.11 . 5.12 12 , 24 . . 3 2006 1 23 135513 7017 (02)60094567 (02)600948878 http:/ 607822 1 11( 10) (051)5571239 Fax. (051)557 043

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8、13 Fax. (052)289 6604 425020 541 3( 4 ) (031)48761914 Fax. (031)487 6195 730350 9230( 8 ) (054)4736954 Fax. (054)473 6955 480848 2 487 6( 3 ) (031)82981824 Fax. (031)8298185 KS D ISO 15471：2005 KSKSKSSKSKS KSKS SKS KSKS SKSKS KSKSKSSurface chemical analysisAuger electron spectroscopyDescription of selected instrumental performance parameters ICS 71.040.40 KOREAN STANDARDS ASSOCIATION