KS D ISO 17974-2011 Surface chemical analysis-High-resolution Auger electron spectrometers-Calibration of energy scales for elemental and chemical-state analysis《表面化学分析 高分辨率螺旋电子光谱仪.pdf

1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS D ISO 17974 KS D ISO 17974:2011 2011 12 30 http:/www.kats.go.krKS D ISO 17974:2011 : ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ：2003 8 30 ：2011 12 30 2011-0687 ： ： ( 02-509-7294) (http:/www.kats.go.kr). 10 5 , . KS D ISO 17974:2011 i ii 1 1 2 1 3 .1 4 .1

2、 5 .2 6 .5 6.1 .5 6.2 6 6.3 6 6.4 6 6.5 7 6.6 7 6.7 .7 6.8 9 6.9 12 6.10 13 6.11 .14 6.12 .15 6.13 17 6.14 .17 A( ) 0.1 eV Savitzky Golay 19 B( ) 20 C( ) .22 D( ) .24 26 KS D ISO 17974:2011 ii 2002 1 ISO 17974, Surface chemical analysis High-resolution Auger electron spectrometers Calibration of ene

3、rgy scales for elemental and chemical-state analysis . (Auger Electron Spectroscopy： AES) . ( ) . . 0.1 eV . AES 0.3 eV . (Cu) (Al) (Au) , 0.2 % . 02 250 eV , 01 550 eV . , . , 0.5 eV . , . 4.5 eV . . KS Q ISO/IEC 170251 AES . (tolerance limit), . , AES , . , , . . 0.2 eV , R 4 . 95 % (drift) . . .

4、, . . , . AES . KS D ISO 17974:2011 Surface chemical analysis High-resolution Auger electron spectrometers Calibration of energy scales for elemental and chemical-state analysis 1 . , , , , 95 % ( ). . , , E/E 0.2 % , E 1.5 eV , 0.05 eV , 510 keV . . 2 . . ( ) . KS D ISO 18115, 3 KS D ISO 18115 . 4

5、( B ). KS D ISO 17974:2011 2 AES A a b (zero offset) (eV) c R d R2 Ecorr Emeas (eV) Eelem , (eV) Emeas (eV) Emeas,n n (eV) Emeas,ni n (eV) Eref,n n (eV) Eoref,n n FWHM (eV) i j k Cu M2,3VV, Cu L3VV Au M5N6,7N6,7 Al KL2,3 L2,3 m Cu M2,3VV Au M5N6,7N6,7 Al KL2,3L2,3 n R (%) tx 95 % x t (Students t val

6、ue) U9595 % , (eV) U95c(E) , Cu M2,3VV Au M5N6,7N6,7 Al KL2,3L2,3 95 % E (eV) U95l95 % 2 (eV) U95cl 95 % nn 1, 2, 3, 4 (eV) Ecorr Emeas 1 4 95 % ( ) (eV) 2Cu L3VV (eV) RR1, R2 R3 R4 Rn n Rnew (eV) B . 5 . . . , . KS D ISO 17974:2011 3 1 . 6.16.5 . . 6.7 Cu M2,3VV, Cu L3VV Au M5N6,7N6,7 Al KL2,3L2,3

7、, . R . , , (statistical noise) . . R . R . 6.7.1 , . Au M5N6,7N6,7 5 keV 5 keV 10 keV . 2 000 eV , 5 keV 10 keV Al KL2,3L2,3 . Au M5N6,7N6,7 02 250 eV , Al KL2,3L2,3 1 550 eV . , . , , . 6.7 6.10 . Cu L3VV . 6.11 . 6.12 . . 1 95 % 0.2 eV 0.3 eV . 1 . 1 6.14 . . 95 % . , . 1 . , , , 1 0.2 eV . , , .

8、 , U95 . KS D ISO 17974:2011 4 . , . D . . 1 6.1 6.2 6.3 , 6.4 6.5 6.6 ?6.7 , 6.8 6.9 6.10 6.11 6.12 6.14 6.13 ? KS D ISO 17974:2011 5 1 , eV 0.2 0.3 , eV R (1) 0.050 0.050 (6.7 ) m m 1 2 m 1 m 2 m 1 m 2 , eV U95cl (12) (13) 0.185 0.130 0.185 0.130 , eV 2 (5) (6) 0.050 0.050 0.050 0.050 (6.7 ) , eV

9、U95 (11) 0.192 0.139 0.192 0.139 , eV ( U95) U95 0.008 0.061 0.108 0.161 eV ( 0.025 eV ), 6.14 0.3 2.4 4.3 6.4 4 , . , . 1 3 4 95 % . . 6 6.1 2 050 eV , 5 keV 10 keV Cu Au . Cu Al . 99.8 % , 10 mm10 mm 0.10.2 mm . KS D ISO 17974:2011 6 Cu 1 % . (6.3 ) . 6.2 Cu Au Al . . 6.3 , 2 % . ( ： wide spectrum

10、) . 6.11 ( ) 3 % . . . 1 5 keV 30 A 1 cm2 1 . 2 Au , Al . AES 2 . 6.4 . 6.4 6.14 , , . . , . , . . KS D ISO 17974:2011 7 2 E/E Cu, Au Al 6.5 6.5.1 3 3,4 . Au 5 keV 10 keV , Al 5 10 keV . . . , , . (multiplier) . , . 4 . 6.6 , . . , , 1 6.11 . 6.7 6.7.1 R Cu M2,3VV, Cu L3VV Au M5N6,7N6,7, KS D ISO 17

11、974:2011 8 Al KL2,3 L2,3 6.7.4 6.7.6 , . R , . . 6.4 , . . , . . . E/E , . 6.7 . . 6.7.2 Cu L3VV (6.7.4 ). . 6.7.3 Cu M2,3VV, Cu L3VV, Au M5N6,7N6,7 Al KL2,3L2,3 (6.7.4 6.7.6 ), . 3 . 6.7.4 0o 56o . Cu M2,3VV L3VV 6.4 , 106 . 0.1 eV (6.8.1 ). M2,3VV , 2 eV 2 eV , L3VV 2 eV 2 eV . 2 3 . . . . . 0 56 4. . 6.7.5 . Au M5N6,7N6,7 , 107 , Al KL2,3L2,3 106 . 2 eV 2 eV . 2 3 . KS D ISO 17974:2011 9 6.7.4 , , , , ,