1、 KSKSKSKS KS D ISO 18118SKSKSKS KSKSKS SKSKS KSKS SKS KS X KS D ISO 18118： 2005 2005 12 28 D ISO 18118：2005 ( ) ( ) ( ) ： ：2005 12 28 20051007 ： ： ( ) ( 02 5097292 5) . 7 5 , . D ISO 18118：2005 1 1. 1 2. 1 3. 1 4. 2 5. 3 6. 3 6.1 3 6.2 4 6.3 4 6.4 4 6.5 ( AES ) 4 6.6 4 7. 4 7.1 4 8. 4 9. 5 9.1 5 9.2
2、 5 A() 6 B() 15 17 i ICS 71.040.40 KS D ISO X 18118：2005Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials 2003 ISO 18118 Surface
3、chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopyGuide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials , . 1. (Auger) X , , . 2. . , . KS D ISO 18115 NP 18119 Surface chemical analysis Auger
4、electron spectroscopy and Xray photoelectron spectroscopy Peak intensity determination( X ) DIS 21270 Surface chemical analysis X-ray photoelectron and Auger electron spectrometers Linearity of intensity scale( X ) 3. KS D ISO 18115 . 3.1 3.2 . KS D ISO 18115 3.3 3.4 . 3.1 , 1. . 2. , . 3. . 4. , ,
5、. , SIMS D ISO 18118：2005 . 3.2 . 1 . 1. XPS C 1s F 1s , AES Ag M4.5 VV. 2. . 3. . 4. , , . , SIMS . 3.3 , 1. . 2. , . 3. . 1 . 4. , , . 3.4 , 1. . 2. , . 3. . , . 4. , , . 4. AES AMRSF ARSF ASTM ERSF IERF AtiI i AviI i EiI i RSF XPS X 2 D ISO 18118：2005 5. AES XPS (RSF) . 3 RSF, (ERSF), (ARSF), (AM
6、RSF) . 3 RSF A.3 , A.2 . ERSF , ERSF ( A.3 .) . AES 0.1 81 , XPS 0.3 32 . ARSF ERSF . AMRSF RSF. ( ) ERSF , ARSF AMRSF . ARSF AMRSF ARSF AMRSF ( , / ) . AES XPS , RSF . NP 18119 . AES (, ), . AES ( , ) , . XPS AES , . ( , AES XPS X ), ( , AES , XPS X , , ), 3. ( , , ) . , 6. . , ERSF . ERSF ( 7. .)
7、. AES XPS ERSF . ERSF . ERSF ERSF . (IERF) 8. . , UK National Physical Laboratory4 . , 8. ERSF IERF . 6. ERSF ( , , , ) . . 6.1 AES XPS X ERSF . 3 D ISO 18118：2005 6.2 , ( , .) ERSF5 . 6.3 ( ) . 6.4 (AES ) X (XPS ) DIS 21270 X 1 % . , DIS 21270 X 1 % . 6.5 ( AES ) ERSF . 6 . . 6.6 AES . 7, 8 , 9, 10
8、 . 2 eV 10 eV( ) . ERSF . AES Savitzky Golay 9, 10 . 7. ERSF . 7.1 . NP 18119 ASTM E 99511 . 12 , Shirley 13, Tougaard 14 . AES . ( ) , . ERSF11, 15 . 6.6 . 1. NP 18119 . 2. AES Savitzky Golay 9, 10 . 3. 16 . . 8. (IERF) 1, 17, 18. IERF , . 4 D ISO 18118：2005 ( ), IERF . , UK National Physical Labor
9、atory4 ( 6 ) ( ), ERSF . , , (sputtering) . ERSF , . 9. 9.1 (A.6) A . (A.6) . 1 , , AES1 8, XPS2 3 . . A . 1. AES XPS . ( , ) . 2. , . , A (A.4) . 2 , (A.4) . . . . . , , . 9.1.1 ERSF, (A.6) . EiI9.1.2 ARSF , AMRSF (A.6) . AtiIAviI 1. ARSF , (A.9) . 2. AMRSF (A.11 A.34), (A.10) . 9.2 RSF19 . B . 5 D
10、 ISO 18118：2005 A() A.1 AES Ai i Ci i Eb,i i Eg(band-gap) Ei i / Ep (plasmon) Epr Fi i Fj j H (cos, i) cos i (Chandrasekhar) unkiI i unkjI j refiI i refjI j EiI i AtiI i AviI i RSFiI i RSFjI j EpiI i keyI EciI i Mii NA(Avogadro) Nav Nii Nv/ N key N ref N unk n Qav (elastic-scattering) Qii refiQ i unkiQ i 6 D ISO 18118：2005 refir i unkir i avr rii RSF U0 (shell) 1 unkiX i refiX i XPS X Z Zav ii (kg m3) ii (albedo) i,0i i i,1i i i,2i i i,3i i av ii refi i unki i A.2
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