KS D ISO 21270-2005 Surface chemical analysis－X-ray photoelectron and Auger electron spectrometers－Linearity of intensity scale《表面化学分析 X射线光电子能谱仪和俄歇电子能谱仪 强度标的线性》.pdf

1、 KSKSKSKS KS D ISO 21270SKSKSKS KSKSKS SKSKS KSKS SKS KS X KS D ISO 21270： 2005 2005 12 28 D ISO 21270：2005 ( ) ( ) ( ) ： ：2005 12 28 20051007 ： ： ( ) ( 02 5097292 5) . 7 5 , . ICS 71.040.40 KS D ISO 21270：2005 X Surface chemical analysis X-ray photoelectron and Auger electron spectrometers Linearit

2、y of intensity scale 2003 ISO 21270 Surface chemical analysisX-ray photoelectron and Auger electron spectrometersLinearity of intensity scale , . 1. X 2 . . 2. . , . KS D ISO 18115 3. ECuCu L3VV E j jI AES XPS X i (flux) ik MH(E ) E X j jM i iML(E ) E X j jNH(E ) E X j jN i iNL(E ) E X j jN , k(1) m

3、ax e n 4. . AES D ISO 21270：2005 X (flux) 30 XPS , . (flux) . X 2 30 XPS , . . . . , . 6.1 , 6.2 6.3 . 6.4 , 6.5 . 6.6 Cu L3VV . X 30 X (flux) . 6.7 AES , XPS X . 6.8 X (flux) 30 XPS , X . 6.9 . , 6.10 . 5. . , 1/3 ( ), 12 . 6. 6.1 (flux) , AES XPS . 99.8 % Cu , 6.2 . 2 XPS . 2 99.8 % Cu . . 6.3 . 1

4、. 10 mm10 mm, 0.10.2 mm . 2. 10 mm10 mm , 0.1 0.2 mm . 6.2 6.2.1 1 % . 2 D ISO 21270：2005 6.2.2 , . 6.2.3 2 % . ( ) Cu . 6.6 6.8 ( ) 3 % . 1. 1 cm2 5 keV 30 A 1 ( ). 2. Cu AES XPS 3 6 . 6.2.4 1 . 2 . 6.4 . 6.3 6.3.1 . . . XPS 2, 7, 8 . 6.3.2 , . 6.4 . 6.46.10 , , , . . , , , . , . . 6.5 6.5.1 . . (X

5、PS ), 1 (AES ), , . . . , . 10 . . 6.5.2 AES , X (flux) 30 XPS , 6.6 (flux) . X (flux) 2 30 XPS 6.8 . 3 D ISO 21270：2005 6.6 (flux) 6.6.1 Cu Cu L3VV . X (flux) ECu 0.1 eV . 1 eV Cu L3VV (Fermi) 918.69 eV11, 12 , 914.2 eV. Mg X XPS 334.91 eV Al X 567.92 eV. 6.6.2 0.5 eV 0.1 eV 0.5 eV , 1 100 000 . AE

6、S XPS X (flux) 30 . (flux) 30 (flux) 5 % 6.4 . (flux) X , . AES 25 m 25 m (raster) , (Faraday) . 25 m . XPS (flux) , X . (flux) , . 6.7 (flux) 6.7.1 I 30 6.6.1 Ei Cu Ni 30 . N /I 30 . 1 N /I , Ni i i i i N /I , N /Iii i i= 0 k . k(1 ) k(1 ) . . 0 Nmax N N /I (1 ) . Ni i i max . . 6.7.2 Nmax . . 6.7.

7、3 . 6.10 . 6.7.3 kINii= (1) k . n )1(niiiNkIN= (2) e )exp(eiiikIkIN= (3) 4 D ISO 21270：2005 Nmax 1 N i , Nmax N i /I i 6.7.4 (1), (2), (3) . , . . 1. Nin Nie 0.128 , (2) (3) Ni , 1 % . 2. (2) (3) 13 . 3. (2) (3) . 4. 24 ns14 200 ns1 AES XPS . 5. 1 2 (1), (2), (3) . 6.7.5 M . i=NM (4) i i n iiiiNNM=1

8、(5) e = N exp(MMi i i) (6) i6.7.6 1 M /I , N . i i i5 D ISO 21270：2005 k(1 ) k(1 ) . . N Ni max N ( M /Ii i i 1 .) N . . max6.7.7 6.10 . 6.8 X 2 30 XPS 6.8.1 X . , . 6.9 X . Al Mg X , Mg X , . 6.8.2 X , . 6.8.3 Cu 6.1 1 eV , 40 000 1 , . 1 . 4 eV , . 1 X eV eV Mg 4001 250 4854 Al 4001 483 41 087 6.8

9、.4 40 000 6.8.3 X 25 % 2 . 6.8.5 6.8.3 , 6.8.3 ( 6.8.2 .). 1 % . 1 % 6.8.4 6.8.5 . 6.9 X 2 30 XPS 6.9.1 X NH(E ) Nj L(E )( Ej j j ) NH(E )/Nj L(Ej) . . 5 % 30 NH(Ej) . . 30 NL(Ej) , NH(E )/Nj L(E ) 30 . j6 D ISO 21270：2005 6.9.2 2 , NH(E )/Nj L(E ) Nj H(E ) Nj H(E )/Nj L(Ej) = 0 , k . k (k 1) k (k 1

10、) . . 0 Nmax NH(E ) Nj H (E )/Nj L(E ) k(k 1) . Nj max . . A.1 6.9.1 . Nmax 2 NH(Ej ) , Nmax NH(Ej )/NL(Ej) 6.9.3 Nmax . . 6.9.4 . 6.10 . 6.9.4 kENENji=)()(LH (7) k . n )1()(1)()(1nHLH = kENkENENjjj (8) e )1()(exp)()(1eHLH = kEMkENENjjj (9) 7 D ISO 21270：2005 MH(E ) Nj H(E ) . j6.9.5 (7), (8), (9) ,

11、 . , . . 1. NH(Ej)n NH(Ej)e 0.128 (8) (9) N (EjH) , 1 % . 2. (8) 2 14 . 3. (8) (9) , 14 . 4. 24 ns14 200 ns1 AES XPS . 5. 1 2 (1), (2), (3) . 6.9.6 NH(E ) Nj L(E ) Mj H(E ) Mj L(E ) . j)()(H jHjENEM = (10) n nHHH)(1)()(jjjENENEM= (11) e )(exp)()(eHHHjjjEMENEM = (12) X H L . 6.9.7 2 , MH(E )/Mj L(E )

12、 Nj H(Ej) . k (k 1) k (k 1) . . NH(E ) Nj max NH(E ) Mj H(E )/Mj L(Ej) k(k 1) . Nmax . . A.2 (8) . A.3 (8) (9) . . 6.9.8 6.10 . 6.10 , , , , Nmax, . 8 D ISO 21270：2005 A() ( ) Cu 20 mA 5 mA X Mg X . NH(E ) Nj H(E )/Nj L(Ej) A.1 . k 4.15 , n 31 ns (8) . k X , X 4.0 . A.1 (8) 6 Mc/s . (8) 1 10 . A.1 400 1 300 eV 1 eV Cu NH(E j ) NH(E j )/NL(E j). 20 mA 5 mA Mg X . 31 ns . A.1 . 8 Mc/s 1.5 Mc/s 2.5 % . 1 . (Poisson) . 31 ns . MH(Ej)/ML(E ) , A.2 Nj H(Ej) . A.2 6 Mc/s 4 . 4 Mc/s , . 9 D