1、i ANSI/ESD STM3.1-2015 Revision of ANSI/ESD STM3.1-2006 For the Protection of Electrostatic Discharge Susceptible Items Ionization Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440 An American National Standard Approved November 19, 2015 ANSI/ESD STM3.1-2015 ESD Association
2、 Standard Test Method for the Protection of Electrostatic Discharge Susceptible Items - Ionization Approved June 18, 2014 EOS/ESD Association, Inc. ANSI/ESD STM3.1-2015 Electrostatic Discharge Association (ESDA) standards and publications are designed to serve the public interest by eliminating misu
3、nderstandings between manufacturers and purchasers, facilitating the interchangeability and improvement of products and assisting the purchaser in selecting and obtaining the proper product for his particular needs. The existence of such standards and publications shall not in any respect preclude a
4、ny member or non-member of the Association from manufacturing or selling products not conforming to such standards and publications. Nor shall the fact that a standard or publication is published by the Association preclude its voluntary use by non-members of the Association, whether the document is
5、 to be used either domestically or internationally. Recommended standards and publications are adopted by the ESDA in accordance with the ANSI Patent policy. Interpretation of ESDA Standards: The interpretation of standards in-so-far as it may relate to a specific product or manufacturer is a proper
6、 matter for the individual company concerned and cannot be undertaken by any person acting for the ESDA. The ESDA Standards Chairman may make comments limited to an explanation or clarification of the technical language or provisions in a standard, but not related to its application to specific prod
7、ucts and manufacturers. No other person is authorized to comment on behalf of the ESDA on any ESDA Standard. THE CONTENTS OF ESDAS STANDARDS AND PUBLICATIONS ARE PROVIDED “AS-IS,” AND ESDA MAKES NO REPRESENTATIONS OR WARRANTIES, EXPRESSED OR IMPLIED, OF ANY KIND WITH RESPECT TO SUCH CONTENTS. ESDA D
8、ISCLAIMS ALL REPRESENTATIONS AND WARRANTIES, INCLUDING, WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE OR USE, TITLE AND NON-INFRINGEMENT. ESDA STANDARDS AND PUBLICATIONS ARE CONSIDERED TECHNICALLY SOUND AT THE TIME THEY ARE APPROVED FOR PUBLICATION. THEY ARE NOT
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10、Y FOR DAMAGES ARISING FROM THE USE, APPLICATION, OR RELIANCE BY OTHERS ON THE INFORMATION CONTAINED IN THESE STANDARDS OR PUBLICATIONS. NEITHER ESDA, NOR ITS MEMBERS, OFFICERS, EMPLOYEES OR OTHER REPRESENTATIVES WILL BE LIABLE FOR DAMAGES ARISING OUT OF, OR IN CONNECTION WITH, THE USE OR MISUSE OF E
11、SDA STANDARDS OR PUBLICATIONS, EVEN IF ADVISED OF THE POSSIBILITY THEREOF. THIS IS A COMPREHENSIVE LIMITATION OF LIABILITY THAT APPLIES TO ALL DAMAGES OF ANY KIND, INCLUDING WITHOUT LIMITATION, LOSS OF DATA, INCOME OR PROFIT, LOSS OF OR DAMAGE TO PROPERTY AND CLAIMS OF THIRD PARTIES. Published by: E
12、lectrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440 Copyright 2014 by ESD Association All rights reserved No part of this publication may be reproduced in any form, in an electronic retrieval system or otherwise, without the prior written permission of the publisher. Printed i
13、n the United States of America ISBN: 1-58537-285-4 CAUTION NOTICE DISCLAIMER OF WARRANTIES DISCLAIMER OF GUARANTY LIMITATION ON ESDAs LIABILITY ANSI/ESD STM3.1-2015 i (This foreword is not part of ESD Association Standard Test Method ANSI/ESD STM3.1-2015) FOREWORD The primary method used to limit st
14、atic charge for the protection of electrostatic discharge susceptible items in the work environment is grounding. However, grounding methods are not effective in removing static charges from the surfaces of non-conductive (insulative) or isolated conductive materials. Air ionization techniques may b
15、e employed to reduce these charges. The active parameters in charge neutralization are the conductivities of the air for each polarity. It would be appropriate to measure either the conductivities themselves or the ion concentrations for each polarity. This would determine the ability of the ionized
16、 air to neutralize a charge in a given location. (Annex B has been provided as an informative annex on performance of ionizers.) In practice, these measurements are difficult to make. A more feasible way of evaluating the ability of an ionizer to neutralize a static charge is to directly measure the
17、 charge decay time. Charges to be neutralized may be located on insulators as well as on isolated conductors. It is difficult to charge an insulator reliably and repeatably. Charge neutralization is more easily evaluated by measuring the rate of decay of the voltage of an isolated conductive plate.
18、The measurement of this decay should not interfere with or change the nature of the actual decay. Four practical methods of air ionization are addressed in this standard test method: 1. Radioactive Emission 2. High Voltage Corona from AC Electric Fields 3. High Voltage Corona from DC Electric Fields
19、 4. Soft X-ray Emission This standard test method 1 provides test methods and procedures that can be used when evaluating ionization equipment. The objective of the test methods described in this document is to generate meaningful, reproducible data. The test methods are not meant to be a recommenda
20、tion for any particular ionizer configuration. The wide variety of ionizers, and the environments within which they are used, will often require test methods different from those described in this standard test method. Users of this document should be prepared to adapt the test methods as required t
21、o produce meaningful data in their own application of ionizers. Similarly, the test conditions chosen in this standard test method do not represent a recommendation for acceptable ionizer performance. There is a wide range of item sensitivities to static charge. There is also a wide range of environ
22、mental conditions affecting the operation of ionizers. Performance specifications should be agreed between the user and manufacturer of the ionizer in each application. Users of this standard test method should be prepared to establish reasonable performance requirements for their own application of
23、 ionizers. Annex A has been provided as a normative annex to provide a method for measuring capacitance of the isolated conductive plate. The 2014 version of this document includes the use of contacting plate voltage measurements in addition to the previous non-contacting plate voltage measurements.
24、 Charged plate monitors (CPMs) using these technologies have been in use in the industry for many years. References were also added to ESD TR53 Compliance Verification of ESD Protective Equipment and Materials. 1 Standard Test Method (STM): A definitive procedure for the identification, measurement,
25、 and evaluation of one or more qualities, characteristics, or properties of a material, product, system, or process that yield a reproducible test result. ANSI/ESD STM3.1-2015 ii This document was originally designated ANSI/EOS/ESD S3.1-1991 and approved on June 6, 1991. ANSI/EOS/ESD S3.1-1991 was r
26、evised, redesignated ANSI/ESD STM3.1-2000 and was approved on February 6, 2000. ANSI/ESD STM3.1-2000 was reaffirmed, redesignated ANSI/ESD STM3.1-2006 and was approved on February 26, 2006. ANSI/ESD STM3.1-2015 is a revision of ANSI/ESD STM3.1-2006 and was approved on June 18, 2014. At the time the
27、ANSI/ESD STM3.1-2015 was prepared, the 3.0 Ionization subcommittee had the following members: Kevin Duncan, Chair Seagate Technology Eugene Felder Desco Industries, Inc. Vladimir Kraz BestESD Technical Services Huan Li JDSU Gregory Manning NASA Goddard Space Flight Center Chuck McClain Micron Techno
28、logy Gene Monroe NASA-LARC Dale Parkin Seagate Technology Donald Pritchard Monroe Electronics Arnold Steinman, Vice Chair Electronics Workshop Matt Strickland L-3 Communications, Inc. David Swenson, TAS Rep Affinity Static Control Consulting Julius Turangan Ovation, Inc. Bob Vermillion RMV Technolog
29、y Group Joshua Yoo Core Insight, Inc. Craig Zander Transforming Technologies The following individuals made significant contributions to ANSI/ESD STM3.1-2015: Brent Beamer Donn Bellmore Advanced ESD Services + Roger Peirce Simco-Ion Jeff Salisbury Finisar ANSI/ESD STM3.1-2015 iii At the time the ANS
30、I/ESD STM3.1-2006 was prepared, the 3.0 Ionization subcommittee had the following members: Richard Rodrigo, Chair Simco Donn Bellmore Universal Instruments Eugene Felder Desco Industries, Inc. Tim Jarrett Guidant Corp. Vladimir Kraz Credence Technologies Carl Newberg Microstat Labs / Rivers Edge Tec
31、hnical Service Maciej Noras Trek Dale Parkin IBM Donald Pritchard Monroe Electronics Jeff Salisbury Seagate Technology Arnold Steinman, Vice Chair Ion Systems David Swenson, TAS Rep Affinity Static Control Consulting Julius Turangan Western Digital At the time the ANSI/EOS/ESD S3.1-1991 was prepared
32、, the 3.0 Ionization Subcommittee had the following members: Joel Weidendorf, Chair IBM Godfrey (Ben) Baumgartner Lockheed Chris Campbell JES International, Inc. James Curtis NRD, Inc. Robert Elder Eastman Kodak Company Steven Gerken U.S. Air Force Ron Gibson, Secretary IBM Canada, Ltd. Niels Jonass
33、en, Technical Advisor Technical University of Denmark John Kinnear, Recorder IBM James Lonborg Jet Propulsion Laboratory Howard Meyers Motorola Richard Rodrigo Simco Company, Inc. Arnold Steinman, Vice Chair Ion Systems, Inc. David Swenson 3M - ESD Edward Weggeland Static Prevention, Inc. Lester Wen
34、ger Pinion Corporation Gene Williams Static Control Services, Inc. ANSI/ESD STM3.1-2015 iv The following individuals made significant contributions to ANSI/EOS/ESD S3.1-1991: Lawrence Burich Lockheed Tom Caffarella NRD, Inc. Doug Chesleigh Static Prevention, Inc. Charlotte Hampton JES International,
35、 Inc. James Horvat U.S. Air Force Stephen Koehn 3M Company Robert Parr Motorola GEG Scott Shelton Simco Company, Inc. Harlan Snyder IBM Anna Maria Steriti Pinion Corporation ANSI/ESD STM3.1-2015 v TABLE OF CONTENTS 1.0 PURPOSE, SCOPE AND APPLICATION 1 1.1 PURPOSE . 1 1.2 SCOPE . 1 1.3 APPLICATION 1
36、2.0 REFERENCED PUBLICATIONS 1 3.0 DEFINITIONS 2 4.0 SAFETY REQUIREMENTS 2 4.1 PERSONNEL SAFETY . 2 4.2 ELECTRICAL 2 4.3 OZONE . 2 4.4 RADIOACTIVE 2 4.5 X-RAY 2 4.6 INSTALLATION . 3 5.0 TEST FIXTURE AND INSTRUMENTATION 3 6.0 SPECIFIC REQUIREMENTS FOR EQUIPMENT CATEGORIES 5 6.1 ROOM IONIZATION . 6 6.2
37、 LAMINAR FLOW HOOD IONIZATION . 8 6.3 WORKSURFACE IONIZATION . 10 6.4 COMPRESSED GAS IONIZERS GUNS AND NOZZLES 14 ANNEXES Annex A (Normative): Method of Measuring the Capacitance of an Isolated Conductive Plate . 15 Annex B (Informative): Standard Test Method for the Performance of Ionizers . 18 Ann
38、ex C (Informative): Bibliography . 24 Annex D (Informative): ANSI/ESD STM3.1-2015 Revision History 25 TABLES Table 1: Test Setups and Test Locations/Points (TP) 6 Table 2: Example Measurement Data 16 ANSI/ESD STM3.1-2015 vi FIGURES Figure 1: Charged Plate Monitor Components for Non-Contact Plate Mea
39、surement 4 Figure 1A: Charged Plate Monitor Components for Contact Plate Measurement 4 Figure 2: Charged Plate Detail for Non-Contact CPM 4 Figure 2A: Charged Plate Detail for Contact CPM 5 Figure 3: Test Locations for Room Ionization - AC Grids and DC Bar Systems 7 Figure 4: Test Locations for Room
40、 Ionization - Single Polarity Emitter Systems . 7 Figure 5: Test Locations for Room Ionization - Dual DC Line Systems . 8 Figure 6: Test Locations for Room Ionization - Pulsed DC Emitter Systems . 8 Figure 7: Test Locations for Vertical Laminar Flow Hood - Top View 9 Figure 8: Test Locations for Ver
41、tical Laminar Flow Hood - Side View . 10 Figure 9: Test Locations for Horizontal Laminar Flow Hood - Top View 10 Figure 10: Test Locations for Horizontal Laminar Flow Hood - Side View . 10 Figure 11: Test Locations for Benchtop Ionizer - Top View 12 Figure 12: Test Locations for Benchtop Ionizer - S
42、ide View . 12 Figure 13: Test Locations for Overhead Ionizer - Top View . 13 Figure 14: Test Locations for Overhead Ionizer - Side View 13 Figure 15: Test Locations for Compressed Gas Ionizer (Gun or Nozzle) - Side View . 14 ESD Association Standard Test Method ANSI/ESD STM3.1-2015 1 ESD Association
43、 Standard Test Method for the Protection of Electrostatic Discharge Susceptible Items Ionization 1.0 PURPOSE, SCOPE AND APPLICATION 1.1 Purpose This document provides test methods and procedures for evaluating and selecting air ionization equipment and systems (ionizers). 1.2 Scope This standard tes
44、t method establishes measurement techniques, under specified conditions, to determine offset voltage (ion balance) and discharge time (charge neutralization time) for ionizers. This standard test method does not include measurements of electromagnetic interference (EMI), or uses of ionizers in conne
45、ction with ordnance, flammables, explosive items, or electrically initiated explosive devices. 1.3 Application As contained in this document, the test methods and test conditions may be used by manufacturers of ionizers to provide performance data describing their products. Users of ionizers are urg
46、ed to modify the test methods and test conditions for their specific application in order to qualify ionizers for use, or to make periodic verifications of ionizer performance (refer to ANSI/ESD SP3.3, Periodic Verification of Air Ionizers). For compliance verification of ionizers used in static con
47、trol programs, refer to ESD TR53, Compliance Verification of ESD Protective Equipment and Materials. The user will need to decide the extent of the data required for each application. 2.0 REFERENCED PUBLICATIONS Unless otherwise specified, the following documents of the latest issue, revision or ame
48、ndment form a part of this standard to the extent specified herein: The references listed below are not meant to be inclusive of all that might be applicable to the operation of ionizers. There may be additional local, state, national and international documents that are relevant. Users of this stan
49、dard test method are encouraged to determine if other regulations and references apply. ESD ADV1.0, ESD Associations Glossary of Terms2 ESD SP3.3, Periodic Verification of Air Ionizers2 ESD TR53, Compliance Verification of ESD Protective Equipment and Materials2 29 CFR PART 1910.1000, Ozone, (OSHA) Air Contaminants3 29 CFR PART 1910.95, (OSHA) Occupational Noise Exposure3 29 CFR PART 1910.242 (b), (OSHA) Compressed Air Used For Cleaning3 10 CFR PART 20, (NRC) Standards for Protection against Radiation3 21 CFR PART 1020, (FDA) Performance Standards for Ionizing Radiation Emitti
