1、Designation: E1504 11Standard Practice forReporting Mass Spectral Data in Secondary Ion MassSpectrometry (SIMS)1This standard is issued under the fixed designation E1504; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of
2、last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice provides the minimum information neces-sary to describe the instrumental, experimental, and datareductio
3、n procedures used in acquiring and reporting second-ary ion mass spectrometry (SIMS) mass spectral data.1.2 The values stated in SI units are to be regarded asstandard. No other units of measurement are included in thisstandard.1.3 This standard does not purport to address all of thesafety concerns,
4、 if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2E673 Terminology Relating to Surface Analysi
5、s3. Terminology3.1 DefinitionsFor definitions of terms used in this prac-tice, refer to Terminology E673.4. Summary of Practice4.1 Experimental conditions and reporting procedures thataffect SIMS mass spectral data are presented in order tostandardize the reporting of such data to facilitate compari
6、sonswith other laboratories and analytical techniques.5. Significance and Use5.1 This practice is intended for use in reporting theexperimental and data reduction procedures described in otherpublications.6. Information to be Reported6.1 Instrumentation:6.1.1 If a standard commercial SIMS instrument
7、 is used,specify the manufacturer, model number, and type of analyzerused. Specify the manufacturer and model number of anyaccessory or auxiliary equipment that would affect the datacontained within the mass spectrum (for example, additionalvacuum pumping attachments, primary ion mass filter, primar
8、yion sources, electron flood guns, etc.). If any nonstandardmodification has been made to the instrumentation, describethe modification in detail.6.1.2 If a noncommercial SIMS system is used, specify thecomponents composing the system (for example, ion gun,pumping system, vacuum chamber, and mass fi
9、lter). Specifythe manufacturer and model number if the components are ofcommercial origin. If the components are home-built, specifythem in such detail that their potential effect on the obtainedmass spectrum may be deduced by an individual experiencedin SIMS and vacuum technology.6.2 SpecimenDescri
10、be the specimen in as much detail aspossible. Such factors would include, but are not limited to,sample preparation and handling, sample history, bulk andtrace composition, physical dimensions, sample homogeneity,crystallinity, and any preanalysis cleaning procedure used.Describe in detail the metho
11、d of sample mounting. Describeany conductive coating or grids placed on the sample forcharge compensation. If a substrate is used, include substratecomposition, purity, and any methods of cleaning.6.3 Experimental Conditions:6.3.1 Primary Ion Source and Ion Optical ColumnIf acommercial ion source is
12、 being used, then the manufacturerand model number should be specified. If the ion source is acustom design, then it should be described in detail andappropriate literature references given, if applicable. Thespecies extracted from the ion source must be specified. If theprimary ion column provides
13、mass filtering, then the selectedmass-filtered species must be specified. If there is no mass-filtering, then the purity of the material used for ion productionmust be specified. State the ion energy and the impact energyof the primary beam. State the angle of incidence of theprimary ion beam with r
14、espect to the surface normal of thesample as well as the ion current (and the method by which thisis measured). State whether the ion beam is rastered and if so,state the dwell time, the spot size, and the total irradiated area.Specify the primary ion dose (ions-m2) that was used to obtain1This prac
15、tice is under the jurisdiction of ASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.06 on SIMS.Current edition approved Nov. 1, 2011. Published November 2011. Originallyapproved in 1992. Last previous edition approved in 2006 as E1504 06. DOI:10.1520/E1504-11
16、.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box
17、 C700, West Conshohocken, PA 19428-2959, United States.the spectrum. If the primary ion beam is pulsed (that is,Time-of-Flight SIMS), details of the pulsing should be de-scribed (pulse width, repetition rate, extent of beam bunching,and so forth). In addition, any special alignment or tuning ofthe p
18、rimary column should be specified or referenced.6.3.2 Other experimental conditions: If non-standard oper-ating are employed, such as application of low/high tempera-tures or sample rotation during analysis, please state this andany additional information that may be required, such asrotation speed
19、(in rad/s).6.3.3 Secondary Ion Mass SpectrometerSpecify the areaof the sample from which the ions were collected. Specifywhether any electronic gating methods were used, the param-eters of the gating, and how the gating method affects thespectrum (such as, raster gating for crater edge rejection ors
20、pectral gating for selecting a mass spectral region in aTime-of-Flight spectrometer). Specify the conditions of themass spectrometer, such as, but not limited to, collection angle,energy-filtering parameters, reflectron voltages, pulsing condi-tions, the use of collimation or beam-defining apertures
21、 andslits, post-acceleration voltages, and so forth. If appropriate,state how the condition influenced the mass spectral data (thatis, energy filtering to reduce polyatomic ion species). If chargecompensation is used, describe the type of system used and theparameters of the system. If an electron f
22、lood gun is used, thenthe current or dose (electrons/m2) should be specified. Specifyand describe the type of secondary ion detection system used(such as, Faraday cup, pulse-counting electron multiplier,resistive anode encoder, and so forth).6.3.4 Mass Spectral BackgroundSpecify the pressure inthe p
23、rimary ion column, specimen chamber, and mass spec-trometer prior to sample introduction and during analysis.Specify the type of vacuum pumping in each section of theinstrument. Describe any significant or unusual contaminants,if known. Provide the composition of any reactive gas used forsample floo
24、ding,3along with the method used to determine thepartial pressure of the reactive gas.6.4 Results:6.4.1 Display of Mass Spectral DataThe vertical axis of aSIMS mass spectral display gives the secondary ion intensity inunits of either counts/s, total integrated counts (specify whetherthe integration
25、is over total spectra acquired or time), orpercent of the most intense peak displayed in the spectrum. Thehorizontal axis should display the mass/charge ratio. Anycorrections (such as for dead time, or background subtraction)applied to the spectrum must be stated.6.4.2 CalibrationSpecify the method
26、used to establish themass scale, especially the number of calibration points usedand the form of any algorithm used.6.4.3 Mass ResolutionSpecify the mass resolution of themass spectrometer. This should be calculated as M/DM, whereDM is the full width at half maximum intensity for an ion peakat mass
27、M. Because many mass spectrometers vary in massresolution over their mass range, specify both the DM and Mvalues used to calculate the specified mass resolution.7. Keywords7.1 mass spectral data; SIMSASTM International takes no position respecting the validity of any patent rights asserted in connec
28、tion with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsib
29、le technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revision of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful con
30、sideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100
31、Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM web
32、site(www.astm.org). Permission rights to photocopy the standard may also be secured from the ASTM website (www.astm.org/COPYRIGHT/).3Bernheim, M. and Slodzian, G., “Effect of Oxygen on the Sputtering ofAluminum Targets Bombarded with Argon Ions,” International Journal of MassSpectrometry and Ion Physics, Vol 12, 1973, p. 93.E1504 112
