1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS D ISO 14975 KS D ISO 14975:2011 2011 12 30 http:/www.kats.go.krKS D ISO 14975:2011 : ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ：2003 8 30 ：2011 12 30 2011-0687 ： ： ( 02-509-7 294) (http:/ www.kats.go.kr). 10 5 , . KS D ISO 14975:2011 i ii 1 1 2 1 3 .1 4
2、.1 5 .2 5.1 .2 5.2 2 5.3 .2 A( ) .8 B( ) .10 14 KS D ISO 14975:2011 ii 2000 1 ISO 14975, Surface chemical analysis Information formats . KS D ISO 14975:2011 Surface chemical analysis Information formats 1 , KS D ISO 14976 . (AES) (XPS) . 2 . . ( ) . KS D ISO 14976, 3 , . 3.1 3.2 , , 3.3 4 CAS DTF (K
3、S D ISO 14976 ) IUPAC N/A . KS D ISO 14975:2011 2 5 5.1 DTF DTF . , DTF . DTF - - DTF . , - , - , DTF . (human readers) . , “ ”, “ ”, “ ” . . 5.2 ： 80 , (carriage return) . ： 7 ASCII . . ： 7 ASCII CARRIAGE RETURN 7 ASCII LINE FEED ： ISO/IEC 3 , . 5.3 5.3.1 5.3.1.1 , KS D ISO 14975:2011 3 . 5.3.2 . .
4、 IUPAC 5.3.1.2 , . 5.3.2 . . 5.3.1.3 , . 5.3.2 . . KS D ISO 14975:2011 4 5.3.2 5.3.2.1 5.2 . , . IUPAC CAS . . “ISO_Specimen_Information_Format_1998_October_15” . “host_material=” . , “bulk” . IUPAC . “IUPAC_chemical_name=” IUPAC , “none”, “unknown” “N/A” . . “chemical_abstracts_registry_number=” ,
5、“none”, “unknown” “N/A” . . “host_material_composition=” . , “mass %” “atomic %” . “ ” . . “bulk_purity=” , “unknown” “N/A” . , mass% atomic% . . “4N” . . “known_impurities=” , , “none”, “unknown” “N/A” . , mass%, atomic%, ppm, ppb, atoms/cm3 atoms/cm2 . . . “structure=” , hexagonal close-packed , g
6、rain boundary , , “unknown” “N/A” . . “form_of_product” , , “unknown” “N/A” . . “supplier=” , , “unknown” “N/A” . . “lot_number=” , “unknown” “N/A” . KS D ISO 14975:2011 5 . “homogeneity=” “homogeneous”, “inhomogeneous”, “unknown”, “N/A” . “;” . . “crystallinity=” “single”( , Miller “_” ), “poly”( )
7、, “amorphous”, “unknown”, “N/A” . “;” . . “material_family=” “metal”, “inorganic”( ), “organic”( ), “poly”( ), “polymer”, “semi”( ), “bio”( ), “composite”, “super_conductive”( ), . “;” . . “special_material_classes=” “rod”( ingot), “sheet” sheet , “film_single”( ) , “film_multi”( ) , “sinter”( ), “w
8、afer”, “powder”, “fibre”, . “;” . . “specimen_mounting=” “mechanical”( ), “mechanically_under_grid”( ),” “conductive _adhesive”( ), “nonconductive_adhesive”( ), “powder_compact_In”( ), “powder_put_into” ( , ). . “;” . . “ex_situ_preparation=” “none” “polish” “cleavage” “ion”( ), “powder_compact_stee
9、l_pad”( ), “acetone”( ), . , , . , “ex_situ_preparation_1=”, “ex_situ_preparation_2=” . . , “ex_situ_preparation=” “ ” . “;” . . “in_situ_preparation” “none”, “ion” “_” (ion gun) , , .,” “cleavage”, “heating”, “scratch”, . , . “in_situ_ preparation_1 =”, “in_situ_preparation_2 =” . . , “in_situ_prep
10、aration =” “ ” . “;” . . “charge_control_condition=” “none”, “flood” (flood gun), “_” , , “screen”( .), . , , . , “charge_control_condition_1=”, “charge_control_condition_2=” . KS D ISO 14975:2011 6 . , “charge_control_condition=” “ ” . “;” . . “specimen_temperature=” , , , “unknown” . , “K” . “;” .
11、 . “comment=” . , “comment_1=”, “comment_2=” . , “comment =” . . “end_of_specimen_information_format” 5.3.2.2 . AES , “ISO_AES_Calibration_Information_Format_1998_October_15” XPS , “ISO_XPS_Calibration_Information_Format_1998_October_15” . “energy_scale_calibration_feature_label=” , , . “_” . “energ
12、y_ scale_calibration_feature_measured_energy=” , . “_” . , “energy_scale_calibration_feature_label_1=” , “energy_scale_calibration_feature_measured_energy_1=” . “energy_scale_calibration_feature_label_2=” “energy_scale_calibration_feature_measured_energy_2=” . “energy_scale_calibration_charge_compen
13、sation=” . “_” . “flood” . , “energy_scale_calibration=” , ( , , ), eV . , , “_” . “;” . , “energy_scale_calibration_=uncalibrated” . . “intensity_scale_calibration=” , . . , “intensity_scale_calibration_1=”, “intensity_scale_calibration_2=” . KS D ISO 14975:2011 7 , “intensity_scale_calibration=” ,
14、 ( , , ) . “;” . , “intensity_scale_calibration=uncalibrated” . . “resolution_calibration=” , . , “resolution_scale_calibration_1=”, “resolution_scale_ calibration_2=” . , “resolution_scale_calibration=” , ( , , ) . , , “_” . “;” . , “resolution_calibration=uncalibrated” . . “end_of_calibration_info
15、rmation_format” 5.3.2.3 5.2 . . . AES , “ISO_AES_Data_Processing_Information_Format_1998_October_15” XPS , “ISO_XPS_Data_Processing_Information_Format_1998_October_15” . “date_processing_procedure=” . , “data_ processing_procedure_1=”, “data_processing_procedure_2=” . . , “data_processing_procedure=
16、unprocessed ” . . “end_of_data_processing_information_format” KS D ISO 14975:2011 8 A ( ) A.1 , , 6061 Al, , , . , Si SiO2 XPS , XPS Si , “silica” . A.2 , Li3PO4, SiO2 W(CO)6 . Au50Cu50atomic% Fe74Cr18Ni8mass% . , Li-P-O- . A.3 , 99.99 mass% checked by NISSAN ARC LTD. . A.4 , N_0.01 mass%, O_0.02 ma
17、ss% checked by NISSAN ARC LTD. S_4E17 atoms/cm3 . A.5 MOSFET, , , , . A.6 XPS Cu, Ag, Au . energy_scale_calibration_feature_label_1=XPS_Cu2p3/2 energy_scale_calibration_feature_measured_energy_1=BE_932.66eV energy_scale_calibration_feature_label_2=XPS_Ag3d5/2 energy_scale_calibration_feature_measure
18、d_energy_2=BE_368.27eV energy_scale_calibration_feature_label_3=XPS_Au4f7/2 energy_scale_calibration_feature_measured_energy_3=BE_84.00eV C1s , . energy_scale_calibration_charge_compensation=C1s_285eV AES . KS D ISO 14975:2011 9 energy_scale_calibration_feature_label_1=AES_CuMVV energy_scale_calibra
19、tion_feature_measured_energy_1=KE_61.16eV energy_scale_calibration_feature_label_2=AES_AuNVV energy_scale_calibration_feature_measured_energy_2=KE_72.21eV energy_scale_calibration_feature_label_3=AES_CuLVV energy_scale_calibration_feature_measured_energy_3=KE_918.62eV XPS AES 9, 10 . , . energy_scal
20、e_calibration_procedure = ISO9999_1998_0.25eV A.7 11, 12, 13 , AES NPL NPL A1 XPS NPL NPL X1 . , . intensity_scale_calibration_procedure = ISO9999_1998； attach Cu spectrum A.8 . “Ag3d5/2_0.97eV FWHM”, Ag3d5/2(=0.97eV) . , . resolution_calibration_procedure = ISO9999_1998_0.5eV A.9 “Savitzky-Golay” “
21、S-G” “Tougaard ” “Tougaard” . . KS D ISO 14975:2011 10 B ( ) B.1 1： , , ISO_Specimen_Information _Format_1998_October_15 host_material=polyethylene IUPAC_chemical _name=polyethylene chemical_abstracts_registry_number=9002-88-4 host_material_composition=C2H4 bulk_purity=99.5 mass % checked by NISSAN
22、ARC LTD. known_impurities=O_0.3 mass %, N_0.1 mass % checked by NISSAN ARC LTD. structure=none form_of_product=supermarket bag supplier=Mitsubishi Chemical Co. lot_number=961017PE homogeneity=homogeneous crystallinity=amorphous material_family=polymer special_material_classes=sheet specimen_mounting
23、=mechanically_under_grid ex_situ_preparation=degreased by n-hexane in_situ_preparation=none charge_control_conditions=flood+screen specimen_temperature=298 K comment=sample is linear low density polyethylene sheet end_of_specimen_information_format ISO_XPS_Calibration_Information_Format_1998_October_15 energy_scale_calibration_feature_label_1=XPS_Cu2p3/2 energy_scale_calibration_feature_measured_energy_1=BE_932.7 eV energy_scale_calibration_feature_label_2=XPS_Au4f7/2 energy_scale_calibration_feature_measured_energy_2=BE_84.0 eV energy_scale_calibration_charge_compensation=flood_6 eV intensi
