1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS D ISO 14976 KS D ISO 14976:2011 2011 12 30 http:/www.kats.go.krKS D ISO 14976:2011 : ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ：2003 8 30 ：2011 12 30 2011-0687 ： ： ( 02-509-7294) (http:/www.kats.go.kr). 10 5 , . KS D ISO 14976:2011 i ii 1 1 2 .1 2.1 .1 2
2、2 .1 2.3 3 2.4 .4 2.5 13 A( ) .14 B( ) .18 C( ) .29 47 KS D ISO 14976:2011 ii 1998 1 ISO 14976, Surface chemical analysis Data transfer format . KS D ISO 14976:2011 Surface chemical analysis Data transfer format 1 , , , . ( ) . AES, EDX, FABMS, ISS, SIMS, SNMS, UPS, XPS, XRF . , , . 2 2.1 A . 2.2 2
3、3 , BS 6154： 19811 (British Standard Method of defining syntactic metalanguage) . , 3 , , . . , , . 2.2 . . . (*) . (terminal-string) . (syntactic-primary) . , , (*), . (syntactic factor) . , . (syntactic term) . KS D ISO 14976:2011 2 (,) . , (single definition) . , , , (|) . , (definitions-list) .
4、 2 . 2 . 2 (syntactic-exception) . . . . . . (meta-identifier) . (=), , (;) . (syntax-rule) . 1 . (syntax) . , . a) , (empty-sequence) . b) “”, , “” , . (optional-sequence) . c) “”, , “” , . (repeated-sequence) . d) “(”, , “)” , . (grouped-sequence) . e) . f) . g) “?” , “?” , . (special-sequence) .
5、 “*” , , “*” “)” . , . , , KS D ISO 14976:2011 3 , . , . 1 . 6 , 2.2 , . * . . , . | . = . ; . and “ and ” , . (* and *) , . ( and ) , . and 0 , . and , . ? and ? , . 2.3 , . . , . , 1E37 (dummy value) . , 1 . 2 . 3 (array) . , CARRIAGE RETURN LINE FEED 10 13 10 ASCII (carriage return) . . 1 , .
6、2 , KS D ISO 14976:2011 4 . 2.4 , , , , , , (* . .*), , , (* 1 1 , . . MAP, MAPDP, NORM SDP .*), , x , y (* MAP MAPDP 3 . x y , .*), (* , . *), , (* .*), 0, , (* . 0 , . , , . , 1E37 .*), , , (* . , KS D ISO 14976:2011 5 , . 0 .*) (* . , .*), (* , 1 . .*), ; , , (*1*) (* , , 1987*), (*2*) (*3*) (*4*
7、) (*24 *), (*5*) (*6*) (* 6 , 1 .*), (*7*) (*8*) , (*8*) (* .*), (*9*) (*10*) x (* x , 1 *), (*10*) y (* y 1 . 2 MAP MAPDP .*), (*11*) (* , , , m2 , , eV . , , . , . *), (*12*) (*13*) , (*13*) , (*13*) (* 3 (1) MAPDP, MAPSVDP, SDP SDPSV (2) FABMS, FABMS energy spec, ISS, SIMS, SIMS energy spec, SNMS
8、 SNMS energy spec . *), KS D ISO 14976:2011 6 (*14*) (*eV *), (*15*) (*XPS XRF W , AES, EDX, ISS, SIMS SNMS, FABMS *), (*16*) x (* m *), (*16*) y (* m *), (*17*) x (*m *), (*17*) y (*m . 2 MAP, MAPDP, MAPSV, MAPSVDP SEM . *), (*18*) x (*18*) y (*18*) x (*18*) y (*18*) x (*18*) y (* 6 MAPSV, MAPSVDP
9、SEM . , . , x (frame) 1 , y 1 . *), (*19*) (* , z *), (*20*) (* , y *), (*21*) , (*22*) , (* eV , amu *), (*23*) (* - eV. AES diff .*), (*24*) , (*25*) (acceptance) (*AES, ELS, ISS, UPS XPS eV . FABMS, SIMS SNMS .*), 1,1 N,1 1,M N, M KS D ISO 14976:2011 7 (*26*) (* V .*), (*27*) x (* x FABMS, FABMS
10、energy spec, ISS, SIMS, SIMS energy spec, SNMS, SNMS energy spec, AES diff, AES dir, ELS, UPS XPS , x (gated) , EDX XRF x . x m .*), (*27*) y (* y x x y . *), (*28*) (* , z *), (*28*) (* , y *), (*29*) (* *), (*30*) (* , AES KLL, XPS 1s, SIMS 1*), (*30*) (* , AES XPS 1, SIMS 1*), (*31*) (*31*) (*31*
11、) (*31*) (* 4 REGULAR .*), (*32*) (* 2 , . , 1 .*), (*32*) , (*32*) (* .*), (*33*) , (*34*) (* 1 . EDX XRF .*), (*35*) (*36*) (* . EDX XRF . , (1 ) . exp( ) . 0 , . .*), (*37*) (* eV *), (*37*) KS D ISO 14976:2011 8 (* nA . *), (*37*) x (* m *), (*37*) y (* m *), (*37*) (* , z *), (*37*) (* , y *) (
12、37*) (* continuous , cyclic . , AES diff, AES dir, EDX, ELS, UPS, XPS XRF 7 (analysis) . 7 (1) AES diff, AES dir, EDX, ELS, UPS, XPS XRF (2) MAPDP, MAPSVDP, SDP SDPSV .*), (*38*) (* , z *), (*38*) (* , y *), (*39*) (* . , 8 .*), (*40*) , (*40*) , (*40*) , (*40*) (* 3 .*), (* . , , .*), (* .*), , (*
13、 . .*), (* . 1 , . 1 . 1 .*), KS D ISO 14976:2011 9 (* , .*); (* , . AES diff, AES dir, EDX, ELS, ISS, UPS, XPS, XRF FABMS, SIMS,SNMS FABMS energy spec, SIMS energy spec, SNMS energy spec MAP MAPDP NORM SDP eV u s eV SDPSV s s *); ; ; ; ; ( FAT | FRR | constant delta m | constant m/delta m ), ; , ; ; ; x ; y ; ; ; ; ; x ; y ; ; ? 7 ASCII CARRIAGE RETURN 7 ASCII LINE FEED?; |!|“|#|$|%|? |A|B|C|D|E|F|G|H|I|J|K|L|M|N|O |P|Q|R|S|T|U|V|W|X|Y|Z|_ | |a|b|c|d|e|f|g|h|i|j|k|l|m|n|o |p|q|r|s|t|u|v|w|x|y|z| (* 7 (7-Bit ASCII), ANSI X3.4
