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本文(GOST R 52250-2004 Electronic engineering materials Resists for lithography processes General specifications《电子工程材料 光刻工艺抗蚀剂 通用规范》.pdf)为本站会员(inwarn120)主动上传,麦多课文库仅提供信息存储空间,仅对用户上传内容的表现方式做保护处理,对上载内容本身不做任何修改或编辑。 若此文所含内容侵犯了您的版权或隐私,请立即通知麦多课文库(发送邮件至master@mydoc123.com或直接QQ联系客服),我们立即给予删除!

GOST R 52250-2004 Electronic engineering materials Resists for lithography processes General specifications《电子工程材料 光刻工艺抗蚀剂 通用规范》.pdf

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12、CG08G09G09G14G02G0AG03G02G0FG14G02G07G19G08G09G09G05G05G07G08G14G07G20G22G07G27G02G0FG14G02G07G25G22G22G3FG07G15G21G40G07G20G41G25G28G09G14G3FG07G35G35G36G3DG36G2FG07G35G2BG36G19G35G42G36G01G02G03G04G05G06G07G08G09G0AG0BG04G0CG0BG09G0DG06G0EG02G0EG02G09G0AG0FG0BG10G0BG02G07G11G12G04G0AG13G0EG06G14G0

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14、FG0BG14G10G07G0DG07G12G0EG17G0AG0FG0BG19G1AG07G08G09G04G02G07G17G1BG02G1CG0EG0BG11G12G07G02G15G07G05G22G12G1CG1DG23G0BG24G0BG11G17G14G25G07G0EG0BG16G0EG05G0EG11G06G04G12G05G07G0BG09G17G09G0BG04G12G06G0EG02G1CG0BG02G07G11G12G04G0AG13G0EG26G04G0BG11G12G07G02G15G07G05G12G07G0BG11G04G04G12G18G0EG12G11G1

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17、FG08G0BG02G0AG07G05G0FG02G09G0EG0FG08G09G14G0FG02G0AG0DG0AG07G0BG07G1AG02G04G0DG09G14G0BG0DG07G08G45G05G10G05G02G11G31G0AG08G15G08G07G05G18G03G02G0AG05G12G07G13G0DG18G07G0FG02G18G0FG0DG46G0DG0AG05G12G07G1CG08G09G09G14G02G0AG03G02G0FG14G02G07G19G08G09G09G05G05G0EG0FG10G15G08G14G08G27G28G28G27G29G2AG2

18、8G29G29G2BG01G01G0AG18G14G13G12G1AG1BG1CG15G13G07G20G07G1DG13G11G02G09G14G31G07G0EG0FG05G27G0DG0AG0DG0AG05G12G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G0

19、7G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07 G20G07G25G07G2FG08G0FG27G02G14G05G0BG0AG0CG0DG07G09G09G0CG11G1AG05G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G

20、07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G

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31、G12G07G0EG08G07G0EG0FG05G27G0DG0AG0DG0AG05G44G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21

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33、21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07G21G07 G25G48G0EG0FG10G15G08G14G08G27G28G28G27G29G2AG28G29G29G2BG01

34、G01G01G18G13G1EG01G0FG18G13G21G2CG18G19G1AG08G10G15G13G18G12G13G14G15G08G14G0FG10G10G01G1AG10G1BG0FG1AG08G1DG17G12G17G14G13G1EG01G01G1CG04G25G07G26G06G04G0CG2DG08G2EG0CG07G2FG25G26G09G05G05G09G30G08G25G07G31G05G06G2FG06G14G17G20G01G10G15G19G08G12G21G32G08G21G01G15G0FG0EG14G13G1DG01G33G17G10G1BG01G34

35、G08G1FG14G0FG1EG17G10G10G0FG16G0FG35G36G06G07G08G25G07G31G05G06G37G07G24G2FG06G07G08G38G24G0CG09G22G06G23G02G03G04G05G06G07G08G09G0AG05G0BG04G09G0CG0AG09G04G04G07G0AG09G0CG0BG0DG0EG06G04G07G0AG0EG03G0FG10G0BG11G04G0FG0AG0FG06G0FG0BG12G08G07G0BG03G0AG06G13G08G0CG07G0EG14G13G15G0BG14G07G08G05G04G0FG0F

36、G04G0FG10G16G04G09G04G07G0EG03G0BG0FG14G04G05G0AG12G0AG05G0EG06G0AG08G09G0FG16G06G0DG06G0AG05G05G0EG0CG0EG11G17G18G0AG19G0AG13G14G14G1AG19G14G1BG19G14G1BG1DG1E G05G1FG17G1BG16G20G21G1EG22G12G15G23G13G1CG13G1CG15G24G2FG02G09G14G08G12G30G05G17G07G09G14G02G0AG03G02G0FG14G07G0FG02G09G0EG0FG08G09G14G0FG0

37、2G0AG12G0DG14G09G12G07G0AG02G07G0FG0DG18G05G09G14G0CG07G03G11G12G07G11G05G14G08G15G0FG02G45G05G04G0DG09G1AG05G2CG07G0EG0FG08G10G0DG09G09G08G0BG07G0EG0FG08G05G18G0BG08G03G09G14G0BG02G0EG08G11G16G0EG0FG08G0BG08G03G0AG05G1AG08G0BG0CG2CG07G0EG0FG05G13G08G0FG08G0BG07G05G07G05G0AG14G0DG15G0FG02G11G31G0AG0

38、CG2CG07G27G05G1AG0FG08G09G2CG0DG27G07G4AG03G02G11G0DG0DG07G23G07G0FG0DG18G05G09G14G0CG4BG21G1EG14G02G0AG03G02G0FG14G07G0EG0FG05G27G0DG0AG12G44G14G07G0EG0FG05G07G0FG02G18G0FG02G13G08G14G1AG0DG07G1FG3BG07G0AG02G07G0FG0DG18G05G09G14G0CG07G1AG08G0AG1AG0FG0DG14G0AG0CG2CG07G27G02G0FG08G1AG07G4AG03G02G11G0

39、DG0DG07G23G07G1FG3BG4BG06G07G02G07G14G02G1AG29G0DG09G08G0BG27G0DG09G14G0AG08G07G09G07G1FG3BG07G0EG0FG05G07G05G2CG07G0EG0FG05G0DG27G1AG0DG07G05G07G0EG08G09G14G02G0BG1AG0DG21G25G1E G01G18G12G23G1BG20G15G19G1CG26G13G1EG16G16G26G17G27G15G35G07G0AG02G09G14G08G12G30G0DG27G07G09G14G02G0AG03G02G0FG14G0DG07G

40、05G09G0EG08G11G31G18G08G0BG02G0AG0CG07G0AG08G0FG27G02G14G05G0BG0AG0CG0DG07G09G09G0CG11G1AG05G07G0AG02G07G09G11G0DG03G16G44G30G05G0DG07G09G14G02G0AG03G02G0FG14G0CG4CG1CG1DG1EG1FG07G25G21G20G20G3FG23G24G47G07G36G03G05G0AG02G12G07G09G05G09G14G0DG27G02G07G1AG08G0AG09G14G0FG16G1AG14G08G0FG09G1AG08G17G07G

41、03G08G1AG16G27G0DG0AG14G02G10G05G05G21G07G1FG0DG2CG0AG05G04G0DG09G1AG05G0DG07G16G09G11G08G0BG05G12G1CG1DG1EG1FG07G20G25G21G20G21G22G22G47G23G49G49G07G1EG05G09G14G0DG27G02G07G09G14G02G0AG03G02G0FG14G08G0BG07G13G0DG18G08G0EG02G09G0AG08G09G14G05G07G14G0FG16G03G02G21G07G1DG13G30G05G0DG07G09G02G0AG05G14G

42、02G0FG0AG08G28G15G05G15G05G0DG0AG05G04G0DG09G1AG05G0DG14G0FG0DG13G08G0BG02G0AG05G12G07G1AG07G0BG08G18G03G16G2CG16G07G0FG02G13G08G04G0DG17G07G18G08G0AG0CG1CG1DG1EG1FG07G20G25G21G20G21G22G22G48G23G48G41G07G1EG05G09G14G0DG27G02G07G09G14G02G0AG03G02G0FG14G08G0BG07G13G0DG18G08G0EG02G09G0AG08G09G14G05G07G

43、14G0FG16G03G02G21G07G35G0FG0DG03G0AG0CG0DG07G0BG0DG30G0DG09G14G0BG02G21G07G37G11G02G09G09G05G45G05G1AG02G10G05G12G05G07G08G13G30G05G0DG07G14G0FG0DG13G08G0BG02G0AG05G12G07G13G0DG18G08G0EG02G09G0AG08G09G14G05G1CG1DG1EG1FG07G20G25G21G20G21G22G20G3FG23G49G3FG07G1EG05G09G14G0DG27G02G07G09G14G02G0AG03G02G

44、0FG14G08G0BG07G13G0DG18G08G0EG02G09G0AG08G09G14G05G07G14G0FG16G03G02G21G07G35G08G18G03G16G2CG07G0FG02G13G08G04G0DG17G07G18G08G0AG0CG21G07G34G0DG14G08G03G07G05G18G27G0DG28G0FG0DG0AG05G12G07G1AG08G0AG10G0DG0AG14G0FG02G10G05G05G07G0BG0FG0DG03G0AG0CG2CG07G0BG0DG30G0DG09G14G0BG07G05G0AG03G05G1AG02G14G08G

45、0FG0AG0CG27G05G07G14G0FG16G13G1AG02G27G05G1CG1DG1EG1FG07G38G38G23G25G22G22G22G07G2FG0DG45G14G0DG0EG0FG08G03G16G1AG14G0CG21G07G2BG0FG08G18G0FG02G04G0AG0CG0DG07G05G07G0AG0DG0EG0FG08G18G0FG02G04G0AG0CG0DG07G29G05G03G1AG08G09G14G05G21G07G1DG0EG0FG0DG03G0DG11G0DG0AG05G0DG07G1AG05G0AG0DG27G02G14G05G28G04G

46、0DG09G1AG08G17G07G0BG12G18G1AG08G09G14G05G07G05G07G0FG02G09G04G0DG14G07G03G05G0AG02G27G05G04G0DG09G1AG08G17G07G0BG12G18G1AG08G09G14G05G1CG1DG1EG1FG07G38G49G49G47G23G48G38G07G19G0DG02G1AG14G05G0BG0CG07G05G07G08G09G08G13G08G07G04G05G09G14G0CG0DG07G0BG0DG30G0DG09G14G0BG02G21G07G2BG0FG02G0BG05G11G02G07G

47、0EG0FG05G0DG27G1AG05G06G07G08G14G13G08G0FG07G0EG0FG08G13G06G07G45G02G09G08G0BG1AG02G06G16G0EG02G1AG08G0BG1AG02G06G07G27G02G0FG1AG05G0FG08G0BG1AG02G06G07G14G0FG02G0AG09G0EG08G0FG14G05G0FG08G0BG02G0AG05G0DG07G05G07G2CG0FG02G0AG0DG0AG05G0DG1CG1DG1EG1FG07 G48G38G48G41G23G49G24G07 G37G02G0FG14G08G0AG07G1

48、5G08G45G0FG05G0FG08G0BG02G0AG0AG0CG17G21G07G1DG13G30G05G0DG07G14G0DG2CG0AG05G04G0DG09G1AG05G0DG07G16G09G11G08G0BG05G12G1CG1DG1EG1FG07G20G22G22G25G49G23G49G20G07G35G05G09G1AG08G18G05G27G0DG14G0FG0CG07G1AG02G0EG05G11G11G12G0FG0AG0CG0DG07G09G14G0DG1AG11G12G0AG0AG0CG0DG21G07G1FG0DG2CG0AG05G04G0DG09G1AG0

49、5G0DG07G16G09G11G08G0BG05G12G1CG1DG1EG1FG07 G20G38G49G3FG20G23G24G47G07 G4DG30G05G1AG05G07 G05G18G07 G15G08G45G0FG05G0FG08G0BG02G0AG0AG08G15G08G07 G1AG02G0FG14G08G0AG02G07 G03G11G12G07G2CG05G27G05G04G0DG09G1AG08G17G07G0EG0FG08G03G16G1AG10G05G05G21G07G1FG0DG2CG0AG05G04G0DG09G1AG05G0DG16G09G11G08G0BG0

50、5G12G1CG1DG1EG1FG07G20G3FG20G24G25G23G24G41G07G34G02G0FG1AG05G0FG08G0BG1AG02G07G15G0FG16G18G08G0BG1CG1DG1EG1FG07G20G3FG49G48G22G23G48G48G07G2BG0FG08G03G16G1AG14G0CG07G2CG05G27G05G04G0DG09G1AG05G0DG21G07G34G0DG14G08G03G0CG07G08G0EG0FG0DG03G0DG11G0DG0AG05G12G07G0BG08G03G0CG1CG1DG1EG1FG07G20G48G41G25G2

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