GOST R 52250-2004 Electronic engineering materials Resists for lithography processes General specifications《电子工程材料 光刻工艺抗蚀剂 通用规范》.pdf

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38、CG2CG07G27G05G1AG0FG08G09G2CG0DG27G07G4AG03G02G11G0DG0DG07G23G07G0FG0DG18G05G09G14G0CG4BG21G1EG14G02G0AG03G02G0FG14G07G0EG0FG05G27G0DG0AG12G44G14G07G0EG0FG05G07G0FG02G18G0FG02G13G08G14G1AG0DG07G1FG3BG07G0AG02G07G0FG0DG18G05G09G14G0CG07G1AG08G0AG1AG0FG0DG14G0AG0CG2CG07G27G02G0FG08G1AG07G4AG03G02G11G0

39、DG0DG07G23G07G1FG3BG4BG06G07G02G07G14G02G1AG29G0DG09G08G0BG27G0DG09G14G0AG08G07G09G07G1FG3BG07G0EG0FG05G07G05G2CG07G0EG0FG05G0DG27G1AG0DG07G05G07G0EG08G09G14G02G0BG1AG0DG21G25G1E G01G18G12G23G1BG20G15G19G1CG26G13G1EG16G16G26G17G27G15G35G07G0AG02G09G14G08G12G30G0DG27G07G09G14G02G0AG03G02G0FG14G0DG07G

40、05G09G0EG08G11G31G18G08G0BG02G0AG0CG07G0AG08G0FG27G02G14G05G0BG0AG0CG0DG07G09G09G0CG11G1AG05G07G0AG02G07G09G11G0DG03G16G44G30G05G0DG07G09G14G02G0AG03G02G0FG14G0CG4CG1CG1DG1EG1FG07G25G21G20G20G3FG23G24G47G07G36G03G05G0AG02G12G07G09G05G09G14G0DG27G02G07G1AG08G0AG09G14G0FG16G1AG14G08G0FG09G1AG08G17G07G

41、03G08G1AG16G27G0DG0AG14G02G10G05G05G21G07G1FG0DG2CG0AG05G04G0DG09G1AG05G0DG07G16G09G11G08G0BG05G12G1CG1DG1EG1FG07G20G25G21G20G21G22G22G47G23G49G49G07G1EG05G09G14G0DG27G02G07G09G14G02G0AG03G02G0FG14G08G0BG07G13G0DG18G08G0EG02G09G0AG08G09G14G05G07G14G0FG16G03G02G21G07G1DG13G30G05G0DG07G09G02G0AG05G14G

42、02G0FG0AG08G28G15G05G15G05G0DG0AG05G04G0DG09G1AG05G0DG14G0FG0DG13G08G0BG02G0AG05G12G07G1AG07G0BG08G18G03G16G2CG16G07G0FG02G13G08G04G0DG17G07G18G08G0AG0CG1CG1DG1EG1FG07G20G25G21G20G21G22G22G48G23G48G41G07G1EG05G09G14G0DG27G02G07G09G14G02G0AG03G02G0FG14G08G0BG07G13G0DG18G08G0EG02G09G0AG08G09G14G05G07G

43、14G0FG16G03G02G21G07G35G0FG0DG03G0AG0CG0DG07G0BG0DG30G0DG09G14G0BG02G21G07G37G11G02G09G09G05G45G05G1AG02G10G05G12G05G07G08G13G30G05G0DG07G14G0FG0DG13G08G0BG02G0AG05G12G07G13G0DG18G08G0EG02G09G0AG08G09G14G05G1CG1DG1EG1FG07G20G25G21G20G21G22G20G3FG23G49G3FG07G1EG05G09G14G0DG27G02G07G09G14G02G0AG03G02G

44、0FG14G08G0BG07G13G0DG18G08G0EG02G09G0AG08G09G14G05G07G14G0FG16G03G02G21G07G35G08G18G03G16G2CG07G0FG02G13G08G04G0DG17G07G18G08G0AG0CG21G07G34G0DG14G08G03G07G05G18G27G0DG28G0FG0DG0AG05G12G07G1AG08G0AG10G0DG0AG14G0FG02G10G05G05G07G0BG0FG0DG03G0AG0CG2CG07G0BG0DG30G0DG09G14G0BG07G05G0AG03G05G1AG02G14G08G

45、0FG0AG0CG27G05G07G14G0FG16G13G1AG02G27G05G1CG1DG1EG1FG07G38G38G23G25G22G22G22G07G2FG0DG45G14G0DG0EG0FG08G03G16G1AG14G0CG21G07G2BG0FG08G18G0FG02G04G0AG0CG0DG07G05G07G0AG0DG0EG0FG08G18G0FG02G04G0AG0CG0DG07G29G05G03G1AG08G09G14G05G21G07G1DG0EG0FG0DG03G0DG11G0DG0AG05G0DG07G1AG05G0AG0DG27G02G14G05G28G04G

46、0DG09G1AG08G17G07G0BG12G18G1AG08G09G14G05G07G05G07G0FG02G09G04G0DG14G07G03G05G0AG02G27G05G04G0DG09G1AG08G17G07G0BG12G18G1AG08G09G14G05G1CG1DG1EG1FG07G38G49G49G47G23G48G38G07G19G0DG02G1AG14G05G0BG0CG07G05G07G08G09G08G13G08G07G04G05G09G14G0CG0DG07G0BG0DG30G0DG09G14G0BG02G21G07G2BG0FG02G0BG05G11G02G07G

47、0EG0FG05G0DG27G1AG05G06G07G08G14G13G08G0FG07G0EG0FG08G13G06G07G45G02G09G08G0BG1AG02G06G16G0EG02G1AG08G0BG1AG02G06G07G27G02G0FG1AG05G0FG08G0BG1AG02G06G07G14G0FG02G0AG09G0EG08G0FG14G05G0FG08G0BG02G0AG05G0DG07G05G07G2CG0FG02G0AG0DG0AG05G0DG1CG1DG1EG1FG07 G48G38G48G41G23G49G24G07 G37G02G0FG14G08G0AG07G1

48、5G08G45G0FG05G0FG08G0BG02G0AG0AG0CG17G21G07G1DG13G30G05G0DG07G14G0DG2CG0AG05G04G0DG09G1AG05G0DG07G16G09G11G08G0BG05G12G1CG1DG1EG1FG07G20G22G22G25G49G23G49G20G07G35G05G09G1AG08G18G05G27G0DG14G0FG0CG07G1AG02G0EG05G11G11G12G0FG0AG0CG0DG07G09G14G0DG1AG11G12G0AG0AG0CG0DG21G07G1FG0DG2CG0AG05G04G0DG09G1AG0

49、5G0DG07G16G09G11G08G0BG05G12G1CG1DG1EG1FG07 G20G38G49G3FG20G23G24G47G07 G4DG30G05G1AG05G07 G05G18G07 G15G08G45G0FG05G0FG08G0BG02G0AG0AG08G15G08G07 G1AG02G0FG14G08G0AG02G07 G03G11G12G07G2CG05G27G05G04G0DG09G1AG08G17G07G0EG0FG08G03G16G1AG10G05G05G21G07G1FG0DG2CG0AG05G04G0DG09G1AG05G0DG16G09G11G08G0BG0

50、5G12G1CG1DG1EG1FG07G20G3FG20G24G25G23G24G41G07G34G02G0FG1AG05G0FG08G0BG1AG02G07G15G0FG16G18G08G0BG1CG1DG1EG1FG07G20G3FG49G48G22G23G48G48G07G2BG0FG08G03G16G1AG14G0CG07G2CG05G27G05G04G0DG09G1AG05G0DG21G07G34G0DG14G08G03G0CG07G08G0EG0FG0DG03G0DG11G0DG0AG05G12G07G0BG08G03G0CG1CG1DG1EG1FG07G20G48G41G25G2