1、 Revision of ANSI/ESD SP10.1-2007 For the Protection of Electrostatic Discharge Susceptible Items- Automated Handling Equipment (AHE)Electrostatic Discharge Association 7900 Turin Road, Bldg 3 Rome, NY 13440-2069 An American National Standard Approved May 3, 2016 ANSI/ESD SP10.1-2016 ESD Association
2、 Standard Practice for the Protection of Electrostatic Discharge Susceptible Items Automated Handling Equipment (AHE) Approved February 25, 2016 ESD Association, Inc. ANSI/ESD SP10.1-2016 Electrostatic Discharge Association (ESDA) standards and publications are designed to serve the public interest
3、by eliminating misunderstandings between manufacturers and purchasers, facilitating the interchangeability and improvement of products and assisting the purchaser in selecting and obtaining the proper product for his particular needs. The existence of such standards and publications shall not in any
4、 respect preclude any member or non-member of the Association from manufacturing or selling products not conforming to such standards and publications. Nor shall the fact that a standard or publication is published by the Association preclude its voluntary use by non-members of the Association wheth
5、er the document is to be used either domestically or internationally. Recommended standards and publications are adopted by the ESDA in accordance with the ANSI Patent policy. Interpretation of ESDA Standards: The interpretation of standards in-so-far as it may relate to a specific product or manufa
6、cturer is a proper matter for the individual company concerned and cannot be undertaken by any person acting for the ESDA. The ESDA Standards Chairman may make comments limited to an explanation or clarification of the technical language or provisions in a standard, but not related to its applicatio
7、n to specific products and manufacturers. No other person is authorized to comment on behalf of the ESDA on any ESDA Standard. THE CONTENTS OF ESDAS STANDARDS AND PUBLICATIONS ARE PROVIDED “AS-IS,” AND ESDA MAKES NO REPRESENTATIONS OR WARRANTIES, EXPRESSED OR IMPLIED, OF ANY KIND WITH RESPECT TO SUC
8、H CONTENTS. ESDA DISCLAIMS ALL REPRESENTATIONS AND WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE OR USE, TITLE AND NON-INFRINGEMENT. ESDA STANDARDS AND PUBLICATIONS ARE CONSIDERED TECHNICALLY SOUND AT THE TIME THEY ARE APPROVED FOR PUBLICAT
9、ION. THEY ARE NOT A SUBSTITUTE FOR A PRODUCT SELLERS OR USERS OWN JUDGEMENT WITH RESPECT TO ANY PARTICULAR PRODUCT DISCUSSED, AND ESDA DOES NOT UNDERTAKE TO GUARANTEE THE PERFORMANCE OF ANY INDIVIDUAL MANUFACTURERS PRODUCTS BY VIRTUE OF SUCH STANDARDS OR PUBLICATIONS. THUS, ESDA EXPRESSLY DISLAIMS A
10、NY RESPONSIBILITY FOR DAMAGES ARISING FROM THE USE, APPLICATION, OR RELIANCE BY OTHERS ON THE INFORMATION CONTAINED IN THESE STANDARDS OR PUBLICATIONS. NEITHER ESDA, NOR ITS MEMBERS, OFFICERS, EMPLOYEES OR OTHER REPRESENTATIVES WILL BE LIABLE FOR DAMAGES ARISING OUT OF, OR IN CONNECTION WITH, THE US
11、E OR MISUSE OF ESDA STANDARDS OR PUBLICATIONS, EVEN IF ADVISED OF THE POSSIBILITY THEREOF. THIS IS A COMPREHENSIVE LIMITATION OF LIABILITY THAT APPLIES TO ALL DAMAGES OF ANY KIND, INCLUDING WITHOUT LIMITATION, LOSS OF DATA, INCOME OR PROFIT, LOSS OF OR DAMAGE TO PROPERTY AND CLAIMS OF THIRD PARTIES.
12、 Published by: Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440 Copyright 2016 by ESD Association All rights reserved No part of this publication may be reproduced in any form, in an electronic retrival system or otherwise, without the prior written permission of the publi
13、sher. Printed in the United States of America ISBN: 1-58537-287-0 CAUTION NOTICE CAUTION NOTICE DISCLAIMER OF WARRANTIES DISCLAIMER OF GUARANTY LIMITATION ON ESDAs LIABILITY ANSI/ESD SP10.1-2016 i (This foreword is not part of ESD Association Standard Practice ANSI/ESD SP10.1-2016) FOREWORD Recent y
14、ears have witnessed an increasing use of automation in the electronics industry. There is hardly a device, circuit board, or assembly that does not undergo one or more types of automated handling at some point during its production cycle. Further, circuit density for most semiconductor devices has s
15、teadily increased, leading to a higher ESD susceptibility for some semiconductor devices. As a result, extensive measures are required to protect these sensitive devices during manufacture. Many of the same methods used to deal with static charge on a workbench have been applied to automated handlin
16、g equipment. Grounding, the use of static dissipative materials, and ionization are techniques commonly used to deal with static charge. Automated handling equipment (AHE) presents additional problems for effective static control. Devices may become polarized by an electric field, or charge can be i
17、nduced onto a device that is grounded in the presence of the electrostatic field. Also, a charge can be generated by contact with or separation from various materials. Components of AHE, particularly when integral with thermal chambers, generally require the use of easily charged materials. Groundin
18、g of sliding or rotating components may also be a challenge. These are some common problems encountered by both manufacturers and users of automated equipment. ESD control methods should be verified periodically. Test methods are needed to insure grounding integrity and verify that product does not
19、acquire an unacceptable level of static charge during its passage through automated equipment. In order to achieve suitable ESD control in AHE, it may be necessary to monitor or verify electrostatic charge on a product as it passes through the equipment. This can provide both continuous verification
20、 of ESD counter-measures and a method for locating sources of charge generation. Various types of measuring devices have been developed to determine the electrostatic potential or estimate the charge on product as it passes through the equipment. In order to verify the performance of these measuring
21、 devices, it is necessary to have a means of testing their repeatability and calibration, both at manufacture and periodically during service. This standard practice1 has been developed to assist in the generation of meaningful, repeatable data using these measuring devices. The diverse range of han
22、dling equipment, environments, and device sensitivities may require modifications to the test apparatus described in this standard practice. Further, the test conditions and results given within this standard practice may not always represent acceptable performance. Specifications should be agreed u
23、pon between the user and manufacturer of the automatic handling equipment in each application. This document was originally designated ESD SP10.1-2000 and was approved on February 6, 2000. ANSI/ESD SP10.1-2007 was a reaffirmation of ESD SP10.1-2000 and was approved on June 27, 2007. ANSI/ESD SP10.1-
24、2016 is a revision of ANSI/ESD SP10.1-2007 and was approved on February 25, 2016. 1 ESD Association Standard Practice (SP): A procedure for performing one or more operations or functions that may or may not yield a test result. Note, if a test result is obtained it may not be reproducible. ANSI/ESD
25、SP10.1-2016 ii At the time ANSI/ESD SP10.1-2016 was approved, the 10.0 Handlers Subcommittee had the following members: Thomas Albano, Interim Chair Harris Space and Intelligence Systems Rejean Dion Bystat International, Inc. Vladimir Kraz OnFILTER Jeff Salisbury Finisar Corporation Arnold Steinman
26、Electronics Workshop Julius Turangan Dou Yee Enterprises Scott Ward, TAS Rep Texas Instruments The following individuals made significant contributions to ANSI/ESD SP10.1-2016: At the time ANSI/ESD SP10.1-2007 was approved, the 10.0 Handlers Subcommittee had the following members: Donn Bellmore, Cha
27、ir Universal Instruments Corp. Don Boehm Dou Yee Enterprises Rejean Dion Bystat International, Inc. Jay Hamlin Medtronic Vladimir Kraz 3M Donald Pritchard Monroe Electronics Arnold Steinman MKS, Ion Systems David Swenson Affinity Static Control Consulting, LLC Julius Turangan Western Digital At the
28、time ESD SP10.1-2000 was approved, the 10.0 Handlers Subcommittee had the following members: Donn Bellmore Advanced ESD Services+ Donald Pritchard Monroe Electronics Joseph Bernier, Chair Intersil Thomas Albano Eastman Kodak Company Donn Bellmore Universal Instruments Donald Boehm Novx Corporation K
29、en Hansen Tellabs John Kinnear IBM Thomas Mohler Raytheon Systems Charles Perry Monroe Electronics Donald Pritchard Trek, Inc. Arnold Steinman Ion Systems Craig Zander, Secretary Restronics Company, Inc. ANSI/ESD SP10.1-2016 iii The following individuals made significant contributions to ESD SP10.1-
30、2000: Wayne Tan Advanced Micro Devices Rita Shartzer Motorola ANSI/ESD SP10.1-2016 iv TABLE OF CONTENTS 1.0 PURPOSE, SCOPE, AND APPLICATION . 1 1.1 PURPOSE . 1 1.2 SCOPE . 1 1.3 APPLICATION 1 2.0 REFERENCED PUBLICATIONS 2 3.0 DEFINITIONS 2 4.0 SAFETY REQUIREMENTS 2 4.1 ELECTRICAL GENERAL . 2 4.2 ELE
31、CTRICAL AUTOMATIC HANDLING EQUIPMENT 2 4.3 ENVIRONMENTAL 3 5.0 MEASUREMENT EQUIPMENT 3 5.1 RESISTANCE MEASUREMENTS APPARATUS . 3 5.2 CHARGE ACCUMULATION MEASUREMENTS . 3 6.0 TEST PROCEDURES RESISTANCE MEASUREMENTS 4 6.1 TEST PREPARATIONS 24 HOURS PRIOR TO MEASUREMENTS . 4 6.2 TEST DATA REPORTING 4 6
32、.2.1 General Information . 4 6.2.2 Required Measurements 5 7.0 TEST PROCEDURES CHARGE ACCUMULATION MEASUREMENT . 5 7.1 TEST PREPARATIONS DYNAMIC TEST 5 7.2 MEASUREMENT CORRELATION DYNAMIC TEST 5 7.2.1 Correlation Samples Integrated Circuit . 6 7.2.2 Correlation Samples PC Board . 6 7.2.3 Correlation
33、 Testing . 7 7.3 TEST PREPARATIONS STATIC TEST . 7 7.4 TEST DATA REPORTING 8 7.4.1 General Information . 8 7.5 MEASURING DEVICES ON THE AHE 8 ANSI/ESD SP10.1-2016 v ANNEXES Annex A (Informative): Suggested Equipment Grounding Guidelines 9 Annex B (Informative): Selection of Electrostatic Voltmeters
34、10 Annex C (Informative): Recommendations on Installation of the Voltage or Electrostatic Field Sensor 11 Annex D (Informative): Sample Data Sheet 12 Annex E (Informative): Sample Test Report Form 13 Annex F (Informative): Bibliography 15 Annex G (Informative): Revision History of ANSI/ESD SP10.1-20
35、16 16 FIGURES Figure 1: Example of Measurement Points on an Automated Handler 11 ESD Association Standard Practice ANSI/ESD SP10.1-2016 1 ESD Association Standard Practice for the Protection of Electrostatic Discharge Susceptible Items Automated Handling Equipment (AHE) 1.0 PURPOSE, SCOPE, AND APPLI
36、CATION 1.1 Purpose This standard practice provides test procedures for evaluating the electrostatic environment associated with AHE. This document provides testing and data reporting procedures for the evaluation of ESD ground integrity in AHE and for the evaluation of charge generation and accumula
37、tion on devices in AHE. These methods evaluate newly installed and existing equipment by verifying the equipments existing ground paths and by determining if charge on ESD-sensitive devices (ESDS) can be detected. 1.2 Scope This standard practice covers resistance-to-ground measurements of machine c
38、omponents and sources of charge in AHE. Two methods are described to measure sources of charge. One method measures charge indirectly by measuring the voltage or field associated with the charge. The second method directly measures the voltage induced on ESDS items. In particular, it establishes tes
39、t procedures for: the measurement of DC electrical resistance between machine components of AHE and the equipment grounding conductor (EGC). See Annex A. testing AHE to determine whether charge is being generated on devices as they move through the equipment. reporting the correlation between measur
40、ed voltages and known test voltages as they apply to AHE. (Charge measuring devices are not addressed in this document.) Grounding methods and materials specified herein may or may not provide adequate grounding for conditions other than steady state DC. Reactance considerations at any frequency are
41、 beyond the scope of this document. In addition, this standard practice does not determine the effectiveness of any grounding method for reducing electromagnetic interference (EMI). Explosive, ordnance, or flammable materials handling considerations are also excluded from this standard practice. 1.3
42、 Application Test procedures contained within this standard practice may be used by both AHE manufacturers and users to produce repeatable data describing the ground integrity of AHE and the charge generated and accumulated on specific package types during normal operating usage of the AHE. Since th
43、ere is a wide variety of device sensitivities, AHE types, package types and environmental conditions, users and manufacturers are strongly urged to agree upon appropriate specifications, measurement accuracies, modifications, or additions to the tests described herein. This standard practice relies
44、upon point-to-point DC resistance measurements taken from machine components of concern or the equipment chassis to the EGC. ANSI/ESD SP10.1-2016 2 2.0 REFERENCED PUBLICATIONS Unless otherwise specified, the following documents of the latest issue, revision, or amendment form a part of this standard
45、 to the extent specified herein: ESD ADV1.0, ESD Association Glossary of Terms2 ANSI/ESD S6.1, Grounding2 ANSI/ESD S1.1, Wrist Straps2 ANSI/NFPA-70, National Electric Code3 3.0 DEFINITIONS The terms used in the body of this document are in accordance with the definitions found in ESD ADV1.0, ESD Ass
46、ociations Glossary of Terms, available for complimentary download at http:/www.esda.org. 4.0 SAFETY REQUIREMENTS 4.1 Electrical General 4.1.1 THE PROCEDURES AND EQUIPMENT DESCRIBED IN THIS DOCUMENT MAY EXPOSE PERSONNEL TO HAZARDOUS ELECTRICAL CONDITIONS. USERS OF THIS DOCUMENT ARE RESPONSIBLE FOR SE
47、LECTING EQUIPMENT THAT COMPLIES WITH APPLICABLE LAWS, REGULATORY CODES AND EXTERNAL AND INTERNAL POLICY. USERS ARE CAUTIONED THAT THIS DOCUMENT CANNOT REPLACE OR SUPERCEDE ANY REQUIREMENTS FOR PERSONNEL SAFETY. THE ULTIMATE RESPONSIBILITY FOR PERSONNEL SAFETY RESIDES WITH THE END USER OF THIS DOCUME
48、NT. A THOROUGH UNDERSTANDING OF MACHINE OPERATION, CAPABILITIES, AND POTENTIAL HAZARDS IS IMPERATIVE BEFORE ANY TESTING MAY COMMENCE. FURTHERMORE, CARE AND FORETHOUGHT SHOULD BE TAKEN TO PREVENT INJURY FROM MOVING MACHINE COMPONENTS. RESISTANCE VALUES OBTAINED BY METHODS DESCRIBED IN THIS DOCUMENT S
49、HOULD NOT BE USED TO SET LIMITS FOR ELECTRICAL HAZARDS TO PERSONNEL. 4.1.2 GROUND FAULT CIRCUIT INTERRUPTERS (GFCI) AND OTHER SAFETY PROTECTION SHOULD BE CONSIDERED WHEREVER PERSONNEL MIGHT COME INTO CONTACT WITH ELECTRICAL UTLILITY SOURCES. 4.1.3 ELECTRICAL HAZARD REDUCTION PRACTICES SHOULD BE EXERCISED AND PROPER GROUNDING INSTRUCTIONS FOR THE EQUIPMENT MUST BE FOLLOWED WHEN PERFORMING THESE TESTS. 4.1.4 THE RESISTANCE MEASUREMENTS OBTAINED THROUGH THE USE OF TEST METHODS DESCRIBED IN THIS STANDARDS PRACTICE, SHALL NOT BE USED TO DETERMINE THE RE
