1、Designation: E2734/E2734M 10 (Reapproved 2018)Standard Specification forDimensions of Knife-Edge Flanges1This standard is issued under the fixed designation E2734/E2734M; the number immediately following the designation indicates the yearof original adoption or, in the case of revision, the year of
2、last revision. A number in parentheses indicates the year of last reapproval.A superscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This standard specifies the dimensions of knife-edgestyle flanges and their associated gaskets used in vacuumsystems f
3、or pressures ranging from 105Pa to 10-11Pa. Suchflanges are widely used throughout vacuum technology appli-cations in semiconductor processing tools, surface analysissystems, space simulation systems, and general research re-quiring vacuum.1.2 The values stated in either SI units or inch-pound units
4、are to be regarded separately as standard. The values stated ineach system may not be exact equivalents; therefore, eachsystem shall be used independently of the other. Combiningvalues from the two systems may result in non-conformancewith the standard.1.3 This standard does not purport to address a
5、ll of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety, health, and environmental practices and deter-mine the applicability of regulatory limitations prior to use.1.4 This international standard was developed
6、in accor-dance with internationally recognized principles on standard-ization established in the Decision on Principles for theDevelopment of International Standards, Guides and Recom-mendations issued by the World Trade Organization TechnicalBarriers to Trade (TBT) Committee.2. Referenced Documents
7、2.1 ASTM Standard:2E673 Terminology Relating to Surface Analysis (Withdrawn2012)32.2 ISO Standard:4ISO 4288:1996 Geometrical Product Specifications (GPS)Surface Texture: Profile MethodRules and Proceduresfor the Assessment of Surface Texture3. Terminology3.1 DefinitionsFor definitions used in this s
8、pecification,see Terminology E673.3.2 Definitions of Terms Specific to This Standard:3.2.1 knife-edge flange, nvacuum flanges seal with ametal gasket; two mating surfaces with identical circular(triangular profile) knife-edges are bolted together; a deform-able metal gasket, captured between the kni
9、fe-edges provides aleak-free seal.3.2.1.1 DiscussionVacuum flanges that seal with a metalgasket were originally developed as Conflat flanges (trade-mark) by the Varian Corporation.3.2.2 type, nknife-edge flanges come in a variety of sizes;historically, the flange sizes were identified in North Ameri
10、caas the flanges outside diameter (in inches) and in Europe as themaximum nominal bore of the tube (in millimetres) that mightbe welded to the flange; for this specification, the flangeidentification “type” is used where the type is approximatelyequal to the flanges outside diameter in inches.4. Mat
11、erials and Manufacture4.1 FlangeFlanges must be manufactured from a suffi-ciently hard or hard-coated material to resist deformation of theknife-edge profile despite repeatedly forming a vacuum sealwith metal gaskets.4.2 GasketGasket must be manufactured from a soft,annealed, or partially-tempered m
12、etal such that the matingflanges knife-edges cause sufficient (initial) plastic deforma-tion that a vacuum seal is accomplished.5. Dimensions, Mass, and Permissible Variations5.1 Figs. 1-3 and Tables 1 and 2 contain the requireddimensions and tolerances for rotatable and non-rotatableknife-edge vacu
13、um flanges.1This specification is under the jurisdiction ofASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.13 on VacuumTechnology.Current edition approved June 1, 2018. Published June 2018. Originallyapproved in 2010. Last previous edition approved in 2010
14、as E2734/E2734M10.DOI: 10.1520/E2734_E2734M-10R18.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3The last a
15、pproved version of this historical standard is referenced onwww.astm.org.4Available from International Organization for Standardization (ISO), ISOCentral Secretariat, BIBC II, Chemin de Blandonnet 8, CP 401, 1214 Vernier,Geneva, Switzerland, http:/www.iso.org.Copyright ASTM International, 100 Barr H
16、arbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United StatesThis international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for theDevelopment of International Standards, Guides and Recommend
17、ations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.1FIG. 1 Flange Dimensions: (a) Non-Rotatable Flange (b) Rotatable FlangeFIG. 2 Knife-Edge DetailFIG. 3 Knife-Edge Gasket DimensionsE2734/E2734M 10 (2018)2TABLE1Knife-EdgeFlangeDimensionABCDEFGHITypeNominalBoreN
18、ominal OutsideDiameterTolerance0.030in.0.75mmMaxTubeDiameterNum-berofBoltHolesBoltHoleDiameterBoltThreadBoltCirclePositionToleranceofBoltHolesSealRecessDiameterTolerance0.004in.0.10mmKnife EdgeDiameterTolerance0.004in.0.10mmSetbackFlangeFacetoTubeSeatTolerance0.005in.0.12mmDepthofReceiverSeatforInse
19、rt (Max)FlangeThickness(Min)mmin.mmin.Min, mmMax,mmMin,in.Max,in.mmin.mmin.mmin.mmin.mmin.mmin.mmin.mmin.1in.OD10CF25.401.00012.00.47263.33.50.1300.138m305n/a17.50.6890.10.00413.490.53110.490.4133.000.118n/an/a6.00.236113in.OD16CF33.861.33319.30.76064.34.60.1710.180m407#83227.01.0620.20.00921.390.84
20、218.290.7204.570.1806.500.2566.60.260218in.OD25CF53.982.12525.71.01046.76.90.2640.273m61.0142841.31.6250.20.00933.021.30027.691.0904.320.1707.060.27811.40.450234in.OD35CF69.852.75044.51.75066.76.90.2640.273m61.0142858.72.3120.20.00948.311.90241.911.6505.310.2097.750.30512.20.480338in.OD50CF85.733.37
21、551.02.00888.48.60.3310.340m81.255162472.42.8500.20.00961.752.43155.882.2005.720.2259.800.38615.20.600412in.OD63CF114.304.50070.02.75588.48.60.3310.340m81.255162492.23.6280.20.00982.583.25177.223.0409.530.37512.830.50516.80.660458in.OD75CF117.484.62576.23.000108.48.60.3310.340m81.2551624102.44.0300.
22、20.00991.693.61085.143.3529.530.37513.130.51718.50.7306in.OD100CF152.406.000108.04.250168.48.60.3310.340m81.2551624130.35.1280.20.009120.654.750115.324.54011.100.43714.430.56819.30.760634in.OD125CF171.456.750127.05.000188.48.60.3310.340m81.2551624151.65.9690.20.009141.735.580136.355.36811.680.46015.
23、540.61220.80.8208in.OD160CF203.208.000159.06.260208.48.60.3310.340m81.2551624181.17.1280.20.009171.456.750166.126.54012.700.50015.950.62821.80.86010in.OD200CF254.0010.000206.08.110248.48.60.3310.340m81.2551624231.99.1280.20.009222.288.751216.928.54012.700.50017.250.67924.10.95012in.OD250CF304.8012.0
24、00256.010.079328.48.60.3310.340m81.2551624284.011.1800.20.009273.2010.756267.7210.54012.700.50017.960.75024.50.9641212in.OD265CF317.5012.500267.010.512308.48.60.3310.340m81.2551624295.011.6140.20.009285.1911.228280.0111.02412.700.50018.690.73624.50.9641314in.OD275CF336.5513.250273.410.7653010.610.80
25、.4180.425m101.53824306.312.0600.20.009294.5411.596288.2411.34812.700.50019.910.78427.91.10014in.OD295CF355.6014.000306.012.0473010.610.80.4180.425m101.53824325.312.8090.20.009313.3612.337308.0312.12712.700.50019.910.78428.31.1141414in.OD300CF362.0014.252306.012.0473610.610.80.4180.425m101.53824334.0
26、13.1500.20.009321.4512.656316.3012.45316.000.630n/an/a30.01.1811412in.OD305CF368.3014.500306.012.0473210.610.80.4180.425m101.53824338.113.3110.20.009326.4012.850320.0012.59812.700.50010.030.39528.01.1021612in.OD350CF419.1016.500356.114.0203610.610.80.4180.425m101.53824388.915.3100.20.009377.0114.843
27、370.7914.59812.700.50020.830.82028.01.10218in.OD400CF457.2018.000406.516.0043610.610.80.4180.425m101.53824431.817.0000.20.009419.3016.508414.0016.29915.880.625n/an/a28.51.1221812in.OD405CF469.9018.500406.516.0044010.610.80.4180.425m101.53824437.917.2400.20.009424.4016.709419.0016.49615.880.62520.830
28、.82028.01.102E2734/E2734M 10 (2018)36. Workmanship, Finish, and Appearance6.1 Knife-edge vacuum flanges are typically used in appli-cations which require: (1) a high degree of leak integrity, and(2) the lowest possible contamination from outgassing. Toachieve both characteristics, the finish of the
29、flanges knife-edges and gaskets must be free of visible cracks, pits,inclusions, scratches, and foreign materials. The knife-edgesurfaces must have a 32 RMS finish or better as measuredusing ISO 4288:1996.7. Keywords7.1 flange; gasket; knife-edge; metal gasket; metal seal;outgassing; rotatable flang
30、e; vacuum fitting; vacuum hardware;vacuum sealASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, a
31、nd the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revis
32、ion of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you s
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35、923, Tel: (978) 646-2600; http:/ 2 Knife-Edge Gasket DimensionTypeThickness, L Inside Diameter, J Outside Diameter, Kin.Tolerance 0.003mmTolerance 0.07in.MaxmmMaxin.Tolerance +0.002,0.002mmTolerance 0.051 in. OD 0.080 2.03 0.335 8.5 0.524 13.31113 in. OD 0.080 2.03 0.643 16.3 0.838 21.29218 in. OD 0
36、.080 2.03 1.013 25.7 1.290 32.77234 in. OD 0.080 2.03 1.533 38.9 1.895 48.13338 in. OD 0.080 2.03 2015 51.2 2.425 61.60412 in. OD 0.080 2.03 2.813 71.5 3.243 82.37458 in. OD 0.080 2.03 3.015 76.6 3.598 91.396 in. OD 0.080 2.03 4.009 101.8 4.743 120.47634 in. OD 0.080 2.03 5.013 127.3 5.568 141.438 i
37、n. OD 0.080 2.03 6.010 152.7 6.743 171.2710 in. OD 0.080 2.03 8.010 203.5 8.743 222.0712 in. OD 0.080 2.03 10.007 254.2 10.749 273.021212 in. OD 0.080 2.03 10.500 266.7 11.221 285.011314 in. OD 0.080 2.03 10.857 275.8 11.589 294.3614 in. OD 0.080 2.03 11.813 300.1 12.330 313.181414 in. OD 0.080 2.03 12.016 305.2 12.638 321.011412 in. OD 0.080 2.03 12.107 307.5 12.843 326.211612 in. OD 0.080 2.03 14.107 358.3 14.836 376.8318 in. OD 0.080 2.03 15.807 401.5 16.501 419.131812 in. OD 0.080 2.03 15.970 405.6 16.702 424.23E2734/E2734M 10 (2018)4
