1、Designation: F 51 00 (Reapproved 2007)Standard Test Method forSizing and Counting Particulate Contaminant In and OnClean Room Garments1This standard is issued under the fixed designation F 51; the number immediately following the designation indicates the year of originaladoption or, in the case of
2、revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A superscriptepsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This test method covers the determination of detachableparticulate contaminant 5 m or larger, i
3、n and on the fabric ofclean room garments.1.2 This test method does not apply to nonporous fabricssuch as Tyvekt or Gortext. It only applies to fabrics that areporous such as cotton or polyester.1.3 The values stated in SI units are to be regarded as thestandard. The inch-pound values given in paren
4、theses are forinformation only.1.4 This test method provides not only the traditional opticalmicroscopic analysis but also a size distribution and surfaceobscuration analysis for particles on a fine-textured membranefilter or in a tape lift sample. It utilizes transmitted illuminationto render all p
5、articles darker than the background for gray leveldetection. Particles collected on opaque plates must be trans-ferred to a suitable membrane filter.1.5 This standard may involve hazardous materials, opera-tions, and equipment. This standard does not purport toaddress all of the safety concerns, if
6、any, associated with itsuse. It is the responsibility of the user of this standard toestablish appropriate safety and health practices and deter-mine the applicability of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2E 1216 Practice for Sampling for Particulate Conta
7、minationby Tape LiftF25 Test Method for Sizing and Counting Airborne Par-ticulate Contamination in Cleanrooms and Other Dust-Controlled Areas2.2 Institute of Environmental Sciences and Technology(IEST) Document:3IEST-RP-CC003.2, Garment System Considerations forCleanrooms and Other Controlled Enviro
8、nments3. Terminology3.1 Definitions:3.1.1 fiber, nparticle longer than 100 m and with alength-to-width ratio exceeding 10:1.3.1.2 micrometre (m), nSI unit of length which is 10-6ofa metre or approximately 0.00004 in.3.1.3 particle size (L) (m)major projected dimension ofa particle.4. Summary of Test
9、 Method4.1 Filtered air is drawn through five designated 0.01-m2(1.5-in.2or approximately 0.01-ft2) areas of a single thicknessof the garment fabric at a rate of 14 L/min (0.5 cfm) for aperiod of 1 min for each area.4.2 The air drawn through the garment subsequently passesthrough a membrane filter d
10、isk, impinging the entrainedparticles upon the filter surface.4.3 The filter disk is then examined microscopically forparticles removed from the garment.4.4 For particles larger than 5 m, use optical analysis. Forparticles smaller than 5 m, use automated image analysis.4.5 Cleaning and counting tech
11、niques are in accordancewith those established in Section 10.5. Significance and Use5.1 The test method for particulate sizing and numbers ongarments is nondestructive and may be used to evaluate thecontamination levels of fibers and particles on and in cleanroom garments. The test may be used for e
12、valuating thecleanliness levels of new or newly cleaned garments. It alsomay be used to evaluate the extent of fiber and particulatecontamination on garments that have been worn, if necessary.1This test method is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and Applications of Spa
13、ce Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edition approved April 1, 2007. Published April 2007. Originallyapproved in 1965. Last previous edition approved in 2002 as F 51 - 00(2002)e1.2For referenced ASTM standards, visit the ASTM website, www.astm
14、.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from IEST, 940 E. Northwest Highway, Mount Prospect, IL 60056.1Copyright ASTM International, 100 Barr Harbor Drive
15、, PO Box C700, West Conshohocken, PA 19428-2959, United States.For this application, it is necessary to sample representativeareas of the garment fabric.6. Apparatus6.1 Filter Assembly and Adapter ,4see Fig. 1and Fig. 2.6.1.1 Filter Holder, aerosol open type having an effectivefilter area of 960 6 2
16、5 mm2.6.2 Vacuum Pump or Aspirator, capable of operating at apressure of 7 kPa (500 torr) with a flow rate of 14 L/min (0.5cfm).6.3 Flowmeter or Orifice ,4calibrated and having a capacityin excess of 14 L/min (0.5 cfm), or a limiting orifice calibratedwith the pump, filter holder, and filter used fo
17、r this test methodat a flow rate of 14 6 0.5 L/min (0.50 6 0.02 cfm). Ensure,visually, that the orifice is free of obstructing matter beforeeach test.6.4 Membrane Filters :4,56.4.1 Black, 0.80-m pore size, 47-mm diameter with3.08-mm imprinted grid for fabric particles.6.4.2 White, 0.80-m pore size,
18、47-mm diameter withoutimprinted grid for fabric particles and automated image ana-lyzer.6.4.3 White, 5.0-m pore size, 47-mm diameter (air prefilterused with the filters in 6.4.1 and 6.4.2).6.4.4 Plastic Petri Slides with Covers ,6plastic petri dishes,60-mm diameter or glass microscope slides, 50 by
19、75 mm.6.5 Binocular Microscope ,7with ocular-objective combina-tions to obtain 40 to 453 and 90 to 1503 magnifications.Latter objective shall have a numerical aperture of 0.15 min.Fig. 3shows suitable apparatus.6.6 Programmable Image Analyzer, a Computer-Driven Mi-croscope Which Counts and Sizes Par
20、ticles With AutomatedStage and Automated Focus Interface:6.6.1 Microscope, with a large glass platform automaticstage and automated focus.6.6.2 Objectives and Projection Lenses, to generate a pixeldimension of about 5 m or less.6.7 Forceps, with unserrated tips.6.8 Normal Counter ,8(2 gang) or equiv
21、alent.6.9 Microscope Lamp ,96 V, 5 A high intensity.6.10 Stage Micrometer ,10standard 0.01- to 0.1-mm scale.6.11 Ocular Micrometer Scale ,115-mm linear scale with100 divisions.6.12 Standard Counting Specimens .47. Sampling Requirements7.1 The sample shall be collected by drawing air filtered to5 m t
22、hrough the test garment, impinging the garment-borneparticles on the membrane filter. The filter surface mounted inthe open-type aerosol filter holder shall be placed on the outersurface of the test garment. The garment is firmly clamped tothe filter holder by means of the air-filter adapter. During
23、sampling, the garment shall be hung or carefully positioned tominimize extraneous contamination.4The following equipment is satisfactory for this test method except wherementioned otherwise. The following part numbers refer to equipment available fromMillipore Filter Corp.:(1) Fabric Particle Monito
24、ring Assembly, #XX50 047 40, Millipore Filter Corp.,Bedford, MA01730, Gelman 1200Awith 1207Adapter available from Gelman Co.,Chelsea, MI or equivalent.(2) Adapter No. XX50 047 45, or equivalent.(3) Limiting Orifice XX50 000 00.(4) Forceps with unserrated tips.(5) Check Slide Photographic, XX 50 000
25、50 or equivalent.(6) Aerosol Monitors Type M A BG037A0.(7) Adapter, XX 62 000 04.5Filters manufactured by the Millipore Filter Corp., Bedford, MA 01730 orGelman Co., Chelsea, MI, have been found satisfactory for this purpose.6Analyslides, Gelman Sciences,AnnArbor, MI, have been found satisfactory fo
26、ruse with microscopes.7Microscopes such as Bausch and Zeiss Model KF 124-212 (withaccessories), or equivalent, have been found satisfactory for this purpose.8The Veeder Root counter has been found satisfactory for this purpose.9The AO Spencer, or equivalent lamp, has been found satisfactory for this
27、purpose.10Bausch fabric; particulate contaminantNOTE 1With membrane filter on stage, movement of the state makes particles appear to pass the divisions on the measuring eyepiece.FIG. 9 Alternative Unit AreasF 51 00 (2007)6APPENDIXES(Nonmandatory Information)X1. ALTERNATIVE METHOD FOR PARTICULATE SAM
28、PLING OF CLEAN ROOM GARMENTSX1.1 A 0.31-m (1-ft) square stainless steel frame should beused as a test jig. The sides should be 76 mm (3 in.) deep toallow the frame to be placed in the vertical position. The frameshould have a screen stretched over one side of the foot squareopening to serve as a sup
29、port for the garment test surface.X1.2 Wrap the garment around the frame so that the closedfront of the garment is stretched flat against the screen. One ortwo clamps may be used as necessary to hold the garment testsurface in place and in a vertical position.X1.3 The test probe (Fig. X1.1) should c
30、ontain the appro-priate 47-mm membrane filter with a 0.8-m pore size.Regulate airflow to 20 L/min (0.71 cfm), using a flowmeter,and move the probe in eight overlapping passes so that thecomplete test surface is covered in 1 min. The perimeter of theprobe opening should fully contact the test surface
31、.X1.4 Remove the membrane filter and analyze the surfacefor particles and fibers by microscopic or automated imageanalyzer techniques, as described in Sections 10 and 11.X1.5 See IEST-RP-CC003.3 for additional recommenda-tions on the sampling using this technique.X2. PROPOSED DECONTAMINATION PROCESS
32、ED GARMENT CLASSIFICATIONX2.1 Table X2.1 provides classifications for various levelsof contamination.FIG. X1.1 Typical Aerosol Monitor Sampling SystemTABLE X2.1 Contamination ClassificationNOTE 1Obviously broken fibers and lint-bearing seams on outersurfaces of garments, wiping cloths, caps, hoods,
33、booties, and fabrics shallbe cause for rework and rejection. Decontamination processed clean roomfabrics shall be free from persistent objectionable odors.Class Contamination LevelMaximum Particles/Fibers per 0.1 m2of FabricA 999 particles 5 m/10 fibersB 4999 particles 5 m/25 fibersC 9999 particles
34、5 m/50 fibersD 14 999 particles 5 m/125 fibersE 25 000 particles 5 m/175 fibersF 51 00 (2007)7ASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determinat
35、ion of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withd
36、rawn. Your comments are invited either for revision of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your
37、 comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).F 51 00 (2007)8
