1、Designation: F 1373 93 (Reapproved 2005)Standard Test Method forDetermination of Cycle Life of Automatic Valves for GasDistribution System Components1This standard is issued under the fixed designation F 1373; the number immediately following the designation indicates the year oforiginal adoption or
2、, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas distribution systems
3、. This test methodpresents a procedure that may be applied for the evaluation of one or more components considered foruse in such systems.1. Scope1.1 This test method covers the testing of automatic valvesfor cycle life utilizing static, no-flow conditions. This no-flowcondition is felt to be a real
4、istic test to determine the valvescycle life.1.2 This test method applies to automatically operatedvalves. It is intended to measure the cycle life of the valve itselfincluding the seat and body sealing. It does not include cycletesting of the actuator. Testing must include both pressuretesting and
5、helium leak testing and must include vacuum testconditions when appropriate. This test method may be appliedto a broad range of valve sizes.1.3 Limitations:1.3.1 This test is not designed to evaluate the performanceof the actuator. This test method addresses the gas systemcontamination aspects of th
6、e valve performance, that is, seatand body leakage and diaphragm or bellows failure. If theactuator fails during the evaluation, the valve is deemed as afailure.1.3.2 While the requirements of a valves performancemight include items such as particulate generation levels, thistest method only attempt
7、s to evaluate cycle life and perfor-mance degradation as they relate to the ability of the valve tooperate and shut off flow.1.3.3 This test method is written with the assumption thatthe operator understands the use of the apparatus at a levelequivalent to six months of experience.1.4 The values sta
8、ted in SI units are to be regarded as thestandard. The inch-pound units given in parentheses are forinformation only.1.5 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priat
9、e safety and health practices and determine the applica-bility of regulatory limitations prior to use. Specific hazardstatements are given in Section 7.2. Referenced Document2.1 SEMATECH Standard:2.1.1 Test Method for Determination of Helium Leak Ratefor Gas Distribution Systems Components, Provisio
10、nal SE-MASPEC #90120391 B-STD. Feb. 22, 1993.23. Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1 actuation cycleoperation of valve from fully openedto fully closed and back to fully opened.3.1.2 actuator a gas (compressed air nitrogen)-operateddevice connected to the valve stem t
11、o open and close the valve.3.1.3 actuator pressurerange of actuator gas line pressurerequired to fully open and close the valve.3.1.4 automatic valvea valve with an actuation devicethat can be operated remotely, such as a pneumatically orelectrically controlled valve.3.1.5 cycle lifethe cycle life o
12、f a valve involves twocharacteristics: catastrophic valve failure, that is a single value;and a degraded performance, that is, a plot of helium leak rateversus cycles.3.1.6 failurethe termination of the ability of the valve toperform its required function.3.1.7 failure modethe mode by which a failur
13、e is ob-served to occur.1This test method is under the jurisdiction of ASTM Committee F01 onElectronics and is the direct responsibility of Subcommittee F01.10 on ProcessingEnvironments.Current edition approved Jan. 1, 2005. Published January 2005. Originallyapproved in 1992. Last previous edition a
14、pproved in 1999 as F 1373 93(1999).2Available from SEMATECH, 2706 Montopolis Dr., Austin, TX 78741-6499.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.3.1.7.1 DiscussionFailure mode types include a cata-strophic failure that is both
15、 sudden and complete and degradedfailure that is gradual, partial, or both.3.1.8 standard conditions101.3 kPa, 0.0C (14.73 psia,32.0F).3.1.9 valveany component designed to provide positiveshutoff of fluid media with the capability of being externallyoperated.4. Significance and Use4.1 The purpose of
16、 this test method is to define a procedurefor testing components being considered for installation into ahigh-purity gas distribution system. Application of this testmethod is expected to yield comparable data among compo-nents tested for the purposes of qualification for this installa-tion.5. Appar
17、atus5.1 Helium Mass Spectrometer Leak Detector.5.2 Cycle Counter.5.3 Upstream and Downstream Pressure Indicators orTransducers, capable of handling the test pressure ranges; avacuum pump for vacuum service valves, an isolation valveand test valve, some pressure transducers or gages, and a cyclecontr
18、oller to provide consistent cycling are required.5.4 Instrument to Detect Failure of the Valve to HoldPressure, for example, a data logger tied to the outlet pressuretransducer. A data logging instrument is preferred but anyinstrument such as a dual strip chart recorder capable ofdetecting the failu
19、re is acceptable.6. Reagents and Materials6.1 Aira high pressure supply of clean dry air (CDA) ornitrogen filtered to 0.02 m.6.2 Actuation Gas Supply, is required.6.3 Helium Supply, is required, though for helium leak testsonly.7. Hazards7.1 The test must be performed in an environment andmanner tha
20、t prevents injury, or external laboratory damage.NOTE 1Precaution: During this test the valve may be tested until itfails and may release high pressure gas.7.2 Do not use helium as the test gas for cycling. This isbecause helium leak rate test method is used to measure leaksin the test component.8.
21、Preparation of Apparatus8.1 Construct a test stand for the determination of the cyclelife of automatic valves according to the schematic drawingshown in Fig. 1. A recommended test apparatus which can beused to conduct both the cycle life and all three helium leaktests is shown in Fig. 2 (see 5.2). D
22、imensions between thecomponents are also shown in Fig. 2 and a list of parts that canbe used to assemble the recommended test apparatus ispresented in Fig. 3 (see 5.3).8.2 Nitrogen gas supply is filtered by an electronics gradehigh purity gas filter before it is delivered to the test valvethrough th
23、e isolation valve. The test valve is isolated betweentwo isolation valves to allow for pressurization of the testcomponent during cycling and leak testing. Helium gas neededfor leak testing is provided from an ultra high purity helium gascylinder.8.3 The test component is installed inside a borosili
24、cate belljar placed above a stainless steel base plate to provide aleak-tight enclosure required for both the inboard and outboardhelium leak tests. Ports are provided in the base plate for theinlet and outlet lines of the test component, for the actuatorline, and for a port for the actuator exhaust
25、 to release theexhaust outside the bell jar. The base plate is sealed to the belljar by a rubber gasket during outboard leak testing of the testcomponent.8.4 Both the inlet and outlet pressures are measured imme-diately upstream and downstream of the test valve by twoelectronic pressure transducers.
26、 These pressure transducers areconnected to two digital readouts to display inlet and outletpressures. Electronic readouts are connected to a dual channelstrip chart recorder to continuously monitor the inlet and outletpressures.8.5 A thermocouple is connected to a digital readout unit todirectly di
27、splay and read the ambient temperature.8.6 As shown in Fig. 2, the nitrogen gas supply is shut offbefore helium is delivered to either pressurize the test compo-nent for outboard leak testing or for spraying helium around thetest specimen for inboard leak testing. A helium leak detectorthat can meas
28、ure helium leak rates down to 2 3 1011atm-cm3/s (He) is to be used for the leak measurements.9. Calibration9.1 Calibrate instruments regularly in accordance withmanufacturers instructions.10. Test Conditions10.1 Maintain test temperature between 18 and 26C (64and 78F). Environmental temperature with
29、in this range is notexpected to have any measurable effect on valve performance.11. Procedure11.1 Conduct an initial helium leak test (see SEMATECHTest Method on Helium Leak Rate) to establish a baseline leakrate. Test vacuum service valves under vacuum using aninboard helium leak test. Test positiv
30、e pressure service valvesFIG. 1 Cycle Life Test SchematicF 1373 93 (2005)2FIG. 2 Schematic Diagram of the Recommended Cycle Life Test ApparatusF 1373 93 (2005)3under pressure using an outboard helium leak test. Leak test allvalves across the seat.11.2 Assemble the test valve into the test apparatus
31、(see Fig.1).11.3 Conduct a system pressure leak test at full test pres-sure. A helium leak detector can be used to test the system forleaks. Alternately, the test apparatus can be pressurized to thesystem pressure and soap solution can be sprayed to detectleaks around the fittings and joints.11.4 Se
32、t the valve actuation pressure to the maximum valuewithin the manufacturers recommended pressure range.11.5 Pressurize (or evacuate) the valve to the valvesmaximum allowable working pressure as specified by themanufacturer (MAWP) or vacuum (whichever is applicable).Close the isolation valves, verify
33、ing that the test pressure bothupstream and downstream is correct.11.6 Continuously monitor both the upstream and down-stream pressures as specified in 5.4.11.7 The test valve must be helium leak tested at 10 %intervals of the manufacturers stated cycle life (or expectedcycle life) in order to deter
34、mine the degradation in helium leaktightness of the valve upon cycling. When manufacturerscycle life data is not known, the test valves should be cycled at40 000 cycle increments, and the valves tested for leaks at theend of each cycling increment.11.8 Actuation cycles are to be 1 to 2 s open and 1
35、to 2closed. Continue test until failure occurs (see 3.1.5).11.9 For single unit verification tests, continue the test to atleast 125 % of manufacturers stated cycle life.12. Report12.1 Complete the chart given in Fig. 4 and Fig. 5.12.2 Illustrations See Fig. 1 for test schematic diagram.13. Precisio
36、n and Bias13.1 The precision and bias for this test method are beingdetermined.14. Keywords14.1 components; contamination; gas distribution compo-nents; life cycle testing; semiconductor processing; valvesNOTE 1Products are identified with manufacturers name solely forthe purpose of defining product
37、s to be used in the construction of therecommended test apparatus. The use of manufacturers name does notconstitute an endorsement of their product. Equivalent products can besubstituted without altering the function or quality of the test.FIG. 3 Parts for the Recommended Cycle Life Test MethodAppar
38、atusFIG. 4 Cycle Life Data ChartF 1373 93 (2005)4ASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights
39、, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for re
40、vision of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing yo
41、u shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).FIG. 5 Cycle Life of Automatic ValvesF 1373 93 (2005)5
