1、Designation: F 1376 92 (Reapproved 2005)Standard Guide forMetallurgical Analysis for Gas Distribution SystemComponents1This standard is issued under the fixed designation F 1376; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the
2、year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas distribution systems. This guidepresents a procedur
3、e that may be applied for the evaluation of one or more components considered foruse in such systems.1. Scope1.1 This guide covers corrosion resistant metallic alloys ofthe general class stainless steel, containing chromium, nickel,manganese, and silicon as major alloying additions and possi-bly mol
4、ybdenum, that are qualified or specified for the mate-rials of components used in high-purity gas supply systems forthe semiconductor industry. This guide is primarily intendedfor testing to determine conformance to applicable compositionand metallurgical specifications as stated in supplier product
5、specifications or customer purchase specifications, or both.1.2 Elements analyzed and reported in this guide are asfollows:1.2.1 The alloying additions chromium, nickel, and molyb-denum (if specified in alloy, as in type 316L),1.2.2 The minor elements and residuals manganese, silicon,copper, cobalt,
6、 and stabilizers such as titanium and columbium(niobium), if present,1.2.3 Carbon, sulfur and phosphorus,1.2.4 Nitrogen and oxygen gases,1.2.5 Any additional minor element additions that may bemade as part of the melting and casting practice, such asaluminum and calcium,1.2.6 Available standard anal
7、ytical and reporting techniquesare described for these elements.1.3 Metallurgical characteristics to be analyzed and reportedare inclusion contents, grain structure, mechanical properties,and intergranular corrosion susceptibility.1.4 Limitations:1.4.1 This guide is limited to corrosion resistant me
8、talalloys of the general class stated in the Scope.1.4.2 The test methods cited in this guide are not intended topreclude the use of other generally accepted techniques ofdemonstrated equivalent or superior precision and bias.1.4.3 Inclusion of testing and analysis procedures for anygiven element or
9、 metallurgical characteristic in this guide is notto be construed as being a requirement for incorporation of thatelement or metallurgical characteristic into any specifications.1.5 The values stated in SI units are to be regarded as thestandard. The inch-pound units given in parentheses are forinfo
10、rmation only.1.6 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.
11、 Referenced Documents2.1 ASTM Standards:2A 262 Practices for Detecting Susceptibility to IntergranularAttack in Austenitic Stainless SteelsA 370 Test Methods and Definitions for Mechanical Testingof Steel ProductsA 479/A 479M Specification for Stainless and Heat-Resisting Steel Bars and Shapes for U
12、se in Boilers andOther Pressure VesselsA 484/A 484M Specification for General Requirements forStainless and Heat-Resisting Steel Bars, Billets, and Forg-ings2A 751 Test Methods, Practices, and Terminology forChemical Analysis of Steel ProductsE8Test Methods of Tension Testing of Metallic Materials1T
13、his guide is under the jurisdiction of ASTM Committee F01 on Electronicsand is the direct responsibility of Subcommittee F01.10 on Processing Environ-ments.Current edition published Jan. 1, 2005. Published January 2005. Originallyapproved in 1992. Last previous edition approved in 1999 as F 137692(1
14、999).2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.1Copyright ASTM International, 100 Barr Harbor Drive, PO
15、 Box C700, West Conshohocken, PA 19428-2959, United States.E45 Test Methods for Determining the Inclusion Content ofSteelE112 Test Methods for Determining theAverage Grain SizeE 353 Test Methods for Chemical Analysis of Stainless,Heat-Resisting, Maraging, and Other Similar Chromium-Nickel-Iron Alloy
16、sE 572 Test Method for X-Ray Emission SpectrometricAnalysis of Stainless SteelE 1019 Test Methods for Determination of Carbon, Sulfur,Nitrogen, Oxygen, and Hydrogen in Steel and in Iron,Nickel, and Cobalt AlloysE 1086 Test Method for Optical Emission Vacuum Spectro-metric Analysis of Stainless Steel
17、 by the Point-to-PlaneExcitation TechniqueE 1122 Practice for Obtaining JK Inclusion Ratings UsingAutomatic Image AnalysisE 1245 Practice for Determining the Inclusion or Second-Phase Constituent Content of Metals by Automatic ImageAnalysisE 1282 Guide for Specifying the Chemical Compositionsand Sel
18、ecting Sampling Practices and Quantitative Analy-sis Methods for Metals, Ores, and Related MaterialsE 1382 Test Methods for Determining the Average GrainSize Using Semiautomatic and Automatic Image Analysis3. Terminology3.1 Definitions:3.1.1 heat analysischemical analysis of the heat of stain-less s
19、teel determined by analyzing a sample obtained duringthe pouring of the heat for the elements designated in aspecification.3.1.2 inclusiondiscrete second phases (oxides, sulfides,carbides, inter-metallic compounds) that are distributed in themetal matrix.3.1.3 verification analysischemical analysis
20、of a semifin-ished or finished product for the purpose of determiningconformance to applicable specifications.4. Significance and Use4.1 This guide defines a procedure for testing componentsbeing considered for installation into a high-purity gas distri-bution system. Application of this guide is ex
21、pected to yieldcomparable data among components tested for purposes ofqualification for this installation.4.2 This guide establishes a procedure for determining theelemental composition and metallurgical characteristics ofmetal used to fabricate components for high purity gas distri-bution systems i
22、n the semiconductor industry. The compositionand metallurgy of stainless steel may be expected to affectproperties of importance to this application, including surfaceroughness, incidence of surface defects, passivation, corrosionresistance, and welding.5. Materials and Manufacture5.1 Materials and
23、instrumentation are specified in theASTM test methods utilized in this guide.6. Procedure6.1 The general requirements of Specification A 484/A 484M prevail for verification analysis, sampling, and testmethods.6.2 Specification A 479/A 479M prevails for the determina-tion of conformance of test resul
24、ts to ASTM standard require-ments.6.3 Chemical Analysis:6.3.1 The definitions, reference methods, practices, andreporting related to the chemical analysis of stainless steelalloys for this application shall be in accordance with TestMethods A 751.6.3.2 Use the following wet chemical test methods asc
25、ontrol test methods and as the basis for standardizing instru-mental analysis techniques, in accordance with Test MethodE 353:ElementConcentrationRange, %Test Method E353,SectionsChromium 0.10 to 35.00 212 to 220Nickel 10.1 to 48.00 172 to 179Molybdenum 1.5 to 7.0 242 to 249Manganese 0.01 to 5.00 8
26、to 17Silicon 0.05 to 4.00 46 to 52Copper 0.01 to 5.00 82 to 89Copper 0.01 to 5.00 109 to 118Cobalt 0.01 to 5.00 61 to 70Titanium 0.01 to 0.35 231 to 241Sulfur 0.005 to 0.50 37 to 45Phosphorus 0.002 to 0.35 18 to 29Phosphorus 0.02 to 0.35 164 to 171Aluminum 0.003 to 0.20 71 to 816.3.2.1 Apparatus, te
27、st procedures and data analysis aredescribed in the appropriate sections of the Test Method E 353.6.3.3 Use the method of optical emission vacuum spectro-metric analysis in accordance with Method E 1086 for heatanalysis or verification analysis of stainless steel samples thatcan be prepared with a f
28、lat surface of 13-mm (0.5-in.)minimum diameter. This test method provides analysis of thefollowing elements in the concentration ranges shown:ElementConcentrationRange,%Chromium 17.0 to 23.0Nickel 7.5 to 13.0Molybdenum 0.01 to 3.0Manganese 0.01 to 2.0Silicon 0.01 to 0.90Copper 0.01 to 0.30Carbon 0.0
29、05 to 0.25Phosphorus 0.003 to 0.15Sulfur 0.003 to 0.0656.3.3.1 Apparatus, test procedures, and data analysis aredescribed in the appropriate sections of Method E 1086.6.3.4 Use the method of X-ray emission spectrometricanalysis in accordance with Test Method E 572 for heatanalysis or verification an
30、alysis of stainless steel. This testmethod provides for the analysis of the following elements inthe concentration ranges shown:Element ConcentrationRange,%Chromium 11.0 to 19.0Nickel 0.20 to 13.0Molybdenum 0.05 to 3.00Manganese 0.40 to 2.00Copper 0.05 to 3.50Cobalt 0.05 to 0.50F 1376 92 (2005)2Elem
31、ent ConcentrationRange,%Columbium (Niobium) 0.30 to 0.706.3.4.1 Apparatus, test procedures and data analysis aredescribed in the appropriate sections of Test Method E 572.6.3.5 The following test methods may be used for heatanalysis and verification analysis for the determination ofcarbon, sulfur, n
32、itrogen, and oxygen in stainless steel, inaccordance with Test Method E 1019.ElementConcentrationRange, %Test Method E 1019,SectionsCarbon 0.005 to 4.5 9 to 19Sulfur 0.001 to 0.010 20 to 30Nitrogen 0.001 to 0.200 31 to 41Oxygen 0.001 to 0.005 42 to 536.3.5.1 Apparatus, test procedures, and data anal
33、ysis aredescribed in the appropriate sections of Test Method E 1019.6.3.6 Guide the development of specifications for composi-tional requirements and the identification of appropriate sam-pling and quantitative analysis methodologies referenced inproduct specifications in accordance with Guide E 128
34、2.6.3.7 An example of data for chemical analysis is providedin Table 1.6.4 Inclusion Contents:6.4.1 Determine the extent and types of inclusions that formas a result of deoxidation practice or limited solubility in solidsteel by Method A, Plate III, of Practice E45, for the fourcategories of inclusi
35、ons addressed. Alternatively, obtain inclu-sion ratings by automatic image analysis techniques in accor-dance with Practice E 1122. Do not rate inclusions such ascarbides, nitrides, carbonitrides, borides, and intermetallicphases using these methods.6.4.2 Perform characterization of the amount, numb
36、er, size,and spacing of any discrete second phase in stainless steel byautomatic image analysis in accordance with Practice E 1245.6.4.3 The definitions, apparatus, methods, practices, andreporting relating to the determination of inclusion contents instainless steel alloys for this application are
37、in accordance withthe ASTM practice used (see 6.4.1 and 6.4.2).6.4.4 An example of data for inclusion contents is providedin Table 2.6.5 Grain Size:6.5.1 Perform estimation of the average grain size in stain-less steel in accordance with Test Methods E112. The defini-tions, apparatus, methods, pract
38、ices, and reporting stated in thistest method apply.6.5.2 Alternatively, the average grain size may be deter-mined by automatic image analysis in accordance with TestMethod E 1382.6.5.3 An example of data for grain size is provided in Table3.6.6 Mechanical Properties:6.6.1 The definitions, practices
39、, and reporting of the me-chanical properties of stainless steel alloys for this applicationare in accordance with Test Methods and Definitions A 370.6.6.2 The tension test properties (tensile strength, yieldstrength, elongation and reduction of area) of metals for thisapplication are determined in
40、accordance with Test MethodsE8.Apparatus, test procedures, and data analysis are describedin the appropriate sections of this test method.6.6.3 An example of data for mechanical properties isprovided in Table 4.6.7 Susceptibility to Intergranular Corrosion:6.7.1 Susceptibility to intergranular attac
41、k due to precipita-tion of chromium carbides at the grain boundaries is detectedby the test methods of Practices A 262. Apparatus, test proce-dures and data analysis are described in the appropriatesections of Practices A 262.6.7.2 Screen samples for susceptibility to intergranular at-tacks by use o
42、f Practices A 262, Practice A. Etch structuresclassified as“ Step” or “Dual” shall be acceptable.6.7.3 Subject etch structures classified as “Ditch Structures”as described in Practices A 262, Practice A, must be furthertested in accordance with Practices A 262, Practice E, todetermine susceptibility
43、 to intergranular attack. Acceptancecriteria is in accordance with Practice E. Report results.7. Keywords7.1 alloy composition; components; composition; contami-nation; corrosion; gas distribution components; metallurgicalanalysis; metals; semiconductor processing; stainless steelTABLE 1 Chemical An
44、alysisAAnalyzed composition in weight, %Chromium 17.34Nickel 11.69Molybdenum 2.13Manganese 1.62Silicon 0.42Copper 0.10Cobalt 0.05Titanium .Columbium .Carbon 0.018Sulfur 0.009Phosphorus 0.023Nitrogen 0.040Oxygen 0.002Aluminum 0.005Calcium .AComposition meets the chemical requirements for S31603 (Type
45、 316L)stainless steel in accordance with Specification A 479.TABLE 2 Inclusion ContentsSampleInclusion TypeAType A Type B Type C Type DThin Heavy Thin Heavy Thin Heavy Thin Heavy110.50.50000.5021.50000.50003100.50000.50410.5000000ARating in accordance with Practice E45, Method A, Plate III, sampled
46、frombillets.TABLE 3 Grain StructureAverage grain size number in accordance with Test Methods E1125to6F 1376 92 (2005)3ASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly
47、 advised that determination of the validity of any such patent rights, and the riskof infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, ei
48、ther reapproved or withdrawn. Your comments are invited either for revision of this standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may atten
49、d. If you feel that your comments have not received a fair hearing you shouldmake your views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org).TABLE 4 Mechanical PropertiesYield strength (0.2
