1、Designation: F1594 95 (Reapproved 2011)Standard Specification forPure Aluminum (Unalloyed) Source Material for VacuumCoating Applications1This standard is issued under the fixed designation F1594; the number immediately following the designation indicates the year oforiginal adoption or, in the case
2、 of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This specification covers pure aluminum metal (unal-loyed) for use as raw material for makin
3、g evaporation sources,sputtering targets, and superconducting wires.1.2 This specification sets purity grade levels, physicalattributes, analytical methods, and packaging requirements.2. Referenced Documents2.1 ASTM Standards:2E29 Practice for Using Significant Digits in Test Data toDetermine Confor
4、mance with SpecificationsE112 Test Methods for Determining Average Grain Size3. Terminology3.1 Definitions:3.1.1 raw material lota quantity of material that is melted,consolidated, or purified, or both, in one equipment run as anominally uniform batch of metal.4. Classification4.1 Grades of aluminum
5、 are defined in Table 1.4.2 Purity and total metallic impurity levels are based uponelements listed in Table 2.5. Ordering Information5.1 Orders for these products shall include the following:5.1.1 Grade (see 4.1).5.1.2 Configuration (see 8.1).5.1.3 Whether or not certification is required (see 12.1
6、).5.1.4 Whether or not a sample representative of the finishedproduct is required to be provided by the supplier to thepurchaser.6. Impurities6.1 The suite of metallic elements to be assayed for isdefined in Table 2. Acceptable analysis methods are specifiedin Section 12. Elements not detected will
7、be counted andreported as present at the detection limit. Additional elementsmay be analyzed and reported, as agreed upon betweensupplier and purchaser, but these shall not be counted indefining the grade designation.6.2 Acceptable concentration limits for individual elementsand analytical technique
8、s shall be agreed upon between thesupplier and the purchaser.7. Physical Properties7.1 Grain size and measurement method for grain size shallbe agreed upon between the supplier and the purchaser. Whenthe grain morphology is equiaxied, refer to Practice E112.8. Dimensions8.1 Each product shall confor
9、m to an appropriate engineer-ing drawing.8.2 Nominal dimensions, tolerances, and other attributesshall be agreed upon between the supplier and the purchaser.9. Workmanship, Finish, and Appearance9.1 Workmanship, finish, and appearance shall be agreedupon between the supplier and the purchaser.9.2 Su
10、rface must be free of any contaminates such as moldrelease, dirt, or oils that could adversely affect the purity of thematerial when remelted, unless otherwise agreed upon betweensupplier and purchaser.1This specification is under the jurisdiction of ASTM Committee F01 onElectronics and is under the
11、 direct responsibility of Subcommittee F01.17 on SputterMetallization.Current edition approved June 1, 2011. Published June 2011. Originallyapproved in 1995. Last previous edition approved in 2003 as F159495 (2003).DOI: 10.1520/F1594-95R11.2For referenced ASTM standards, visit the ASTM website, www.
12、astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.TABLE 1 Aluminum GradesGrade Purity, %Maximum Total MetallicImpurity Level (by weight),ppm4N5 99.995 504N 99.99 1003N8 99
13、.98 2003N5 99.95 5001Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.10. Sampling10.1 Analyses for impurities shall be performed on a samplethat is representative of the finished material lot provided bythe supplier.11. Analytical Met
14、hods11.1 Analysis for impurities in Table 2 and 6.2 shall beperformed using optical emission spectroscopy, atomic absorp-tion, or any other technique that meets the purchaser-requireddetection limits.11.2 Impurity levels shall be reported using Practice E29.12. Certification12.1 When required by the
15、 purchaser, a certificate ofanalysis/compliance that represents the finished material lotshall be provided for each lot by the supplier.12.2 The certificate of analysis/compliance shall state themanufacturers or suppliers name, the suppliers lot number,impurity levels, method of analysis, and any ot
16、her informationagreed upon between the supplier and the purchaser.12.3 Impurity levels may be reported in the certificate ofanalysis/compliance using actual analytical results for thematerial lot, or by a certificate of analysis/compliance usingtypical analytical results based upon historical statis
17、tical datafor the same process. Certification and the manner of reportingimpurity levels shall be agreed upon between the supplier andthe purchaser.13. Packaging13.1 Each piece shall be enclosed in a shipping carton thatensures product integrity during shipment.14. Keywords14.1 aluminum source; evap
18、oration; thin films; vacuumcoatingASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of any such patent rights, and the risko
19、f infringement of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revision of this
20、standard or for additional standardsand should be addressed to ASTM International Headquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee, which you may attend. If you feel that your comments have not received a fair hearing you shouldmake yo
21、ur views known to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by co
22、ntacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org). Permission rights to photocopy the standard may also be secured from the ASTM website (www.astm.org/COPYRIGHT/).TABLE 2 Minimum Metallic Elements to be Assayedboron beryllium bismuth calcium cadmium cobalt chromium copper iron gallium vanadiumlithium magnesium manganese sodium nickel lead silicon tin strontium titanium zinczirconiumF1594 95 (2011)2
