1、BRITISH STANDARD BS EN ISO 13696:2002 Incorporating Corrigendum No. 1 Optics and optical instruments Test methods for radiation scattered by optical components The European Standard EN ISO 13696:2002 has the status of a British Standard ICS 37.020 BS EN ISO 13696:2002 This British Standard, having b
2、een prepared under the direction of the Consumer Products and Services Sector Policy and Strategy Committee, was published under the authority of the Standards Policy and Strategy Committee on 30 August 2002 BSI 15 October 2002 ISBN 0 580 40323 8 National foreword This British Standard is the offici
3、al English language version of EN ISO 13696:2002. It is identical with ISO 13696:2002. The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and optical instruments, which has the responsibility to: A list of organizations represented on this committee can be o
4、btained on request to its secretary. Cross-references The British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facili
5、ty of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations.
6、 aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. Summary of pages
7、 This document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 26, the Annex ZA page and a back cover. The BSI copyright date displayed in this document indicates when the document was last i
8、ssued. Amendments issued since publication Amd. No. Date Comments 14171 Corrigendum No. 1 15 October 2002 Correction to the EN ISO foreword page and incorporating the Annex ZA pageEUROPEANSTANDARD NORMEEUROPENNE EUROPISCHENORM ENISO13696 July2002 ICS37.020 Englishversion OpticsandopticalinstrumentsT
9、estmethodsforradiation scatteredbyopticalcomponents(ISO13696:2002) OptiqueetinstrumentsdoptiqueMthodesdessaidu rayonnementdiffusparlescomposantsoptiques(ISO 13696:2002) OptikundoptischeInstrumenteBestimmungvon StreustrahlunghervorgerufendurchoptischeKomponenten (ISO13696:2002) ThisEuropeanStandardwa
10、sapprovedbyCENon8June2002. CENmembersareboundtocomplywiththeCEN/CENELECInternalRegulationswhichstipulatetheconditionsforgivingthisEurope an Standardthestatusofanationalstandardwithoutanyalteration.Uptodatelistsandbibliographicalreferencesconcernings uchnational standardsmaybeobtainedonapplicationtot
11、heManagementCentreortoanyCENmember. ThisEuropeanStandardexistsinthreeofficialversions(English,French,German).Aversioninanyotherlanguagemadebytra nslation undertheresponsibilityofaCENmemberintoitsownlanguageandnotifiedtotheManagementCentrehasthesamestatusasthe official versions. CENmembersarethenatio
12、nalstandardsbodiesofAustria,Belgium,CzechRepublic,Denmark,Finland,France,Germany,Greece, Iceland,Ireland,Italy,Luxembourg,Malta,Netherlands,Norway,Portugal,Spain,Sweden,SwitzerlandandUnitedKingdom. EUROPEANCOMMITTEEFORSTANDARDIZATION COMITEUROPENDENORMALISATION EUROPISCHESKOMITEEFRNORMUNG Management
13、Centre:ruedeStassart,36B1050Brussels 2002CEN Allrightsofexploitationinanyformandbyanymeansreserved worldwideforCENnationalMembers. Ref.No.ENISO13696:2002ECORRECTED20020925 Foreword Thisdocument(ISO13696:2002)hasbeenpreparedbyTechnicalCommitteeISO/TC172 “Opticsandopticalinstruments“incollaborationwit
14、hTechnicalCommitteeCEN/TC123 “Lasersandlaserrelatedequipment“,thesecretariatofwhichisheldbyDIN. ThisEuropeanStandardshallbegiventhestatusofanationalstandard,eitherbypublication ofanidenticaltextorbyendorsement,atthelatestbyJanuary2003,andconflictingnational standardsshallbewithdrawnatthelatestbyJanu
15、ary2003. AccordingtotheCEN/CENELECInternalRegulations,thenationalstandardsorganizationsof thefollowingcountriesareboundtoimplementthisEuropeanStandard:Austria,Belgium, CzechRepublic,Denmark,Finland,France,Germany,Greece,Iceland,Ireland,Italy, Luxembourg,Malta,Netherlands,Norway,Portugal,Spain,Sweden
16、,Switzerlandandthe UnitedKingdom. Endorsementnotice ThetextofISO13696:2002hasbeenapprovedbyCENasENISO13696:2002withoutany modifications. NOTENormativereferencestoInternationalStandardsarelistedinAnnexZA(normative). ENISO13696:2002Reference number ISO 13696:2002(E) INTERNATIONAL STANDARD ISO 13696 Fi
17、rst edition 2002-07-15 Optics and optical instruments Test methods for radiation scattered by optical components Optique et instruments doptique Mthodes dessai du rayonnement diffus par les composants optiques ENISO13696:2002ENISO13696:2002iiISO :696312200()E ISO 2002 All irthgs resdevre iii Content
18、s Page Foreword.iv Introduction.v 1 Scope 1 2 Normative references1 3 Terms, definitions and symbols.1 3.1 Terms and definitions .1 3.2 Symbols and units.3 4 Test method .3 4.1 Principle3 4.2 Measurement arrangement and test equipment 3 4.3 Arrangement with high sensitivity.6 4.4 Preparation of spec
19、imens.6 5 Procedure .7 5.1 General7 5.2 Alignment procedure.7 5.3 Measurement procedure.8 6 Evaluation.8 6.1 Determination of the total scattering value.8 6.2 Error budget .11 7 Test report 11 Annex A (informative) Set-up with a Coblentz sphere 13 Annex B (informative) Example of test report15 Annex
20、 C (informative) Statistical evaluation example.19 Annex D (informative) Example for selection of spacing23 Bibliography26 ENISO13696:2002iiiISO :696312002(E) vi ISO 2002 All irthgs resdevre Foreword ISO (the International Organization for Standardization) is a worldwide federation of national stand
21、ards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International orga
22、nizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given
23、in the ISO/IEC Directives, Part 3. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility
24、that some of the elements of this International Standard may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. International Standard ISO 13696 was prepared by Technical Committee ISO/TC 172, Optics and optical instruments, Subcommittee
25、 SC 9, Electro-optical systems. Annexes A to D of this International Standard are for information only. ENISO13696:2002ivISO :696312200()E ISO 2002 All irthgs resdevre v Introduction In most applications, scattering in optical components reduces the efficiency and deteriorates the image-forming qual
26、ity of optical systems. Scattering is predominantly produced by imperfections of the coatings and the optical surfaces of the components. Common surface features which contribute to optical scattering are imperfections of substrates, thin films and interfaces, surface and interface roughness, or con
27、tamination and scratches. These imperfections deflect a fraction of the incident radiation from the specular path. The spatial distribution of this scattered radiation is dependent on the wavelength of the incident radiation and on the individual optical properties of the component. For most applica
28、tions in laser technology and optics, the amount of total loss produced by scattering is a useful quality criterion of an optical component. This International Standard describes a testing procedure for the corresponding quantity, the total scattering (TS) value, which is defined by the measured val
29、ues of backward scattering and forward scattering. The measurement principle described in this International Standard is based on an Ulbricht sphere as the integrating element for scattered radiation. An alternative apparatus with a Coblentz hemisphere, which is also frequently employed for collecti
30、ng scattered light, is described in annex A. Currently, advanced studies on the comparability and the limitations of both light collecting elements are being performed (e.g. round robin tests, EUREKA-project EUROLASER: CHOCLAB). ENISO13696:2002vINTENRATIONAL TSANDADR ISO :696312002(E) ISO 2002 All i
31、rthgs resdevre 1 Optics and optical instruments Test methods for radiation scattered by optical components 1 Scope This International Standard specifies procedures for the determination of the total scattering by coated and uncoated optical surfaces. Procedures are given for measuring the contributi
32、ons of the forward scattering and backward scattering to the total scattering of an optical component. This International Standard applies to coated and uncoated optical components with optical surfaces that have a radius of curvature of more than 10 m. The wavelength range includes the ultraviolet,
33、 the visible and the infrared spectral regions. 2 Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this International Standard. For dated references, subsequent amendments to, or revisions of, any of these publi
34、cations do not apply. However, parties to agreements based on this International Standard are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references, the latest edition of the normative document referred to ap
35、plies. Members of ISO and IEC maintain registers of currently valid International Standards. ISO 11145, Optics and optical instruments Lasers and laser-related equipment Vocabulary and symbols ISO 14644-1:1999, Cleanrooms and associated controlled environments Part 1: Classification of air cleanline
36、ss 3 Terms, definitions and symbols 3.1 Terms and definitions For the purposes of this International Standard, the terms and definitions given in ISO 11145 and the following apply. 3.1.1 scattered radiation fraction of the incident radiation that is deflected from the specular optical path 3.1.2 fro
37、nt surface optical surface that interacts first with the incident radiation 3.1.3 rear surface surface that interacts last with the transmitted radiation ENISO13696:20021ISO :696312002(E) 2 ISO 2002 All irthgs resdevre 3.1.4 backward scattering fraction of radiation scattered by the optical componen
38、t into the backward halfspace NOTE Backward halfspace is defined by the halfspace that contains the incident beam impinging upon the component and that is limited by a plane containing the front surface of the optical component. 3.1.5 forward scattering fraction of radiation scattered by the optical
39、 component into the forward halfspace NOTE Forward halfspace is defined by the halfspace that contains the beam transmitted by the component and that is limited by a plane containing the rear surface of the optical component. 3.1.6 total scattering ratio of the total power generated by all contribut
40、ions of scattered radiation into the forward or the backward halfspace or both to the power of the incident radiation NOTE The halfspace in which the scattering is measured should be clearly stated. 3.1.7 diffuse reflectance standard diffuse reflector with known total reflectance NOTE Commonly used
41、diffuse reflectance standards are fabricated from barium sulfate or polytetrafluoroethylene powders (see Table 2). The total reflectance of reflectors freshly prepared from these materials is typically greater than 0,98 in the spectral range given in Table 2, and it can be considered as a 100 % refl
42、ectance standard. For increasing the accuracy, diffuse reflectance standards with lower reflectance values can be realized by mixtures of polytetrafluoroethylene powder and powders of absorbing materials. (See reference 5 in the Bibliography.) 3.1.8 range of acceptance angle range from the minimum t
43、o the maximum angle with respect to the reflected or transmitted beam that can be collected by the integrating element 3.1.9 angle of polarization angle between the major axis of the instantaneous ellipse of the incident radiation and the plane of incidence NOTE 1 For non-normal incidence, the plane
44、 of incidence is defined by the plane which contains the direction of propagation of the incident radiation and the normal at the point of incidence. NOTE 2 The angle of polarization, , is identical to the azimuth, (according to ISO 12005), if the reference axis is located in the plane of incidence.
45、 ENISO13696:20022ISO :696312200()E ISO 2002 All irthgs resdevre 3 3.2 Symbols and units of measure Table 1 Symbols and units of measure Symbol Term Unit Wavelength nm Angle of incidence degrees Angle of polarization degrees d Beam diameter on the surface of the specimen mm P inc Power of the inciden
46、t radiation W P bac Total power, backward scattered radiation W P for Total power, forward scattered radiation W S bac Backward scattering S for Forward scattering V s,bac Detector signal for the specimen, backward scattering V V s,for Detector signal for the specimen, forward scattering V V c Detec
47、tor signal, diffuse reflectance standard V V u Detector signal, test ports open V s Transmittance of specimen at wavelength, s Reflectance of specimen at wavelength, r i Sample position mm N Number of test sites per surface 4 Test method 4.1 Principle The fundamental principle (see Figure 1) of the
48、measurement apparatus is based on the collection and integration of the scattered radiation. For this purpose, a hollow sphere with a diffusely reflecting coating on the inner surface (Ulbricht sphere) is employed. Beam ports are necessary for the transmission of the test beam and the specularly reflected beam through the wall of the sphere. The sample is att
