1、 g49g50g3g38g50g51g60g44g49g42g3g58g44g55g43g50g56g55g3g37g54g44g3g51g40g53g48g44g54g54g44g50g49g3g40g59g38g40g51g55g3g36g54g3g51g40g53g48g44g55g55g40g39g3g37g60g3g38g50g51g60g53g44g42g43g55g3g47g36g58equipment Measurement of phase retardation of optical components for polarized laser radiationThe E
2、uropean Standard EN ISO 24013:2006 has the status of a British StandardICS 31.260Optics and photonics Lasers and laser-related BRITISH STANDARDBS EN ISO 24013:2006BS EN ISO 24013:2006This British Standard was published under the authority of the Standards Policy and Strategy Committee on 29 December
3、 2006 BSI 2006ISBN 0 580 49898 0Amendments issued since publicationAmd. No. Date Commentscontract. Users are responsible for its correct application.Compliance with a British Standard cannot confer immunity from legal obligations. National forewordThis British Standard was published by BSI. It is th
4、e UK implementation of EN ISO 24013:2006.The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and photonics.A list of organizations represented on CPW/172 can be obtained on request to its secretary.This publication does not purport to include all the necessar
5、y provisions of a EUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN ISO 24013November 2006ICS 31.260English VersionOptics and photonics - Lasers and laser-related equipment -Measurement of phase retardation of optical components forpolarized laser radiation (ISO 24013:2006)Optique et photonique - La
6、sers et quipements associsaux lasers - Mesurage du retard de phase des composantsoptiques pour le rayonnement laser polaris (ISO24013:2006)Optik und Photonik - Laser und Laseranlagen - Messungder Phasenverschiebung optischer Komponenten frpolarisierte Laserstrahlung (ISO 24013:2006)This European Sta
7、ndard was approved by CEN on 14 November 2006.CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this EuropeanStandard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning
8、 such nationalstandards may be obtained on application to the Central Secretariat or to any CEN member.This European Standard exists in three official versions (English, French, German). A version in any other language made by translationunder the responsibility of a CEN member into its own language
9、 and notified to the Central Secretariat has the same status as the officialversions.CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, N
10、etherlands, Norway, Poland, Portugal, Romania,Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGManagement Centre: rue de Stassart, 36 B-1050 Brussels 2006 CEN All rights of exploitation
11、 in any form and by any means reservedworldwide for CEN national Members.Ref. No. EN ISO 24013:2006: EForeword This document (prEN ISO 24013:2006) has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and pho
12、tonics“, the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by May 2007, and conflicting national standards shall be withdrawn at the latest by May 2007. Accordi
13、ng to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania
14、, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 24013:2006 has been approved by CEN as EN ISO 24013:2006 without any modifications. EN ISO 24013:2006Reference numberISO 24013:20
15、06(E)INTERNATIONAL STANDARD ISO24013First edition2006-11-15Optics and photonics Lasers and laser-related equipment Measurement of phase retardation of optical components for polarized laser radiation Optique et photonique Lasers et quipements associs aux lasers Mesurage du retard de phase des compos
16、ants optiques pour le rayonnement laser polaris EN ISO 24013:2006ii iiiContents Page Foreword iv Introduction v 1 Scope 1 2 Normative references 1 3 Terms and definitions .1 4 Symbols and abbreviated terms 1 5 Measurement principle2 6 Preparation of test sample and measuring arrangement3 6.1 General
17、3 6.2 Laser beam preparation 3 6.3 Sample adjustment and system calibration3 6.4 Detection system .4 7 Test procedure.5 7.1 Test procedure for zero phase retardation .5 7.2 Test procedure for /2 phase retardation5 8 Evaluation.6 8.1 General6 8.2 Evaluation for zero phase retardation .6 8.3 Evaluatio
18、n for /2 phase retardation6 9 Test report 6 Annex A (informative) Theoretical background .8 Bibliography 15 EN ISO 24013:2006iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing Internat
19、ional Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with I
20、SO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical c
21、ommittees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to th
22、e possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 24013 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. E
23、N ISO 24013:2006vIntroduction Normally it is desirable that the state of polarization be not influenced by the optical components used. For the generation or maintenance of specific states of polarization the influence of optical components on the beam polarization is crucial. For generating circula
24、rly polarized radiation from linearly polarized radiation /2 phase retarders are used. This International Standard describes methods to determine the relative phase retardation of optical components with respect to the x- and y-axes of the polarization and s- and p-polarization, respectively. This I
25、nternational Standard is necessary for optics manufacturers, suppliers and customers of such optics for the determination of the influence of phase retardation of optical components. EN ISO 24013:2006blank1Optics and photonics Lasers and laser-related equipment Measurement of phase retardation of op
26、tical components for polarized laser radiation 1 Scope This International Standard specifies test methods for the determination of the optical phase retardation of optical components by polarized laser beams. 2 Normative references The following referenced documents are indispensable for the applica
27、tion of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 11145, Optics and photonics Lasers and laser-related equipment Vocabulary and symbols ISO 12005, Lasers and laser
28、-related equipment Test methods for laser beam parameters Polarization ISO 14644-1:1999, Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 11145 and ISO 12005 a
29、pply. 4 Symbols and abbreviated terms Symbols used and units of measure Symbol Unit Term 1 degree of linear polarization rad angle of analyser a1V/m amplitude of electric field in x-direction a2V/m amplitude of electric field in y-direction a, b V/m principal axes of the vibrational ellipse rad phas
30、e difference rad phase retardation E V/m electric field vector x1 absorptance in x-direction y1 absorptance in y-direction rad angle of the principle axis of the vibrational ellipse EN ISO 24013:20062 5 Measurement principle The optical component under test is irradiated by a laser beam with a defin
31、ed state of polarization. After passing the component the state of polarization of the beam is determined by using an analyser. The phase retardation is then evaluated from the change of the state of polarization. There are two cases to distinguish: a) the expected phase retardation is near zero: in
32、 this case a circularly polarized beam shall be used for the test; b) the expected phase retardation is near /2: in this case a linearly polarized beam shall be used for the test. Figure 1 shows the measuring set up. a) Optical path for reflective samples b) Optical path for transmissive samples Key
33、 1 laser 2 polarizer (linear or circular) 3 sample under test 4 analyser 5 detector 6 alignment laser 7 positional sensitive detector Figure 1 Schematic drawing of the measuring set up EN ISO 24013:20063A laser and a polarizer generating linearly or circularly polarized radiation shall be used in co
34、mbination with an analyser and a power detector. For measuring reflective samples an alignment laser in combination with a positional sensitive detector ensures a reproducible angle alignment of the sample under test. 6 Preparation of test sample and measuring arrangement 6.1 General Storage, cleani
35、ng and the preparation of the test samples are carried out in accordance with the manufacturers instructions for normal use. The environment of the testing place consists of dust-free filtered air with less than 60 % relative humidity. The residual dust is reduced in accordance with, for example, th
36、e clean-room ISO class 7 as defined in ISO 14644-1:1999. A linearly polarized laser shall be used as the radiation source. To keep errors as low as possible, the beam power stability should be as high as possible. Wavelength, angle of incidence and state of polarization of the laser radiation used f
37、or the measurement shall correspond to the values specified by the manufacturer for the use of the test sample. If ranges are accepted for these three quantities, any combination of wavelength, angle of incidence and state of polarization may be chosen from these ranges. 6.2 Laser beam preparation T
38、he accuracy of the measurement is strongly influenced by a clear definition of the state of polarization of the laser beam. Therefore it is necessary to prepare the polarization state of the probe beam (linearly or circularly) carefully. If the expected phase retardation is near /2, a linearly polar
39、ized beam shall be used. The quantity (1 ), where is the degree of linear polarization, shall be less than 103. This shall be verified by using the analyser without the sample in the beam path. NOTE 1 Such a state of polarization can be achieved by using a linearly polarized laser beam in combinatio
40、n with additional polarizing elements. If the expected phase retardation is near zero, a circularly polarized beam shall be used. The degree of linear polarization shall be less than 103. This shall be verified by using the analyser without the sample in the beam path. NOTE 2 Such a state of polariz
41、ation can be achieved by using a linearly polarized laser beam in combination with additional linearly polarizing elements and a /2 phase retarding element. All optical elements shall not increase the quantity (1 ) in the case of a linearly polarized beam and in the case of a circularly polarized be
42、am, by more than 103. For this reason the use of folding mirrors in the test setup is discouraged and all other optical elements shall be used under normal incidence. 6.3 Sample adjustment and system calibration 6.3.1 Reflective samples The sample shall be mounted very accurately at the angle of inc
43、idence according to the manufacturers specification. The deviation from the intended angle of use shall be less than 2 mrad. For this purpose the component shall be mounted on a precision rotary stage. Back reflecting the laser beam into the laser cavity defines the normal incidence. EN ISO 24013:20
44、064 Additionally, in the case of a linearly polarized probe beam, the angle between the plane of vibration of the incoming laser beam and the plane of incidence shall be (/4 2) mrad. 6.3.2 Possible alignment procedure First, the laser beam shall be adjusted so that the beam propagation is parallel t
45、o the surface of the optical table. Second, the beam reflected from the sample shall be adjusted so that the propagation of the reflected beam is also parallel to the surface of the optical table for all angles of incidence. Third, in case of a linearly polarized incoming beam, the angle between the
46、 plane of vibration and the plane of the optical table shall be adjusted to be /4. This can be achieved by adjusting the linear polarizer initially so that the plane of vibration is parallel to the optical table. This can be checked by using a Brewster window, the turning axis of which is perpendicu
47、lar to the optical table. If under these conditions the reflected minimum power is propagating parallel to the optical table, then turning of the linear polarizer by /4 finally provides the desired angle of the linearly polarized beam. When the alignment has been calibrated according to the procedur
48、e described above, the correct alignment of the additional samples can be simplified by using an additional laser with high pointing stability and a positional sensitive detector (see Figure 1). In this case the additional laser beam hits the component under near-normal incidence and the adjustment
49、of the sample under test is performed so that the reflected laser beam hits the positional sensitive detector at the same position. 6.3.3 Transmissive samples The sample shall be mounted under the angle of incidence according to the manufacturers specification. The deviation from the intended angle of use shall be less than 2 mrad. 6.4 Detection system 6.4.1 General The detection system consists of a polarization analyser and a power detector. 6.4.2 Polarization analyse
