1、BSI Standards PublicationBS EN ISO 25178-604:2013Geometrical productspecifications (GPS) Surfacetexture: ArealPart 604: Nominal characteristics of non-contact (coherence scanning interferometry)instrumentsBS EN ISO 25178-604:2013 BRITISH STANDARDNational forewordThis British Standard is the UK imple
2、mentation of EN ISO25178-604:2013.The UK participation in its preparation was entrusted to TechnicalCommittee TDW/4, Technical Product Realization.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the nec
3、essaryprovisions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2013. Published by BSI StandardsLimited 2013ISBN 978 0 580 66355 0ICS 17.040.20Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was
4、 published under the authority of theStandards Policy and Strategy Committee on 31 August 2013.Amendments issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-604 August 2013 ICS 17.040.20 English Version Geometrical product specifications (GPS) -
5、Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 604: Caractristiques nominales des instruments sans contact ( interfromtrie p
6、ar balayage cohrence) (ISO 25178-604:2013) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 604: Merkmale von berhrungslos messenden Gerten (der Kohrenz-Scannungs-Interferometrie) (ISO 25178-604:2013) This European Standard was approved by CEN on 15 May 2013. CEN
7、 members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on appl
8、ication to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Ma
9、nagement Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Lat
10、via, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Mar
11、nix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-604:2013: EBS EN ISO 25178-604:2013EN ISO 25178-604:2013 (E) 3 Foreword This document (EN ISO 25178-604:2013) has been prepared by Technical Com
12、mittee ISO/TC 213 “Dimensional and geometrical product specifications and verification” in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the statu
13、s of a national standard, either by publication of an identical text or by endorsement, at the latest by February 2014, and conflicting national standards shall be withdrawn at the latest by February 2014. Attention is drawn to the possibility that some of the elements of this document may be the su
14、bject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium,
15、Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland
16、, Turkey and the United Kingdom. Endorsement notice The text of ISO 25178-604:2013 has been approved by CEN as EN ISO 25178-604:2013 without any modification. BS EN ISO 25178-604:2013ISO 25178-604:2013(E) ISO 2013 All rights reserved iiiContents PageForeword ivIntroduction v1 Scope . 12 Terms and de
17、finitions . 12.1 Terms and definitions related to all areal surface texture measurement methods . 12.2 Terms and definitions related to x- and y-scanning systems 62.3 Terms and definitions related to optical systems . 82.4 Terms and definitions related to optical properties of the workpiece 102.5 Te
18、rms and definitions specific to coherence scanning interferometric microscopy .103 Descriptions of the influence quantities 143.1 General 143.2 Influence quantities . 14Annex A (informative) Overview and components of a coherence scanning interferometry (CSI) microscope 17Annex B (informative) Coher
19、ence scanning interferometry (CSI) theory of operation .22Annex C (informative) Spatial resolution .31Annex D (informative) Example procedure for estimating surface topography repeatability .36Annex E (informative) Relation to the GPS matrix model37Bibliography .39BS EN ISO 25178-604:2013ISO 25178-6
20、04:2013(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for
21、which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on al
22、l matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. Th
23、is document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directivesAttention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all s
24、uch patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received. www.iso.org/patentsAny trade name used in this document is information given for the convenience of users and does not
25、 constitute an endorsement.The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product specifications and verification. The document was prepared in collaboration with Technical Committee CEN/TC 290, Dimensional and geometrical product specifications and verificati
26、on.ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) Surface texture: Areal : Part 1: Indication of surface texture Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods fo
27、r measuring surface texture Part 70: Physical measurement standards Part 71: Software measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of n
28、on-contact (phase shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments Part 606: Nominal characteristics of non-contact (f
29、ocus variation) instruments Part 701: Calibration and measurement standards for contact (stylus) instrumentsThe following part is under preparation: Part 72: XML file format x3piv ISO 2013 All rights reservedBS EN ISO 25178-604:2013ISO 25178-604:2013(E)IntroductionThis part of ISO 25178 is a geometr
30、ical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences chain link 5 of the chains of standards on roughness profile, waviness profile, primary profile and areal surface texture. The ISO/GPS Masterplan given in ISO/TR 14638 gives an
31、 overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, unless otherwise indicated.For more detailed
32、information on the relation of this part of ISO 25178 to other standards and to the GPS matrix model, see Annex E.This part of ISO 25178 describes the metrological characteristics of coherence scanning interferometric microscopes, designed for the measurement of surface topography maps. For more det
33、ailed information on the coherence scanning technique, see Annex A and Annex B.NOTE Portions of this document, particularly the informative texts, may describe patented systems and methods. This information is provided only to assist users in understanding the operating principles of coherence scann
34、ing interferometry. This document is not intended to establish priority for any intellectual property, nor does it imply a license to any proprietary technologies that may be described herein. ISO 2013 All rights reserved vBS EN ISO 25178-604:2013BS EN ISO 25178-604:2013Geometrical product specifica
35、tions (GPS) Surface texture: Areal Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments1 ScopeThis part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.2 Terms and
36、definitionsFor the purposes of this document, the following terms and definitions apply.2.1 Terms and definitions related to all areal surface texture measurement methods2.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is
37、 measured2.1.2coordinate system of the instrumentright hand orthonormal system of axes (x, y, z) defined as: (x, y) is the plane established by the areal reference of the instrument (note that there are optical instruments that do not possess a physical areal guide) z-axis is mounted parallel to the
38、 optical axis and is perpendicular to the (x, y) plane for an optical instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane for a stylus instrument (see Figure 1)INTERNATIONAL STANDARD ISO 25178-604:2013(E) ISO 2013 All rights reserved 1BS EN ISO 25
39、178-604:2013ISO 25178-604:2013(E)Key1 coordinate system of the instrument2 measurement loopFigure 1 Coordinate system and measurement loop of the instrumentNote 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for instruments that scan in
40、the horizontal plane.)Note 2 to entry: See also “specification coordinate system” ISO 25178-2:2012, 3.1.2 and “measurement coordinate system” ISO 25178-6:2010, 3.1.1.2.1.3measurement loopclosed chain which comprises all components connecting the workpiece and the probe, e.g. the means of positioning
41、, the work holding fixture, the measuring stand, the drive unit, the probing systemNote 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the measurement uncertainty.SEE: Figure 1.2.1.4real surface of a workpieceset of features which physically e
42、xist and separate the entire workpiece from the surrounding mediumNote 1 to entry: The real surface is a mathematical representation of the surface that is independent of the measurement process.Note 2 to entry: See also “mechanical surface” ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1 and “el
43、ectromagnetic surface” ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2.Note 3 to entry: The electro-magnetic surface considered for one type of optical instrument may be different from the electro-magnetic surface for other types of optical instruments.2 ISO 2013 All rights reservedBS EN ISO 2517
44、8-604:2013ISO 25178-604:2013(E)2.1.5surface probedevice that converts the surface height into a signal during measurementNote 1 to entry: In earlier standards, this was termed “transducer”.2.1.6measuring volumerange of the instrument stated in terms of the limits on all three coordinates measured by
45、 the instrumentNote 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by the measuring range of the x- and y- drive units, and the measuring range of the z-probing system.SOURCE: ISO 25178-601:2010, 3.4.12.1.7response curveFx, Fy, Fzgraphical representation
46、 of the function that describes the relation between the actual quantity and the measured quantityNote 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity xM(respectively yMor zM).Note 2 to entry: The response curve can be used for adjustments and error corre
47、ctions.SOURCE: ISO 25178-601:2010, 3.4.22.1.8amplification coefficientx, y, zslope of the linear regression curve obtained from the response curve (2.1.7)Note 1 to entry: There will be amplification coefficients applicable to the x, y and z quantities.Note 2 to entry: The ideal response is a straigh
48、t line with a slope equal to 1, which means that the values of the measurand are equal to the values of the input quantities.Note 3 to entry: See also “sensitivity of a measuring system” (ISO/IEC Guide 99:2007,14.12)SOURCE: ISO 25178-601:2010, 3.4.3, modified Note 3 to entry has been added.2.1.9inst
49、rument noiseNiinternal noise added to the output signal caused by the instrument if ideally placed in a noise-free environmentNote 1 to entry: Internal noise can be due to electronic noise, as e.g. amplifiers, or optical noise, as e.g. stray light.Note 2 to entry: This noise typically has high frequencies and it limits the ability of the instrument to detect small spatial wavelengths of the surface texture.Note 3 to entry: The S-filter according ISO 25178-3 may reduce this noise.Note 4 to entry: For some i
