1、October 2011 Translation by DIN-Sprachendienst.English price group 12No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).IC
2、S 31.260!$t_“1819460www.din.deDDIN EN ISO 21254-3Lasers and laser-related equipment Test methods for laser-induced damage threshold Part 3: Assurance of laser power (energy) handling capabilities(ISO 21254-3:2011)English translation of DIN EN ISO 21254-3:2011-10Laser und Laseranlagen Prfverfahren fr
3、 die laserinduzierte Zerstrschwelle Teil 3: Zertifizierung der Belastbarkeit hinsichtlich Laserleistung (-energie)(ISO 21254-3:2011)Englische bersetzung von DIN EN ISO 21254-3:2011-10Lasers et quipements associs aux lasers Mthodes dessai du seuil dendommagement provoqu par laser Partie 3: Possibilit
4、s de traitement par puissance (nergie) laser (ISO 21254-3:2011)Traduction anglaise de DIN EN ISO 21254-3:2011-10SupersedesDIN EN ISO 11254-3:2006-12www.beuth.deIn case of doubt, the German-language original shall be considered authoritative.Document comprises pages0 .11922DIN EN ISO 21254-3:2011-10
5、A comma is used as the decimal marker. National foreword This standard has been prepared by Technical Committee ISO/TC 172 “Optics and photonics”, Subcommittee SC 9 “Electro-optical systems” in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics” (Secretariat: DIN, Germany). The
6、responsible German body involved in its preparation was the Normenausschuss Feinmechanik und Optik (Optics and Precision Mechanics Standards Committee), Working Committee NA 027-01-18 AA Laser. EN ISO 21254 consists of the following parts, under the general title Lasers and laser-related equipment T
7、est methods for laser-induced damage threshold: Part 1: Definitions and general principles Part 2: Threshold determination Part 3: Assurance of laser power (energy) handling capabilities Part 4: Inspection, detection and measurement Technical Report The DIN Standard corresponding to the Internationa
8、l Standard referred to in this document is as follows: ISO 11145 DIN EN ISO 11145 Amendments This standard differs from DIN EN ISO 11254-3:2006-12 as follows: a) the test method has been revised; b) definitions and general principles have been transferred to ISO 21254-1; c) the content of the standa
9、rd has been revised. Previous editions DIN EN ISO 11254-3: 2006-12 National Annex NA (informative) Bibliography DIN EN ISO 11145, Optics and photonics Lasers and laser-related equipment Vocabulary and symbols 2 EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 21254-3 July 2011 ICS 31.260 Sup
10、ersedes EN ISO 11254-3:2006English Version Lasers and laser-related equipment - Test methods for laser-induced damage threshold - Part 3: Assurance of laser power (energy) handling capabilities (ISO 21254-3:2011) Lasers et quipements associs aux lasers - Mthodes dessai du seuil dendommagement provoq
11、u par laser - Partie 3: Possibilits de traitement par puissance (nergie) laser (ISO 21254-3:2011) Laser und Laseranlagen - Prfverfahren fr die laserinduzierte Zerstrschwelle - Teil 3: Zertifizierung der Belastbarkeit hinsichtlich Laserleistung (-energie) This European Standard was approved by CEN on
12、 14 July 2011. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may b
13、e obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to
14、the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxem
15、bourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Management Centre: Avenue Marnix 17, B-1000 Brussels 2011 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No.
16、 EN ISO 21254-3:2011: EEUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG (ISO 21254-3:2011) Contents Page Foreword .3 Introduction.4 1 Scope5 2 Normative references5 3 Terms and definitions .5 4 Symbols and units of measurement6 5 Test methods .7 5.
17、1 Principle7 5.2 Test methods .7 6 Accuracy.10 7 Test report10 Annex A (informative) Example of a test report.11 Annex B (informative) Notes on use .14 Annex C (informative) Details of the derivation of the operating-characteristic curve .18 Bibliography 220DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:
18、2011 (E) Foreword This document (EN ISO 21254-3:2011) has been prepared by Technical Committee ISO/TC 172 “Optics and photonics“ in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics” the secretariat of which is held by DIN. This European Standard shall be given the status of a
19、national standard, either by publication of an identical text or by endorsement, at the latest by January 2012, and conflicting national standards shall be withdrawn at the latest by January 2012. Attention is drawn to the possibility that some of the elements of this document may be the subject of
20、patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. This document supersedes EN ISO 11254-3:2006. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this
21、European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland a
22、nd the United Kingdom. Endorsement notice The text of ISO 21254-3:2011 has been approved by CEN as a EN ISO 21254-3:2011 without any modification. 3DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:2011 (E) Introduction This part of ISO 21254 describes two methods of verifying the power density (energy dens
23、ity) handling capability of optical components, both coated and uncoated. The methods will give consistent measurement results and can therefore be used for acceptance testing or to produce results which can be compared between test laboratories. The methods are applicable to all combinations of las
24、er wavelengths and pulse lengths. Comparison of laser damage threshold data can, however, be misleading unless the measurements have been carried out at identical wavelengths and pulse lengths. 4DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:2011 (E) WARNING The extrapolation of damage data can lead to a
25、n overestimation of the laser-induced damage threshold. In the case of toxic materials (e.g. ZnSe, GaAs, CdTe, ThF4, chalcogenides, Be, Cr, Ni), this can lead to serious health hazards. See ISO 21254-1:2011, Annex A, for further comments. 1 Scope This part of ISO 21254 specifies two methods of verif
26、ying the power density (energy density) handling capability of optical surfaces. The first method provides a rigorous test that fulfils the requirements at a specified confidence level in the knowledge of potential defects. The second method provides a simple, and hence inexpensive, test for an empi
27、rically derived test level. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies
28、. ISO 11145, Optics and photonics Lasers and laser-related equipment Vocabulary and symbols ISO 21254-1:2011, Lasers and laser-related equipment Test methods for laser-induced damage threshold Part 1: Definitions and general principles 3 Terms and definitions For the purposes of this document, the t
29、erms and definitions given in ISO 11145 and ISO 21254-1 and the following apply. 3.1 assurance level energy density/power density/linear power density of the laser radiation incident on the optical surface of the component being tested 3.2 assurance area Aarea over which the value of H(x,y,z) is equ
30、al to or greater than the assurance level 5DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:2011 (E) 3.3 confidence level probability of successful completion of the assurance test 3.4 flat-top beam beam which has a broad area of nearly constant peak intensity (or fluence) 3.5 fraction of test area to be e
31、xposed ftestproportion of the total area of the optical component which has to be interrogated to achieve a certain confidence level 3.6 area to be tested Atestarea of the optical component which has to be interrogated to achieve a certain confidence level 3.7 horizontal overlap xproportion of overl
32、apping beam area of two consecutive pulses in direction x 3.8 vertical overlap yproportion of overlapping beam area of two consecutive pulses in direction y 3.9 distance between test sites dtsseparation of test sites 4 Symbols and units of measurement The symbols and units of measurement are compile
33、d in Table 1. In addition, the terms and definitions given in ISO 21254-1 apply. Table 1 Symbols and units of measurement Symbol Unit Term confidence level ftestfraction of test area to be exposed Ndnumber of damage-initiation sites J/cm2, W/cm2, W/cm assurance level Acm2assurance area Atestcm2area
34、to be tested xhorizontal overlap yvertical overlap dtsdistance between test sites 6DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:2011 (E) 5 Test methods 5.1 Principle This part of ISO 21254 provides methods that will give a high level of confidence in the power density (energy density) handling capabili
35、ty of the component tested. The methods can be used in a wide variety of applications, including: non-destructive testing, witness sampling, lot sampling and sub-aperture inspection. The level of confidence that the component does not contain a defect with a lower damage threshold than the acceptabl
36、e irradiation strength increases with the percentage fraction of the area tested. These confidence levels are discussed in Annexes B and C. Discussions shall be held between the test house and the user/component manufacturer to define the confidence level required and the number of shots per site (1
37、-on-1 or S-on-1 testing) and the pulse-repetition frequency at which the tests are to be carried out. This will define parameters such as the assurance area, A, the distance between test sites, dts, and the total number of sites, Nts, to be irradiated. The apparatus for, general principles of and sa
38、mpling for laser-induced damage testing are described in ISO 21254-1. A laser system with a suitable beam preparation system delivering laser radiation with a reproducible flat-top spatial profile is required for the assurance of laser power (energy) handling capabilities. In this test, sampled test
39、 sites on the specimen surface are irradiated at an agreed or specified irradiation strength, irradiating in sequence a fraction of the specimen area and verifying that no damage is observed. Enough test sites on the optical surface under test shall be irradiated so that a given confidence level can
40、 be established. Since the observation of any damage during a test constitutes a failure, this test can be non-destructive for parts for which this is considered acceptable. The microscopic examination of the test site before and after irradiation is used to detect any damage. The fluence-handling c
41、apability of an optical surface under irradiation by short pulsed lasers is usually expressed in units of energy density, i.e. joules per square centimetre. The power-handling capability of an optical surface under irradiation by cw (continuous-wave) lasers or quasi-cw lasers is usually expressed in
42、 units of linear power density, i.e. watts per centimetre. The proper physical parameter and units for scaling results obtained with quasi-cw and cw-lasers is the linear power density, expressed in watts per centimetre. 5.2 Test methods 5.2.1 General In tests that sample the ability of a specimen to
43、 withstand laser irradiation, it is possible to define two types of test. The first, a type 1 test, allows the determination of a confidence level that permits no more than a certain number of defects to exist within the area tested. The type 1 test is described in 5.2.2. The second, a type 2 test,
44、is designed usually empirically, to be used on a specific specimen for a specific use. Such tests are employed to provide cost-effective screening at a high rate in an industrial environment. It should be noted that such empirically derived tests were the first widely used laser damage tests in prod
45、uction systems. The criteria that need to be specified to define a type 2 test are given in 5.2.3. 7DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:2011 (E) 5.2.2 Type 1 test Depending on the application, select the assurance level, , the confidence level, , and the number of defects, Nd, per specimen (us
46、ually the responsibility of the user). Use Figure 1 to determine the fraction, ftest, of the area to be tested, Atest, that is to be exposed. Determine (by measurement) Afrom the power-density or energy-density profile of the irradiating beam in the target plane. Determine the number of interrogatio
47、ns, Nts, that will need be made to expose the fraction ftestof the surface under test: test testtsAfNA= (1) Determine the distance between test sites, dts, for hexagonal close-packed arrays and for square arrays: testtsts23AdN= for hexagonal close packed arrays (2) testtstsAdN= for square arrays (3)
48、 Calculate the overlap, x: tsx2(, ) ( , )dd(, ) ddH xy Hx d y xyHxy xy=g179g179g179g179(4) It might not be possible in all cases to perform an unconditioned assurance test, i.e. xor y99,5 % at 193 nm, 0 rad angle of incidence, standard coating for normal use in excimer lasers Part identification, da
49、te of production: BLO, 05/10/2001 Serial number of part: BLO 3328-5570-193 Test specification Laser parameters Wavelength: 193 nm Angle of incidence: 0 rad Polarization state: unpolarized Pulse-repetition frequency: 200 HzEffective beam diameter in target plane: 6,6 mm Pulse duration: 13,0 ns Effective pulse duration: 12,5 ns 11DIN EN ISO 21254-3:2011-10 EN ISO 21254-3:2011 (E) Key X time, in nanoseconds Y power, in arbitrary units Figure A.1 Temporal profile ZYXKey X length scale, in millimetr
