1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS EN 60749-7:2011Semiconductor devices Mechanical and climatic testmethods -Part 7: Internal moisture contentmeasurement and the analysis of otherresidual gasesBS EN 60749-7:201
2、1 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN 60749-7:2011.It supersedes BS EN 60749-7:2002 which is withdrawn.The UK participation in its preparation was entrusted to TechnicalCommittee EPL/47, Semiconductors.A list of organizations represented on this comm
3、ittee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. BSI 2011ISBN 978 0 580 68752 5ICS 31.080.01Compliance with a British Standard cannot confer immunity fromlegal ob
4、ligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 30 September 2011.Amendments issued since publicationDate Text affectedBS EN 60749-7:2011EUROPEAN STANDARD EN 60749-7 NORME EUROPENNE EUROPISCHE NORM September 2011 CENELEC European Com
5、mittee for Electrotechnical Standardization Comit Europen de Normalisation Electrotechnique Europisches Komitee fr Elektrotechnische Normung Management Centre: Avenue Marnix 17, B - 1000 Brussels 2011 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC me
6、mbers. Ref. No. EN 60749-7:2011 E ICS 31.080.01 Supersedes EN 60749-7:2002English version Semiconductor devices - Mechanical and climatic test methods - Part 7: Internal moisture content measurement and the analysis of other residual gases (IEC 60749-7:2011) Dispositifs semiconducteurs - Mthodes des
7、sais mcaniques et climatiques - Partie 7: Mesure de la teneur en humidit interne et analyse des autres gaz rsiduels (CEI 60749-7:2011) Halbleiterbauelemente - Mechanische und klimatische Prfverfahren - Teil 7: Messung des inneren Feuchtegehaltes und Analyse von anderen Restgasen (IEC 60749-7:2011) T
8、his European Standard was approved by CENELEC on 2011-07-22. CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical r
9、eferences concerning such national standards may be obtained on application to the Central Secretariat or to any CENELEC member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CENEL
10、EC member into its own language and notified to the Central Secretariat has the same status as the official versions. CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, H
11、ungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. BS EN 60749-7:2011EN 60749-7:2011 - 2 - Foreword The text of document 47/2087/FDIS, future edition 2 of IE
12、C 60749-7, prepared by IEC TC 47, Semiconductor devices, was submitted to the IEC-CENELEC parallel vote and was approved by CENELEC as EN 60749-7 on 2011-07-22. This European Standard supersedes EN 60749-7:2002. The main change is the removal of the two alternative methods formerly designated method
13、 2 and method 3. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and CENELEC shall not be held responsible for identifying any or all such patent rights. The following dates were fixed: latest date by which the EN has to be im
14、plemented at national level by publication of an identical national standard or by endorsement (dop) 2012-04-22 latest date by which the national standards conflicting with the EN have to be withdrawn (dow) 2014-07-22 _ Endorsement notice The text of the International Standard IEC 60749-7:2011 was a
15、pproved by CENELEC as a European Standard without any modification. In the official version, for Bibliography, the following note has to be added for the standard indicated: IEC 60749-8 NOTE Harmonized as EN 60749-8. _ 2 60749-7 IEC:2011 CONTENTS FOREWORD . 3 1 Scope . 5 2 Normative references . 5 3
16、 Terms and definitions . 5 4 Test apparatus . 5 4.1 Mass spectrometer method . 5 4.2 Mass spectrometer 5 4.2.1 Spectra range 5 4.2.2 Detection limit . 6 4.2.3 System calibration . 6 4.2.4 Calibration for other gases 6 4.2.5 Daily calibration check . 7 4.2.6 Substitution . 7 4.2.7 Precision tuning .
17、7 4.2.8 Record keeping . 7 4.3 Vacuum opening chamber . 7 4.4 Piercing arrangement 7 4.5 Pressure-sensing device . 7 5 Procedure 8 6 Failure criteria 9 7 Implementation . 9 8 Summary 10 Bibliography 11 60749-7 IEC:2011 3 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ SEMICONDUCTOR DEVICES MECHANICAL AN
18、D CLIMATIC TEST METHODS Part 7: Internal moisture content measurement and the analysis of other residual gases FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees)
19、. The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports, Publicly Available Sp
20、ecifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work. International, governmental and non-governmental organizati
21、ons liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between the two organizations. 2) The formal decisions or agreements of IEC on technical matter
22、s express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees. 3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
23、Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any misinterpretation by any end user. 4) In order to promote international uniformity, IEC N
24、ational Committees undertake to apply IEC Publications transparently to the maximum extent possible in their national and regional publications. Any divergence between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter. 5) IEC itself d
25、oes not provide any attestation of conformity. Independent certification bodies provide conformity assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any services carried out by independent certification bodies. 6) All users should ensure that they
26、have the latest edition of this publication. 7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members of its technical committees and IEC National Committees for any personal injury, property damage or other damage of any nature wha
27、tsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications. 8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publi
28、cations is indispensable for the correct application of this publication. 9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent rights. IEC shall not be held responsible for identifying any or all such patent rights. International Sta
29、ndard IEC 60749-7 has been prepared by IEC technical committee 47: Semiconductor devices. This second edition cancels and replaces the first edition published in 2002 and constitutes a technical revision. This second edition has been completely re-written so as to align it with the text of the lates
30、t versions of MIL-STD-750, method 1018 and MIL-STD-883, method 1018. The main change is the removal of the two alternative methods formerly designated method 2 and method 3. 4 60749-7 IEC:2011 The text of this standard is based on the following documents: FDIS Report on voting 47/2087/FDIS 47/2098/R
31、VD Full information on the voting for the approval of this standard can be found in the report on voting indicated in the above table. This publication has been drafted in accordance with the ISO/IEC Directives, Part 2. A list of all parts in the IEC 60749 series, under the general title Semiconduct
32、or devices Mechanical and climatic test methods, can be found on the IEC website. The committee has decided that the contents of this publication will remain unchanged until the stability date indicated on the IEC web site under “http:/webstore.iec.ch“ in the data related to the specific publication
33、. At this date, the publication will be reconfirmed, withdrawn, replaced by a revised edition, or amended. 60749-7 IEC:2011 5 SEMICONDUCTOR DEVICES MECHANICAL AND CLIMATIC TEST METHODS Part 7: Internal moisture content measurement and the analysis of other residual gases 1 Scope This International S
34、tandard specifies the testing and measurement of water vapour and other gas content of the atmosphere inside a metal or ceramic hermetically sealed device. The test is used as a measure of the quality of the sealing process and to provide information about the long-term chemical stability of the atm
35、osphere inside the package. It is applicable to semiconductor devices sealed in such a manner but generally only used for high reliability applications such as military or aerospace. This test is destructive. 2 Normative references The following referenced documents are indispensable for the applica
36、tion of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. None 3 Terms and definitions For the purposes of this document, the following terms and definitions apply. 3.1 parts
37、per million by volume ppmv the concentration of one substance in another substance expressed as a ratio of parts of the one substance in a million parts of the other substance, measured by volume 4 Test apparatus 4.1 Mass spectrometer method This method measures the water vapour content of the devic
38、e atmosphere by mass spectro-metry. The apparatus is detailed below. 4.2 Mass spectrometer The mass spectrometer shall be capable of meeting the requirements of 4.2.1 to 4.2.2 and shall be calibrated in accordance with 4.2.3 to 4.2.8. 4.2.1 Spectra range The mass spectrometer shall be capable of rea
39、ding a minimum spectra range of 1 AMU to 100 AMU (atomic mass units). 6 60749-7 IEC:2011 4.2.2 Detection limit The mass spectrometer shall be capable of reproducibly detecting the specified moisture content for a given volume package with a signal-to-noise ratio of 20:1 (i.e. for a specified limit o
40、f 5 000 ppmv, 0,01 ml, the mass spectrometer shall demonstrate a 250 ppmv minimum detection limit to moisture for a package volume of 0,01 ml). The smallest volume shall be considered the worst case. 4.2.3 System calibration The mass spectrometer shall be calibrated annually with a moisture level in
41、 the 4 500 ppmv to 5 500 ppmv range, with a moisture level in the 2 000 ppmv to 3 000 ppmv range and with a moisture level in the 7 000 ppmv to 8 000 ppmv range using the same sensitivity factor. This calibration needs to be performed for each calibrator volume to demonstrate a linear response and t
42、o detect offset. A minimum of three data points for each moisture level shall be collected. Package simulators which have the capability of generating at least three known volumes of gas 10 % on a repetitive basis by means of a continuous sample volume purge of known moisture content 5 % shall be us
43、ed. Moisture content shall be established by the standard generation techniques (i.e. double pressure, divided flow, or cryogenic method). The dew point hygrometer shall be recalibrated a minimum of once a year using equipment traceable to national standards or by a suitable commercial calibration s
44、ervices laboratory using equipment traceable to national standards. The dew point hygrometer shall be capable of measuring the dew point temperature to within an accuracy of 0,2 C. The system shall have a pressure sensor to measure the pressure in line with the temperature dew point sensor to an acc
45、uracy of 300 Pa for the range of pressure being used. In addition, the test laboratory shall have a procedure to calculate the concentration of moisture, in units of parts per million by volume, from the dew point temperature measurement and the pressure measurement. Gas analysis results obtained by
46、 this method shall be considered valid only in the moisture range or limit bracketed by at least two (volume or concentration) calibration points (i.e. 5 000 ppmv between 0,01 ml to 0,1 ml or 1 000 ppmv to 5 000 ppmv between 0,01 ml to 0,1 ml). A best fit curve shall be used between volume calibrati
47、on points. Systems not capable of bracketing may use an equivalent procedure as approved by the customer or certifying body. Corrections of sensitivity factors deviating greater than 10 % from the mean between calibration points shall be required. NOTE It is recommended that the percentage of water
48、vapour contained in a gas flowing through the gas humidifier be compared to the dew point sensor reading for accuracy of the sensor. The following equation may be used to calculate the per cent of water vapour contained in a gas flowing through the gas humidifier. agv2100PPPOH+=)(%(1) where Pv is th
49、e vapour pressure of water in the GPH based on water temperature in degrees celsius (C); Pgis the gauge pressure; Pais the atmospheric pressure. 4.2.4 Calibration for other gases Calibration shall be required for all gases found in concentrations greater than 0,01 % by volume. As a minimum, this shall include all gases listed in Item b) of Clause 5. The applicable gases shall be calibrated at approximately 1 % concentrations requirements, with the exception of the following: fluorocarb
