1、BS EN ISO11554:2008ICS 31.260NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBRITISH STANDARDOptics and photonics Lasers and laser-related equipment Test methods forlaser beam power,energy and temporalcharacteristics (ISO11554:2006)This British Standardwas published underthe au
2、thority of theStandards Policy andStrategy Committee on BSI 2009ISBN 978 0 580 62193 2Amendments/corrigenda issued since publicationDate CommentsBS EN ISO 11554:2008National forewordThis British Standard is the UK implementation of EN ISO11554:2008. It is identical to ISO 11554:2006. It supersedes B
3、S EN ISO11554:2006 which is withdrawn.The UK participation in its preparation was entrusted to TechnicalCommittee CPW/172/9, Electro-optical systems.A list of organizations represented on this committee can be obtained onrequest to its secretary.This publication does not purport to include all the n
4、ecessary provisionsof a contract. Users are responsible for its correct application.Compliance with a British Standard cannot confer immunityfrom legal obligations.2 ebruary20098 FEUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN ISO 11554July 2008ICS 31.260 Supersedes EN ISO 11554:2006 English Vers
5、ionOptics and photonics - Lasers and laser-related equipment -Test methods for laser beam power, energy and temporalcharacteristics (ISO 11554:2006)Optique et photonique - Lasers et quipements associsaux lasers - Mthodes dessai de la puissance et delnergie des faisceaux lasers et de leurs caractrist
6、iquestemporelles (ISO 11554:2006)Optik und Photonik - Laser und Laseranlagen -Prfverfahren fr Leistung, Energie und Kenngren desZeitverhaltens von Laserstrahlen (ISO 11554:2006)This European Standard was approved by CEN on 22 June 2008.CEN members are bound to comply with the CEN/CENELEC Internal Re
7、gulations which stipulate the conditions for giving this EuropeanStandard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such nationalstandards may be obtained on application to the CEN Management Centre or to any CEN member.This
8、European Standard exists in three official versions (English, French, German). A version in any other language made by translationunder the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the same status as theofficial versions.CEN members are the n
9、ational standards bodies of Austria, Belgium, Bulgaria, Cyprus, Czech Republic, Denmark, Estonia, Finland,France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and
10、 United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGManagement Centre: rue de Stassart, 36 B-1050 Brussels 2008 CEN All rights of exploitation in any form and by any means reservedworldwide for CEN national Members.Ref. No. EN ISO 11554:2
11、008: EBS EN ISO 11554:2008 BS EN ISO 11554:2008EN ISO 11554:2008 (E) 4 Annex ZA (informative) Relationship between this European Standard and the Essential Requirements of EU Directive 98/37/EC This European Standard has been prepared under a mandate given to CEN by the European Commission and the E
12、uropean Free Trade Association to provide one means of conforming to Essential Requirements of the New Approach Directive for machinery 98/37/EC amended by Directive 98/79/EC. Once this standard is cited in the Official Journal of the European Communities under that Directive and has been implemente
13、d as a national standard in at least one Member State, compliance with the normative clauses of this standard confers, within the limits of the scope of this standard, a presumption of conformity with the corresponding Essential Requirements 1.5.10 Radiation and 1.5.12 Laser equipment of that Direct
14、ive and associated EFTA regulations. WARNING: Other requirements and other EU Directives may be applicable to the products falling within the scope of this International standard. BS EN ISO 11554:2008BS EN ISO 11554:2008EN ISO 11554:2008 (E) 5 Annex ZB (informative) Relationship between this Europea
15、n Standard and the Essential Requirements of EU Directive 2006/42/EC This European Standard has been prepared under a mandate given to CEN by the European Commission and the European Free Trade Association to provide a means of conforming to Essential Requirements of the New Approach Directive 2006/
16、42/EC on machinery. Once this standard is cited in the Official Journal of the European Communities under that Directive and has been implemented as a national standard in at least one Member State, compliance with the normative clauses of this standard confers, within the limits of the scope of thi
17、s standard, a presumption of conformity with the relevant Essential Requirements 1.5.10 Radiation and 1.5.12 Laser radiation of that Directive and associated EFTA regulations. WARNING Other requirements and other EU Directives may be applicable to the product(s) falling within the scope of this stan
18、dard. BS EN ISO 11554:2008ISO 11554:2006(E) ISO 2006 All rights reserved iiiContents Page Foreword iv Introduction v 1 Scope . 1 2 Normative references . 1 3 Terms and definitions. 1 4 Symbols and units of measurement. 2 5 Measurement principles. 3 6 Measurement configuration, test equipment and aux
19、iliary devices . 3 6.1 Preparation 3 6.2 Control of environmental impacts 6 6.3 Detectors . 6 6.4 Beam-forming optics 7 6.5 Optical attenuators . 7 7 Measurements. 7 7.1 General. 7 7.2 Power of cw lasers 7 7.3 Power stability of cw lasers. 8 7.4 Pulse energy of pulsed lasers . 8 7.5 Energy stability
20、 of pulsed lasers. 8 7.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power 8 7.7 Pulse duration stability 8 7.8 Pulse repetition rate . 8 7.9 Small signal cut-off frequency 9 8 Evaluation 9 8.1 General. 9 8.2 Power of cw lasers 9 8.3 Power stability of cw lasers. 10 8.4 Pulse
21、 energy of pulsed lasers . 10 8.5 Energy stability of pulsed lasers. 10 8.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power 10 8.7 Pulse duration stability 13 8.8 Pulse repetition rate . 13 8.9 Small signal cut-off frequency 13 9 Test Report 13 Annex A (informative) Relativ
22、e intensity noise (RIN) . 16 Bibliography . 18 BS EN ISO 11554:2008ISO 11554:2006(E) iv ISO 2006 All rights reservedForeword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standa
23、rds is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also tak
24、e part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is
25、 to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibilit
26、y that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 11554 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. This third ed
27、ition cancels and replaces the second edition (ISO 11554:2003), which has been technically revised. For the purposes of this International Standard, the CEN annex regarding fulfilment of European Council Directives has been removed. BS EN ISO 11554:2008ISO 11554:2006(E) ISO 2006 All rights reserved
28、vIntroduction The measurement of laser power (energy for pulsed lasers) is a common type of measurement performed by laser manufacturers and users. Power (energy) measurements are needed for laser safety classification, stability specifications, maximum laser output specifications, damage avoidance,
29、 specific application requirements, etc. This document provides guidance on performing laser power (energy) measurements as applied to stability characterization. The stability criteria are described for various temporal regions (e.g., short-term, medium-term and long-term) and provide methods to qu
30、antify these specifications. This International Standard also covers pulse measurements where detector response speed can be critically important when analysing pulse shape or peak power of short pulses. To standardize reporting of power (energy) measurement results, a report template is also includ
31、ed. This International Standard is a Type B standard as stated in ISO 12100-1. The provisions of this International standard may be supplemented or modified by a Type C standard. Note that for machines which are covered by the scope of a Type C standard and which have been designed and built accordi
32、ng to the provisions of that standard, the provisions of that Type C standard take precedence over the provisions of this Type B standard. BS EN ISO 11554:2008BS EN ISO 11554:2008INTERNATIONAL STANDARD ISO 11554:2006(E) ISO 2006 All rights reserved 1Optics and photonics Lasers and laser-related equi
33、pment Test methods for laser beam power, energy and temporal characteristics 1 Scope This International Standard specifies test methods for determining the power and energy of continuous-wave and pulsed laser beams, as well as their temporal characteristics of pulse shape, pulse duration and pulse r
34、epetition rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy stability of pulsed lasers and pulse duration stability. The test methods given in this International Standard are used for the testing and characterization of lasers. 2 Normative references The f
35、ollowing referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the last edition of the referenced document (including any amendments) applies. ISO 11145:2006, Optics and optical instruments Lasers an
36、d laser-related equipment Vocabulary and symbols IEC 61040:1990, Power and energy measuring detectors, instruments and equipment for laser radiation International vocabulary of basic and general terms in metrology (VIM). BIPM, IEC, IFCC, ISO, IUPAC, IUPAP, OIML, 2nd ed. 1993 3 Terms and definitions
37、For the purposes of this document, the terms and definitions given in ISO 11145, in the VIM and the following apply. 3.1 relative intensity noise RIN R( f ) single-sided spectral density of the power fluctuations normalized to the square of the average power as a function of the frequency f NOTE 1 T
38、he relative intensity noise R( f ) or RIN as defined above is explicitly spoken of as the “relative intensity noise spectral density”, but usually simply referred to as RIN. NOTE 2 For further details, see Annex A. 3.2 small signal cut-off frequency fcfrequency at which the laser power output modula
39、tion drops to half the value obtained at low frequencies when applying small, constant input power modulation and increasing the frequency BS EN ISO 11554:2008ISO 11554:2006(E) 2 ISO 2006 All rights reserved4 Symbols and units of measurement The symbols and units specified in ISO 11145 and in Table
40、1 are used in this International Standard. Table 1 Symbols and units of measurement Symbol Unit Term f Hz Frequency fcHz Small signal cut-off frequency f1, f2 Hz Frequency range for which the relative intensity noise R( f ) is given k 1 Coverage factor for the determination of uncertainty m 1 Readin
41、g m 1 Mean value of readings P W Power averaged over the sampling period P W Mean power, averaged over the measurement period at the operating conditions specified by the manufacturer P 1 Relative power fluctuation to a 95 % confidence level for the appropriate sampling period P (1 s) and/or P (1 ms
42、) and/or P (0,1 s) and/or P (1 s) Q J Mean pulse energy Q 1 Relative pulse energy fluctuation to a 95 % confidence level R( f ) Hz1or dB/Hz Relative intensity noise, RIN S(t) 1 Detector signal s 1 Measured standard deviation T s Pulse repetition period t s Measurement period Urel1 Expanded relative
43、uncertainty corresponding to a 95 % confidence level (coverage factor k = 2) Urel(C) 1 Expanded relative uncertainty of calibration corresponding to a 95 % confidence level (coverage factor k = 2) Fs Fall time of laser pulse H1 Relative pulse duration fluctuation with regard to Hto a 95 % confidence
44、 level Rs Rise time of laser pulse 101 Relative pulse duration fluctuation with regard to 10to a 95 % confidence level NOTE 1 For further details regarding 95 % confidence level see ISO 2602 1. NOTE 2 The expanded uncertainty is obtained by multiplying the standard uncertainty by a coverage factor k
45、 = 2. It is determined according to the Guide to the Expression of Uncertainty in Measurement 3. In general, with this coverage factor, the value of the measurand lies with a probability of approximately 95 % within the interval defined by the expanded uncertainty. NOTE 3 R( f ) expressed in dB/Hz e
46、quals 10 lg R( f ) with R( f ) given in Hz1. BS EN ISO 11554:2008ISO 11554:2006(E) ISO 2006 All rights reserved 35 Measurement principles The laser beam is directed on to the detector surface to produce a signal with amplitude proportional to the power or energy of the laser. The amplitude versus ti
47、me is measured. Radiation emitted by sources with large divergence angles is collected by an integrating sphere. Beam forming and attenuation devices may be used when appropriate. The evaluation method depends on the parameter to be determined and is described in Clause 8. 6 Measurement configuratio
48、n, test equipment and auxiliary devices 6.1 Preparation 6.1.1 Sources with small divergence angles The laser beam and the optical axis of the measuring system shall be coaxial. Select the diameter (cross-section) of the optical system such that it accommodates the entire cross-section of the laser b
49、eam and so that clipping or diffraction loss is smaller than 10 % of the intended measurement uncertainty. Arrange an optical axis so that it is coaxial with the laser beam to be measured. Suitable optical alignment devices are available for this purpose (e.g., aligning lasers or steering mirrors). Mount the attenuators or beam-forming optics such that the optical axis runs through the geometrical centres. Care should be exercised to avoid systematic errors. NOTE 1 Reflections, external ambient light, ther
