1、BSI Standards PublicationBS EN ISO 13694:2015Optics and photonics Lasersand laser-related equipment Test methods for laserbeam power (energy) densitydistributionBS EN ISO 13694:2015 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN ISO 13694:2015. It supersedes BS
2、 EN ISO 13694:2000 which iswithdrawn.The UK participation in its preparation was entrusted to Technical Committee CPW/172, Optics and Photonics.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the neces
3、sary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2016.Published by BSI Standards Limited 2016ISBN 978 0 580 83290 1 ICS 31.260 Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was
4、 published under the authority of the Standards Policy and Strategy Committee on 31 January 2016.Amendments/corrigenda issued since publicationDate T e x t a f f e c t e dEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 13694 December 2015 ICS 31.260 Supersedes EN ISO 13694:2000English Versi
5、on Optics and photonics - Lasers and laser-related equipment - Test methods for laser beam power (energy) density distribution (ISO 13694:2015) Optique et photonique - Lasers et quipements associs aux lasers - Mthodes dessai de distribution de la densit de puissance (dnergie) du faisceau laser (ISO
6、13694:2015) Optik und Photonik - Laser und Laseranlagen - Prfverfahren fr die Leistungs-(Energie-)dichteverteilung von Laserstrahlen (ISO 13694:2015)This European Standard was approved by CEN on 19 September 2015. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipul
7、ate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European St
8、andard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the n
9、ational standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,
10、Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey andUnited Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2015 CEN All rights of exploitation in any form and by any m
11、eans reserved worldwide for CEN national Members. Ref. No. EN ISO 13694:2015 EBS EN ISO 13694:2015EN ISO 13694:2015 (E) 3 European foreword This document (EN ISO 13694:2015) has been prepared by Technical Committee ISO/TC 172 “Opticsand photonics“ in collaboration with Technical Committee CEN/TC 123
12、 “Lasers and photonics” thesecretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of anidentical text or by endorsement, at the latest by June 2016, and conflicting national standards shall bewithdrawn at the latest by June
13、 2016. Attention is drawn to the possibility that some of the elements of this document may be the subject ofpatent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patentrights. This document supersedes EN ISO 13694:2000. According to the CEN-CENELEC Internal
14、 Regulations, the national standards organizations of thefollowing countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,France, Germany, Greece, Hungary, Iceland, Ireland,
15、 Italy, Latvia, Lithuania, Luxembourg, Malta,Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,Turkey and the United Kingdom. Endorsement notice The text of ISO 13694:2015 has been approved by CEN as EN ISO 13694:2015 without any modification. BS EN ISO 1
16、3694:2015ISO 13694:2015(E)Foreword ivIntroduction v1 Scope . 12 Normative references 13 Terms and definitions . 13.1 Measured quantities . 13.2 Characterizing parameters . 34 Coordinate system 65 Characterizing parameters derived from the measured spatial distribution 76 Test principle . 77 Measurem
17、ent arrangement and test equipment 77.1 General . 77.2 Preparation 77.3 Control of environment . 87.4 Detector system 87.5 Beam-forming optics, optical attenuators, and beam splitters . 88 Test procedure 98.1 Equipment preparation . 98.2 Detector calibration procedure 98.2.1 Spatial calibration . 98
18、.2.2 Power energy calibration . 98.3 Data recording and noise correction 108.3.1 General. 108.3.2 Correction by background-map subtraction 108.3.3 Correction by average background subtraction.119 Evaluation .119.1 Choice and optimization of integration limits 119.2 Control and optimization of backgr
19、ound corrections 1110 Test report 12Annex A (informative) Test report .13 ISO 2015 All rights reserved iiiContents PageBS EN ISO 13694:2015ISO 13694:2015(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The
20、 work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-gove
21、rnmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in
22、 the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the po
23、ssibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list
24、 of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well a
25、s information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe committee responsible for this document is ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems.This second edition
26、 cancels and replaces the first edition (ISO 13694:2000), which has been technically revised with the following changes:a) the definition of power density distribution E (x, y, z) has been revised, a definition of the power density E (x0, y0, z) has been added;b) the definition of energy density dis
27、tribution H (x, y, z) has been revised, a definition of the energy density H (x0, y0, z) has been added;c) the term “threshold power energy density” has been replaced by “clip-level power energy density”. The index “T” indicating “threshold” has been replaced by “CL” accordingly;d) the term “effecti
28、ve power energy” has been replaced by “clip-level power energy”;e) in 3.2.5, the formula for beam ellipticity has been revised;f) the term “effective irradiation area” has been replaced by “clip-level irradiation area”;g) the notation Ez() Hz() indicating the clip-level average power energy density
29、has been replaced by Ezave(), Hzave();h) Figure 1 has been revised taking into account the items a) and g) of this list.It also incorporates the corrigendum ISO 13694:2000/Cor 1:2005.iv ISO 2015 All rights reservedBS EN ISO 13694:2015ISO 13694:2015(E)IntroductionMany applications of lasers involve u
30、sing the near-field as well as the far-field power energy density distribution of the beam. The power energy density distribution of a laser beam is characterized by the spatial distribution of irradiant power energy density with lateral displacement in a particular plane perpendicular to the direct
31、ion of propagation. In general, the power energy density distribution of the beam changes along the direction of propagation. Depending on the power energy, size, wavelength, polarization, and coherence of the beam, different methods of measurement are applicable in different situations. Five method
32、s are commonly used: camera arrays (1D and 2D), apertures, pinholes, slits, and knife edges.This International Standard provides definitions of terms and symbols to be used in referring to power density distribution, as well as requirements for its measurement. For pulsed lasers, the distribution of
33、 time-integrated power density (i.e. energy density) is the quantity most often measured.According to ISO 11145, it is possible to use two different definitions for describing and measuring the laser beam diameter. One definition is based on the measurement of the encircled power energy; the other i
34、s based on determining the spatial moments of the power energy density distribution of the laser beam.The use of spatial moments is necessary for calculating the beam propagation factor, K, and the beam propagation ratio, M2, from measurements of the beam widths at different distances along the prop
35、agation axis. ISO 11146 describes this measurement procedure. For other applications, other definitions for the beam diameter can be used. For some quantities used in this International Standard, the first definition (encircled power energy) is more appropriate and easier to use.The International Or
36、ganization for Standardization (ISO) draws attention to the fact that it is claimed that compliance with this document can involve the use of patents concerning the inclusion of negative noise values in background evaluation of CCD camera images as described in 8.3.2.ISO takes no position concerning
37、 the evidence, validity, and scope of this patent right.The holder of this patent right (U.S. No. 5,418,562 and 5,440,562, and PCT WO 94/27401) has assured ISO that they are willing to negotiate licenses under reasonable and non-discriminatory terms and conditions with applicants throughout the worl
38、d. In this respect, the statement of the holder of this patent right is registered with ISO. Information can be obtained from:Spiricon Inc.Laser Beam Diagnostics2600 North MainLogan, UT 84341USA ISO 2015 All rights reserved vBS EN ISO 13694:2015BS EN ISO 13694:2015Optics and photonics Lasers and las
39、er-related equipment Test methods for laser beam power (energy) density distribution1 ScopeThis International Standard specifies methods by which the measurement of power energy density distribution is made and defines parameters for the characterization of the spatial properties of laser power ener
40、gy density distribution functions at a given plane.The methods given in this International Standard are intended to be used for the testing and characterization of both continuous wave (cw) and pulsed laser beams used in optics and optical instruments.2 Normative referencesThe following documents, i
41、n whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 11145, Optics and photonics La
42、ser and laser-related equipment Vocabulary and symbolsISO 11146 (all parts), Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratiosISO 11554, Optics and photonics Lasers and laser-related equipment Test methods for laser beam power, energ
43、y and temporal characteristicsIEC 61040, Power and energy measuring detectors, instruments and equipment for laser radiation3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 11145 and IEC 61040 and the following apply.3.1 Measured quantities3.1.1power d
44、ensity distributionExyz(, ,)set of all power densities at location z of a certain CW beam with non-negative values for all transverse coordinates (x,y)3.1.1.1power densityEx yz(, ,)00part of the beam power at location z which impinges on the area A at the location (x0, y0) divided by the area A ( A
45、0 )INTERNATIONAL STANDARD ISO 13694:2015(E) ISO 2015 All rights reserved 1BS EN ISO 13694:2015ISO 13694:2015(E)3.1.2energy density distributionHxyz(, ,)set of all energy densities at location z of a certain pulsed beam with non-negative values for all transverse coordinates (x, y)Hxyz Exyz t(, ,) (,
46、 ,)=d3.1.2.1energy densityHx yz(, ,)00pulsed laser beam part of the beam energy (time-integrated power) at location z which impinges on the area A at the location (x0, y0) divided by the area A ( A 0 )Hx yz Ex yzt(, ,) (, ,)00 00=d3.1.3powerPz()power in a continuous wave (cw) beam at location zPz Ex
47、yz xy() (, ,)=dd3.1.4pulse energyQz()energy in a pulsed beam at location zQz Hxyz xy() (, ,)=dd3.1.5maximum power energy densityEzmax() Hzmax()maximum of the spatial power energy density distribution functionExyz(, ,) Hxyz(, ,) at location z3.1.6location of the maximum(,)maxmaxxyzlocation of Ezmax()
48、 or Hzmax() in the xy plane at location zNote 1 to entry: (,)maxmaxxyz cannot be uniquely defined when measuring with detectors having a high spatial resolution and a relatively small dynamic range.3.1.7clip-level power energy densityEzCL() HzCL()fraction of the maximum power energy density (3.1.5)
49、at location zEzEzCL() ()max=HzHzCL() ()max=2 ISO 2015 All rights reservedBS EN ISO 13694:2015ISO 13694:2015(E)01(,)()CLHxyz Hz3.2.2fractional power energyfz()fraction of the clip-level power energy (3.2.1) for a given to the total power energy in the distribution at location zfzPzPz()()()= for cw-beams;fzQzQz()()()= for pulsed beams;01fz()3.2.3centre of gravitycentroid positionxz yz(),()first-order moments of a powerenergy dis
