1、BRITISH STANDARDBS EN ISO 13697:2006Optics and photonics Lasers and laser-related equipment Test methods for specular reflectance and regular transmittance of optical laser componentsThe European Standard EN ISO 13697:2006 has the status of a British StandardICS 31.260g49g50g3g38g50g51g60g44g49g42g3
2、g58g44g55g43g50g56g55g3g37g54g44g3g51g40g53g48g44g54g54g44g50g49g3g40g59g38g40g51g55g3g36g54g3g51g40g53g48g44g55g55g40g39g3g37g60g3g38g50g51g60g53g44g42g43g55g3g47g36g58BS EN ISO 13697:2006This British Standard was published under the authority of the Standards Policy and Strategy Committee on 31 Ma
3、y 2006 BSI 2006ISBN 0 580 48472 6National forewordThis British Standard is the official English language version of EN ISO 13697:2006. It is identical with ISO 13697:2006.The UK participation in its preparation was entrusted by Technical Committee CPW/172, Optics and photonics, to Subcommittee CPW/1
4、72/9, Electro-optical systems, which has the responsibility to: A list of organizations represented on this subcommittee can be obtained on request to its secretary.Cross-referencesThe British Standards which implement international or European publications referred to in this document may be found
5、in the BSI Catalogue under the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online.This publication does not purport to include all the necessary provisions of a contract. Users are responsi
6、ble for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep UK i
7、nterests informed; monitor related international and European developments and promulgate them in the UK.Summary of pagesThis document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 16, an i
8、nside back cover and a back cover.The BSI copyright notice displayed in this document indicates when the document was last issued.Amendments issued since publicationAmd. No. Date CommentsEUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN ISO 13697May 2006ICS 31.260English VersionOptics and photonics
9、- Lasers and laser-related equipment -Test methods for specular reflectance and regular transmittanceof optical laser components (ISO 13697:2006)Optique et photonique - Lasers et quipements associsaux lasers - Mthodes dessai du facteur de rflexionspculaire et du facteur de transmission des composant
10、soptiques laser (ISO 13697:2006)Optik und Photonik - Laser und Laseranlagen -Prfverfahren fr den gerichteten Reflexionsgrad und denTransmissionsgrad von optischen Laserkomponenten (ISO13697:2006)This European Standard was approved by CEN on 13 April 2006.CEN members are bound to comply with the CEN/
11、CENELEC Internal Regulations which stipulate the conditions for giving this EuropeanStandard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such nationalstandards may be obtained on application to the Central Secretariat or to any
12、 CEN member.This European Standard exists in three official versions (English, French, German). A version in any other language made by translationunder the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the officialversions.CEN me
13、mbers are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,Slovakia, Slovenia, Spain, Sweden, Switzerlan
14、d and United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGManagement Centre: rue de Stassart, 36 B-1050 Brussels 2006 CEN All rights of exploitation in any form and by any means reservedworldwide for CEN national Members.Ref. No. EN ISO 13
15、697:2006: EForeword This document (EN ISO 13697:2006) has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics“, the secretariat of which is held by DIN. This European Standard shall be given the s
16、tatus of a national standard, either by publication of an identical text or by endorsement, at the latest by November 2006, and conflicting national standards shall be withdrawn at the latest by November 2006. According to the CEN/CENELEC Internal Regulations, the national standards organizations of
17、 the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slov
18、enia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 13697:2006 has been approved by CEN as EN ISO 13697:2006 without any modifications. EN ISO 13697:2006Reference numberISO 13697:2006(E)INTERNATIONAL STANDARD ISO13697First edition2006-05-15Optics and photonics Las
19、ers and laser-related equipment Test methods for specular reflectance and regular transmittance of optical laser components Optique et photonique Lasers et quipements associs aux lasers Mthodes dessai du facteur de rflexion spculaire et du facteur de transmission des composants optiques laser EN ISO
20、 13697:2006ii iiiContents Page Foreword iv Introduction v 1 Scope 1 2 Normative references 1 3 Terms and definitions .1 4 Symbols used and units of measure .2 5 Test and calibration principles.2 5.1 General2 5.2 Specular reflectance2 5.3 Transmittance 3 5.4 Calibration 3 6 Preparation of test sample
21、 and measuring arrangement7 6.1 General7 6.2 Laser beam preparation 8 6.3 Chopper 8 6.4 Detector arrangement .8 7 Characteristic features of the laser beam .9 8 Test procedure.9 8.1 Calibration of the chopper mirror 9 8.2 Specular reflectance for near-normal incidence 10 8.3 Angular dependence of re
22、flectance.11 8.4 Transmittance 12 9 Evaluation.13 9.1 Specular reflectance for near-normal incidence 13 9.2 Angular dependence of reflectance.13 9.3 Transmittance 13 10 Test report 14 Bibliography 16 EN ISO 13697:2006iv Foreword ISO (the International Organization for Standardization) is a worldwide
23、 federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that
24、committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in acc
25、ordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requ
26、ires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 13697 was prepared by Technic
27、al Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. EN ISO 13697:2006vIntroduction Laser-based optical systems require optical components with greatly enhanced reflectance and/or transmission characteristics. It is necessary to be able to measure these characte
28、ristics precisely. The measurement procedures in this International Standard have been optimized to allow the measurement of the specular reflectance and transmittance of the optical components to a high degree of accuracy over a wide range of values. EN ISO 13697:2006blank1Optics and photonics Lase
29、rs and laser-related equipment Test methods for specular reflectance and regular transmittance of optical laser components 1 Scope This International Standard specifies measurement procedures for the precise determination of the specular reflectance and regular transmittance of optical laser compone
30、nts. The accuracy of the described test methods exceeds that of measurement procedures outlined in ISO 15368 by several orders of magnitude. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited
31、applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 31-6, Quantities and units Part 6: Light and related electromagnetic radiations ISO 11145, Optics and photonics Lasers and laser-related equipment Vocabulary and symbols ISO 14644-1
32、, Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness 3 Terms and definitions For the purpose of this document, the terms and definitions given in ISO 11145 and ISO 31-6 apply. EN ISO 13697:20062 4 Symbols used and units of measure Table 1 Symbols used and uni
33、ts of measure Symbol Unit Term sspecular reflectance of sample ch, mspecular reflectance of chopper, specular reflectance of deflecting mirror sregular transmittance of sample m wavelength PavW average power rad angle of incidence d m beam diameter on the test sample fchHz chopper frequency famHz fr
34、equency of laser power modulation PrW power of reference beam PpW power of probe beam P W power difference between reference beam and probe beam Smsignal at frequency of laser power modulation Smosignal at frequency of laser power modulation, probe beam blocked S signal at frequency, which is the su
35、m or the difference of chopper frequency and power modulation frequency S0signal at frequency, which is the sum or the difference of chopper frequency and power modulation frequency, probe beam blocked C1, C2arbitrary constants 5 Test and calibration principles 5.1 General Specular reflectance and r
36、egular transmittance are determined optically as the ratio of the regularly reflected or regularly transmitted part of the reflected or transmitted power radiation to the incident power radiation. The reflectance or the transmittance of the test sample are constant within the temperature fluctuation
37、s experienced by the component during the test and are independent of the power density of the impinging radiation. 5.2 Specular reflectance The reflectance of optical components is determined optically by means of a measuring arrangement as shown in Figures 1 and 2. An optically flat and highly ref
38、lective chopper mirror divides the laser beam into a probe beam and a reference beam. The probe beam is reflected by the chopper mirror and the sample, whereas the reference beam transmits without being affected. Both beams, alternating temporally, impinge upon the same spot on the rear target of th
39、e integrating sphere. Figure 1 shows the measuring arrangement for near-normal incidence, whereas the angular dependence of reflectance can be measured in a measuring arrangement according to Figure 2. Compared with the arrangement in Figure 1, an additional mirror is used to create a double bounce
40、permitting the measurement of the reflectance of the sample at different angles of incidence. EN ISO 13697:20063The powers Ppfor the probe beam and Prfor the reference beam are related by 2prsch m= P P (1) where mis the specular reflectance of the additional deflecting mirror; 2s is the double bounc
41、e on the sample; s isthe specular reflectance of the sample; chis the specular reflectance of the chopper mirror. The specular reflectance sof the test sample can be expressed as srch m11P= P(2) where P = Pr Pp5.3 Transmittance The transmittance of optical components is determined by means of a meas
42、uring arrangement as shown in Figure 3 using an additional mirror with known reflectance m. For the powers Ppand Prmeasured with a set-up according to Figure 3, the following relationship exists Pp= schmPr(3) wheresis the regular transmittance of the sample. The regular transmittance sof the test sa
43、mple can be calculated from the following relationship: srch m11P= P(4) 5.4 Calibration The reflectance of the chopper mirror has to be known for evaluation. Figure 4 shows the measurement set-up used for the calibration procedure. To determine the two unknown specular reflectances mof the additiona
44、l mirror and chof the chopper mirror, two sets of measurements have to be performed. One measurement is done in the set-up of the test procedure described in 8.2, while for the other measurement the integrating sphere and an additional mirror have to be replaced according to Figure 4. The beam trans
45、forming optics and the chopper mirror remain unchanged to ensure that the laser hits the chopper under identical conditions. For the set-up according to Figure 4, the following relationship for the powers Ppand Prexists prmchPP= (5) EN ISO 13697:20064 This set-up enables the computation of the quoti
46、ent Q of the specular reflectance of the additional mirror and the chopper mirror. mchQ = (6) Their product P is determined according to Figure 1, where the sample is replaced by the additional mirror. In this case: mchP = (7) The specular reflectance of the chopper chand the additional mirror mare
47、given by chPQ = (8) mPQ = (9) Key 1 laser 6 probe beam 2 telescope 7 reference beam 3 pinhole 8 integrating sphere 4 chopper 9 detector, mounted on top of the sphere 5 sample 10 rotating target Figure 1 Schematic measuring arrangement for specular reflectance measurement (near-normal incidence angle
48、 on sample) EN ISO 13697:20065Key 1 laser 7 reference beam 2 telescope 8 integrating sphere 3 pinhole 9 detector, mounted on top of the sphere 4 chopper 10 rotating target 5 sample 11 additional mirror 6 probe beam Figure 2 Schematic measuring arrangement for specular reflectance measurement (arbitr
49、arily chosen angle of incidence on sample) EN ISO 13697:20066 Key 1 laser 7 reference beam 2 telescope 8 integrating sphere 3 pinhole 9 detector, mounted on top of the sphere 4 chopper 10 rotating target 5 sample 11 additional mirror 6 probe beam Figure 3 Schematic measuring arrangement for measuring the transmittance (arbitrarily chosen angle of incidence on sample) EN ISO 13697:20067Key 1 laser 6 probe beam 2 telescope 7 reference beam 3 pinhole 8 integrating sphere
