EN ISO 14880-3-2006 en Optics and phonotics - Microlens arrays - Part 3 Test methods for optical properties other than wavefront aberrations《光学和光子学 显微物镜系列 第3部分 不同于波像差的光学特征的试验办法 ISO.pdf

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1、BRITISH STANDARDBS EN ISO 14880-3:2006Optics and photonics Microlens arrays Part 3: Test methods for optical properties other than wavefront aberrationsThe European Standard EN ISO 14880-3:2006 has the status of a British StandardICS 31.260g49g50g3g38g50g51g60g44g49g42g3g58g44g55g43g50g56g55g3g37g54

2、g44g3g51g40g53g48g44g54g54g44g50g49g3g40g59g38g40g51g55g3g36g54g3g51g40g53g48g44g55g55g40g39g3g37g60g3g38g50g51g60g53g44g42g43g55g3g47g36g58BS EN ISO 14880-3:2006This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 June 2006 BSI 2006ISBN 0 580

3、48721 0National forewordThis British Standard is the official English language version of EN ISO 14880-3:2006. It is identical with ISO 14880-3:2006.The UK participation in its preparation was entrusted by Technical Committee CPW/172, Optics and photonics, to Subcommittee CPW/172/9, Electro-Optical

4、systems, which has the responsibility to: A list of organizations represented on this subcommittee can be obtained on request to its secretary.Cross-referencesThe British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue u

5、nder the section entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct ap

6、plication. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep UK interests informed; mon

7、itor related international and European developments and promulgate them in the UK.Summary of pagesThis document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 14, an inside back cover and a

8、 back cover.The BSI copyright notice displayed in this document indicates when the document was last issued.Amendments issued since publicationAmd. No. Date CommentsEUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN ISO 14880-3June 2006ICS 31.260English VersionOptics and phonotics - Microlens arrays

9、- Part 3: Test methodsfor optical properties other than wavefront aberrations (ISO14880-3:2006)Optique et phonotique - Rseaux de microlentilles - Partie3: Mthodes dessai pour les proprits optiques autresque les aberrations du front donde (ISO 14880-3:2006)Optik und Photonik - Mikrolinsenarrays - Tei

10、l 3:Prfverfahren fr optische Eigenschaften auerWellenfrontaberrationen (ISO 14880-3:2006)This European Standard was approved by CEN on 3 May 2006.CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this EuropeanStandard the status of a

11、national standard without any alteration. Up-to-date lists and bibliographical references concerning such nationalstandards may be obtained on application to the Central Secretariat or to any CEN member.This European Standard exists in three official versions (English, French, German). A version in

12、any other language made by translationunder the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the officialversions.CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finlan

13、d, France,Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE

14、FR NORMUNGManagement Centre: rue de Stassart, 36 B-1050 Brussels 2006 CEN All rights of exploitation in any form and by any means reservedworldwide for CEN national Members.Ref. No. EN ISO 14880-3:2006: EForeword This document (EN ISO 14880-3:2006) has been prepared by Technical Committee ISO/TC 172

15、 “Optics and optical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics “, the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the lates

16、t by December 2006, and conflicting national standards shall be withdrawn at the latest by December 2006. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech

17、Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 14880-3:2006 has

18、 been approved by CEN as EN ISO 14880-3:2006 without any modifications. EN ISO 14880-3:2006Reference numberISO 14880-3:2006(E)INTERNATIONAL STANDARD ISO14880-3First edition2006-06-01Optics and photonics Microlens arrays Part 3: Test methods for optical properties other than wavefront aberrations Opt

19、ique et photonique Rseaux de microlentilles Partie 3: Mthode dessai pour les proprits optiques autres que les aberrations du front donde EN ISO 14880-3:2006ii iiiContents Page Foreword iv Introduction v 1 Scope . 1 2 Normative references . 1 3 Terms and definitions. 1 4 Substrate test 1 5 Microscope

20、 test method 1 5.1 Principle. 1 5.2 Measurement arrangement and test equipment 2 5.3 Preparation 4 6 Procedure 4 6.1 General. 4 6.2 Measurement of effective back or front focal length 4 6.3 Measurement of chromatic aberration . 4 6.4 Measurement of the uniformity of the focal spot positions . 5 7 Re

21、sults and uncertainties 5 8 Coupling efficiency, imaging quality 6 9 Test report . 6 Annex A (informative) Measurements with wavefront measuring systems. 8 Annex B (normative) Confocal measurement of effective back or front focal length of lens array 10 Annex C (informative) Coupling efficiency, ima

22、ging quality . 12 Annex D (normative) Measurement of the uniformity of the focal spot positions of a microlens array . 13 Bibliography . 14 EN ISO 14880-3:2006iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodie

23、s). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and n

24、on-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Pa

25、rt 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies castin

26、g a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 14880-3 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommit

27、tee SC 9, Electro-optical systems. ISO 14880 consists of the following parts, under the general title Optics and photonics Microlens arrays: Part 1: Vocabulary Part 2: Test methods for wavefront aberrations Part 3: Test methods for optical properties other than wavefront aberrations Part 4: Test met

28、hods for geometrical properties EN ISO 14880-3:2006vIntroduction This part of 14880 specifies methods of testing optical properties, other than wavefront aberrations, of microlens arrays. Examples of applications for microlens arrays include three-dimensional displays, coupling optics associated wit

29、h arrayed light sources and photo-detectors, enhanced optics for liquid crystal displays, and optical parallel processor elements. The testing of microlenses is in principle similar to testing any other lens. The same parameters need to be measured and the same techniques used. However, in many case

30、s the measurement of very small lenses presents practical problems which make it difficult to use the standard equipment that is available for testing normal size lenses. The market in microlens arrays has generated a need for agreement on basic terminology and test methods. Standard terminology and

31、 clear definitions are needed not only to promote applications but also to encourage scientists and engineers to exchange ideas and new concepts based on common understanding. This part of 14880 contributes to the purpose of the series of ISO 14880 standards which is to improve the compatibility and

32、 interchangeability of lens arrays from different suppliers and to enhance development of the technology using microlens arrays. The measurement of focal length is described in the body of this part of ISO 14880 and the use of an alternative technique, interferometry, is described in Annex A. Measur

33、ement of the focal length of an array of microlenses, using a confocal technique, is described in Annex B. Coupling efficiency and imaging quality are discussed in Annex C. Measurement of the focal spot positions of an array of microlenses in parallel, using the Shack-Hartmann technique, is describe

34、d in Annex D. EN ISO 14880-3:2006blank1Optics and photonics Microlens arrays Part 3: Test methods for optical properties other than wavefront aberrations 1 Scope This part of ISO 14880 specifies methods for testing optical properties, other than wavefront aberrations, of microlenses in microlens arr

35、ays. It is applicable to microlens arrays with very small lenses formed on one or more surfaces of a common substrate and to graded index microlenses. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edit

36、ion cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 14880-1, Optics and photonics Microlens arrays Part 1: Vocabulary ISO 10110-5, Optics and optical instruments Preparation of drawings for optical elements and systems Part

37、 5: Surface form tolerances 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 14880-1 apply. 4 Substrate test The optical quality of the substrate contributes to the quality of the focal positions defined by the microlenses and shall be quantified in a

38、ccordance with ISO 10110-5. 5 Microscope test method 5.1 Principle The basic principle is to locate, by optical means, the surface of the microlens under test. The effective back (front) focal length is determined by measuring the axial displacement necessary to locate the focal position. EN ISO 148

39、80-3:20062 5.2 Measurement arrangement and test equipment 5.2.1 General The testing of microlenses is similar in principle to testing larger lenses. In many cases however, the measurement of very small lenses presents practical problems which make it difficult to use standard equipment. In general,

40、two optical techniques can be used. One is based on microscopy, the other is based on interferometry. The first technique uses a microscope to locate, by focusing, the vertex of the microlens. The effective back (front) focal length is deduced from a measurement of the displacement necessary to refo

41、cus the microscope on the image of a distant source as shown in Figure 1. A focusing aid in the microscope such as a split-field focusing graticule enables the featureless vertex of a microlens to be more readily located when viewing with reflected light. For focal length measurements the distant po

42、int source may be the emitting tip of an optical fibre or an illuminated test graticule. Tests may be performed with white light or monochromatic illumination. The second technique uses wavefront sensing to locate the test surface or the centre of curvature. The location test may be carried out with

43、 the help of one of the following devices: Fizeau interferometer, Twyman-Green interferometer, lateral shearing interferometer, or Shack-Hartmann device. These are more fully described in ISO 14880-2 and ISO/TR 14999-1. One advantage of interferometry is that for strongly aberrated lenses, the varia

44、tion in focal length with aperture radius can be readily deduced from the interference patterns. A disadvantage is that tests are restricted to the wavelength of the interferometer light source. Key 1 distant point source 2 substrate and microlens producing focussed spot 3 microscope objective 4 axi

45、al adjustment of microscope to locate lens surface and focus 5 beamsplitter 6 source for focus location on lens surface 7 charge-coupled device (CCD) camera Figure 1 A collimated source and microscope used to measure the effective back or front focal length of a microlens EN ISO 14880-3:20063Clauses

46、 5 to 9 concentrate on the microscope technique while an interferometric technique is described in Annex A and a Shack-Hartmann technique in Annex D. The confocal measurement of the effective focal lengths of lens arrays is described in Annex B. 5.2.2 Test system 5.2.2.1 General The test system cons

47、ists of a microscope fitted with displacement transducers, suitable light source, test object, microscope video camera, monitor and image analyser (line intensity scan). 5.2.2.2 Microscope A microscope fitted with a focusing aid such as a split-image rangefinder is required to enable focus settings

48、to be made on a featureless surface such as the vertex of the microlens surface. The mechanical design shall allow the distant point source or test graticule to be placed below the stage carrying the test lens. Ideally, the test lens should be supported with no additional optical component such as a

49、 glass plate between it and the distant point source or test graticule. The displacement of the test surface relative to the microscope objective is measured with a calibrated displacement transducer. The numerical aperture (NA) of the microscope objective shall be larger than the numerical aperture of the test lens at the focal point. 5.2.2.3 Light source A light source emitting radiation in the band of wavelengths or at a specific wavelength required for the test shall be used. The properties of the light source shall be d

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