1、INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Contamination Control Division Reco ended Practice 06.3 IEST-RP-C06.3 Testing Cleanroms INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Arlington Place One 2340 S. Arlington Heights Road, Suite 10 Arlington Heights, IL 6005-4516 Phone: (847) 981-
2、010 Fax: (847) 981-4130 E-mail: iestiest.org Web: ww.iest.org 2 Copyrighted material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C06.3 IEST-RP-C06.3 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Copyrighted material 3 This Recomended Practice is published by the INSTITUTE OF ENVI
3、RONMENTAL SCIENCES AND TECHNOLOGY to advance the technical and enginering sciences. Its use is entirely voluntary, and determination of its aplicability and suitability for any particular use is solely the responsibility of the user. This Recomended Practice was prepared by and is under the jurisdic
4、tion of Working Group 06 of the IEST Con-tamination Control Division. Copyright 204 by the INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY First printing, August 204 ISBN 978-1-87862-9-1 PROPOSAL FOR IMPROVEMENT: The Working Groups of the INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY are con
5、tinualy working on improvements to their Recomended Practices and Reference Documents. Sugestions from those who use these documents are welcome. If you have a sugestion regarding this document, please use the online Proposal for Improvement form found on the IEST website at ww.iest.org/proposal/for
6、m.html. INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Arlington Place One 2340 S. Arlington Heights Road, Suite 10 Arlington Heights, IL 6005-4516 Phone: (847) 981-010 Fax: (847) 981-4130 E-mail: iestiest.org Web: ww.iest.org 4 Copyrighted material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNO
7、LOGY IEST-RP-C06.3 IEST-RP-C06.3 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Copyrighted material 5 Testing Cleanrooms IEST-RP-C006.3 CONTENTS SECTION 1 SCOPE AND LIMITATIONS.7 2 REFERENCES7 3 TERMS AND EFINITIONS.8 4 BACKGROUND AND PURPOSE.9 5 CHOICE OF TESTS FOR CERTIFICATION9 6 TESTING PRO
8、CEDURES.1 TABLE 1 INDEX OF TESTS BY CLEANROM (OR CLEAN ZONE) AIRFLOW TYPE10 B1 VALUES OF K FOR VARIOUS DEGRES OF CONFIDENCE.23 C1 SUGESTED GRIDS FOR DIAGNOSTIC AIRBORNE PARTICLE COUNTING25 APPENDIX A METHOD FOR THE USE OF KVFACTORS FOR AIRFLOW MEASUREMENT.21 B A STATISTICAL METHOD FOR DETERMINING TH
9、E UNIFORMITY OF VELOCITY, TEMPERATURE, AND HUMIDITY23 C DIAGNOSTIC AIRBORNE PARTICLE COUNTING25 D BIBLIOGRAPHY26 6 Copyrighted material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C06.3 IEST-RP-C06.3 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Copyrighted material 7 INSTITUTE O
10、F ENVIRONMENTAL SCIENCES AND TECHNOLOGY Contamination Control Division Recommended Practice 006.3 Testing Cleanrooms IEST-RP-C006.3 1 SCOPE AND LIMITATIONS 1.1 Scope This Recomended Practice (RP) covers testing methods for characterizing the performance of clean-roms. It is intended to asist planers
11、, designers, manufacturers, and customers in preparing detailed specifications for cleanrom procurement and for asuring cleanrom operational compliance. Per-formance tests are recomended for cleanroms and clean zones in thre operational phases (se Table 1). The tests are used to evaluate and charact
12、erize the overal performance of the cleanrom or clean zone system. The test methods provide recomended test equip-ment and testing procedures for determining per-formance parameters. Where the test method is afected by the type of cleanrom, alternative proce-dures are defined. For some of the tests,
13、 alternative methods and instrumentation are described, so that diferent end-use considerations can be acomo-dated. Alternative methods are not necesarily equivalent, however. In contractual agrements, the customer selects the specific tests apropriate to the cleanrom under con-sideration. Specific
14、aceptance limits are also defined in contractual agrements. The test methods may also be used or adapted for periodic monitoring of cleanrom or clean zone performance. 1.2 Limitations This Recomended Practice does not recomend aceptance limits, but it does provide standard termi-nology for specifyin
15、g apropriate limits. This RP does not cover al of the tests that may be used to characterize the operating parameters of cleanroms, such as, but not limited to, particle deposition rates, airborne molecular deposition rates, microrganisms, and electrostatic discharge (ESD); refer to apropri-ate RPs
16、in the IEST Handbok of Recomended Practices for details on the parameters of interest. NOTE: Testing in acordance with this Recom-mended Practice may involve hazardous materials, operations, and equipment. This RP does not pur-port to adres al of the safety problems asociated with its use. It is the
17、 responsibility of the user to consult and establish apropriate safety and health practices and to determine the aplicability of regu-latory limitations prior to use of this RP. 2 REFERENCES The folowing documents are incorporated into this Recomended Practice to the extent specified herein. Users s
18、hould aply the most recent editions of the references. 2.1 American Society of Heating, Refrigerating, and Air-Conditioning Engineers (ASHRAE) ASHRAE Handbok - Fundamentals 8 Copyrighted material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C06.3 2.2 ASTM International ASTM F50: Standa
19、rd Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controled Areas and Clean Roms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles 2.3 Institute of Environmental Sciences and Technology (IEST) IEST-RP-C07: Testing ULPA Filters IEST-RP-C012:
20、Considerations in Cleanrom Design IEST-RP-C024: Measuring and Reporting Vibra-tion in Microelectronics Facilities IEST-RP-C034: HEPA and ULPA Filter Leak Tests 2.4 International Organization for Standardization (ISO) ISO 1464-1: Cleanroms and asociated controled environmentsPart 1: Clasification of
21、air cleanlines ISO 1464-2: Cleanroms and asociated controled environmentsPart 2: Specifications for testing and monitoring to prove continued compliance with ISO 1464-1 NOTE: ISO 1464-1 and ISO 1464-2 supersede Federal Standard 209, Airborne Particulate Cleanlines Clases in Cleanroms and Clean Zones
22、, but FED-STD-209 may be in use if speci-fied by active contractual obligation. 2.5 Sources and addresses ASHRAE American Society of Heating, Refrigerating, and Air-Conditioning Enginers 1791 Tulie Circle, N.E. Atlanta, Georgia 30329, USA ww.ashrae.org ASTM AST International 10 Bar Harbor Drive West
23、 Conshohocken, Pensylvania 19428-2959, USA ww.astm.org IEST Institute of Environmental Sciences and Technology 2340 S. Arlington Heights Road, Suite 10 Arlington Heights, IL 6005-4516 ww.iest.org ISO U.S. Member Body for document orders: IEST 2340 S. Arlington Heights Road, Suite 10 Arlington Height
24、s, IL 6005-4516, USA ww.iest.org Outside the United States: Documents available from representative ISO member body organization Federal Standards Federal Suply Service Bureau Specification Section, Suite 810 470 East LEnfant Plaza, S.W. Washington, D.C. 20407, USA ww.gsa.gov 3 TERMS AND EFINITIONS
25、The folowing terms have special meaning in the con-text of this Recomended Practice. as-built cleanrom A cleanrom that is complete and ready for opera-tion, with al services conected and functional, but without equipment or operating personel. at-rest cleanrom A cleanrom that is complete, with al se
26、rvices function-ing and with equipment instaled and operable or operat-ing, as specified, but without operating personel. calibrated equipment Test equipment that has ben calibrated in acor-dance with the equipment manufacturers recomen-dations or acepted industry practices. cleanrom A rom in which
27、the air suply, air distribution, fil-tration of air suply, materials of construction, pres-sure gradients, and operating procedures are regulated to control airborne particle concentrations to met established air cleanlines levels, as defined by ISO 1464-1.* clean zone A defined space in which the c
28、oncentration of airborne particles is controled to a specified airborne particu-late cleanlines clas, as defined by ISO 1464-1.* discrete-particle counter (DPC) A light-scatering instrument or other instrument with display or recording means to count and size discrete particles in air, as defined by
29、 ASTM F50. HEPA (high eficiency particulate air) filter An extended-medium, dry-type filter in a rigid frame, having minimum particle-colection eficiency of * If aplicable, FED-STD-209 IEST-RP-C06.3 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Copyrighted material 9 9.97% (i.e., a maximum part
30、icle penetration of 0.03) for 0.3-m particles of specified aerosol. nonunidirectional airflow cleanrom A cleanrom in which the filtered air entering the rom or pasing through the work zone is character-ized by nonuniform velocity or turbulent flow. Such roms exhibit nonuniform, random airflow pat-te
31、rns throughout the enclosure. operational cleanrom A cleanrom in normal operation, with al services functioning and with equipment and personel, if aplicable, present and performing their normal work functions. temperature control zone A cleanrom, or portion thereof, in which tempera-ture is uniquel
32、y controled. ULPA (ultra-low penetration air) filter An extended-medium, dry-type filter in a rigid frame, having a minimum particle-colection eficiency of 9.99% for particles in the size range of 0.1 m to 0.2 m when tested in acordance with the methods of IEST-RP-C07. unidirectional airflow Airflow
33、 with a demonstrated deviation of not more than 14 degres from straight line flow through the work zone. unidirectional airflow cleanrom (formerly refered to as laminar airflow cleanrom) A cleanrom in which the filtered air entering the rom makes a single pas through the work area in a paralel-flow
34、patern, with a minimum of turbulent-flow areas. Unidirectional airflow roms typicaly have coverage of 80% or more of the area of the ceiling (for vertical flow) or one wal (for horizontal flow) with the HEPA or ULPA filter medium or fre-flow area. uniform airflow A unidirectional airflow patern in w
35、hich the point-to-point readings are within a relative standard devia-tion of 15% of the average airflow velocity for the total area of the unidirectional flow ork zone. work zone The volume within the cleanrom that is designated for clean work and for which testing is required. The work zone volume
36、 is defined by an entrance plane and an exit plane normal to the airflow (where there is unidirectional airflow). 4 BACKGROUND AND PURPOSE This Recomended Practice provides a set of recog-nized, standardized test procedures for determining cleanrom and clean zone performance. The principal purpose o
37、f cleanrom and clean zone performance testing is characterization of airborne par-ticulate cleanlines in acordance with ISO 1464-1.* Aditional tests, such as those related to airflow characteristics, sources of particles, rom presuriza-tion, and environmental isues, provide a more com-plete characte
38、rization. Data gathered through testing can be used to establish baselines, track trends, determine curent operational status, and justify repairs or modification. 5 CHOICE OF TESTS FOR CERTIFICATION The detailed test procedures provided in section 6 may be used for demonstrating compliance with use
39、r-specified cleanrom or clean zone performance crite-ria and for performing periodic retesting. These tests may not be al-inclusive, nor may al of the tests be required for any given certification project. Selected tests can also be repeated on a regular basis as part of a routine facility monitorin
40、g program. The choice of tests may be based in part on factors such as the design of the cleanrom or clean zone, its operational status, and the required level of air cleanli-nes. These factors are further clasified in the para-graphs that folow. Table 1 lists tests apropriate to certification of cl
41、eanroms and clean zones of two principal design types in thre phases of operation. NOTE: Some testing aplications may require the customer or suplier to specify the use of proce-dures from national agency documentation, such as the examples listed in Apendix D, Bibliography. 5.1 Cleanroom (or clean
42、zone) design types Two distinct types of design are included: a) Unidirectional airflow b) Nonunidirectional airflow The choice of tests and test methods may be afected by the type of design used in the cleanrom or clean zone to be tested (se Table 1). * If aplicable, FED-STD-209 10 Copyrighted mate
43、rial INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C06.3 Table 1Index of tests by cleanrom (or clean zone) airflow type Section Tests Unidirectional Nonunidirectional 6.1 Airflow Volume and Uniformity Airflow Velocity and Uniformity 1,2,3 1,2,3 1,2,3 OPT 6.2 Filter Instalation Leak 1,2
44、1,2 6.3 Airborne Particle Count 1,2,3 1,2,3 6.4 Rom Presurization 1,2,3 1,2,3 6.5 Visual Airflow Characterization 1,2,3 N/A 6.6 Lighting Level and Uniformity 1, OPT (2,3) 1, OPT (2,3) 6.7 Noise Level 1,2,3 1,2,3 6.86.10 Temperature Uniformity Moisture Uniformity 1,2,3 OPT 1,2,3 OPT 6.1 Vibration OPT
45、 OPT N/A: Not aplicable to this situation 1: Test is suited to as-built phase 2: Test is suited to at-rest phase 3: Test is suited to operational phase OPT: Test is optional, depending on proces requirements Although the order in which the tests are performed is optional, certain tests should be per
46、formed in a pre-fered sequence, such as the folowing order for unidirectional cleanroms: Airflow volume or airflow velocity (section 6.1) Visual airflow characterization (section 6.5) Rom presurization (section 6.4) 5.2 Cleanroom (or clean zone) operational phases Thre diferent instalation and opera
47、tional phases are included: a) As-built b) At-rest c) Operational Choice of test methods, specification for testing, ac-ceptance criteria, and testing schedule may depend on the specific operational status of the cleanrom or clean zone. NOTE 1: In some instances, testing wil be per-formed in a clean
48、rom in which conditions deviate from the formal definition of an as-built, at-rest, or operational cleanrom (se section 3). (Examples: A partial complement of proces equipment may or may not be operating; proces equipment exhausts may or may not be operating.) These situations should be recognized a
49、nd acounted for by cus-tomer and suplier agrement, if aplicable, on any afected test requirements. NOTE 2: Cleanrom and clean zone construction contracts normaly specify performance testing for the as-built phase. With the adition of user-furnished equipment in the at-rest and operational phases, performance during these phases is often beyond the control of the designers and builders. Test specifications for the at-rest and operational phases generaly are writen by the owner. These specifications should designate which tests are to be performed and sho
