1、IEST-RP-CC020.2Substrates and Forms for Documentation in CleanroomsInstItute of envIronmental scIences and technologyContamination Control DivisionRecommended Practice 020.2InstItute of envIronmental scIences and technologyArlington Place One2340 S. Arlington Heights Road, Suite 100Arlington Heights
2、, Illinois 60005-4516Phone: (847) 981-0100 Fax: (847) 981-4130E-mail: iestiest.org Web: www.iest.org2 Copyrighted material IEST-RP-CC020.2 InstItute of envIronmental scIences and technologyInstItute of envIronmental scIences and technologyArlington Place One2340 S. Arlington Heights Road, Suite 100A
3、rlington Heights, Illinois 60005-4516Phone: (847) 981-0100 Fax: (847) 981-4130E-mail: iestiest.org Web: www.iest.orgPlease note that in regard to references herein to Federal Standard 209 (FED-STD-209), Airborne Par-ticulate Cleanliness Classes in Cleanrooms and Clean Zones, the U.S. General Service
4、s Administration issued the following NOTICE OF CANCELLATION of FED-STD-209 on November 29, 2001: “Federal Standard 209E dated September 11, 1992 is hereby canceled and superseded by International Organization for Standardization (ISO) Standards. International Standards for Cleanrooms and associated
5、 controlled environments, ISO 14644-1 Part 1: Classification of air cleanliness; and ISO 14644-2 Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1.”Copies of ISO Standards 14644-1 Part 1, and 14644-2 Part 2, may be obtained from the Institute of Envi-ro
6、nmental Sciences and Technology (IEST), 5005 Newport Drive, Suite 506, Rolling Meadows, IL 60008-3841. Phone: 1-847-255-1561, Fax: 1-847-255-1699, Website: www.iest.org, E-mail: publicationsalesiest.org. This Recommended Practice is published by the InstItute of envIronmental scIences and technology
7、 to advance contamination control technology and the technical and engineering sciences. Its use is entirely voluntary, and determination of its applicability and suitability for any particular use is solely the responsibility of the user.This document was prepared by and is under the jurisdiction o
8、f Working Group 020 of the Standards and Practices Committee of the Institutes Contamination Control Division. It supersedes IES-RP-CC-020-88T.Copyright 1996 by the InstItute of envIronmental scIences and technology.Sixth printing, November 2002.ISBN 978-1-877862-48-9PROPOSAL FOR IMPROVEMENT: The Wo
9、rking Groups of the InstItute of envIronmental scIences and technology are continually working on improvements to their Recommended Practices and Reference Documents. Suggestions from those who use these documents are welcome. If you have a suggestion regarding this document, please use the online P
10、roposal for Improvement form found on the IEST website at www.iest.org/proposal/form.html.Copyrighted material IEST-RP-CC020.2 InstItute of envIronmental scIences and technologySubstrates and Forms for Documentation in CleanroomsIEST-RP-CC020.2CONTENTS1 SCOPE AND LIMITATIONS . 52 REFERENCES 53 TERMS
11、 AND DEFINITIONS. 64 BACKGROUND AND PURPOSE . 65 TESTS FOR STRUCTURAL PROPERTIES . 76 TEST FOR RELEASABLE PARTICLES . 87 TESTS FOR EXTRACTABLE MATTER 9 Copyrighted material IEST-RP-CC020.2 InstItute of envIronmental scIences and technologyCopyrighted material IEST-RP-CC020.2 InstItute of envIronment
12、al scIences and technologyInstItute of envIronmental scIences and technologyContamination Control DivisionRecommended Practice 020.2Substrates and Forms for Documentation in CleanroomsIEST-RP-CC020.21 SCOPE AND LIMITATIONS1.1 ScopeThis Recommended Practice (RP) applies to substrates and forms used i
13、n cleanrooms for the purpose of docu-mentation. Specifically included are: copy paper, writ-ing paper, labels, tags, self-adhesive notes, perforated and punched forms, envelopes, bound materials, and all printed versions thereof. This RP provides appro-priate methods for assessing the cleanliness of
14、 these items insofar as their suitability for use in cleanrooms is concerned.1.2 LimitationsContamination resulting from the use of items such as pens and clipboards, as well as contamination from printers and copiers, is beyond the scope of this docu-ment except where their use in conjunction with
15、the items listed under Scope may increase the generation of particles from those items. Users are referred to Recommended Practice IEST-RP-CC015 (Cleanroom Production and Support Equipment) for that informa-tion as well as for proper procedures for handling such items and equipment.This Recommended
16、Practice does not, nor should it, categorize substrates according to their suitability for use in particular applications. Rather, it offers rational and germane tests for those characteristics of substrates and forms that are generally acknowledged to be important. The results from these tests perm
17、it quantitative assess-ment of the merits of various documentation materials according to the combination of properties important to the individual user.2 REFERENCESThe following list of publications refers to the most recent editions in print.2.1 American Society for Testing and Materials (astm)ast
18、m-D39: trapezoidal tear testastm-D1193: Standard Specification for Reagent Waterastm-D1894: Standard Test Method for Static and Kinetic Coefficients of Friction of Plastic Film and Sheetingastm-F311: Standard Practice for Processing Aero-space Liquid Samples for Particulate Contamination Analysis Us
19、ing Membrane Filtersastm-F312: Standard Methods for Microscopical Sizing and Counting Particles from Aerospace Fluids on Membrane Filters2.2 General Services Administration (Federal Standards)FeD-STD-209e: Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones2. Institute of Environm
20、ental Sciences and Technology (Iest)ieST-RP-CC002: Laminar Flow Clean-Air DevicesieST-RP-CC015: Cleanroom Production and Support equipment Copyrighted material IEST-RP-CC020.2 InstItute of envIronmental scIences and technology2. Technical Association of the Pulp and Paper Industry (tappI)TAPPi Metho
21、d T403: Bursting Strength of PaperTAPPi Method T410: Grammage of Paper and Paper-boardTAPPi Method T411: Thickness (Caliper) of Paper, Pa-perboard, and Combined BoardTAPPi Method T423: Folding endurance of Paper (Schopper Type Tester)TAPPi Method T459: Surface Strength of Paper (Wax Pick Test)TAPPi
22、Method T494: Tensile Breaking Properties of Paper and Paperboard (Using Constant Rate of elongation Apparatus)TAPPi Method T503: Coefficient of Static Friction of Shipping Sack Papers (inclined Plane Method)TAPPi Method T511: Folding endurance of Paper (mit Tester)TAPPi Method T538: Smoothness of Pa
23、per and Paper-board (Sheffield Method)TAPPi Method T543: Bending Resistance of Paper (Gurley Type Tester)2. Sources and addressesastmAmerican Society for Testing and Materials100 Barr Harbor DriveWest Conshohocken, Pennsylvania 19428 USAfederal standard (fed-std-209e) available from IEST, orFederal
24、Supply Service BureauSpecification Section (3FBP-W), Suite 8100470 East LEnfant Plaza, S.W.Washington, D.C. 20407 USAIestInstitute of Environmental Sciences and Technology2340 S. Arlington Heights Road, Suite 100Arlington Heights, Illinois 60005-4516tappITAPPI PressP.O. Box 105113Atlanta, Georgia 30
25、348 USA TERMS AND DEFINITIONSgenerated particlesParticles that were not previously present on the surface of a substrate, but are generated and released in response to mechanical energy imparted to that surface.particleAn object that is solid, liquid, or both, usually between 1 nanometer and 1 milli
26、meter in size.releasable particlesParticles present on the surface of a substrate that are readily releasable therefrom by wetting it with a liq-uid, but without imparting mechanical energy to the substrate. BACKGROUND AND PURPOSEThe tests in this RP for substrates and forms used for documentation i
27、n cleanrooms can be divided into two broad categories, one having to do with structural prop-erties (and therefore related to function) and one having to do with contamination or cleanliness.It is frequently necessary for both user and vendor to refer to certain structural properties of substrates a
28、nd forms in order that they be minimally but accurately described. A complete list of all possible structural properties would be without either end or agreement. Furthermore, different tests for these properties abound, many of which address the same issue from different points of view. The Technic
29、al Association of the Pulp and Paper Industry (tappI) and the American Society for Testing and Materials (astm) have compiled extensive lists of standard methods for evaluating many of the structural properties of paper and similar products. A selection of some of these tests for the more important
30、structural properties, along with a brief description of each test method, is given in section 5. These tests are included in this RP not to suggest that any or all of them must be known or specified, but rather to provide both user and supplier with a common basis for testing and discussion in the
31、event that any of these tests is specified.While the types and sources of contaminants are virtu-ally limitless, it is generally agreed that particles, matter extractable with solvents, and inorganic constituents are the most important considerations in high-technology applications. Recognizing that
32、 the number of particles that can be re-leased from a substrate is maximized when it is immersed in a liquid, a wet test for enumerating such particles Copyrighted material IEST-RP-CC020.2 InstItute of envIronmental scIences and technologyis provided in section 6. The procedure quantifies the number
33、 of particles already present on and readily releas-able from the surface of a substrate by wetting it with a liquid while avoiding the administration of mechanical energy. Although it is recognized that particles not al-ready present can be generated in response to imparting mechanical energy to a
34、substrate, no test has as yet been agreed upon for enumerating such particles.Section 7 provides tests for the quantitative analysis of extractable matter. A procedure for determining the total burden of unspecified extractable matter is given in section 7.1, while section 7.2 provides guidelines fo
35、r the quantitative analysis of specific constituents. A method for determining high-temperature ash, an excellent in-dicator of the total amount of inorganic species present, is described in 7.3. This last test is particularly useful in the selection of substrates and forms for cleanroom application
36、s, because such items frequently contain high levels of inorganic fillers which have been added to impart opacity. TESTS FOR STRUCTURAL PROPERTIES.1 Basis weight (grammage)The mass (in grams) of a conveniently sized and repre-sentative sample is divided by the area of the sample (in square meters) a
37、nd the result expressed as basis weight (g/m2). It should be specified whether the basis weight is on a dry, “as is,” or equilibrated basis. The use of units other than grams per square meter to express basis weight is strongly discouraged. See tappI Method T410.2 CaliperThe caliper of a sample is i
38、ts measured thickness (in micrometers) under a specified load. tappI Method T411 treats this subject adequately, describing the equipment required (a motor-driven dial micrometer) and the tech-nique of measurement. Tensile strength, elongation, and energy to ruptureTensile strength is a measure of t
39、he maximum force (in kilonewtons per meter) that must be applied in the plane of a flat specimen in order to cause it to rupture. tappI Method T494 provides carefully specified conditions for conducting this test. The amount of elongation (stretch) that a sample will undergo before actual rupture ta
40、kes place provides another useful piece of information, and a procedure for testing it is also covered in this TAPPI Method. Coupling tensile strength with elongation yields energy to rupture, a measure of the maximum amount of energy that can be stored by a specimen. Sophisticated equipment is requ
41、ired for the proper measurement of these three attributes. Burst strengthBurst strength is a measure of the pressure (in kilopascals) required to rupture a specimen through the application of a controlled force delivered at a controlled rate when the specimen is held tightly in a clamp. tappI Method
42、 T403 describes the test procedure and the necessary equipment. Burst strength is widely accepted as being an excellent composite measure of many aspects of strength. The test is not complicated and the equipment is inexpensive. Trapezoidal tear strengthThis useful test is a simultaneous measure of
43、both tensile and tear strengths. It is based upon astm-d39. StiffnessThe tappI Method T543, which quantifies “Gurley stiff-ness,” is an acceptable technique for the measurement of this property in paper.5.7 Coefficient of frictionA simple method for determining static friction is given in tappI Meth
44、od T503. A sled and an inclined plane are each covered with a specimen. The static coefficient of friction is obtained by determining the tangent of the angle at which the sled begins to slide on the inclined plane. astm-d1894 is a method for obtaining both static and kinetic coefficients of frictio
45、n.8 Folding endurancetappI Method T423 and tappI Method T511 describe two methods for evaluating folding endurance. Each employs a specialized piece of equipment (a Schopper tester and an mIt tester, respectively) to fold an item at a specified rate and under a certain load, until rupture takes plac
46、e.9 SmoothnesstappI Method T538 is an accepted method for deter-mining the smoothness of paper and similar products. The test employs a Sheffield smoothness tester which consists of a measuring device, a glass surface plate, and assorted gauges and flowmeters.10 Surface strengthThis very simple test
47、 seeks to determine the resistance of a surface to picking. tappI Method T459 describes the 8 Copyrighted material IEST-RP-CC020.2 InstItute of envIronmental scIences and technologyuse of a series of waxes with varying adhesive proper-ties; the waxes are applied to the items being tested to evaluate
48、 pick strength. TEST FOR RELEASABLE PARTICLESIt is important to recognize that, unlike the testing of documentation materials for other forms of contaminants, such as ions or extractable matter, no discrete or unique answer exists for the number of particles that such sub-strates can potentially con
49、tribute to an environment. To be sure, documentation materials have on their surfaces a finite number of enumerable particles. These particles constitute a class of particles called readily releasable particles; they are operationally quantified by using the procedure described in section 6.1.These substrates can also be the source of another category of particles; that is, particles that were not previously present but come into existence in response to the administration of mechanic
