1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS B 6968 3：KS B 6968:2008 2008 12 23 http:/www.kats.go.krKS B 6968:2008 : ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ： 2008 12 23 2008-0926 ： ： ( 025097290) (http:/www.kats.go.kr). 10 5 , . KS B 6968:2008 3： Reliability test method for the vacuum valves Par
2、t 3： Pressure control valves 1 1.1 . 1.2 ( .) . KS B 6387, KS B 6967 . 2 . . ( ) . KS A 0006, KS A 3004, KS A 5608 1, 1： KS A 5608 2, 2： KS A 5608 3, 3： KS B 6387, 1： KS B 6967, 2： KS M 6518, KS M 6784, KS Q 4001, RS D 0027, 3 KS A 3004, KS A 5608 1, KS A 5608 2, KS A 5608 3 KS Q 4001 . 3.1 . KS B 6
3、968:2008 2 3.2 3.3 . 3.4 O- 3.5 (Weibull) 3.6 (mean time to failure) 3.7 B10 10 % 3.8 (confidence level) (： B10) , 3.9 (crack), (crevice), (hole) 3.10 (leak rate) . . 3.11 , 3.12 KS B 6968:2008 3 3.13 (outgassing) . , O- 3.14 (leak detection) . 3.15 (mass spectrometer) . (partial pressure) (： ) 3.16
4、 3.17 IRHD (International Rubber Hardness Degree) 4 4.1 (pendulum), (butterfly) (throttle) , . , O- , (bellows) . 4.2 , , . 5 , , 15 . 6 , , . 6.1 1 . O- 2 . KS B 6968:2008 4 1 7.2 . 7.3 . 7.4 . 15 2 O- IRHD (MPa) (%) 7.5.2 7.5.3 7.5.3 IRHD (%) (%) 7.5.4.1 7.5.4.1 7.5.4.1 (%) 7.5.5 6.2 5 7.6 . 3 . 3
5、 7.6.1 . . 7.6.2 . . 5 6.3 5 4 . B10 (5105 ) RS D 0027 . 1.1 , . KS B 6968:2008 5 4 7.7 (0.50.025) MPa 5 200 000 , 25 %, 50 %, 75 %, 100 % . . . 5 100 % . 5 6.4 5 5 . 5 . 5 7.8 (0.50.025) MPa 5 200 000 , 25 %, 50 %, 75 %, 100 % . . 5 7 7.1 KS A 0006 . 7.2 A . 7.3 B . 7.4 C . 7.5 O- 7.5.1 KS B 6968:2
6、008 6 KS M 6518 4. . 7.5.2 IRHD IRHD KS M 6784 7. . 7.5.2.1 KS M 6518 7.2.1 . 7.5.3 KS M 6518 5. . 7.5.4 KS M 6518 8.3 . 7.5.4.1 IRHD , IRHD , KS M 6518 8.7 . 7.5.5 O- KS M 6518 11. . 7.5.5.1 150 , 200 24 . 25 % . 7.6 , . 7.6.1 1 . 20 , 20 , 1 300 . . , 20 . 1 150 O- . 2 200 O- . KS B 6968:2008 7 1
7、7.6.2 6 1 4 . , . 6 Hz min mm h 5 100 10 0.4 4 7.7 a) 2 , . b) , , , , . c) . d) . e) ( 5 %) . . f) . . g) 3 1 . (0.50.025) MPa , . 72 20 1 ( ) 72 20 72 KS B 6968:2008 8 h) 25 %, 50 %, 75 %, 100 % . i) ( 5 %) . , . j) , , , . k) . , e) j) . l) 200 000 . , , . m) . 7 . , . 1 5 9 2 6 10 3 7 11 ( ) 4 8
8、 12 ( ) 2 1 2 359116781012 4KS B 6968:2008 9 3 7 mm N m 50 5 10 100 10 20 250 20 30 7.8 . a) 2 , . b) ( 4 ). , . c) . d) 1 . (0.50.025) MPa , . e) 25 %, 50 %, 75 %, 100 % . f) . , c) e) . g) 200 000 . , , . 100 % 0 % 2 1 2 2 2 KS B 6968:2008 10 4 ( ) 8 . a) ( , ) b) ( , , , ) c) ( , , ) d) e) f) g)
9、h) (s) (450 Pa) (400 Pa) (350 Pa) (Pa) KS B 6968:2008 11 A ( ) A.1 A.1.1 . A.1.2 (leak standard system) (standard leak) . A.2 KS B ISO 3530, ASME E 1603, Standard test methods for leakage measurement using the mass spectrometer leak detector or residual gas analyzer in the hood mode ASTM E 498, Stan
10、dard test methods for leaks using the mass spectrometer leak detector or residual gas analyzer in the trace probe mode A.3 A.3.1 (standard leak) . (permeation type leak) (capillary type leak) , . A.3.2 (virtual leak) . A.3.3 (mass spectrometer leak detector) . A.3.4 (trace gas, search gas) . A.3.5 (
11、vent) . KS B 6968:2008 12 A.3.6 (Helium background signal) A.3.7 (repeatability) A.4 A.4.1 KS A 0006 (231) . A.4.2 A.4.2.1 A.1 , . A.1 A.4.2.2 A.2 , . (He leak detector)HeKS B 6968:2008 13 A.2 A.4.3 , . . A.4.4 5 . A.4.5 a) , (231) 24 . b) , . c) 4 . d) . e) . A.4.6 a) . b) 10 (Rsc) . c) . 3 (Rso) (
12、He leak detector)HeKS B 6968:2008 14 Rs( Rso Rsc) . d) b) c) (RTc) (RTo) RT( RTo RTc) . e) RTc , RTo 1 . f) b) d) 5 . g) . STSTRRLL = (A.1) LT： LS： RT： RS： A.5 A.5.1 . (A.1) . LR RS RT (RT/RS) . A.1 LS(Pa L/s) RS(Pa L/s) RT(Pa L/s) LR(RT/RS) LT(Pa L/s) 1 1.37E 05 1.4E 05 4.2E 05 3.00 4.11E 05 2 1.37
13、E 05 1.5E 05 4.2E 05 2.80 3.84E 05 3 1.37E 05 1.5E 05 4.2E 05 2.80 3.84E 05 4 1.37E 05 1.4E 05 4.0E 05 2.86 3.91E 05 5 1.37E 05 1.4E 05 4.0E 05 2.86 3.91E 05 1.37E 05 1.44E 05 4.12E 05 2.86 3.92E 05 a) , u(LR) ：212RRR1018.8)(11)(i=niLLnLs (A.2) 2RR1066.3)()(=nLsLu (A.3) b) , u(LS) 95 % (k 2) . L/sPa
14、1085.621037.12)()(76SS=LULu (A.4) c) , u(CR) KS B 6968:2008 15 1.010 6Pa L/s , 1/2 . . L/sPa1089.232101)(76R=Cu (A.5) A.5.2 . A.2 Xi , xi (Pa L/s) u(xi) (Pa L/s) ci (Pa L/s) i LS1.3710 56.8510 7 2.86 1.9610 64 LR2.86 3.6610 2 1.3710 52.3910 74 CR 2.8910 7 1 2.8910 7 2.0510 6 A.5.3 U (coverage factor
15、) k . U k uC(A.6) 22.0510 6Pa L/s 4.1010 6Pa L/s( 95 % k 2) A.5.4 (LT) 95 % k 2 , LT 3.9210 5Pa L/s, U 4.1010 6Pa L/s . A.6 . a) ( , ) b) ( , , , ) c) ( , , ) d) e) f) g) h) i) KS B 6968:2008 16 B ( ) B.1 B.1.1 . B.1.2 . B.2 KS B ISO 3530, ASME E 1603, Standard test methods for leakage measurement using the mass spectrometer leak detector or residual gas analyzer in the hood mode ASTM E 498, Standard test methods for leaks using the mass spectrometer leak dete
