1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS B ISO 3529 2 2： KS B ISO 3529 2:2008 2008 9 8 http:/www.kats.go.krKS B ISO 3529 2:2008 : ( ) ( ) ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ： 2003 12 15 ： 2008 9 8 2008-0508 ： ： ( 02-509-7290) (http:/www.kats.go.kr). 10 5 , . KS B ISO 3529 2:2008 2： Vacuu
2、m technology Vocabulary Part 2： Vacuum pumps and related terms 1981 1 ISO 3529 2, Vacuum technology Vocabulary Part 2： Vacuum pumps and related terms . 1 . KS B ISO 3529 1 . 2 2.1 2.1.0 (vacuum pump) . (2.1.1 2.1.2) (2.1.3) 2 . 2.1.1 ( ) positive displacement (vacuum) pump . . (2.1.1.1) (2.1.1.2 2.1
3、.1.4) . 2.1.1.0 2.1.1.0.1 ( ) gas ballast (vacuum) pump . 2.1.1.3.1 2.1.1.3.3 . 2.1.1.0.2 ( ) oil-sealed (liquid-sealed) vacuum pump KS B ISO 3529 2:2008 2 2.1.1.0.3 (dry-sealed vacuum pump) 2.1.1.1 (piston vacuum pump) 2.1.1.2 (liquid ring vacuum pump) . . 2.1.1.3 2.1.1.3.1 (sliding vane rotary vac
4、uum pump) . 2 2.1.1.3.2 (rotary piston vacuum pump) ( ) 2.1.1.3.3 (rotary plunger vacuum pump) . . . 2.1.1.4 (Roots vacuum pump) 2.1.1.5 (trochoid pump) 2.1.2 (kinetic vacuum pump) . . KS B ISO 3529 2:2008 3 2.1.2.1 (turbine vacuum pump) . . ( ) ( ) . 2.1.2.2 (ejector vacuum pump) . . 2.1.2.2.1 (liq
5、uid jet vacuum pump) ( ) 2.1.2.2.2 (gas jet vacuum pump) 2.1.2.2.3 (vapour jet vacuum pump) ( , ) 2.1.2.3 (diffusion pump) . . . . 2.1.2.3.1 (self purifying diffusion pump) 2.1.2.3.2 (fractionating diffusion pump) , 2.1.2.4 (diffusion ejector pump) 2.1.2.5 (molecular drag pump) KS B ISO 3529 2:2008
6、4 2.1.2.5.1 (turbo-molecular pump) . . . 2.1.2.6 (ion transfer pump) 2.1.3 (entrapment capture vacuum pump) 2.1.3.1 (adsorption pump) (： ) 2.1.3.2 (getter pump) “ ” . “ ” . 2.1.3.3 ( ) (sublimation evaporation pump) . 2.1.3.4 (getter ion pump) 2.1.3.4.1 ( ) (sublimation evaporation ion pump) 2.1.3.4
7、.2 (sputter ion pump) 2.1.3.5 (cryopump) . . 120 K . KS B ISO 3529 2:2008 5 2.2 2.2.0.1 (pump case) 2.2.0.2 (inlet) 2.2.0.3 (outlet) 2.2.1.1 , (vane, blade) 2.2.1.2 (discharge valve) 2.2.1.3 (expansion chamber) , . 2.2.1.4 (compression chamber) . 2.2.1.5 (vacuum pump oil) , , “ ” . 2.2.2.1 (pump flu
8、id) 2.2.2.2 (nozzle) 2.2.2.2.1 (nozzle throat) KS B ISO 3529 2:2008 6 2.2.2.2.2 (nozzle clearance area) 2.2.2.2.3 (nozzle clearance) 2.2.2.3 (jet) 2.2.2.4 (diffuser) 2.2.2.4.1 (diffuser throat) 2.2.2.5 , (vapour tube ; vapour pipe ; vapour chimney) 2.2.2.6 (nozzle assembly) 2.2.2.7 (skirt) 2.3 2.3.1
9、 (trap) 2.3.1.1 (cold trap) 2.3.1.2 (sorption trap) 2.3.1.3 (ion trap) KS B ISO 3529 2:2008 7 2.3.2 (baffle) 2.3.3 (oil separator) 2.3.4 (oil purifier) 2.4 2.4.1 ( ) (rough low vacuum pump) 2.4.2 (roughing vacuum pump) 2.4.3 (backing vacuum pump) . . 2.4.4 (holding vacuum pump) 2.4.5 (high vacuum pu
10、mp) , 2.4.6 (booster vacuum pump) 2.4.7 (appendage vacuum pump) 2.5 2.5.1.1 (volume flow rate of a vacuum pump)： S, ： m3 s 1 . . KS B ISO 3529 2:2008 8 . 2.5.1.2 (throughput of a vacuum pump)： Q, ： Pa m3 s 1 2.5.2 (starting pressure) 2.5.3.0 (backing pressure) 2.5.3.1 (critical backing pressure) . .
11、 . . 2.5.3.2 (maximum backing pressure) 2.5.4 (maximum working pressure) 2.5.5 (ultimate pressure of a pump) . , . 2.5.6 (compression ratio) 2.5.7.1 (back-diffusion of gas) . 2.5.7.2 (back-streaming of pump fluid) . 2.5.7.3 (back-migration) KS B ISO 3529 2:2008 9 a) , b) , 2.5.8.1 (water vapour tole
12、rable load) 2.5.8.2 (maximum tolerable water vapour inlet pressure) 2.5.9.1 (warm-up time for a vapour jet pump or a diffusion pump) . . 2.5.9.2 (cool-down time for a vapour jet pump or a diffusion pump) KS B ISO 3529 2:2008 10 A 2.1.3 2.1.1 2.1.2 2.1.2.6 2.1.3.1 2.1.1.1 2.1.2.1 2.1.2.2 2.1.3.2 2.1.
13、2.5 2.1.2.2.1 2.1.3.3 2.1.1.2 2.1.2.5.1 2.1.2.2.2 2.1.3.4 2.1.1.3.1 2.1.2.2.3 2.1.3.4.1 2.1.1.3.2 2.1.2.3 2.1.3.4.2 2.1.1.3.3 2.1.1.4 2.1.2.4 2.1.3.5 KS B ISO 3529 2:2008 11 A adsorption pump ( ) 2.1.3.1 appendage pump 2.4.7 area nozzle clearance area 2.2.2.2.2 assembly nozzle assembly 2.2.2.6 axial
14、 flow pump 2.1.2.1 B back-diffusion 2.5.7.1 backing pressure 2.5.3.0 critical backing pressure 2.5.3.1 maximum backing pressure 2.5.3.2 backing pump 2.4.3 back-migration 2.5.7.3 back-streaming 2.5.7.2 baffle 2.3.2 ballast gas ballast pump ( ) 2.1.1.0.1 blade 2.2.1.1 booster pump 2.4.6 C capture pump
15、 2.1.3 case pump case 2.2.0.1 chamber compression chamber 2.2.1.4 expansion chamber 2.2.1.3 chimney vapour chimney 2.2.2.5 clearance nozzle clearance 2.2.2.2.3 nozzle clearance area 2.2.2.2.2 cold trap 2.3.1.1 compression chamber 2.2.1.4 compression ratio 2.5.6 cool-down time 2.5.9.2 critical backin
16、g pressure 2.5.3.1 cryopump 2.1.3.5 KS B ISO 3529 2:2008 12 D diffuser 2.2.2.4 diffuser throat 2.2.2.4.1 diffusion pump 2.1.2.3 cool-down time 2.5.9.2 warm-up time 2.5.9.1 fractionating diffusion pump 2.1.2.3.2 oil vapour diffusion pump 2.1.2.3.1 multi-stage oil vapour diffusion pump 2.1.2.3.2 self-
17、purifying diffusion pump 2.1.2.3.1 diffusion-ejector pump 2.1.2.4 discharge valve 2.2.1.2 displacement positive displacement pump 2.1.1 reciprocating positive displacement pump 2.1.1 rotary positive displacement pump 2.1.1 drag pump 2.1.2 molecular drag pump 2.1.2.5 dry-sealed pump 2.1.1.0.3 E ejector pump 2.1.2.2 diffusion-ejector pump 2.1.2.4 entrainment fluid entrainment pump 2.1.2 entrapment pump 2.1.3 evaporation ion pump 2.1.3.4.1 evaporation pump
