1、 KS C 6111 3KSKSKSKS SKSKSKS KSKSKS SKSKS KSKS SKS KS KS C 6111 3: 2007(2012 ) 2007 7 6 http:/www.kats.go.krKS C 6111 3: 2007 : ( ) ( ) ( ) : (http:/www.standard.go.kr) : :2007 7 6 :2012 12 31 2012-0854 : : ( 02-509-7294) (http:/www.kats.go.kr). 10 5 , . KS C 6111 3: 2007 i , . , (77 K, PCS 1/500 )
2、. KS C 6111 3: 2007 ii . (SQUID) , YBa2Cu3O7-(YBCO) , YBCO . , , , i) ii) , (Rs) () . (ZS) ZS Rs, 0( , 0 .) . Rs 77 K, 10 GHz (oxygen-free high-purity copper, OFHC .) 1/100 1/50 . Nb , 3 Nb (resonant cavity) (quality factor, Q) Nb Rs Nb Rs . , 3 . Rs , , , , Rs . 2002 IEC Rs . ZS , IEC 3 Rs . ZS . K
3、S C 6111 3: 2007 (2012 ) Electronic characteristic measurements Intrinsic surface impedance of high-TC superconductor films at microwave frequencies 1 (two-tone) , . . : 8 50 GHz : 10 GHz 0.01 m 2 . . ( ) . KS C IEC 60050 815, 3 ( ) ZS Et Ht . ZS Et/Ht RS j XS(1) RS: XS: 4 KS C 6111 3: 2007 2 ZS Q .
4、 10 80 K 10 % . 5 5.1 1 . (network analyzer), (cryocooler), . (scalar network analyzer) (vector network analyzer) . 1 5.2 2 (open-ended) . . (Opticlean) . , Be-Cu . / TE , XYZ GM KS C 6111 3: 2007 3 . 2 5.3 3 (10 m) . 3 (10 m) 5.4 RS tan (77 K, 10 GHz 10 6) (tan 77 K, 10 GHz 10 6). 1 . TE012 TE021 Q
5、 , Q , . TE012 TE021 1 . Q , . Be-Cu KS C 6111 3: 2007 4 RS . 1 TE012 TE021 (mm) (mm)TE012 (GHz) TE021 (GHz) 5 2.86 40.06 39.97 3.9 2.2 15.17 15.29 6 6.1 3 , 3 . , . 0.1 mm . 2 40 GHz 15 GHz . 2 : mm 5 2.86 15 2.96 16 3.9 2.2 9 2.3 10 6.2 1 . Q , . . . . , , . 6.3 RS TE012 TE021 f0 Q0 , . a) ( 1). ,
6、 . . . . b) TE012 . KS C 6111 3: 2007 5 c) TE012 ( 4). 4 S21 f0 f d) f0 (half power band width) f . Q(QL) . ffQL0= (2) e) Q(Q0) QL . IL . Q0 . 200101ILLQQ= (3) , , (IL 30 dB) . (IL 10 dB) . Q0 (reflection scattering parameter) . 221122222111112101,1)1(SSSSSSQQL+=+=+=(4) S11 S22 , 1 2 (coupling coeff
7、icient) . . , Q0 . , (NA) . . f0f3dB(dB)KS C 6111 3: 2007 6 f) f0 Q0 f01 Q01 . f01 Q01 . g) TE021 f0 Q0 f02 Q02 . 6.4 tan TE012 TE021 Q0 Rs, tan . ppsSpptSppbSpppkRCRBRAQtan10+= (5) tSpR : bSpR : sSpR : kp: tanp: Ap: Bp: Cp: TE012 p 1, TE021 p 2 , k 2, k 0.5 . TE012 f01, TE021 f02 tan, tSpR , bSpR t
8、SptSpbSpbSpppRffRRffRff20200,tantan=(6) f0 (f01 f02)/2 tan tSR . + =sSsStSRCARCARBABAQAQAkAkA22111221120210122112)(1tan (7) + =sSsStStSRCkRCkRkBkBQkQkkAkAR11222121120120212112)(1(8) kPPPffAA =0, kPPPffBB =0, ffkkPPP0= . , (tSbSRR = ), SSR1 SSR2 Q01 Q02 f tan tSR . KS C 6111 3: 2007 7 6.5 (10 m) TE02
9、1 . . TLLTrTXTXTffrrdielectricBottomSBottomTopSTop+=21221211 ,00(9) , 0,=TLTTXrBottomS , (9) . TXTffTopSTop=,00211, )(02000effTffTop= (10) , , (10) . 6.6 . (11) . 303333)coth()/(1)/()coth(zzzhzhzSteffSittZGZ= (11) ZS i0/z3, z32 i0 *, * 1 i2 , . , h z4cot(z4l ) z4 , t , l . (11) . 7 7.1 Q . 3 . KS C
10、6111 3: 2007 8 3 70 dB 10 GHz 1 Hz 0.1 dB 17 dBm 77 K 10 6 tan 1/3 , . 4 0.05 mm 0.05 mm 0.005 mm : 10 nm r.m.s. : 0.001 mm r.m.s. 0.1 c (0.3 ) 7.2 . , . . , , . . 7.3 . 7.4 . (polytetrafluoroethylene, PTFE) (polymethyl-methacrylate, PMMA) . m . 8 8.1 . a) KS C 6111 3: 2007 9 b) c) d) e) f) 8.2 RS ,
11、 1, 2, tan, . 8.3 . a) b) c) , d) KS C 6111 3: 2007 10 A ( ) A.1 10 GHz 0.1 m Rs . A.1 . 6 . A.1.1 TE012 TE021 , TE012 TE021 . tan , TE012 TE021 Q , (HEM) TE, TM . ( 10 m) . . A.1.2 1 A.1 b) TE011 , . RS RS 100 30 GHz RS . f 2 , f 1/2 . A.1.3 2 A.1 c) TMnm0 , . RS , RS . tan , . A.1.4 1, 3 A.1 d) TEMn , KS C 6111 3: 2007 11 , . . A.1.5 4, 57 A.1 e) TE011 , . TE0mp . RS tan 110 8 tan 4. 50 K , 10 GHz tan 10 6 10 8 . tan 110 8 . A.1.6 8 A.1 f) TE01 . . tan RS . Q RS . A.1.7 9, 10 tan . A.1 g) TE011 TE013 . . tan RS Q . RS tan . , 12