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2、nstrumental performance parameters 2004 ISO 15470 Surface chemical analysis X-ray photoelectron spectroscopy Description of selected instrumental performance parameters . 1. X . 2. . , . KS D ISO 18115 3. KS D ISO 18115 . 4. FWHM (full width at half maximum) XPS X 5. 5.1 , ( ) . 5.2 . , , . 5.3 . 1
3、. 5.4 X 5.4.1 X . X . 5.4.2 X X . , . a) D ISO 15470：2005 b) c) 5.4.3 5.4.2 X . , 5.4.2 , . . 5.5 Ag 3d5/2 5 % Ag 3d5/2 (FWHM) . Ag 3d5/2 FWHM 5.4.2 . 3eV . , . 10 1 . 5.6 Cu 2p3/2 . . Ag 3d Cu 2p Au 4f5/2 3/2 7/2 . Cu 2p Au 4f3/2 7/2 . X KS D ISO 15472 X . 5.7 ( 2 %) . 5.8 5.4.2 . . 5.9 (imaging) 5
4、.9.1 . 5.9.2, 5.9.3, 5.9.4 . 5.9.2 1 , 30 % . (line trace) FWHM . , . 50 100 % 50 % . 1. 30 % . 2. FWHM 12 88 % . . 3. . . 5.9.3 2 , 2 , 2 D ISO 15470：2005 . 90 , . , 90 . , 12 88 % . 1. FWHM 12 88 % . 2. , . 3. , 64 % . 4. . . 5.9.4 3 5 , . 90 . 12 88 % . 1. , FWHM 12 88 % . 2. , 1 . 5.10 XPS . , 5
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7、1422347 Fax. (063)214 2238 506301 62115( 4 ) (062)95314357 Fax. (062)953 1438 641210 298 7 ( 6 ) (055)2121212 Fax. (055)212 1213 683804 7582( 2 ) (052)28966013 Fax. (052)289 6604 425020 541 3( 4 ) (031)48761914 Fax. (031)487 6195 730350 9230( 8 ) (054)4736954 Fax. (054)473 6955 480848 2 487 6( 3 ) (031)82981824 Fax. (031)8298185 KS D ISO 15470：2005 KSKSKSSKSKS KSKS SKS KSKS SKSKS KSKSKSSurface chemical analysisX ray photoelectron spectroscopyDescription of selected instrumental performance parameters ICS 71.040.40 KOREAN STANDARDS ASSOCIATION
