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KS D ISO 18114-2005 Surface chemical analysis－Secondary-ion mass spectrometry－Determination of relative sensitivity factors from ion-implanted reference materials《表面化学分析 次级离子质谱法 测定.pdf

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1、 KSKSKSKS KS D ISO 18114SKSKSKS KSKSKS SKSKS KSKS SKS KS KS D ISO 18114： 2005 2005 12 28 D ISO 18114： 2005 ( ) ( ) ( ) ： ： 2005 12 28 2005 1007 ： ： ( ) ( 02 509 72925) . 7 5 , . ICS 71.040.40 KS D ISO 18114：2005 Surface chemical analysis Secondary-ion mass spectrometry Determination of relative sens

2、itivity factors from ion-implanted reference materials 2003 ISO 18114 Surface chemical analysisSecondary-ion mass spectrometryDetermination of relative sensitivity factors from ion-implanted reference materials . 1. (SIMS) (RSF) . , 1 . 2. . , . KS D ISO 18115 3. KS D ISO 18115 . 4. MAiC, i M A , d

3、, . jAiI i A , / . jkMiI i Mk , / . I A , / . jBGjAN A jn (fluence), . AjRSF , . SIMS 5. (RSF) D ISO 18114：2005 SIMS . RSF . jkikjAMiAiMAMAiNIIC=,RSF (1) . 1 . . 6. SIMS RSF . , . 7. 1 , SIMS 100 . (sputtering) 2 . CRM(certified reference materials) CRM . CRM , (Rutherford) . 8. i Aj , MjAiIk, . MkM

4、iIk M A A . j=niMiAiMAdIIInkjkj1BG,/)(RSF (2) d , . , I Mk . RSF . =niAiMMAdIIInjkkj1BG,)( RSF (3) 9. . a) b) SIMS c) d) 2 D ISO 18114： 2005 3 e) f) ( , ) g) ( ) D ISO 18114：2005 1 WILSON, R.G., STEVIE, F.A., and MAGEE, C.W., Secondary Ion Mass Spectrometry A Practical Handbook for Depth Profiling a

5、nd Bulk Impurity Analysis( ), John Wiley and Sons, New York, 1989, Section 3.1 4 2006 1 23 135513 7017 (02)60094567 (02)600948878 http:/ 607822 1 11( 10) (051)5571239 Fax. (051)557 0430 702012 2 1741( 3 ) (053)38415624 Fax. (053)384 1565 790 380 627( ) (054)2789611 Fax. (054)278 9662 406130 994( 16)

6、 (032)26002607 Fax. (032)260 0268 443766 9065( 9 ) (031)25970009 Fax. (031)259 7010 200041 1 9( 304) (033)252 9423, 254 9423 Fax. (033)256 9423 361802 1508 1( 6 ) (043)23624513 Fax. (043)236 2454 305343 2314( 5 ) (042)86423013 Fax. (042)864 2304 330 816 43 5( 1204 ) (041)58905003 Fax. (041)589 0504

7、561841 1 337 2( 7 ) (063)21422347 Fax. (063)214 2238 506301 62115( 4 ) (062)95314357 Fax. (062)953 1438 641210 298 7 ( 6 ) (055)2121212 Fax. (055)212 1213 683804 7582( 2 ) (052)28966013 Fax. (052)289 6604 425020 541 3( 4 ) (031)48761914 Fax. (031)487 6195 730350 9230( 8 ) (054)4736954 Fax. (054)473 6955 480848 2 487 6( 3 ) (031)82981824 Fax. (031)8298185 KS D ISO 18114：2005 KSKSKSSKSKS KSKS SKS KSKS SKSKS KSKSKSSurface chemical analysisSecondary ion mass spectrometryDetermination of relative sensitivity factors from ion implanted reference materials ICS 71.040.40 KOREAN STANDARDS ASSOCIATION

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