1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS D ISO 22029 KS D ISO 22029: 2013 2013 6 5 http:/www.kats.go.krKS D ISO 22029:2013 : ( ) ( ) ( ) : (http:/www.standard.go.kr) : :2004 12 30 :2013 6 5 2013-0189 : : ( 02-509-7274) (http:/www.kats.go.kr). 10 5 , . KS D ISO 22029:2013 i ii 1 1 2 .1 2.1 .1 2.2
2、 2 2.3 .3 2.4 4 2.5 6 3 EMSA .6 8 KS D ISO 22029:2013 ii 2003 1 ISO 22029, Standard file format for spectral data exchange . EMSA/MAS 1991 10 . (PC) . ISO/TC 202( , :International Organization for Standardization, Technical Committee for Microbeam Analysis) . . TC 202 TC 201 . . , . , , . . EMSA . .
3、 . ( 1, 2, 3, 4 ) . , . , . . . EMSA MAS . . , ( ) . . a) ( ). b) . c) , , . , . d) ( ) . e) BITNET, ARPANET, ( ) . . f) EMSA/MAS (XEDS, EELS, AES ) . , . g) . h) (: ) KS D ISO 22029:2013 iii . i) . , . . EMMPDL(Electron Microscopy and Microanalysis Public Domain Library) ( 1 ). , ( 5 ). EMSA , ( 3,
4、 4 ). 60 VMAS ( 6 ). JCAMP-DX , . JCAMP-DX , X , , . XEDS . . . . . . (TIFF) EMSA MAS . , . KS D ISO 22029:2013 Standard file format for spectral data exchange 1 EMSA/MAS . . (BITNET, ARPANET), ( ), (: ) . , , . , . . 2 2.1 ASCII(text) . (header lines) . 15 (keyword) (field: ) . . . , . , . . * * EM
5、SA/MAS . , . * * * * * * , , . KS D ISO 22029:2013 2 “#” . 13 . EMSA/MAS ( EMSA/MAS .) 1 # , 13 ( ) . 12 , # . , ( 1 ). , . - #Xunits #XUNITS . 14 , 15 ( ) / , . 16 . CRT 79 . 15 , 64 ( 79 15) . (carriage return) (linefeed combination)(, ) . (space)(ASCII 32), (ASCII 13) (ASCII 10) , ASCII . !“#$%?
6、(ASCII 33 64) ABCDEFGHIJKLMNOPQRSTUVWXYZ(ASCII 65 90) abcdefghijklmnopqrstuvwxyz(ASCII 97 122) | (ASCII 91 96, ASCII 123 126) TAB . , 1 , . .TXT, .EMSA .MSA . 2.2 , . , . . . . . #TITLE , . #TITLE , . : #FORMAT “EMSA/MAS spectral data file“ #VERSION ( TC 202 v1.0) #TITLE . . 64 #DATE , DD MMM YYYY K
7、S D ISO 22029:2013 3 #TIME . HH: MM 24 #OWNER #NPOINTS X Y 1. NPOINTS. EMSA 4 096 . . #NCOLUMNS 1. NCOLUMNS 5. when DATATYPE Y 1. NCOLUMNS 3. when DATATYPE XY 1 . . #XUNITS X , : eV #YUNITS Y , : counts #DATATYPE : Y X, Y . Y XY . #XPERCHAN X #OFFSET xunits ( ) #SPECTRUM #ENDOFDATA 2.3 . #SPECTRUM :
8、 . #ENDOFDATA : . #DATATYPE . x ( ) , #NCOLUMNS y . Y 1 #NCOLUMNS 5 . y ( .) (: 3.142E 3) , . x #XPERCHAN, #OFFSET #CHOFFSET . (#NCOLUMNS 1) . #NCOLUMNS (x, y) . XY 1 #NCOLUMNS 3 . x y . (x, y) . (#NCOLUMNS1) . . . , . . KS D ISO 22029:2013 4 1 0 0 (: 0.1 .1). . ( ) . y X (x, y) . . X (map) x y . TI
9、FF . 2.4 #CHECKSUM #SPECTRUM , #CHOFFSET . CHECKSUM , CHECKSUM . (integrity) . ( 20 ) ASCII ( 64 ) . #CHECKSUM . . , , . . RN . nCS n . : #SIGNALTYPE , 3CS . EDS WDS ELS CLS GAM #XUNITS X 64CS #YUNITS Y 64CS #CHOFFSET X 0 ( ) #COMMENT 64CS . / : #BEAMKV kV RN #EMISSION A RN #PROBECUR nA RN #BEAMDIAM
10、 nm RN #MAGCAM RN. , mm #CONVANGLE (milliradian) RN #OPERMODE . 5CS . IMAGE DIFFR KS D ISO 22029:2013 5 SCIMG SCDIF : #THICKNESS nm RN #XTILTSTGE X RN #YTILTSTGE Y RN #XPOSITION X / RN #YPOSITION Y / RN #ZPOSITION Z / RN ELS : #DWELLTIME (millisecond) / RN #INTEGTIME RN #COLLANGLE RN #ELSDET ELS , 6
11、CS SERIAL ELS PARALL ELS EDS : #ELEVANGLE EDS, WDS (elevation angle)RN #AZIMANGLE EDS, WDS (azimuthal angle)RN #SOLIDANGLE (steradian) RN #LIVETIME (second) RN #REALTIME RN #TBEWIND RN #TAUWIND Au / RN #TDEADLYR RN #TACTLYR RN #TALWIND RN #TPYWIND RN #TBNWIND - RN #TDIWIND RN #THCWIND RN #EDSDET X ,
12、 5CS . SIBEW Si(Li) SIUTW Si(Li) SIWLS Si(Li) GEBEW Ge GEUTW Ge GEWLS Ge #CHECKSUM 32 bit #CHECKSUM . CHECKSUM ASCII . KS D ISO 22029:2013 6 CHECKSUM . CHECKSUM , . . # , #SPECTRUM EMSA/MAS . . EMSA/MAS . . #TCONLYR RN #TMCONLYR #FILENAME , .TXT, .EMSA, .MSA . 2.5 #ENDOFDATA #CHECKSUM . #ENDOFDATA .
13、 #CHECKSUM , #CHECKSUM #ENDOFDATA . 3 EMSA . 1 x, y ELS . 1 X, Y #FORMAT : EMSA/MAS spectral data file #VERSION : TC 202 v1.0 #TITLE : NIO EELS OK SHELL #DATE : 01-OCT-1991 #TIME : 12: 00 #OWNER : EMSA/MAS TASK FORCE #NPOINTS : 20. #NCOLUMNS : 1. #XUNITS : Energy loss(eV) #YUNITS : Intensity #DATATY
14、PE : XY #XPERCHAN : 3.1 #OFFSET : 520.13 #CHOFFSET : 168 #SIGNALTYPE : ELS #XLABEL : Energy #YLABEL : Counts #BEAMKV kV : 120.0 #EMISSION A : 5.5 KS D ISO 22029:2013 7 1 X, Y ( ) #PROBECUR nA : 12.345 #BEAMDIAM nm : 100.0 #MAGCAM : 100. #CONVANGLE mR : 1.5 #COLLANGLE mR : 3.4 #OPERMODE : IMAG #THICK
15、NESS nm : 50. #DWELLTIME ms : 100. #ELSDET : SERIAL #SPECTRUM : Spectral data starts here 520.13, 4066.0 523.22, 3996.0 526.32, 3932.0 529.42, 3923.0 532.51, 5602.0 535.61, 5288.0 538.70, 7234.0 541.80, 7809.0 544.90, 4710.0 547.99, 5015.0 551.09, 4366.0 554.18, 4524.0 557.28, 4832.0 560.38, 5474.0
16、563.47, 5718.0 565.79, 5034.0 568.89, 4651.0 571.99, 4613.0 574.31, 4637.0 577.40, 4429.0 580.50, 4217.0 #ENDOFDATA KS D ISO 22029:2013 8 1 ZALUZEC, N.J., In the Computer Corner, EMSA Bulletin, 17: 1(1987), pp. 93 94, and RWEMMPDL Abstract, EMSA Bulletin, 17: 2(Nov 1987), p. 92 2 MCDONALD, R.S. and
17、WILKS, P.A., JCAMP-DX: A Standard for Exchange of Infrared Spectra in Computer Readable Form, Applied Spectroscopy, 42(1988) pp. 151 162 3 LYMAN, C., Task Force Committee Report, EMSA Bulletin, 19(1989) pp. 97 100 4 HUNT, J.A. and FIORI, C.E., A Proposed EMSA/MAS Data Format for the Transfer of Spec
18、tra, EMSA Bulletin, 19(1989), pp. 100 105 5 ZALUZEC, N.J., RWEMMPDL-VERSION 1.1 Abstract, EMSA Bulletin, 19(1989), p. 114 6 DENCH, W.A., HAZEL, L.B., SEAH, M.P and the VAMAS Community, VAMAS Surface Chemical Analysis Standard Data Transfer Format with Skeleton Decoding Programs, Surface and Interface Analysis, 13(1988), pp. 63 122 153787 1 145 3(16) (02)26240114 (02)26240148 http:/ Korean Agency for Technology and Standards http:/www.kats.go.kr KS D ISO 22029:2013 KSKSKS SKSKS KSKS SKS KS SKS KSKS SKSKS KSKSKS Standard file format for spectral data exchange ICS 71.040.99