1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS D ISO 9220 KS D ISO 9220:2009 2009 12 30 http:/www.kats.go.krKS D ISO 9220:2009 : ( ) ( ) NFM () () NS ( ) : (http:/www.standard.go.kr) ： ：1999 12 8 ：2009 12 30 2009-0983 ： ： ( 02-509-7274) (http:/www.kats.go.kr). 10 5 , . KS D ISO 9220:2009 Metallic coat
2、ings Measurement of coating thickness Scanning electron microscope method 1988 1 ISO 9220, Metallic coatings Measurement of coating thickness Scanning electron microscope method . ( ) . 1 (SEM) . 10 % 0.1 m ( ) . (ISO 1463) . 2 . . ( ) . KS D 0246, KS D 8317, KS D 8519, (ISO 1463 ) KS D ISO 2064, IS
3、O 1463, Metallic and oxide coatings Measurement of coating thickness Microscopical method 3 KS D ISO 2046 KS D 8317 . 3.1 KS D ISO 9220:2009 2 4 . . 5 5.1 (Scanning Electron Microscope： SEM) 50 nm . 5.2 SEM (SEM stage micrometer) (graticule) SEM . 5 % . 6 . 6.1 (substrate) . 6.2 . 10 1.5 % . 6.3 (be
4、am) ( ) . . 6.4 . 6.5 . , (6.6 A.1 ). KS D ISO 9220:2009 3 6.6 . . 6.7 . . 6.8 . , . , . . 6.9 . . X- (A.3.5 ) (backscatter image)(A.3.6 ) . 6.10 . (field of view) 1.5 3 . 5 % 25 % . . 6.11 . . 6.12 6.12.1 . . 6.12.2 . (scan rotation), . x, y, z KS D ISO 9220:2009 4 . 6.13 , . . . 7 . a) . b) . c) .
5、 d) . e) . A . 8 8.1 (5.1) (5.2) . 6. 9. 10. . . 8.2 2 1 , . 8.3 8.3.1 0.1 mm . (diffraction plate reader) . 8.3.2 3 mm 3 . 8.4 . KS D ISO 9220:2009 5 0001cmll ： lm ： (mm) lc ： (m) 9 9.1 (5.1) . 6. 10. . 9.2 , . 9.2.1 9.2.2 . 9.2.1 9.2.1.1 . 9.2.1.2 0.1 mm . . 9.2.2 9.2.2.1 . 9.2.2.2 (inflection) .
6、0.1 mm . A . 9.3 . 0001mld d ： (m) lm ： (mm) ： (8.4 ) 10 , 10 % 0.1 m( .) (A.3.7 ). KS D ISO 9220:2009 6 11 m 0.01 m . 1 m 3 . . 12 . a) . b) c) d) e) f) g) h) i) ： KS D ISO 9220:2009 7 A ( ) A.0 . . . A.1 (mounting) . 10 m . . . . , . . A.2 A.2.1 . , (90 ), . . . 100 180 240, 320, 500 600 . 3040 ,
7、90 . 69 m, 1 m 0.5 m . A.2.2 . . A.2.3 . . . A.3 KS D ISO 9220:2009 8 A.3.1 . 10 % . . A.3.2 . . . A.3.3 . . . A.3.4 . A.3.5 X- (EDS) . EDS 1 m . A.3.6 1 0.1 m . A.3.7 . 0.039 m , 0.02 m 0.02 m . 153787 1 92 3(13) (02)26240114 (02)262401489 http:/ KS D ISO 9220:2009 KSKSKS SKSKS KSKS SKS KS SKS KSKS SKSKS KSKSKS Metallic coatingsMeasurement of coating thicknessScanning electron microscope method ICS 25.220.40 Korean Agency for Technology and Standards http:/www.kats.go.kr
