DIN 58739-1-2002 Production in optical engineering - Workpiece receptions for optics - Part 1 Vacuum chucks《光学加工 光学加工工件夹具 第1部分 真空夹头》.pdf

1、G27G28G38G37G36G26G2bG28G3G31G32G35G30G18G1bG1aG16G1cG10G14 G27G2cG31G3G27G48G58G57G56G46._G4bG48G56G3G2cG51G56G57G4cG57G58G57G3G49G81G55G3G31G52G55G50G58G51G4aG3G48G11 G39G11G3Gb1G3G2dG48G47G48G3G24G55G57G3G47G48G55G3G39G48G55G59G4cG48G4fG49G6cG4fG57G4cG4aG58G51G4aGfG3G44G58G46._G4bG3G44G58G56G5dG5

2、8G4aG56G5aG48G4cG56G48GfG51G58G55G3G50G4cG57G3G2aG48G51G48G4bG50G4cG4aG58G51G4aG3G47G48G56G3G27G2cG31G3G27G48G58G57G56G46._G4bG48G56G3G2cG51G56G57G4cG57G58G57G3G49G81G55G3G31G52G55G50G58G51G4aG3G48G11G39G11GfG3G25G48G55G4fG4cG51GfG3G4aG48G56G57G44G57G57G48G57G11G24G4fG4fG48G4cG51G59G48G55G4eG44G58G4

3、9G3G47G48G55G3G31G52G55G50G48G51G3G47G58G55G46._G4bG3G25G48G58G57G4bG3G39G48G55G4fG44G4aG3G2aG50G45G2bGfG3G14G13G1aG1aG15G3G25G48G55G4fG4cG51G2cG26G36G3G16G1aG11G13G15G13G33G55G52G47G58G46._G57G4cG52G51G3G4cG51G3G52G53G57G4cG46._G44G4fG3G48G51G4aG4cG51G48G48G55G4cG51G4aG3Ga4G3G3aG52G55G4eG53G4cG48G4

4、6._G48G3G55G48G46._G48G53G57G4cG52G51G56G3G49G52G55G3G52G53G57G4cG46._G56 Ga4G33G44G55G57 G14G1dG3G39G44G46._G58G58G50G3G46._G4bG58G46._G4eG56G33G55G52G47G58G46._G57G4cG52G51G3G52G53G57G4cG54G58G48G3Ga4G3G27G4cG56G53G52G56G4cG57G4cG49G56G3G47G48G3G56G48G55G55G44G4aG48G3G53G52G58G55G3G4fGa9G52G53G57G

5、4cG54G58G48G3Ga4G3G33G44G55G57G4cG48 G14G1dG30G44G51G47G55G4cG51G56G3G6aG3G59G4cG47G48G39G52G55G5aG52G55G57G27G4cG48G56G48G3G31G52G55G50G3G5aG58G55G47G48G3G59G52G50G3G24G55G45G48G4cG57G56G44G58G56G56G46._G4bG58G56G56G3Gb3G29G48G55G57G4cG4aG58G51G4aG56G50G4cG57G57G48G4fG3G47G48G55G3G32G53G57G4cG4eGa6

6、G3G4cG50G3G31G52G55G50G48G51G44G58G56G56G46._G4bG58G56G56G3G29G48G4cG51G50G48G46._G4bG44G51G4cG4eG3G58G51G47G32G53G57G4cG4eG3GbG31G24G29G58G32GcG3G48G55G44G55G45G48G4cG57G48G57G11G27G2cG31G18G1bG1aG16G1cG3Gb3G32G53G57G4cG4eG49G48G55G57G4cG4aG58G51G4aG3Ga4G3G36G53G44G51G51G50G4cG57G57G48G4fG3G49G81G5

7、5G3G47G4cG48G3G32G53G57G4cG4eGa6G3G45G48G56G57G48G4bG57G3G44G58G56G1dGa4 G37G48G4cG4f G14G1dG3G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G51Ga4 G37G48G4cG4f G15G1dG3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G51G3G50G4cG57G3G30G48G50G45G55G44G51G48G51Ga4 G37G48G4cG4f G16G1dG3G36G53G44G51G51

8、G5dG44G51G4aG48G51G3G49G81G55G3G28G4cG51G5dG48G4fG4fG4cG51G56G48G51Ga4 G37G48G4cG4f G17G1dG3G36G53G44G51G51G5dG44G51G4aG48G51G3G49G81G55G3G37G55G44G4aG4eG7cG55G53G48G55G62G51G47G48G55G58G51G4aG48G51G2aG48G4aG48G51G81G45G48G55G3G27G2cG31 G18G1bG1aG16G1cG1dG14G1cG1aG19G10G13G19G3G5aG58G55G47G48G51G3G4

9、9G52G4fG4aG48G51G47G48G3G62G51G47G48G55G58G51G4aG48G51G3G59G52G55G4aG48G51G52G50G50G48G51G1dG44Gc G31G52G55G50G3G4cG51G3G59G4cG48G55G3G37G48G4cG4fG48G3G44G58G49G4aG48G57G48G4cG4fG57G1eG45Gc G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G51G3G51G48G58G3G44G58G49G4aG48G51G52G50G50G48G51G11G29G55G81G4bG48G

10、55G48G3G24G58G56G4aG44G45G48G51G27G2cG31G18G1bG1aG16G1cG1dG3G14G1cG1aG19G10G13G19G28G51G57G5aG58G55G49 G2dG44G51G58G44G55G3G15G13G13G15G29G52G55G57G56G48G57G5dG58G51G4aG3G36G48G4cG57G48G3G15G3G58G51G47G3G16G31G52G55G50G48G51G44G58G56G56G46._G4bG58G56G56G3G29G48G4cG51G50G48G46._G4bG44G51G4cG4eG3G58G5

11、1G47G3G32G53G57G4cG4eG3GbG31G24G29G58G32GcG3G4cG50G3G27G2cG31G3G27G48G58G57G56G46._G4bG48G56G3G2cG51G56G57G4cG57G58G57G3G49G81G55G3G31G52G55G50G58G51G4aG3G48G11G39G11G32G53G57G4cG4eG49G48G55G57G4cG4aG58G51G4aG36G53G44G51G51G50G4cG57G57G48G4fG3G49G81G55G3G47G4cG48G3G32G53G57G4cG4eG37G48G4cG4f G14G1dG

12、3G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G51G35G48G49G11G3G31G55G11G3G27G2cG31G3G18G1bG1aG16G1cG10G14G1dG15G13G13G15G10G13G14G33G55G48G4cG56G4aG55G11G3G13G18 G39G48G55G57G55G11G10G31G55G11G3G13G13G13G18G30G4cG57G27G2cG31G3G18G1bG1aG16G1cG10G15G1dG15G13G13G15G10G13G14GfG27G2cG31G3G18G1bG1aG16G1cG10

13、G16G1dG15G13G13G15G10G13G14GfG27G2cG31G3G18G1bG1aG16G1cG10G17G1dG15G13G13G15G10G13G14G28G55G56G44G57G5dG3G49G81G55G27G2cG31G3G18G1bG1aG16G1cG1dG14G1cG1aG19G10G13G19G27G2cG31G18G1bG1aG16G1cG10G14G1dG15G13G13G15G10G13G14G15G14G24G51G5aG48G51G47G58G51G4aG56G45G48G55G48G4cG46._G4bG27G4cG48G56G48G3G31G52

14、G55G50G3G4aG4cG4fG57G3G49G81G55G3G36G53G44G51G51G50G4cG57G57G48G4fGfG3G47G4cG48G3G4cG51G3G47G48G55G3G32G53G57G4cG4eG45G48G44G55G45G48G4cG57G58G51G4aG3G45G48G4cG50G3G36G46._G4bG4fG48G4cG49G48G51G3G58G51G47G3G33G52G4fG4cG48G55G48G51G3G59G52G51G3G28G4cG51G5dG48G4fG4fG4cG51G56G48G51G3G58G51G47G44G58G49G

15、3G37G55G44G4aG4eG7cG55G53G48G55G51G3G4aG48G4eG4cG57G57G48G57G48G51G3G2fG4cG51G56G48G51G3G28G4cG51G56G44G57G5dG3G49G4cG51G47G48G51G11G36G4cG48G3G4fG48G4aG57G3G30G44G89G48GfG3G2fG44G4aG48G57G52G4fG48G55G44G51G5dG48G51G3G58G51G47G3G24G51G56G46._G4bG4fG81G56G56G48G3G59G52G51G3G39G44G4eG58G58G50G44G58G49

16、G51G44G4bG50G48G51G3G49G48G56G57G11G15 G31G52G55G50G44G57G4cG59G48G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G27G4cG48G56G48G3G31G52G55G50G3G48G51G57G4bG6cG4fG57G3G47G58G55G46._G4bG3G47G44G57G4cG48G55G57G48G3G52G47G48G55G3G58G51G47G44G57G4cG48G55G57G48G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G3G29G48G56G57G

17、4fG48G4aG58G51G4aG48G51G3G44G58G56G3G44G51G47G48G55G48G51G3G33G58G45G4fG4cG4eG44G57G4cG52G51G48G51G11G27G4cG48G56G48G3G51G52G55G50G44G57G4cG59G48G51G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G3G56G4cG51G47G3G44G51G3G47G48G51G3G4dG48G5aG48G4cG4fG4cG4aG48G51G3G36G57G48G4fG4fG48G51G3G4cG50G3G37G48G5bG57G3G5

18、dG4cG57G4cG48G55G57GfG3G58G51G47G3G47G4cG48G3G33G58G45G4fG4cG4eG44G57G4cG52G51G48G51G3G56G4cG51G47G51G44G46._G4bG56G57G48G4bG48G51G47G3G44G58G49G4aG48G49G81G4bG55G57G11G3G25G48G4cG3G47G44G57G4cG48G55G57G48G51G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G3G4aG48G4bG7cG55G48G51G3G56G53G6cG57G48G55G48G3G62G51

19、G47G48G55G58G51G4aG48G51G3G52G47G48G55G3G68G45G48G55G44G55G45G48G4cG57G58G51G4aG48G51G3G51G58G55G5dG58G3G47G4cG48G56G48G55G3G31G52G55G50GfG3G49G44G4fG4fG56G3G56G4cG48G3G47G58G55G46._G4bG3G62G51G47G48G55G58G51G4aG3G52G47G48G55G3G68G45G48G55G44G55G45G48G4cG57G58G51G4aG3G48G4cG51G4aG48G44G55G45G48G4cG5

20、7G48G57G3G56G4cG51G47G11G3G25G48G4cG3G58G51G47G44G57G4cG48G55G57G48G51G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G4aG4cG4fG57G3G47G4cG48G3G4fG48G57G5dG57G48G3G24G58G56G4aG44G45G48G3G47G48G55G3G4cG51G3G25G48G5dG58G4aG3G4aG48G51G52G50G50G48G51G48G51G3G33G58G45G4fG4cG4eG44G57G4cG52G51G3GbG48G4cG51G56G46._G4

21、bG4fG4cG48G89G4fG4cG46._G4bG3G62G51G47G48G55G58G51G4aG48G51GcG11G27G2cG31G18G13G1cGfG3G29G55G48G4cG56G57G4cG46._G4bG48 Ga4G29G52G55G50G48G51GfG3G30G44G89G48G11G27G2cG31G19G16G16G1bGfG3G28G4cG51G49G81G4bG55G55G4cG4fG4fG48G51G11G27G2cG31G2cG36G32G15G1aG19G1bG10G14GfG3G24G4fG4fG4aG48G50G48G4cG51G57G52G

22、4fG48G55G44G51G5dG48G51G3Ga4G3G37G48G4cG4fG14G1dG3G37G52G4fG48G55G44G51G5dG48G51G3G49G81G55G3G2fG6cG51G4aG48G51G10G3G58G51G47G3G3aG4cG51G4eG48G4fG50G44G89G48G3G52G4bG51G48G3G48G4cG51G5dG48G4fG51G48G3G37G52G4fG48G55G44G51G5dG10G48G4cG51G57G55G44G4aG58G51G4aG1eG3G2cG47G48G51G57G4cG56G46._G4bG3G50G4cG5

23、7G3G2cG36G32G15G1aG19G1bG10G14G1dG14G1cG1bG1cG11G16 G30G44G89G48GfG3G25G48G5dG48G4cG46._G4bG51G58G51G4aG30G44G89G48G3G4cG51G3G30G4cG4fG4fG4cG50G48G57G48G55G24G4fG4fG4aG48G50G48G4cG51G57G52G4fG48G55G44G51G5dG48G51G1dG3G2cG36G32G3G15G1aG19G1b Ga4G50G25G48G5dG48G4cG46._G4bG51G58G51G4aG3G48G4cG51G48G55G

24、3G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G3GbG39GcG3G51G44G46._G4bG3G27G2cG31G18G1bG1aG16G1cG10G14G3G50G4cG57G3G24G51G56G46._G4bG4fG58G56G56G3 G47G14G20 G15G18 G50G50GfG3 G4fG14G20 G14G18 G50G50G3G58G51G47G3aG48G55G4eG56G57G52G49G49G3G36G57G44G4bG4fG3GbG36G57GcG1dG24G58G49G51G44G4bG50G48G3G27G2cG3

25、1G18G1bG1aG16G1cGa4G39Ga4G15G18 G14G18G36G57G25G4cG4fG47G14G3Ga4G3G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G27G2cG31G18G1bG1aG16G1cG10G14G1dG15G13G13G15G10G13G14G16G17G3aG48G55G4eG56G57G52G49G49G24G4fG58G50G4cG51G4cG58G50G3GbG24lGcG3G52G47G48G55G3G51G4cG46._G4bG57G3G55G52G56G57G48G51G47G48G55G3G36G

26、57G44G4bG4fG3GbG36G57GcGfG3G36G52G55G57G48G3G51G44G46._G4bG3G3aG44G4bG4fG3G47G48G56G3G2bG48G55G56G57G48G4fG4fG48G55G56G11G2fG4cG57G48G55G44G57G58G55G4bG4cG51G5aG48G4cG56G48G27G2cG31G18G1bG1aG19G1aGfG3G32G53G57G4cG4eG49G48G55G57G4cG4aG58G51G4aG3Ga4G3G3aG48G55G4eG5dG48G58G4aG10G3G58G51G47G3G3aG48G55G4

27、eG56G57G81G46._G4eG57G55G6cG4aG48G55G44G51G56G46._G4bG4fG58G56G56G3G49G81G55G3G56G46._G4bG51G48G4fG4fG4fG44G58G49G48G51G47G48G3G32G53G57G4cG4eG50G44G56G46._G4bG4cG51G48G51G11G37G44G45G48G4fG4fG48 G14Ga4G3G30G44G89G48G3G49G81G55G3G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G51G30G44G89G48G3G4cG51G3G30G4cG4fG4fG4cG50G48G57G48G55G47G16G47G14G4bG19G4fG14G4bG45G13G17G13G3G45G4cG56G3G13G17G13 G14G15G15G13G18G13G13G1cGfG15 G17 G14GfG1aG13G17G13G3G45G4cG56G3G16G13G13 G15G18G14G18G15G13G15G18G17G15G15G13GfG18 G1a G15GfG19G16G13G13G3G45G4cG56G3G18G13G13 G17G13G17G15G19G15Ga4Ga4Ga4G47G15 G13GeG13GfG15