DIN 58739-2-2002 Production in optical engineering - Workpiece receptions for optics - Part 2 Chucks with membranes《光学加工 光学加工工件夹具 第2部分 带隔膜夹头》.pdf

1、G27G28G38G37G36G26G2bG28G3G31G32G35G30G18G1bG1aG16G1cG10G15 G27G2cG31G3G27G48G58G57G56G46._G4bG48G56G3G2cG51G56G57G4cG57G58G57G3G49G81G55G3G31G52G55G50G58G51G4aG3G48G11 G39G11G3Gb1G3G2dG48G47G48G3G24G55G57G3G47G48G55G3G39G48G55G59G4cG48G4fG49G6cG4fG57G4cG4aG58G51G4aGfG3G44G58G46._G4bG3G44G58G56G5dG5

2、8G4aG56G5aG48G4cG56G48GfG51G58G55G3G50G4cG57G3G2aG48G51G48G4bG50G4cG4aG58G51G4aG3G47G48G56G3G27G2cG31G3G27G48G58G57G56G46._G4bG48G56G3G2cG51G56G57G4cG57G58G57G3G49G81G55G3G31G52G55G50G58G51G4aG3G48G11G39G11GfG3G25G48G55G4fG4cG51GfG3G4aG48G56G57G44G57G57G48G57G11G24G4fG4fG48G4cG51G59G48G55G4eG44G58G4

3、9G3G47G48G55G3G31G52G55G50G48G51G3G47G58G55G46._G4bG3G25G48G58G57G4bG3G39G48G55G4fG44G4aG3G2aG50G45G2bGfG3G14G13G1aG1aG15G3G25G48G55G4fG4cG51G2cG26G36G3G16G1aG11G13G15G13G33G55G52G47G58G46._G57G4cG52G51G3G4cG51G3G52G53G57G4cG46._G44G4fG3G48G51G4aG4cG51G48G48G55G4cG51G4aG3Ga4G3G3aG52G55G4eG53G4cG48G4

4、6._G48G3G55G48G46._G48G53G57G4cG52G51G56G3G49G52G55G3G52G53G57G4cG46._G56 Ga4G33G44G55G57 G15G1dG3G26G4bG58G46._G4eG56G3G5aG4cG57G4bG3G50G48G50G45G55G44G51G48G56G33G55G52G47G58G46._G57G4cG52G51G3G52G53G57G4cG54G58G48G3Ga4G3G27G4cG56G53G52G56G4cG57G4cG49G56G3G47G48G3G56G48G55G55G44G4aG48G3G53G52G58G5

5、5G3G4fGa9G52G53G57G4cG54G58G48G3Ga4G3G33G44G55G57G4cG48 G15G1dG33G52G55G57G48G3G53G4cG71G46._G48G3G6aG3G50G48G50G45G55G44G51G48G39G52G55G5aG52G55G57G27G4cG48G56G48G3G31G52G55G50G3G5aG58G55G47G48G3G59G52G50G3G24G55G45G48G4cG57G56G44G58G56G56G46._G4bG58G56G56G3Gb3G29G48G55G57G4cG4aG58G51G4aG56G50G4cG5

6、7G57G48G4fG3G47G48G55G3G32G53G57G4cG4eGa6G3G4cG50G3G31G52G55G50G48G51G44G58G56G56G46._G4bG58G56G56G3G29G48G4cG51G50G48G46._G4bG44G51G4cG4eG3G58G51G47G32G53G57G4cG4eG3GbG31G24G29G58G32GcG3G48G55G44G55G45G48G4cG57G48G57G11G27G2cG31G18G1bG1aG16G1cG3Gb3G32G53G57G4cG4eG49G48G55G57G4cG4aG58G51G4aG3Ga4G3G3

7、6G53G44G51G51G50G4cG57G57G48G4fG3G49G81G55G3G47G4cG48G3G32G53G57G4cG4eGa6G3G45G48G56G57G48G4bG57G3G44G58G56G1dGa4 G37G48G4cG4f G14G1dG3G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G51Ga4 G37G48G4cG4f G15G1dG3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G51G3G50G4cG57G3G30G48G50G45G55G44G51G48G5

8、1Ga4 G37G48G4cG4f G16G1dG3G36G53G44G51G51G5dG44G51G4aG48G51G3G49G81G55G3G28G4cG51G5dG48G4fG4fG4cG51G56G48G51Ga4 G37G48G4cG4f G17G1dG3G36G53G44G51G51G5dG44G51G4aG48G51G3G49G81G55G3G37G55G44G4aG4eG7cG55G53G48G55G62G51G47G48G55G58G51G4aG48G51G2aG48G4aG48G51G81G45G48G55G3G27G2cG31 G18G1bG1aG16G1cG1dG14G

9、1cG1aG19G10G13G19G3G5aG58G55G47G48G51G3G49G52G4fG4aG48G51G47G48G3G62G51G47G48G55G58G51G4aG48G51G3G59G52G55G4aG48G51G52G50G50G48G51G1dG44Gc G31G52G55G50G3G4cG51G3G59G4cG48G55G3G37G48G4cG4fG48G3G44G58G49G4aG48G57G48G4cG4fG57G1eG45Gc G39G44G4eG58G58G50G44G58G49G51G44G4bG50G48G51G3G51G48G58G3G44G58G49G4

10、aG48G51G52G50G50G48G51G11G29G55G81G4bG48G55G48G3G24G58G56G4aG44G45G48G51G27G2cG31G18G1bG1aG16G1cG1dG3G14G1cG1aG19G10G13G19G28G51G57G5aG58G55G49 G2dG44G51G58G44G55G3G15G13G13G15G29G52G55G57G56G48G57G5dG58G51G4aG3G36G48G4cG57G48G3G15G3G58G51G47G3G16G31G52G55G50G48G51G44G58G56G56G46._G4bG58G56G56G3G29G

11、48G4cG51G50G48G46._G4bG44G51G4cG4eG3G58G51G47G3G32G53G57G4cG4eG3GbG31G24G29G58G32GcG3G4cG50G3G27G2cG31G3G27G48G58G57G56G46._G4bG48G56G3G2cG51G56G57G4cG57G58G57G3G49G81G55G3G31G52G55G50G58G51G4aG3G48G11G39G11G32G53G57G4cG4eG49G48G55G57G4cG4aG58G51G4aG36G53G44G51G51G50G4cG57G57G48G4fG3G49G81G55G3G47G4

12、cG48G3G32G53G57G4cG4eG37G48G4cG4f G15G1dG3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G51G3G50G4cG57G3G30G48G50G45G55G44G51G48G51G35G48G49G11G3G31G55G11G3G27G2cG31G3G18G1bG1aG16G1cG10G15G1dG15G13G13G15G10G13G14G33G55G48G4cG56G4aG55G11G3G13G19 G39G48G55G57G55G11G10G31G55G11G3G13G13G13G19G30G

13、4cG57G27G2cG31G3G18G1bG1aG16G1cG10G14G1dG15G13G13G14G10G13G14GfG27G2cG31G3G18G1bG1aG16G1cG10G16G1dG15G13G13G15G10G13G14GfG27G2cG31G3G18G1bG1aG16G1cG10G17G1dG15G13G13G15G10G13G14G28G55G56G44G57G5dG3G49G81G55G27G2cG31G3G18G1bG1aG16G1cG1dG14G1cG1aG19G10G13G19G27G2cG31 G18G1bG1aG16G1cG10G15G1dG15G13G13G

14、15G10G13G14G15G14 G24G51G5aG48G51G47G58G51G4aG56G45G48G55G48G4cG46._G4bG27G4cG48G56G48G3G31G52G55G50G3G4aG4cG4fG57G3G49G81G55G3G36G53G44G51G51G50G4cG57G57G48G4fGfG3G47G4cG48G3G4cG51G3G47G48G55G3G32G53G57G4cG4eG45G48G44G55G45G48G4cG57G58G51G4aG3G45G48G4cG50G3G36G46._G4bG4fG48G4cG49G48G51G3G58G51G47G3

15、G33G52G4fG4cG48G55G48G51G3G59G52G51G3G28G4cG51G5dG48G4fG4fG4cG51G56G48G51G3G58G51G47G44G58G49G3G37G55G44G4aG4eG7cG55G53G48G55G51G3G4aG48G4eG4cG57G57G48G57G48G51G3G2fG4cG51G56G48G51G3G28G4cG51G56G44G57G5dG3G49G4cG51G47G48G51G11G36G4cG48G3G4fG48G4aG57G3G30G44G89G48GfG3G2fG44G4aG48G57G52G4fG48G55G44G51

16、G5dG48G51G3G58G51G47G3G56G53G4cG51G47G48G4fG56G48G4cG57G4cG4aG48G3G24G51G56G46._G4bG4fG81G56G56G48G3G59G52G51G3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G51G3G50G4cG57G3G30G48G50G45G55G44G51G48G51G56G52G5aG4cG48G3G47G4cG48G3G30G44G89G48G3G47G48G55G3G5aG48G55G4eG56G57G81G46._G4eG56G48G4cG5

17、7G4cG4aG48G51G3G30G48G50G45G55G44G51G10G24G51G56G46._G4bG4fG81G56G56G48G3G49G48G56G57G11G15 G31G52G55G50G44G57G4cG59G48G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G27G4cG48G56G48G3G31G52G55G50G3G48G51G57G4bG6cG4fG57G3G47G58G55G46._G4bG3G47G44G57G4cG48G55G57G48G3G52G47G48G55G3G58G51G47G44G57G4cG48G55G57G48

18、G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G3G29G48G56G57G4fG48G4aG58G51G4aG48G51G3G44G58G56G3G44G51G47G48G55G48G51G3G33G58G45G4fG4cG4eG44G57G4cG52G51G48G51G11G27G4cG48G56G48G3G51G52G55G50G44G57G4cG59G48G51G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G3G56G4cG51G47G3G44G51G3G47G48G51G3G4dG48G5aG48G4cG4fG4cG4aG4

19、8G51G3G36G57G48G4fG4fG48G51G3G4cG50G3G37G48G5bG57G3G5dG4cG57G4cG48G55G57GfG3G58G51G47G3G47G4cG48G3G33G58G45G4fG4cG4eG44G57G4cG52G51G48G51G3G56G4cG51G47G51G44G46._G4bG56G57G48G4bG48G51G47G3G44G58G49G4aG48G49G81G4bG55G57G11G3G25G48G4cG3G47G44G57G4cG48G55G57G48G51G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G

20、3G4aG48G4bG7cG55G48G51G3G56G53G6cG57G48G55G48G3G62G51G47G48G55G58G51G4aG48G51G3G52G47G48G55G3G68G45G48G55G44G55G45G48G4cG57G58G51G4aG48G51G3G51G58G55G5dG58G3G47G4cG48G56G48G55G3G31G52G55G50GfG3G49G44G4fG4fG56G3G56G4cG48G3G47G58G55G46._G4bG3G62G51G47G48G55G58G51G4aG3G52G47G48G55G3G68G45G48G55G44G55G4

21、5G48G4cG57G58G51G4aG3G48G4cG51G4aG48G44G55G45G48G4cG57G48G57G3G56G4cG51G47G11G3G25G48G4cG3G58G51G47G44G57G4cG48G55G57G48G51G3G39G48G55G5aG48G4cG56G58G51G4aG48G51G4aG4cG4fG57G3G47G4cG48G3G4fG48G57G5dG57G48G3G24G58G56G4aG44G45G48G3G47G48G55G3G4cG51G3G25G48G5dG58G4aG3G4aG48G51G52G50G50G48G51G48G51G3G33

22、G58G45G4fG4cG4eG44G57G4cG52G51G3GbG48G4cG51G56G46._G4bG4fG4cG48G89G4fG4cG46._G4bG3G62G51G47G48G55G58G51G4aG48G51GcG11G27G2cG31G18G13G1cGfG3G29G55G48G4cG56G57G4cG46._G4bG48 Ga4G29G52G55G50G48G51GfG3G30G44G89G48G11G27G2cG31G19G16G16G1bGfG3G28G4cG51G49G81G4bG55G55G4cG4fG4fG48G51G11G27G2cG31G2cG36G32G15

23、G1aG19G1bG10G14GfG3G24G4fG4fG4aG48G50G48G4cG51G57G52G4fG48G55G44G51G5dG48G51G3Ga4G3G37G48G4cG4fG14G1dG3G37G52G4fG48G55G44G51G5dG48G51G3G49G81G55G3G2fG6cG51G4aG48G51G10G3G58G51G47G3G3aG4cG51G4eG48G4fG50G44G89G48G3G52G4bG51G48G3G48G4cG51G5dG48G4fG51G48G3G37G52G4fG48G55G44G51G5dG10G48G4cG51G57G55G44G4a

24、G58G51G4aG1eG3G2cG47G48G51G57G4cG56G46._G4bG3G50G4cG57G3G2cG36G32G15G1aG19G1bG10G14G1dG14G1cG1bG1cG11G16 G30G44G89G48GfG3G25G48G5dG48G4cG46._G4bG51G58G51G4aG30G44G89G48G3G4cG51G3G30G4cG4fG4fG4cG50G48G57G48G55G24G4fG4fG4aG48G50G48G4cG51G57G52G4fG48G55G44G51G5dG48G51G1dG3G2cG36G32 G15G1aG19G1b Ga4G50G

25、25G4cG4fG47 G14G3Ga4G3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G3G50G4cG57G3G30G48G50G45G55G44G51G48G51G3GbG30GcG27G2cG31 G18G1bG1aG16G1cG10G15G1dG15G13G13G15G10G13G14G16G25G48G5dG48G4cG46._G4bG51G58G51G4aG3G48G4cG51G48G55G3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G3G50G4cG57

26、G3G30G48G50G45G55G44G51G48G51G3GbG30GcG3G51G44G46._G4bG3G27G2cG31 G18G1bG1aG16G1cG10G15G3G50G4cG57G3G47G14G20 G15G18 G50G50GfG3G4fG14G20 G15G18 G50G50GfG50 G20 G14G13G13 G50G50G3G44G58G56G3G36G57G44G4bG4fG3GbG36G57GcG1dG3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G3G27G2cG31 G18G1bG1aG16G1cG

27、a4G30Ga4G15G18G15G18 G14G13G13G36G57G17G3aG48G55G4eG56G57G52G49G49G2eG58G53G49G48G55G10G3dG4cG51G4eG10G2fG48G4aG4cG48G55G58G51G4aG48G51G3GbG30G48G56G56G4cG51G4aG3GbG30G56GcGcG3G52G47G48G55G3G51G4cG46._G4bG57G3G55G52G56G57G48G51G47G48G55G3G36G57G44G4bG4fG3GbG36G57GcGfG3G36G52G55G57G48G3G51G44G46._G4b

28、G3G3aG44G4bG4fG3G47G48G56G3G2bG48G55G56G57G48G4fG4fG48G55G56G11G37G44G45G48G4fG4fG48 G14G3Ga4G3G30G44G89G48G3G49G81G55G3G3aG48G55G4eG56G57G81G46._G4eG44G58G49G51G44G4bG50G48G51G3G50G4cG57G3G30G48G50G45G55G44G51G48G51G30G44G89G48G3G4cG51G3G30G4cG4fG4fG4cG50G48G57G48G55G3G47G14G4aG18G4fG14G3G50 G4bG49

29、G57G45G14G15 G15G13G13G14G13G3G45G4cG56G3G14G17G13 G1cG15GfG13G14G13G15G13G14G18G3G45G4cG56G3G14G1cG13 G1cG15GfG18G14G13G16G13G15G13G3G45G4cG56G3G16G14G13 G1cG16GfG13G14G13G17G14G15 G15G18G13G14G13G3G45G4cG56G3G14G17G13 G1cG15GfG13G14G13G15G13G14G18G3G45G4cG56G3G14G1cG13 G1cG15GfG18G14G13G16G13G15G1

30、3G3G45G4cG56G3G16G14G13 G1cG16GfG13G14G13G17G15G18 G15G18G13G14G13G3G45G4cG56G3G14G17G13 G1cG15GfG13G14G13G15G13G14G18G3G45G4cG56G3G14G1cG13 G1cG15GfG18G14G13G16G13G15G13G3G45G4cG56G3G14G19G13 G1c G16GfG13 G14G13 G17G15G18 G17G15G13G14G13G3G45G4cG56G3G14G17G13 G1cG15GfG13G14G13G15G13G14G18G3G45G4cG5

31、6G3G14G1cG13 G1cG15GfG18G14G13G16G13G15G13G3G45G4cG56G3G14G19G13 G1c G16GfG13 G14G13 G17G14G19G13G3G45G4cG56G3G15G15G13 G1c G16GfG13 G14G13 G19G17G13 G17G15G13G15G13G3G45G4cG56G3G14G19G13 G1c G16GfG13 G14G13 G17G14G19G13G3G45G4cG56G3G15G15G13 G1c G16GfG13 G14G13 G19G17G13 G19G15G13G15G13G3G45G4cG56G3G14G19G13 G1c G16GfG13 G14G13 G17G14G19G13G3G45G4cG56G3G15G15G13 G1c G16GfG13 G14G13 G19