1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationCavity resonator method to measure the complex permittivity of low-loss dielectric platesBS EN 62562:2011National forewordThis British Standard is the UK implementation of EN 625
2、62:2011. It is identical to IEC 62562:2010. It supersedes DD IEC/PAS 62562:2008 which is withdrawn.The UK participation in its preparation was entrusted to Technical Committee EPL/46, Cables, wires and waveguides, radio frequency connectors and accessories for communication and signalling.A list of
3、organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. BSI 2011ISBN 978 0 580 61106 3 ICS 17.220.20; 33.120.01Compliance with a
4、 British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Strategy Committee on 31 March 2011.Amendments issued since publicationAmd. No. Date Text affectedBRITISH STANDARDBS EN 62562:2011EUROPEAN STANDARD EN 6
5、2562 NORME EUROPENNE EUROPISCHE NORM February 2011 CENELEC European Committee for Electrotechnical Standardization Comit Europen de Normalisation Electrotechnique Europisches Komitee fr Elektrotechnische Normung Management Centre: Avenue Marnix 17, B - 1000 Brussels 2011 CENELEC - All rights of expl
6、oitation in any form and by any means reserved worldwide for CENELEC members. Ref. No. EN 62562:2011 E ICS 17.220 English version Cavity resonator method to measure the complex permittivity of low-loss dielectric plates (IEC 62562:2010) Mthode de la cavit rsonante pour mesurer la permittivit complex
7、e des plaques dilectriques faibles pertes (CEI 62562:2010) Hohlraumresonanzverfahren zum Messen der komplexen Permittivitt von verlustarmen dielektrischen Platten (IEC 62562:2010) This European Standard was approved by CENELEC on 2011-01-02. CENELEC members are bound to comply with the CEN/CENELEC I
8、nternal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the Central Secretariat or to any CENELE
9、C member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the Central Secretariat has the same status as the official versions. C
10、ENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Roman
11、ia, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. BS EN 62562:2011EN 62562:2011 - 2 - Foreword The text of document 46F/118/CDV, future edition 1 of IEC 62562, prepared by SC 46F, R.F. and microwave passive components, of IEC TC 46, Cables, wires, waveguides, R.F. connectors
12、, R.F. and microwave passive components and accessories, was submitted to the IEC-CENELEC parallel vote and was approved by CENELEC as EN 62562 on 2011-01-02. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and CENELEC shall n
13、ot be held responsible for identifying any or all such patent rights. The following dates were fixed: latest date by which the EN has to be implemented at national level by publication of an identical national standard or by endorsement (dop) 2011-10-02 latest date by which the national standards co
14、nflicting with the EN have to be withdrawn (dow) 2014-01-02 Endorsement notice The text of the International Standard IEC 62562:2010 was approved by CENELEC as a European Standard without any modification. _ BS EN 62562:2011 2 62562 IEC:2010(E) CONTENTS 1 Scope.5 2 Measurement parameters.5 3 Theory
15、and calculation equations .6 3.1 Relative permittivity and loss tangent 6 3.2 Temperature dependence of and tan .9 3.3 Cavity parameters .10 4 Measurement equipment and apparatus .11 4.1 Measurement equipment .11 4.2 Measurement apparatus for complex permittivity .11 5 Measurement procedure.12 5.1 P
16、reparation of measurement apparatus .12 5.2 Measurement of reference level 12 5.3 Measurement of cavity parameters: D , H , r , c , TC .12 5.4 Measurement of complex permittivity of test specimen: , tan .14 5.5 Temperature dependence of and tan .15 Annex A (informative) Example of measured result an
17、d accuracy 16 Bibliography20 Figure 1 Resonator structures of two types 6 Figure 2 Correction term /a.9 Figure 3 Correction terms A/A and B/B .9 Figure 4 Schematic diagram of measurement equipments11 Figure 5 Cavity resonator used for measurement .12 Figure 6 Photograph of cavity resonator for measu
18、rement around 10 GHz .12 Figure 7 Mode chart of cavity resonator .13 Figure 8 Resonance peaks of cavity resonator.13 Figure 9 Resonance frequency f0, insertion attenuation IA0and half-power band width fBW.14 Figure 10 Resonance frequency f0of TE011mode of cavity resonator with dielectric plate (D =
19、35 mm, H = 25 mm) 15 Figure A.1 Measured temperature dependence of f1and Quc17 Figure A.2 Resonance peaks of cavity resonator clamping sapphire plate18 Figure A.3 Measured results of temperature dependence of f0, Qu, and tan for sapphire plate.19 Table A.1 Measured results of cavity parameters.16 Ta
20、ble A.2 Measured results of of and tan for sapphire plate .18 BS EN 62562:201162562 IEC:2010(E) 5 CAVITY RESONATOR METHOD TO MEASURE THE COMPLEX PERMITTIVITY OF LOW-LOSS DIELECTRIC PLATES 1 Scope The object of this International Standard is to describe a measurement method of dielectric properties i
21、n the planar direction of dielectric plate at microwave frequency. This method is called a cavity resonator method. It has been created in order to develop new materials and to design microwave active and passive devices for which standardization of measurement methods of material properties is more
22、 and more important. This method has the following characteristics: the relative permittivity and loss tangent tan values of a dielectric plate sample can be measured accurately and non-destructively; temperature dependence of complex permittivity can be measured; the measurement accuracy is within
23、0,3 % for and within 5106for tan ; fringing effect is corrected using correction charts calculated on the basis of rigorous analysis. This method is applicable for the measurements on the following condition: frequency : 2 GHz Dd . The correction terms shown in Figures 2 and 3 were calculated for 5,
24、1Dd . Therefore, the correction terms are applicable to dielectric plates with any shape if 2,1Dd . Measurement uncertainties of and tan , and tan are estimated as the mean square errors and given respectively by 22222)()()()()(HDtf += (18) 222)tan()tan()tan( +=Q(19) where f , t , D and H are the un
25、certainties of due to standard deviations of 0f , t , D , and H , respectively. Also, tan is mainly attributed to measurement errors of uQ and r , and Qtan and tan are uncertainties of tan due to standard deviations of them, respectively. BS EN 62562:201162562 IEC:2010(E) 9 Figure 2 Correction term
26、/aFigure 3 Correction terms A/A and B/B 3.2 Temperature dependence of and tan Temperature dependence of and tan also can be measured using this method. Temperature coefficient of relative permittivity TC is calculated by equation (3). When the temperature dependences of is linear, particularly, ()T
27、is given by () ( )(100TTTCTT += (20) where T and 0T are the temperatures in measurement and the reference temperature, respectively. In this case, TC can be determined by the least squares method for many measurement points against T . The thermal linear expansion coefficient of the dielectric plate
28、 and that of the conductor cavity cshould be considered in the TC measurement. Furthermore, the temperature coefficient of resistivity TC should be considered in the temperature dependence measurement of tan . Using these parameters, temperature dependent values of ()Tt , ()TD , ()TH , and ()T are g
29、iven by 1011021031041 10 100 a/at/D TE011mode D/H = 1,4 B/BA/ATE011mode D/H = 1,4 = 100 = 1 t/D TE011TE011mode IEC 129/10 IEC 130/10 BS EN 62562:2011 10 62562 IEC:2010(E) () ( )(100TTTtTt += (21) () ( )(10c0TTTDTD += (22) () ( )(10c0TTTHTH += (23) ()()()(1100TTTCTTT += (24) 3.3 Cavity parameters Cav
30、ity parameters such as D , MH 2= , c , r and TC are determined from the measurements for the TE011and TE012resonance modes of an empty cavity without a sample, in advance of complex permittivity measurements. At first, D and H are determined from two measured resonant frequencies, 1f for the TE011mo
31、de and 2f for the TE012mode, by using 22210143ffcjD=(25) 212232ffcH= (26) which can be derived easily from the resonance condition of the cavity. Secondly, c is determined from the measurement of temperature dependence of 1f , by using Tff =11c1 (27) Thirdly, r is determined from the measured values
32、 D , H , 1f , ucQ , which is the unloaded Q-factor for the TE011mode, by the following equation: 322012002322012uc1r2224 +=HDjcHDjQf (28) Finally, TC is determined from the measurement of temperature dependence of 0r= by using TTC=rr1 (29) BS EN 62562:201162562 IEC:2010(E) 11 4 Measurement equipment
33、 and apparatus 4.1 Measurement equipment Figure 4 shows a schematic diagram of two equipment systems required for millimetre wave measurement. For the measurement of dielectric properties, only the information on the amplitude of transmitted power is needed, that is, the information on the phase of
34、the transmitted power is not required. Therefore, a scalar network analyzer can be used for the measurement shown in Figure 4a. However, a vector network analyzer, as shown in Figure 4b, has an advantage in precision of the measurement data. Figure 4a Scalar network analyzer system Figure 4b Vector
35、network analyzer system Figure 4 Schematic diagram of measurement equipments 4.2 Measurement apparatus for complex permittivity The structure of the cavity resonator used in the complex permittivity measurement is shown in Figure 5. A cylindrical cavity containing two cup-shaped parts is machined fr
36、om a copper block. The cavity resonator has 35=D mm, 25=H mm and a flange diameter 5,1fD mm for the measurement around 10 GHz. A specimen with diameter Dd 2,1 is placed between the two parts and clamped with clips to fix this structure. This cavity resonator is excited by the two semi-rigid coaxial
37、cables, each of which has a small loop at the top. The transmission-type resonator is constituted and under-coupled equally to the input and output loops with setting 2211SS = . The photograph is shown in Figure 6. The resonance frequency 0f , half-power band width BWf , and the insertion attenuatio
38、n 0IA (dB) at 0f are measured using a network analyzer by means of the swept-frequency method. The value of uQ is given by BW0L20/)dB(Lu,1010 ffQQQIA=(30) ScalarnetworkanalyzerSweeper MeasurementapparatusDetector DetectorReference lineVector network analyzer Measurement apparatus Reference line Powe
39、r splitter IEC 131/10 IEC 132/10 BS EN 62562:2011 12 62562 IEC:2010(E) Figure 5a Resonator clamping dielectric specimen Figure 5b Empty cavity resonator Figure 5 Cavity resonator used for measurement Coaxial cableCold stageThermal sensorCavity resonatorThermal sensorCavity resonatorCoaxial cableCold
40、 stageFigure 6 Photograph of cavity resonator for measurement around 10 GHz 5 Measurement procedure 5.1 Preparation of measurement apparatus Set up the measurement equipment and apparatus as shown in Figure 4. The cavity resonator and dielectric specimens shall be kept in a clean and dry state, as h
41、igh humidity degrades unloaded Q. The relative humidity shall preferable be less than 60 %. 5.2 Measurement of reference level The reference level, level of full transmission power, is measured first. Connect the reference line to the measurement equipment and measure the full transmission power lev
42、el over the entire measurement frequency range. 5.3 Measurement of cavity parameters: D , H , r , c , TC Rough values of 1f of the TE011resonance mode and 2f of the TE012resonance modes can be estimated from the mode chart shown in Figure 7. Resonance peaks of cavity resonator with 35=D mm and 25=H
43、mm are shown in Figure 8. H=2MPTFEDielectricPlateConductorD2M +ttCoaxialCableRingd 1.2DDf1.5DDd 1.2DDf1.5DPTFE ring Conductor Dielectric plate Coaxial cable H = 2MM t t Df 1,5 Dd 1,2 DDIEC 133/10 IEC 134/10 IEC 135/10 BS EN 62562:201162562 IEC:2010(E) 13 0510152000.511.522.5(D/H)2(fD)210-16 (Hz2m2)T
44、E213TM013TE113TE312TE012,TM112TE212TM012TE112TE311TE011,TM111TM110TE211TM011TE111TM0101.42=1.96(fD)210-16 (Hz2m2)(D/ )2(f D)21016(Hz2m2) 20 15 10 5 0 0 0,5 1,0 1,5 2,0 2,5 IEC 136/10 Figure 7 Mode chart of cavity resonator -80-70-60-50-40-30-20-10010 11 12 13 14 15 16 17f (GHz)IA(dB)TE211TM110TE011,
45、M111TE112TM210TM211TE121TE012,TM112TE312IA(dB)TE211TM110TE011,M111TE112TM210TM211TE121TE012,TM112TE312IA(dB)0 10 20 30 40 50 60 70 80 10 11 12 13 14 15 16 17 f (GHz) TE211TM110TE112TE011,TM111TM210TM211TE121TE312TE012,TM112IEC 137/10 Figure 8 Resonance peaks of cavity resonator Attach PTFE rings to
46、the end plates of the cavity to separate the degenerate TM11(=1, 2) modes from the TE01modes, as shown in Figure 5. Set the empty cavity and adjust the insertion attenuation 0IA to be around 30 dB by changing the distance between two semi-rigid cables, as shown in Figure 9. BS EN 62562:2011 14 62562
47、 IEC:2010(E) -38-36-34-32-30-2812.0444 12.0446 12.0448 12.045 12.0452Frequency (GHz)Insertion attenuatin(dB)3dBf BWf 0IA0Insertion attenuatin(dB)Insertionattenuation (dB)38 f0f (GHz) 28 36 34 32 30 12,0444 12,0446 12,0448 12,0450 12,0452 IA0fBW3 bB IEC 138/10 Figure 9 Resonance frequency f0, inserti
48、on attenuation IA0and half-power band width fBWMeasure 1f and ucQ of the TE011resonance mode and measure 2f of the TE012resonance modes. Calculate u1Q by using equation (30). Calculate the dimensions D , H , and r of cavity resonator from equations (25), (26) and (28). Since the value of r degrades due to oxidation of the metal surface, it shall be measured periodically. Next, measure temperature dependence of 1f and ucQ using the cavi
