1、 KSKSKSKS KS D ISO 22048SKSKSKS KSKSKS SKSKS KSKS SKS KS KS D ISO 22048： 2005 2005 12 28 D ISO 22048：2005 ( ) ( ) ( ) ： ：2005 12 28 20051007 ： ： ( ) ( 02 5097292 5) . 7 5 , . ICS 71.040.40 KS D ISO 22048：2005 Surface chemical analysis - Information format for static secondary-ion mass spectrometry 2
2、004 ISO 22048 Surface chemical analysisInformation format for static secondary-ion mass spectrometry . 1. SIMS . KS D ISO 14976 . 2. . , . KS D ISO 14976 3. KS D ISO 14976 . . 3.1 (package) . , ISO/IEC 2 , . 4. A (ToF ：time of flight) (4) x2 B ToF (4) x (4) E ( ：eV) L ( ：m) u M u m ( ：M) D ISO 22048
3、：2005 t (chopper) T ( ：) t ( ：) x ( , , ) SIMS ToF 5. 5.1 KS D ISO 14976 . KS D ISO 14976 . SIMS , , . , . , , . . . L E m , t . , . 22)(2LttE m = (1) t： . ToF 2 . 22LEA = (2) B = t (3) m x . . m= x2 x (4) = A, = 2AB, = AB2 . . 4 = 0 3 . 3 ( 0 .) (if/then) . ToF (1) . . . . E . (4) m 2 D ISO 22048：2
4、005 . “M” . 3 A . 1 ToF SIMS , , KS D ISO 14976 . A = 3.683 406 219 931 798109 3 , B = 3.674 421 716 518 49210 , , , . 2 3 . 3 KS D ISO 14976 4 . . 5.2 a) 7 ASCII CARRIAGE RETURN 7 ASCII LINE FEED b) SPACE 7 ASC 94 . 94 . “ ” . c) d) e) 80 1E37 . 5.3 5.3.1 SIMS . , . static SIMS instrumental-paramet
5、er information format identifier primary-ion mass primary-ion pulsed current primary-ion direct current primary-ion pulse width primary-ion bunched-pulse width number of ions per pulse primary-ion dose primary-ion cycle time number of ion pulses extraction voltage 3 D ISO 22048：2005 sample holder vo
6、ltage post-acceleration voltage calibration coefficient alpha calibration coefficient beta calibration coefficient gamma flood gun energy flood gun cycle time flood gun pulsed current end of static SIMS instrumental-parameter information format identifier KS D ISO 14976 . (XML)2 . SF5 SF5 . 5.3.2 5.
7、3.1 . , . static SIMS instrumental-parameter information format identifier “ISO _Static_SIMS_ Instrumental_Parameter_Information_Format_1999_September_1” , . primary-ion mass . “primary_ion_mass=” , . primary-ion pulsed current . “primary_ion_pulsed_ current=” , pA . primary-ion direct current . “pr
8、imary_ion_direct_ current=” , . primary-ion pulse width . “primary_ion_pulse_width=” , ns . primary-ion bunched pulse width . “primary_ion_ bunched_pulse_ width=” , ns . number of ions per pulse . “number_of_ions_per_pulse=” , . primary-ion dose . “primary_ion_dose=” , /m2 . primary-ion cycle time .
9、 “primary_ion_cycle_time=” , . number of ion pulses . “number_of_ion_pulses=” , . extraction voltage . “extraction_voltage=” , . . sample holder voltage . “sample_holder_voltage=” , . . post acceleration voltage . “post_acceleration_ voltage=” , . 4 D ISO 22048：2005 . calibration coefficient alpha .
10、 “calibration_coefficient_ alpha=” , . x , Ms2 M M1 . calibration coefficient beta . “calibration_coefficient_ beta=“ , . 1 x , Ms M . calibration coefficient gamma . “calibration_coefficient_gamma=“ , (： M) . flood gun energy . “flood_gun_energy=“ , (： eV) . flood gun cycle time . “flood_gun_cycle_
11、time=“ , (： s) . flood gun pulsed current . “flood_gun_pulsed_ current=“ , (： nA) . end of static SIMS instrumental-parameter information format identifier “end_of_ISO_Static_ SIMS_Instrumental_Parameter_Information_Format“ . 5 D ISO 22048：2005 A() A.1 2 3 . . ISO_Static_SIMS_Instrumental_Parameter_
12、Information_Format_1999_September_1 primary_ion_mass=127 primary_ion_pulsed_current=0.9 primary_ion_direct_current=1E37 primary_ion_pulse_width=25 primary_ion_bunched_pulse_width=0.9 number_of_ions_per_pulse=1E37 primary_ion_dose=1E16 primary_ion_cycle_time=100 number_of_ion_pulses=600000 extraction
13、_voltage=-2000 sample_holder_voltage=0 post_acceleration_voltage=-13500 calibration_coefficient_alpha=3.6834062199317976E-9 calibration_coefficient_beta=-2.7068775610553372E-5 calibration_coefficient_gamma=0.04973104847149 flood_gun_energy=15 flood_gun_cycle_time=100 flood_gun_pulsed_current=5 end_o
14、f_ISO_Static_SIMS_Instrumental_Parameter_Information_Format A.2 3 3 . ISO_Static_SIMS_Instrumental_Parameter_Information_Format_1999_September_1 primary_ion_mass=40 primary_ion_pulsed_current=1E37 primary_ion_direct_current=0.5 primary_ion_pulse_width=1E37 primary_ion_bunched_pulse_width=1E37 number
15、_of_ions_per_pulse=1E37 primary_ion_dose=5.1E16 primary_ion_cycle_time=1E37 number_of_ion_pulses=1E37 extraction_voltage=0 sample_holder_voltage=-4000 6 D ISO 22048：2005 post_acceleration_voltage=-1000 calibration_coefficient_alpha=0.0000831 calibration_coefficient_beta=0.0007635 calibration_coeffic
16、ient_gamma=0.0123011 flood_gun_energy=1E37 flood_gun_cycle_time=0 flood_gun_pulsed_current=0 end_of_ISO_Static_SIMS_Instrumental_Parameter_Information_Format A.3 4 2 3 . ISO_Static_SIMS_Instrumental_Parameter_Information_Format_1999_September_1 primary_ion_mass=132 primary_ion_pulsed_current=1E37 pr
17、imary_ion_direct_current=1.5 primary_ion_pulse_width=1E37 primary_ion_bunched_pulse_width=1E37 number_of_ions_per_pulse=1E37 primary_ion_dose=8.1E16 primary_ion_cycle_time=1E37 number_of_ion_pulses=1E37 extraction_voltage=-20 sample_holder_voltage=0 post_acceleration_voltage=-3000 calibration_coeffi
18、cient_alpha=0 calibration_coefficient_beta=0.9992 calibration_coefficient_gamma=0.034 flood_gun_energy=1E37 flood_gun_cycle_time=0 flood_gun_pulsed_current=0 end_of_ISO_Static_SIMS_Instrumental_Parameter_Information_Format 7 D ISO 22048：2005 1 KS D ISO 14975 2 KS X ISO/IEC 13522 8 8： ISO/IEC 13522 5
19、 XML 8 2006 1 23 135513 7017 (02)60094567 (02)600948878 http:/ 607822 1 11( 10) (051)5571239 Fax. (051)557 0430 702012 2 1741( 3 ) (053)38415624 Fax. (053)384 1565 790 380 627( ) (054)2789611 Fax. (054)278 9662 406130 994( 16) (032)26002607 Fax. (032)260 0268 443766 9065( 9 ) (031)25970009 Fax. (031
20、)259 7010 200041 1 9( 304) (033)252 9423, 254 9423 Fax. (033)256 9423 361802 1508 1( 6 ) (043)23624513 Fax. (043)236 2454 305343 2314( 5 ) (042)86423013 Fax. (042)864 2304 330 816 43 5( 1204 ) (041)58905003 Fax. (041)589 0504 561841 1 337 2( 7 ) (063)21422347 Fax. (063)214 2238 506301 62115( 4 ) (06
21、2)95314357 Fax. (062)953 1438 641210 298 7 ( 6 ) (055)2121212 Fax. (055)212 1213 683804 7582( 2 ) (052)28966013 Fax. (052)289 6604 425020 541 3( 4 ) (031)48761914 Fax. (031)487 6195 730350 9230( 8 ) (054)4736954 Fax. (054)473 6955 480848 2 487 6( 3 ) (031)82981824 Fax. (031)8298185 KS D ISO 22048：2005 KSKSKSSKSKS KSKS SKS KSKS SKSKS KSKSKSSurface chemical analysis Information format for static secondary-ion mass spectrometry ICS 71.040.40 KOREAN STANDARDS ASSOCIATION
