1、 KSKSKSKS SKSKSKS KSKSKS SKSKS KSKS SKS KS 2006 11 28 http:/www.kats.go.krKS I ISO 14644 3 3： KS I ISO 14644 3： 2006 (2011 )I ISO 14644 3： 2006 : ( ) ( ) KIST ( ) : (http:/www.standard.go.kr) ： ：2006 11 28 ：2011 12 26 2011-0623 ： ： ( 02- 509-7270) (http:/www.kats.go.kr). 10 5 , . ICS 13.040.35 KS I
2、ISO 3： 14644 3： 2006(2011 ) Cleanrooms and associated controlled environments Part 3： Test methods 2005 1 ISO 14644 3 Cleanrooms and associated controlled environments Part 3： Test methods , . . 0.1 . , , , , . KS M ISO 14644 . . ISO/TC 209 ( , ISO 14698, KS M ISO 14644 4, ISO 14644 7). . ASTM, CEN,
3、 DIN, IEST, JACA, JIS SEMI . , . . , . 1. . 2 ( ) 3 ( , , ) . . . . , . . . 2. , . . . ISO IEC . I ISO 14644 3： 2006 2 KS M ISO 14644 1： 2002 1： KS M ISO 14644 2： 2002 2： KS M ISO 14644 1 KS M ISO 14644 4： 2002 4： , ISO 7726： 1998 Ergonomics of the thermal environment Instruments for measuring physi
4、cal quantities 3. . 3.1 3.1.1 (cleanroom) , , , , KS M ISO 14644 1： 2002, 2.1.1 3.1.2 (clean zone) , , , , KS M ISO 14644 1： 2002, 2.1.2 , , . 3.1.3 (installation) , , , KS M ISO 14644 1： 2002, 2.1.3. 3.1.4 (separative device) , (containment enclosures), , (isolator), (mini-environment) . 3.2 (airbo
5、rne particle measurement) 3.2.1 (aerosol generator) ( 0.05 2 m) . , , , . 3.2.2 (airborne particle) 1 nm 100 m , ( ) 0.1 m 5 m . 3.2.3 (count median particle diameter, CMD) CMD , CMD . 3.2.4 (macroparticle) 5 m KS M ISO 14644 1： 2002, 2.2.6 3.2.5 M (M descriptor) ( /m3) , KS M ISO 14644 1： 2002, 2.3
6、.2. M ( ) . M , . 3.2.6 (mass median particle diameter, MMD) I ISO 14644 3： 2006 3 MMD , MMD . 3.2.7 (particle concentration) KS M ISO 14644 1： 2002, 2.2.3 3.2.8 (particle size) KS M ISO 14644 1： 2002, 2.2.2 3.2.9 (particle size distribution) KS M ISO 14644 1： 2002, 2.2.4 3.2.10 (test aerosol) . 3.2
7、.11 U (U descriptor) ( /m3) KS M ISO 14644 1： 2002, 2.3.1 U ( ) . U , . 3.2.12 (ultrafine particle) 0.1 m KS M ISO 14644 1： 2002, 2.2.5 3.3 (air filters and systems) 3.3.1 (aerosol challenge) 3.3.2 (designated leak) 3.3.3 (dilution system) 3.3.4 (filter system) , 3.3.5 (final filter) 3.3.6 (installe
8、d filter system) , , 3.3.7 (installed filter system leakage test) , 3.3.8 (leak) 3.3.9 (scanning) (probe) 3.3.10 (standard leak penetration) 3.4 (airflow and other physical states) 3.4.1 (air exchange rate) , 3.4.2 (average airflow rate) I ISO 14644 3： 2006 4 m3/h 3.4.3 (measuring plane) 3.4.4 (non-
9、unidirectional airflow) KS M ISO 14644 4： 2002, 3.6 3.4.5 (supply airflow rate) 3.4.6 (total airflow rate) 3.4.7 (unidirectional airflow) KS M ISO 14644 4： 2002, 3.11 . 3.4.8 (uniformity of airflow) 3.5 (electrostatic measurement) 3.5.1 (discharge time) 3.5.2 ( )(offset voltage) 3.5.3 (static-dissip
10、ative property) (zero) 3.5.4 (surface voltage level) 3.6 (measuring apparatus and measuring conditions) 3.6.1 (aerosol photometer) 3.6.2 (anisokinetic sampling) 3.6.3 (cascade impactor) . 3.6.4 (condensation nucleus counter, CNC) 3.6.5 (counting efficiency) 3.6.6 (differential mobility analyzer, DMA
11、) 3.6.7 (diffusion battery element) 3.6.8 (discrete-particle counter, DPC) I ISO 14644 3： 2006 5 3.6.9 ( , )(false count, background noise count , zero count) 3.6.10 (flowhood with flowmeter) , 3.6.11 (iso-axial sampling) 3.6.12 (isokinetic sampling) 3.6.13 (particle size cutoff device) DPC CNC 3.6.
12、14 (threshold size) 3.6.15 (time-of-flight particle size measurement) . 3.6.16 (virtual impactor) , . 3.6.17 (witness plate) 3.7 (occupancy states) 3.7.1 (as-built) , , KS M ISO 14644 1： 2002, 2.4.1 3.7.2 (at-rest) KS M ISO 14644 1： 2002, 2.4.2 3.7.3 (operational) , KS M ISO 14644 1： 2002, 2.4.3 4.
13、4.1 4.1.1 KS M ISO 14644 2 KS M ISO 14644 1 ( 1 ) 1 KS M ISO 14644 3 4.2.1 B.1 C.1 KS M ISO 14644 1 KS M ISO 14644 2 4.1.2 2 . 3 I ISO 14644 3： 2006 6 . , . . (KS M ISO 14644 2 ). A . B . B . . 2 KS M ISO 14644 3 4.2.1 B.2 C.2 KS M ISO 14644 1 4.2.1 B.3 C.3 KS M ISO 14644 1 (1) 4.2.2 B.4 C.4 KS M IS
14、O 14644 1 KS M ISO 14644 2 (1) 4.2.3 B.5 C.5 KS M ISO 14644 1 KS M ISO 14644 2 4.2.4 B.6 C.6 KS M ISO 14644 2 4.2.5 B.7 C.7 KS M ISO 14644 2 4.2.6 B.8 C.8 ISO 7726 4.2.6 B.9 C.9 ISO 7726 4.2.7 B.10 C.10 4.2.8 B.11 C.11 4.2.9 B.12 C.12 KS M ISO 14644 2 4.2.10 B.13 C.13 KS M ISO 14644 1 KS M ISO 14644
15、 2 (1) KS M ISO 14644 2 . . . 4.2 4.2.1 , 3 . a) (B.1 ) b) (B.2 ) c) (B.3 ) b) c) , . 4.2.2 , . , , . . . B.4 . 4.2.3 . , . B.5 . 4.2.4 , ( I ISO 14644 3： 2006 7 ) ( , ) . . , (scanning) . B.6 . 4.2.5 . . B.7 . 4.2.6 ( ) . B.8 B.9 . 4.2.7 , ( ) . , . . B.10 . 4.2.8 ( ) ( ) . B.11 . 4.2.9 . . B.12 . . 4.2.10 , , . B.13 . 5. , . a) , b) (KS M ISO 14644 3) c) ( ) d) , e) , , f) B g) B I ISO 14644 3： 2006 8 A() A.1 . , . , . A.2 A.1 . . A.1 (1) (2) B.1 (DPC) C.1 (CNC) C.2.1 (DPC) C.2.2 B.2 C.2.3 B.3 C.3 C.3.1 B.3.3.2 C.3.2 (DPC) C.3.3 B.3.3.3 C.3.4 B.4
