1、 IEC/TR 62834 Edition 1.0 2013-09 TECHNICAL REPORT IEC nanoelectronics standardization roadmap IEC/TR 62834:2013(E) colour inside THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2013 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reprod
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9、07.030 PRICE CODE ISBN 978-2-8322-1100-7 Registered trademark of the International Electrotechnical Commission Warning! Make sure that you obtained this publication from an authorized distributor. colour inside 2 TR 62834 IEC:2013(E) CONTENTS FOREWORD . 4 INTRODUCTION . 6 1 Scope 7 2 Background . 8
10、2.1 General 8 2.2 Classification of nanotechnology 9 General 9 2.2.1Nanomaterials 9 2.2.2Nanoscale devices 9 2.2.3Nano-biotechnology 9 2.2.4Nanofabrication process Equipment Measurement 9 2.2.5 3 Current status and prospects . 9 3.1 Related markets . 9 3.2 Technology development directions for nanom
11、aterials . 10 General 10 3.2.1World leading group status . 11 3.2.2Nanopore materials 12 3.2.3Nanocomposite materials 12 3.2.4 3.3 Overall technology status and prospects of nanoelectronic devices 12 4 Nanomaterials technology, scenario and standardization roadmap 13 4.1 Technology 13 Classification
12、 of nanomaterials . 13 4.1.1Standardization items of zero dimensional nanomaterials . 14 4.1.2Standardization items of one-dimensional nanomaterials 15 4.1.3Standardization items of two-dimensional nanomaterials 16 4.1.4Standardization items of three-dimensional nanomaterial . 17 4.1.5 4.2 Scenarios
13、 18 Scenario for nanoparticles (or nanopowders) 18 4.2.1Scenario for quantum dots 18 4.2.2Scenario for carbon nanotubes . 19 4.2.3Scenario for nanowires . 20 4.2.4Scenario for nanostructured thin films . 20 4.2.5Scenario for sheet resistance characterization of CNT films 21 4.2.6Scenario for wear r
14、esistance and exposure test of CNT films 21 4.2.7Scenario for thermal characterization of CNT films . 22 4.2.8Scenario for graphene 22 4.2.9Scenario for nanopores. 23 4.2.10Scenario for nanocomposite materials 23 4.2.11 4.3 Roadmap of standardization of nanomaterials (2009-2020) 24 5 Nanoelectronic
15、devices technology, scenario and standardization roadmap . 24 5.1 Technology 24 Nanoscale non-volatile memory devices . 24 5.1.1New nanomaterial or new nanostructure for nanoelectronic 5.1.2 devices . 24 Three-dimensional nanoscale transistors 24 5.1.3Single electron transistors 25 5.1.4Nanoscale lo
16、gic devices . 25 5.1.5TR 62834 IEC:2013(E) 3 Carbon interconnects 25 5.1.6Nanoscale magnetic devices. 25 5.1.7Molecular devices . 25 5.1.8 5.2 Scenario 25 Scenario for nanoscale non-volatile memory devices 25 5.2.1Scenario for nanostructure electronic materials 26 5.2.2Scenario for nanoscale interco
17、nnects (CNT) . 26 5.2.3Scenario for one-dimensional nanoscale transistors . 27 5.2.4Scenario for three-dimensional nanoscale transistors . 27 5.2.5Scenario for single electron transistors . 28 5.2.6Scenario for key control characteristics of nanoscale logic 5.2.7 devices . 28 Scenario for molecular
18、devices . 28 5.2.8 5.3 Standardization roadmap of nanoelectronic devices (2009-2020) . 28 Bibliography 32 Figure 1 Roadmap format 6 Figure 2 Technologies and related products . 8 Figure 3 Interaction of product, technology and standardization roadmaps . 9 Figure 4 ISO 229 WG3 roadmap for standardiza
19、tion of nanomaterials: www.nanosafe.org 11 Figure 5 Estimated resistance of 50 nm-diameter vias dependent on the filling rate of CNTs in a via hole for 1 nm-diameter SWNT, 3 nm-diameter 3-walled MWNT, and 5 nm-diameter 6-walled MWNT . 27 Figure 6 Roadmap for standardization of nanomaterials (2009-20
20、20) . 30 Figure 7 Roadmap for standardization of nanoelectronic devices (2009-2020) . 31 Table 1 Categories and detail potential products 7 Table 2 Classification of nanomaterials 14 Table 3 Characteristics to be considered in developing standards for nanoparticles . 14 Table 4 Characteristics to be
21、 considered in developing standards for quantum dot . 15 Table 5 Characteristics to be considered in developing standards for CNT . 15 Table 6 Characteristics to be considered in developing standards for nanowires . 16 Table 7 Characteristics to be considered in developing standards for nanostructur
22、ed thin film . 16 Table 8 Characteristics to be considered in developing standards for nanostructured thin films . 17 Table 9 Characteristics to be considered in developing standards for nanopores . 17 Table 10 Characteristics to be considered in developing standards for nanocomposite materials 18 T
23、able 11 Matrix for graphene characterization . 23 4 TR 62834 IEC:2013(E) INTERNATIONAL ELECTROTECHNICAL COMMISSION _ IEC NANOELECTRONICS STANDARDIZATION ROADMAP FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national ele
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35、 Standard, for example “state of the art“. IEC 62834, which is a technical report, has been prepared by IEC technical committee 113: Nanotechnology standardization for electrical and electronic products and systems. The text of this technical report is based on the following documents: Enquiry draft
36、 Report on voting 113/161/DTR 113/197/RVC Full information on the voting for the approval of this technical report can be found in the report on voting indicated in the above table. This publication has been drafted in accordance with the ISO/IEC Directives, Part 2. The committee has decided that th
37、e contents of this publication will remain unchanged until the stability date indicated on the IEC web site under “http:/webstore.iec.ch“ in the data related to the specific publication. At this date, the publication will be TR 62834 IEC:2013(E) 5 reconfirmed, withdrawn, replaced by a revised editio
38、n, or amended. A bilingual version of this publication may be issued at a later date. IMPORTANT The colour inside logo on the cover page of this publication indicates that it contains colours which are considered to be useful for the correct understanding of its contents. Users should therefore prin
39、t this document using a colour printer. 6 TR 62834 IEC:2013(E) INTRODUCTION In IEC TC113 a survey on nano-electrotechnical standardization needs was initiated by the National Institute of Standards and Technology (NIST) in the USA to establish a strategy of standardization priorities regarding the n
40、anoelectronics area. A TC 113 Project Team was then organized to build a “Nanoelectronics standards roadmap”. This document covers nanoscale devices and nanomaterials which will be in the market or are already commercialized for nanoelectronic applications. When selecting the devices and materials t
41、o be included in the roadmap, the Project Team considered their market size and the period of time needed for their technology development. Because most of the experts in TC 113 are from an electronics background, the first version (Part A) of this roadmap covers electronics and ICT (information and
42、 communication technology) rather than energy or convergence technologies. Regarding nanomaterials, roadmaps for carbon nanotubes (CNT), graphene, nanofibres, nanoparticles and quantum dots were established. For each material there are several detailed items that need to be standardized, including p
43、hysical properties and characterization methods. Some of such standards are already under development in TC 113, such as IEC 62565-2-1 and IEC 62569. In the nanoelectronics device roadmap, nanoscale contacts, CNT interconnects, three-dimensional nanotransistors, nanoscale memory devices, and molecul
44、ar devices were selected. Though the priority was on memory devices and new types of transistors, molecular devices were included in this version considering the impact of this technology. The time span of the roadmap is important in order to cover the technology which may be realized in a certain p
45、eriod of time. However, with regard to nanoelectronics development, little information on the average technology development period is available at this stage. Thus TC 113 set the span of the roadmap up until the year 2020 to show the starting point of standardization tasks and the end of activity.
46、As the format should give insights and detailed information to the user of the roadmap, the Gantt chart format was used, including photos (see Figure 1). When a new version of the roadmap is prepared, TC 113 will develop a new format in parallel, which can give more accurate information to users. Fi
47、gure 1 Roadmap format IEC 2281/13 TR 62834 IEC:2013(E) 7 IEC NANOELECTRONICS STANDARDIZATION ROADMAP 1 Scope This Technical Report covers nanomaterials and nanoscale devices. To achieve consensus more quickly when building the roadmap, an ICT “More Moore” area has been adopted for the priority stand
48、ardization items of this first version, as shown in Table 1. Table 1 Categories and detail potential products Categories Detail potential products Version 1 Nanomaterials Zero-dimensional nanomaterial Nanoparticles/Nanopowders Quantum dot One-dimensional nanomaterial Carbon nanotube Nanowire ( - , -
49、 , ZnO) Two-dimensional nanomaterial Nanofunctional thin film Nanostructural film Graphene Three-dimensional nanomaterial Nanopore materials Nanocomposites Nanoscale devices Nanoelectronic devices Nanoscale non-volatile memory devices 1- and 3-dimensional nanoscale transistors Single electron transistor Nanoscale logic devices Nanoscale interconnection Post-CMOS signal processing Nanoscale optical devices Silicon optical devices Photonic crystal optical devi
