1、 ANSI/ESD STM11.12-2015 Revision of ANSI/ESD STM11.12-2007 For the Protection of Electrostatic Discharge Susceptible Items Volume Resistance Measurements of Static Dissipative Planar Materials Electrostatic Discharge Association 7900 Turin Road, Bldg 3 Rome, NY 13440-2069 An American National Standa
2、rd Approved May 28, 2015 ANSI/ESD STM11.12-2015 ESD Association Standard Test Method for the Protection of Electrostatic Discharge Susceptible Items Volume Resistance Measurement of Static Dissipative Planar Materials Approved February 10, 2015 EOS/ESD Association, Inc. ANSI/ESD STM11.12-2015 Electr
3、ostatic Discharge Association (ESDA) standards and publications are designed to serve the public interest by eliminating misunderstandings between manufacturers and purchasers, facilitating the interchangeability and improvement of products and assisting the purchaser in selecting and obtaining the
4、proper product for his particular needs. The existence of such standards and publications shall not in any respect preclude any member or non-member of the Association from manufacturing or selling products not conforming to such standards and publications. Nor shall the fact that a standard or publ
5、ication is published by the Association preclude its voluntary use by non-members of the Association whether the document is to be used either domestically or internationally. Recommended standards and publications are adopted by the ESDA in accordance with the ANSI Patent policy. Interpretation of
6、ESDA Standards: The interpretation of standards in-so-far as it may relate to a specific product or manufacturer is a proper matter for the individual company concerned and cannot be undertaken by any person acting for the ESDA. The ESDA Standards Chairman may make comments limited to an explanation
7、 or clarification of the technical language or provisions in a standard, but not related to its application to specific products and manufacturers. No other person is authorized to comment on behalf of the ESDA on any ESDA Standard. THE CONTENTS OF ESDAS STANDARDS AND PUBLICATIONS ARE PROVIDED “AS-I
8、S,” AND ESDA MAKES NO REPRESENTATIONS OR WARRANTIES, EXPRESSED OR IMPLIED, OF ANY KIND WITH RESPECT TO SUCH CONTENTS. ESDA DISCLAIMS ALL REPRESENTATIONS AND WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE OR USE, TITLE AND NON-INFRINGEMENT. E
9、SDA STANDARDS AND PUBLICATIONS ARE CONSIDERED TECHNICALLY SOUND AT THE TIME THEY ARE APPROVED FOR PUBLICATION. THEY ARE NOT A SUBSTITUTE FOR A PRODUCT SELLERS OR USERS OWN JUDGEMENT WITH RESPECT TO ANY PARTICULAR PRODUCT DISCUSSED, AND ESDA DOES NOT UNDERTAKE TO GUARANTEE THE PERFORMANCE OF ANY INDI
10、VIDUAL MANUFACTURERS PRODUCTS BY VIRTUE OF SUCH STANDARDS OR PUBLICATIONS. THUS, ESDA EXPRESSLY DISLAIMS ANY RESPONSIBILITY FOR DAMAGES ARISING FROM THE USE, APPLICATION, OR RELIANCE BY OTHERS ON THE INFORMATION CONTAINED IN THESE STANDARDS OR PUBLICATIONS. NEITHER ESDA, NOR ITS MEMBERS, OFFICERS, E
11、MPLOYEES OR OTHER REPRESENTATIVES WILL BE LIABLE FOR DAMAGES ARISING OUT OF, OR IN CONNECTION WITH, THE USE OR MISUSE OF ESDA STANDARDS OR PUBLICATIONS, EVEN IF ADVISED OF THE POSSIBILITY THEREOF. THIS IS A COMPREHENSIVE LIMITATION OF LIABILITY THAT APPLIES TO ALL DAMAGES OF ANY KIND, INCLUDING WITH
12、OUT LIMITATION, LOSS OF DATA, INCOME OR PROFIT, LOSS OF OR DAMAGE TO PROPERTY AND CLAIMS OF THIRD PARTIES. Published by: Electrostatic Discharge Association 7900 Turin Road, Bldg. 3 Rome, NY 13440 Copyright 2015 by ESD Association All rights reserved No part of this publication may be reproduced in
13、any form, in an electronic retrieval system or otherwise, without the prior written permission of the publisher. Printed in the United States of America ISBN: 1-58537-278-1CAUTION NOTICE DISCLAIMER OF WARRANTIES DISCLAIMER OF GUARANTY LIMITATION ON ESDAs LIABILITY ANSI/ESD STM11.12-2015 i (This fore
14、word is not part of ESD Association Standard Test Method ANSI/ESD STM11.12-2015) FOREWORD This standard test method1 was developed to fulfill a need to measure static dissipative planar materials not provided for by existing ASTM volume resistance measurement methods. Without regard to a materials m
15、ethod of conduction, this procedure is a resistance measurement through a materials thickness. No effort is made to compensate for different thickness of material or to convert the measurement result to a resistance per unit thickness value. This document was originally designated ANSI/ESD STM11.12-
16、2000 and approved on February 6, 2000. ANSI/ESD STM11.12-2007 was a reaffirmation of ANSI/ESD STM11.12-2000 and was approved on February 11, 2007. ANSI/ESD STM11.12-2015 is a revision of ANSI/ESD STM11.12-2007 and was approved on February 10, 2015. At the time ANSI/ESD STM11.12-2015 was prepared, th
17、e 11.0 Packaging Subcommittee had the following members: David E. Swenson, Chair Affinity Static Control Consulting, LLC Kevin Duncan Seagate Technology Kurt Edwards Lubrizol Conductive Polymers Gene Felder DESCO Industries, Inc. Reinhold Gaertner, TAS Rep Infineon Technologies AG Steven Gerken Unit
18、ed States Air Force Meghan Hodge 3M Doug Holtz Conductive Containers Gregory Manning NASA/ARES Technical Services Gene Monroe NASA - LARC Dale Parkin Seagate Technology Timothy Prass Raytheon Francisco Rodriquez 3M Jeff Salisbury Finisar, Inc. Julius Turangan Ovation, Inc. Robert Vermillion RMV Tech
19、nology Group, LLC Scott Ward Texas Instruments, Inc. Stanley Weitz Electro-Tech Systems, Inc. Craig Zander Transforming Technologies The following individuals made significant contributions to ANSI/ESD STM11.12-2015: Brent Beamer 1 ESD Association Standard Test Method (STM): A definitive procedure f
20、or the identification, measurement and evaluation of one or more qualities, characteristics, or properties of a material, product, system, or process that yield a reproducible test results. ANSI/ESD DSTM11.12-2015 ii At the time ANSI/ESD STM11.12-2007 was prepared, the 11.0 Packaging Subcommittee ha
21、d the following members: Brent Beamer, Chair 3M Don Boehm Dou Yee Enerprises Rick Knight Ranger Plastic Extrusions, Inc. James Ludlow Lubrizol Carl Newberg Microstat Labs Maciej Noras Trek, Inc. Dale Parkin Seagate Technology Jeff Salisbury Flextronics Julius Turangan Western Digital Robert Vermilli
22、on RMV Technology Group, LLC Stanley Weitz Electro-Tech Systems, Inc. At the time ANSI/ESD STM11.12-2000 was prepared, the 11.0 Packaging Subcommittee had the following members: Brent Beamer, Chair Static Control Components Ryne Allen Desco Industries Joe Blanchard Bradford Company Larry Fromm Hewle
23、tt Packard Co. Walt Gately Ex-Tech Plastics, Inc. Ben Baumgartner, TAS Rep ESD West Rick Knight ITW ECPS Steve Koehn 3M Carl Newberg Rivers Edge Technical Service Dale Parkin IBM Charles Perry Monroe Electronics Bob Vermillion RMV Industries Stan Weitz Electro Tech Systems The following individuals
24、made significant contributions to ANSI/ESD STM11.12-2000: Stan Weitz Electro-Tech System Stephen Halperin SH&A John Kinnear IBM ANSI/ESD STM11.12-2015 iii TABLE OF CONTENTS 1.0 PURPOSE . 1 2.0 SCOPE 1 3.0 REFERENCED PUBLICATIONS 1 4.0 DEFINITIONS 1 5.0 PERSONNEL SAFETY . 1 6.0 REPEATABILITY 2 7.0 GE
25、NERAL DISCUSSION 2 8.0 TEST EQUIPMENT . 2 8.1 ELECTRODE ASSEMBLY . 2 8.1.1 Top Electrode . 2 8.1.2 Bottom Electrode Support 3 8.2 INSTRUMENTATION 3 8.3 SYSTEM VERIFICATION FIXTURES 3 9.0 SAMPLE PREPARATION AND CONDITIONING 3 10.0 LOW RESISTANCE RANGE SYSTEM VERIFICATION PROCEDURE . 3 11.0 UPPER RESI
26、STANCE RANGE SYSTEM VERIFICATION PROCEDURE . 4 12.0 TEST METHOD . 4 13.0 REPORTING VOLUME RESISTANCE DATA . 4 ANNEXES Annex A (Informative): Volume Resistivity Calculation from Volume Resistance Results . 10 Annex B (Informative): ANSI/ESD STM11.12-2015 Revision History 11 FIGURES Figure 1: System S
27、etup 5 Figure 2: Top Electrode 6 Figure 3: Bottom Electrode . 7 Figure 4: Low Resistance Verification Fixture 8 Figure 5: High Resistance Verification Fixture . 8 Figure 6: Verification Resistor Placement in Test Set-Up 9ESD Association Standard Test Method ANSI/ESD STM11.12-2015 1 ESD Association S
28、tandard Test Method for Protection of Electrostatic Discharge Susceptible Items Volume Resistance Measurement of Static Dissipative Planar Materials 1.0 PURPOSE This standard test method defines the test procedure, equipment, sample preparation, and conditioning needed to achieve reproducible volume
29、 resistance test results on static dissipative planar materials. 2.0 SCOPE This standard test method defines a direct current measurement to determine the volume resistance of a static dissipative, planar material, without regard to its conduction mechanism. 3.0 REFERENCED PUBLICATIONS Unless otherw
30、ise specified, the following documents of the latest issue, revision or amendment form a part of this standard test method to the extent specified herein: ANSI/ESD STM11.11, Surface Resistance Measurement of Static Dissipative Planar Materials2 ANSI/ESD STM4.1 Worksurfaces, Resistive Characterizatio
31、n2 ASTM D 257, Standard Test Methods for Direct Current (DC) Resistance or Conductance of Insulating Materials3 ASTM D 991, Standard Test Method for Rubber Property-Volume Resistance of Electrically Conductive and Antistatic Products3 4.0 DEFINITIONS The terms used in the body of this document are i
32、n accordance with the definitions found in ESD ADV1.0, ESD Associations Glossary of Terms available for complimentary download at www.esda.org. 5.0 PERSONNEL SAFETY THE PROCEDURES AND EQUIPMENT DESCRIBED IN THIS DOCUMENT MAY EXPOSE PERSONNEL TO HAZARDOUS ELECTRICAL CONDITIONS. USERS OF THIS DOCUMENT
33、 ARE RESPONSIBLE FOR SELECTING EQUIPMENT THAT COMPLIES WITH APPLICABLE LAWS, REGULATORY CODES, AND BOTH EXTERNAL AND INTERNAL POLICY. USERS ARE CAUTIONED THAT THIS DOCUMENT CANNOT REPLACE OR SUPERSEDE ANY REQUIREMENTS FOR PERSONNEL SAFETY. GROUND FAULT CIRCUIT INTERRUPTERS (GFCI) AND OTHER SAFETY PR
34、OTECTION SHOULD BE CONSIDERED WHEREVER PERSONNEL MIGHT COME INTO CONTACT WITH ELECTRICAL SOURCES. ELECTRICAL HAZARD REDUCTION PRACTICES SHALL BE EXERCISED AND PROPER GROUNDING INSTRUCTIONS FOR EQUIPMENT SHOULD BE FOLLOWED. 2 EOS/ESD Association, Inc., 7900 Turin Road, Bldg. 3, Rome, NY 13440, 315-33
35、9-6937, www.esda.org 3 ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA, 19428-2959 USA, 215-299-5400 ANSI/ESD STM11.12-2015 2 THE RESISTANCE MEASUREMENTS OBTAINED THROUGH THE USE OF THIS TEST METHOD SHALL NOT BE USED TO DETERMINE THE RELATIVE SAFETY OF PERSONNEL EXPOSED
36、 TO HIGH AC OR DC VOLTAGES. 6.0 REPEATABILITY This test has been shown to have a repeatability of approximately one order of magnitude. 7.0 GENERAL DISCUSSION This procedure is recommended for measuring the volume resistance of materials that are between 1.0 x 104 ohms and 1.0 x 1011 ohms. This test
37、 method measures the resistance through a materials thickness. It has been demonstrated that the relative humidity (RH) influences the test results significantly so this test method specifies that samples be conditioned and tested at 12 3% RH and 23 3oC. This standard test method consists of the fol
38、lowing steps: A) Sample preparation. B) Test instrument including setup and system verification tests. C) A defined electrification period. D) Test procedure. E) Documentation and reporting of data. 8.0 TEST EQUIPMENT The equipment used for volume resistance measurements of static dissipative materi
39、al is described below. 8.1 Electrode Assembly The electrode assembly consists of a top electrode and a bottom electrode. See Figure 1 for system setup. 8.1.1 Top Electrode The top electrode assembly consists of two concentric rings which make contact with the material under test. See Figure 2. The c
40、ontact surface material of the electrode assembly shall be conductive rubber having a hardness of 50 to 70 on the Shore-A Durometer scale and a volume resistivity of less than 10 ohm-cm per ASTM D 991. The inner electrode shall be a solid disk 30.48 0.64 mm (1.2 0.025 inches) in diameter. The inner
41、electrode shall be flat and make total contact with the test sample. The outer electrode shall be a ring having an inner diameter of 57.15 0.64 mm (2.25 0.025 inches). The width of the outer ring shall be 3.18 0.025 mm (0.125 0.010 inches). The total weight of the top electrode assembly shall be fiv
42、e 2.27 kg 56.7 grams (5 pounds 2 ounces). ANSI/ESD STM11.12-2015 3 8.1.2 Bottom Electrode Support The bottom electrode shall be a flat conductive metal plate sufficiently large to support the sample under test. The plate should be supported by an insulative material having a surface resistivity grea
43、ter than 1.0 x 1013 ohms/square when measured per ASTM D257 or a surface resistance greater than 1.0 x 1012 ohms when measured per ANSI/ESD STM11.11. As shown in Figure 3, insulating bumper buttons may be used. Since it may not be possible to make an accurate volume resistance/resistivity measuremen
44、t on these items without special instrumentation, the bottom electrode isolation resistance should be measured. Place a single electrode from ANSI/ESD STM4.1 Worksurfaces, on the top of the bottom electrode and connect to an instrument as defined in Section 8.2. Attach the second wire from the instr
45、ument to the surface the bottom electrode is resting on and make a measurement. A second worksurface electrode may be used on the support surface to make the connection if needed. The isolation resistance should be 1.0 x 1012 ohms in this measurement. 8.2 Instrumentation The instrumentation may cons
46、ist of either a power supply and a current meter (ammeter) or an integrated instrument that combines these functions. The power supply or instruments voltage shall be 10 volts (5%) and 100 volts ( 5%) while under load. The resistance measuring instrument shall be capable of measuring from 1.0 x 103
47、to 1.0 x 1013 ohms. 8.3 System Verification Fixtures System verification is accomplished by testing the equipment setup as shown in Figure 6. Low and high value (certified/verified) resistors are inserted in series with the system to verify that the test set up will correctly read in the specified r
48、esistance ranges of this standard. The low resistance verification fixture shall be a 499 1% kilohm resistor. See Figure 4. The high resistance verification fixture shall be a 1.0 teraohm (1.0 x 1012) 5% resistor. See Figure 5. NOTE: The high and low value resistors used for system verification shou
49、ld have their values certified at the time of purchase and periodically thereafter as required (recommended annually). 9.0 SAMPLE PREPARATION AND CONDITIONING The samples shall not be marked nor handled on the surface area to be tested. A minimum of six (6) representative specimens of the sample material shall be prepared. Minimum sample size shall be 76 x 127 mm (3.0 x 5.0 inches). Each sample shall be clearly identified in such a way that the markings will not interfere with the area to be tested. Specimens shall be conditioned and tested in an