1、Designation: E2734/E2734M 10Standard Specification forDimensions of Knife-Edge Flanges1This standard is issued under the fixed designation E2734/E2734M; the number immediately following the designation indicates the yearof original adoption or, in the case of revision, the year of last revision. A n
2、umber in parentheses indicates the year of last reapproval.A superscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This standard specifies the dimensions of knife-edgestyle flanges and their associated gaskets used in vacuumsystems for pressures rangi
3、ng from 105Pa to 10-11Pa. Suchflanges are widely used throughout vacuum technology appli-cations in semiconductor processing tools, surface analysissystems, space simulation systems, and general research re-quiring vacuum.1.2 The values stated in either SI units or inch-pound unitsare to be regarded
4、 separately as standard. The values stated ineach system may not be exact equivalents; therefore, eachsystem shall be used independently of the other. Combiningvalues from the two systems may result in non-conformancewith the standard.1.3 This standard does not purport to address all of thesafety co
5、ncerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2E673 Terminology Relating to Surface
6、Analysis2.2 Other Standards:3ISO 4288:1996 Geometrical Product Specifications(GPS)Surface Texture: Profile MethodRules and Pro-cedures for the Assessment of Surface Texture3. Terminology3.1 Definitions For definitions used in this specification,see Terminology E673.3.2 Definitions of Terms Specific
7、to This Standard:3.3 knife-edge flange, nVacuum flanges seal with a metalgasket; two mating surfaces with identical circular (triangularprofile) knife-edges are bolted together; a deformable metalgasket, captured between the knife-edges provides a leak-freeseal.3.3.1 DiscussionVacuum flanges that se
8、al with a metalgasket were originally developed as Conflat flanges (trade-mark) by the Varian Corporation.3.4 type, nKnife-edge flanges come in a variety of sizes;historically, the flange sizes were identified in North Americaas the flanges outside diameter (in inches) and in Europe as themaximum no
9、minal bore of the tube (in millimetres) that mightbe welded to the flange; for this specification, the flangeidentification “type” is used where the type is approximatelyequal to the flanges outside diameter in inches.4. Materials and Manufacture4.1 FlangeFlanges must be manufactured from a suffi-ci
10、ently hard or hard-coated material to resist deformation of theknife-edge profile despite repeatedly forming a vacuum sealwith metal gaskets.4.2 GasketGasket must be manufactured from a soft,annealed, or partially-tempered metal such that the matingflanges knife-edges cause sufficient (initial) plas
11、tic deforma-tion that a vacuum seal is accomplished.5. Dimensions, Mass, and Permissible Variations5.1 Figs. 1-3 and Tables 1 and 2 contain the requireddimensions and tolerances for rotatable and non-rotatableknife-edge vacuum flanges.6. Workmanship, Finish, and Appearance6.1 Knife-edge vacuum flang
12、es are typically used in appli-cations which require: (1) a high degree of leak integrity, and(2) the lowest possible contamination from outgassing. Toachieve both characteristics, the finish of the flanges knife-edges and gaskets must be free of visible cracks, pits, inclu-sions, scratches, and for
13、eign materials. The knife-edge surfacesmust have a 32 RMS finish or better as measured usingISO 4288:1996.7. Keywords7.1 flange; rotatable flange; vacuum seal; gasket; knife-edge; vacuum hardware; metal seal; vacuum fitting; metalgasket; outgassing1This specification is under the jurisdiction ofASTM
14、 Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.13 on VacuumTechnology.Current edition approved Jan. 1, 2010. Published May 2010. DOI: 10.1520/E2734_E2734M-10.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service
15、at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from International Organization for Standardization (ISO), 1, ch. dela Voie-Creuse, Case postale 56, CH-1211, Geneva 20, Switzerland, http:/www.iso.ch.1
16、Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.FIG. 1 Flange Dimensions: (a) Non-Rotatable Flange (b) Rotatable FlangeFIG. 2 Knife-Edge DetailE2734/E2734M 102FIG. 3 Knife-Edge Gasket DimensionsE2734/E2734M 103TABLE 1 Knife-Edge Flang
17、e DimensionAB C D E FGHITypeNominalBoreNominalOutsideDiameterTolerance60.030 in.(60.75 mm)MaxTubeDiameterNumberofBoltHolesBoltHoleDiameterBoltThreadBoltCirclePositionToleranceofBoltHolesSealRecessDiameterTolerance60.004 in.(60.10 mm)KnifeEdgeDiameterTolerance60.004 in.(60.10 mm)SetbackFlangeFace toT
18、ube SeatTolerance60.005 in.(60.12 mm)Depth ofReceiverSeat forInsert(Max)FlangeThickness(Min)mm in. mm in.Min,mmMax,mmMin,in.Max,in.mm in. mm in. mm in. mm in. mm in. mm in. mm in. mm in.1 in. OD 10CF 25.40 1.000 12.0 0.472 6 3.3 3.5 0.130 0.138 m305 n/a 17.5 0.689 0.1 0.004 13.49 0.531 10.49 0.413 3
19、.00 0.118 n/a n/a 6.0 0.236113 in. OD 16CF 33.86 1.333 19.3 0.760 6 4.3 4.6 0.171 0.180 m407 #832 27.0 1.062 0.2 0.009 21.39 0.842 18.29 0.720 4.57 0.180 6.50 0.256 6.6 0.260218 in. OD 25CF 53.98 2.125 25.7 1.010 4 6.7 6.9 0.264 0.273 m61.014 28 41.3 1.625 0.2 0.009 33.02 1.300 27.69 1.090 4.32 0.17
20、0 7.06 0.278 11.4 0.450234 in. OD 35CF 69.85 2.750 44.5 1.750 6 6.7 6.9 0.264 0.273 m61.014 28 58.7 2.312 0.2 0.009 48.31 1.902 41.91 1.650 5.31 0.209 7.75 0.305 12.2 0.480338 in. OD 50CF 85.73 3.375 51.0 2.008 8 8.4 8.6 0.331 0.340 m81.25516 24 72.4 2.850 0.2 0.009 61.75 2.431 55.88 2.200 5.72 0.22
21、5 9.80 0.386 15.2 0.600412 in. OD 63CF 114.30 4.500 70.0 2.755 8 8.4 8.6 0.331 0.340 m81.25516 24 92.2 3.628 0.2 0.009 82.58 3.251 77.22 3.040 9.53 0.375 12.83 0.505 16.8 0.660458 in. OD 75CF 117.48 4.625 76.2 3.000 10 8.4 8.6 0.331 0.340 m81.25516 24 102.4 4.030 0.2 0.009 91.69 3.610 85.14 3.352 9.
22、53 0.375 13.13 0.517 18.5 0.7306 in. OD 100CF 152.40 6.000 108.0 4.250 16 8.4 8.6 0.331 0.340 m81.25516 24 130.3 5.128 0.2 0.009 120.65 4.750 115.32 4.540 11.10 0.437 14.43 0.568 19.3 0.760634 in. OD 125CF 171.45 6.750 127.0 5.000 18 8.4 8.6 0.331 0.340 m81.25516 24 151.6 5.969 0.2 0.009 141.73 5.58
23、0 136.35 5.368 11.68 0.460 15.54 0.612 20.8 0.8208 in. OD 160CF 203.20 8.000 159.0 6.260 20 8.4 8.6 0.331 0.340 m81.25516 24 181.1 7.128 0.2 0.009 171.45 6.750 166.12 6.540 12.70 0.500 15.95 0.628 21.8 0.86010 in. OD 200CF 254.00 10.000 206.0 8.110 24 8.4 8.6 0.331 0.340 m81.25516 24 231.9 9.128 0.2
24、 0.009 222.28 8.751 216.92 8.540 12.70 0.500 17.25 0.679 24.1 0.95012 in. OD 250CF 304.80 12.000 256.0 10.079 32 8.4 8.6 0.331 0.340 m81.25516 24 284.0 11.180 0.2 0.009 273.20 10.756 267.72 10.540 12.70 0.500 17.96 0.750 24.5 0.9641212 in. OD 265CF 317.50 12.500 267.0 10.512 30 8.4 8.6 0.331 0.340 m
25、81.25516 24 295.0 11.614 0.2 0.009 285.19 11.228 280.01 11.024 12.70 0.500 18.69 0.736 24.5 0.9641314 in. OD 275CF 336.55 13.250 273.4 10.765 30 10.6 10.8 0.418 0.425 m101.538 24 306.3 12.060 0.2 0.009 294.54 11.596 288.24 11.348 12.70 0.500 19.91 0.784 27.9 1.10014 in. OD 295CF 355.60 14.000 306.0
26、12.047 30 10.6 10.8 0.418 0.425 m101.538 24 325.3 12.809 0.2 0.009 313.36 12.337 308.03 12.127 12.70 0.500 19.91 0.784 28.3 1.1141414 in. OD 300CF 362.00 14.252 306.0 12.047 36 10.6 10.8 0.418 0.425 m101.538 24 334.0 13.150 0.2 0.009 321.45 12.656 316.30 12.453 16.00 0.630 n/a n/a 30.0 1.1811412 in.
27、 OD 305CF 368.30 14.500 306.0 12.047 32 10.6 10.8 0.418 0.425 m101.538 24 338.1 13.311 0.2 0.009 326.40 12.850 320.00 12.598 12.70 0.500 10.03 0.395 28.0 1.1021612 in. OD 350CF 419.10 16.500 356.1 14.020 36 10.6 10.8 0.418 0.425 m101.538 24 388.9 15.310 0.2 0.009 377.01 14.843 370.79 14.598 12.70 0.
28、500 20.83 0.820 28.0 1.10218 in. OD 400CF 457.20 18.000 406.5 16.004 36 10.6 10.8 0.418 0.425 m101.538 24 431.8 17.000 0.2 0.009 419.30 16.508 414.00 16.299 15.88 0.625 n/a n/a 28.5 1.1221812 in. OD 405CF 469.90 18.500 406.5 16.004 40 10.6 10.8 0.418 0.425 m101.538 24 437.9 17.240 0.2 0.009 424.40 1
29、6.709 419.00 16.496 15.88 0.625 20.83 0.820 28.0 1.102E2734/E2734M104ASTM International takes no position respecting the validity of any patent rights asserted in connection with any item mentionedin this standard. Users of this standard are expressly advised that determination of the validity of an
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34、.TABLE 2 Knife-Edge Gasket DimensionTypeThickness, L Inside Diameter, J Outside Diameter, Kin.Tolerance 60.003mmTolerance 60.07in.MaxmmMaxin.Tolerance +0.002, 0.002mmTolerance 60.051 in. OD 0.080 2.03 0.335 8.5 0.524 13.31113 in. OD 0.080 2.03 0.643 16.3 0.838 21.29218 in. OD 0.080 2.03 1.013 25.7 1
35、.290 32.77234 in. OD 0.080 2.03 1.533 38.9 1.895 48.13338 in. OD 0.080 2.03 2015 51.2 2.425 61.60412 in. OD 0.080 2.03 2.813 71.5 3.243 82.37458 in. OD 0.080 2.03 3.015 76.6 3.598 91.396 in. OD 0.080 2.03 4.009 101.8 4.743 120.47634 in. OD 0.080 2.03 5.013 127.3 5.568 141.438 in. OD 0.080 2.03 6.010
36、 152.7 6.743 171.2710 in. OD 0.080 2.03 8.010 203.5 8.743 222.0712 in. OD 0.080 2.03 10.007 254.2 10.749 273.021212 in. OD 0.080 2.03 10.500 266.7 11.221 285.011314 in. OD 0.080 2.03 10.857 275.8 11.589 294.3614 in. OD 0.080 2.03 11.813 300.1 12.330 313.181414 in. OD 0.080 2.03 12.016 305.2 12.638 321.011412 in. OD 0.080 2.03 12.107 307.5 12.843 326.211612 in. OD 0.080 2.03 14.107 358.3 14.836 376.8318 in. OD 0.080 2.03 15.807 401.5 16.501 419.131812 in. OD 0.080 2.03 15.970 405.6 16.702 424.23E2734/E2734M 105
