GOST ISO 14644-1-2002 Cleanrooms and associated controlled environments Part 1 Classification of air cleanliness《净化室及其有关的控制环境 空气纯度分类》.pdf

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4、25aG265G276G267G268G25fG246G268G26bG264G25cG25aG242G249G244G3G242G261G25eG25aG26cG25fG265G276G26bG26cG25cG268G3G26bG26cG25aG267G25eG25aG26aG26cG268G25cG15G13G13G16G23fG23cG24aG23aG241G242G243G24bG244G242G243G3G24bG248G23cG23fG24cG3G249G248G3G24bG24cG23aG247G23eG23aG24aG24cG242G241G23aG250G242G242GfG

5、3G246G23fG24cG24aG248G245G248G23dG242G242G3G242G3G24bG23fG24aG24cG242G24eG242G244G23aG250G242G242G3GbG23fG23aG24bG24bGcG28G38G35G32G10G24G36G2cG24G31G3G2aG32G38G31G26G2cG2fG3G29G32G35G3G36G37G24G31G27G24G35G27G2cG3dG24G37G2cG32G31GfG3G30G28G37G35G32G2fG32G2aG3cG3G24G31G27G3G26G28G35G37G2cG29G2cG26G2

6、4G37G2cG32G31G3GbG28G24G36G26GcG23bG241G3G14G15Gb2G15G13G13G15G12G15G1aG1cG249G26aG25fG25eG262G26bG265G268G25cG262G25fG23fG25cG26aG25aG261G262G263G26bG264G262G263G3G26bG268G25cG25fG26cG3G269G268G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262GfG3G266G25fG26cG26aG268G265G268G25dG262G262G3G2

7、62G3G26bG25fG26aG26cG262G26eG262G264G25aG270G262G262G3GbG23fG23aG24bG24bGcG3G269G26aG25fG25eG26bG26cG25aG25cG265G279G25fG26cG3G26bG268G25bG268G263G26aG25fG25dG262G268G267G25aG265G276G267G268G25fG3G268G25bG274G25fG25eG262G267G25fG267G262G25fG3G267G25aG270G262G268G267G25aG265G276G267G275G26fG3G268G26a

8、G25dG25aG267G268G25cG3G269G268G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G3G25dG268G26bG26dG25eG25aG26aG26bG26cG25cGfG3G25cG26fG268G25eG279G273G262G26fG3G25cG3G24bG268G25eG26aG26dG10G260G25fG26bG26cG25cG268G3G247G25fG261G25aG25cG262G26bG262G266G275G26fG3G23dG268G26bG26dG25eG25aG26aG26

9、bG26cG25cG11G3G23cG3G25eG25aG265G276G267G25fG263G272G25fG266G3G25cG268G261G266G268G260G267G268G3G25cG26bG26cG26dG269G265G25fG267G262G25fG3G25cG3G23fG23aG24bG24bG3G267G25aG270G262G268G267G25aG265G276G267G275G26fG3G268G26aG25dG25aG267G268G25cG269G268G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G2

10、62G262G3G25eG26aG26dG25dG262G26fG3G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG11G250G25fG265G262GfG3G268G26bG267G268G25cG267G275G25fG3G269G26aG262G267G270G262G269G275G3G262G3G268G26bG267G268G25cG267G268G263G3G269G268G26aG279G25eG268G264G3G269G26aG268G25cG25fG25eG25fG267G262G279G3G26aG25aG25bG268G26cG3G

11、269G268G3G266G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G268G263G3G26bG26cG25aG267G25eG25aG26aG10G26cG262G261G25aG270G262G262G3G26dG26bG26cG25aG267G268G25cG265G25fG267G275G3G23dG248G24bG24cG3G14G11G13Gb2G1cG15G3Ga9G246G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G25aG

12、279G3G26bG262G26bG26cG25fG266G25aG3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G11G3G248G26bG267G268G25cG267G275G25fG3G269G268G265G268G260G25fG10G267G262G279GaaGfG3G23dG248G24bG24cG3G14G11G15Gb2G1cG1aG3Ga9G246G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G25aG279G3G26bG262G

13、26bG26cG25fG266G25aG3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G11G3G24bG26cG25aG267G25eG25aG26aG26cG275G3G266G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G275G25fGfG269G26aG25aG25cG262G265G25aGfG3G26aG25fG264G268G266G25fG267G25eG25aG270G262G262G3G269G268G3G266G25fG260G2

14、5dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G268G263G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G11G3G249G268G26aG279G25eG268G264G3G26aG25aG261G26aG25aG25bG268G26cG264G262GfG3G269G26aG262G267G279G26cG262G279GfG3G269G26aG262G266G25fG10G267G25fG267G262G279GfG3G268G25bG267G268G25cG2

15、65G25fG267G262G279G3G262G3G268G26cG266G25fG267G275GaaG24bG25cG25fG25eG25fG267G262G279G3G268G3G26bG26cG25aG267G25eG25aG26aG26cG25fG14G3G249G248G23eG23dG248G24cG248G23cG245G23fG247G3G248G25bG273G25fG26aG268G26bG26bG262G263G26bG264G268G263G3G268G25bG273G25fG26bG26cG25cG25fG267G267G268G263G3G268G26aG25d

16、G25aG267G262G261G25aG270G262G25fG263G3Ga9G23aG26bG26bG268G270G262G25aG270G262G25fG263G3G262G267G260G25fG267G25fG26aG268G25cG3G269G268G264G268G267G26cG26aG268G265G278G3G266G262G264G26aG268G261G25aG25dG26aG279G261G267G25fG267G262G263GaaG3GbG23aG24bG242G247G244G248G246GcG3G262G3G24cG25fG26fG267G262G271

17、G25fG26bG264G262G266G3G264G268G266G262G26cG25fG26cG268G266G3G269G268G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G3G24cG244G3G14G1bG17G3Ga9G248G25bG25fG26bG10G269G25fG271G25fG267G262G25fG3G269G26aG268G266G275G272G265G25fG267G267G268G263G3G271G262G26bG26cG268G26cG275GaaG15G3G23cG247G23fG

18、24bG23fG247G3G23dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG268G266G3G24aG268G26bG26bG262G262G16G3G249G24aG242G247G259G24cG3G23fG25cG26aG25aG261G262G263G26bG264G262G266G3G26bG268G25cG25fG26cG268G266G3G269G268G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262GfG3G266G25fG26cG26aG268G265G268G25d

19、G262G262G3G262G3G26bG25fG26aG26cG262G26eG262G264G25aG270G262G262G3GbG269G26aG268G26cG268G264G268G265G3G28bG3G15G14G268G26cG3G16G13G3G266G25aG279G3G15G13G13G15G3G25dG11GcG241G25aG3G269G26aG262G267G279G26cG262G25fG3G269G26aG268G25dG268G265G268G26bG268G25cG25aG265G262G1dG244G26aG25aG26cG264G268G25fG3G2

20、67G25aG262G266G25fG267G268G25cG25aG267G262G25fG3G26bG26cG26aG25aG267G275G3G269G268G246G244G3GbG242G24bG248G3G16G14G19G19GcG3G13G13G17Gb2G1cG1aG244G268G25eG3G26bG26cG26aG25aG267G275G3G269G268G246G244G3GbG242G24bG248G3G16G14G19G19GcG3G13G13G17Gb2G1cG1aG24bG268G264G26aG25aG273G25fG267G267G268G25fG3G267

21、G25aG262G266G25fG267G268G25cG25aG267G262G25fG3G267G25aG270G262G268G267G25aG265G276G267G268G25dG268G3G268G26aG25dG25aG267G25aG269G268G3G26bG26cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G23aG261G25fG26aG25bG25aG263G25eG260G25aG267G23aG26aG266G25fG267G262G279G23bG25fG265G25aG26aG26dG26bG276G244G2

22、5aG261G25aG26fG26bG26cG25aG267G244G262G26aG25dG262G261G262G279G246G268G265G25eG268G25cG25aG24aG268G26bG26bG262G263G26bG264G25aG279G3G24eG25fG25eG25fG26aG25aG270G262G279G24cG25aG25eG260G262G264G262G26bG26cG25aG267G24cG26dG26aG264G266G25fG267G262G26bG26cG25aG267G24dG261G25bG25fG264G262G26bG26cG25aG267

23、G24dG264G26aG25aG262G267G25aG24G3dG24G30G25G3cG2eG3dG2eG2aG30G27G35G38G37G2dG37G30G38G3dG38G24G23aG261G25dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG23aG26aG266G25dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG23dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG3G24aG25fG26bG269G26dG25bG265G262G264G262G3G23bG25fG2

24、65G25aG26aG26dG26bG276G23dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG3G24aG25fG26bG269G26dG25bG265G262G264G262G3G244G25aG261G25aG26fG26bG26cG25aG267G244G275G26aG25dG275G261G26bG26cG25aG267G25eG25aG26aG26cG246G268G265G25eG268G25cG25aG26bG26cG25aG267G25eG25aG26aG26cG23dG268G26bG26bG26cG25aG267G25eG25aG2

25、6aG26cG3G24aG268G26bG26bG262G262G24cG25aG25eG260G262G264G26bG26cG25aG267G25eG25aG26aG26cG23dG265G25aG25cG25dG268G26bG26bG265G26dG260G25bG25aG3Ga9G24cG26dG26aG264G266G25fG267G26bG26cG25aG267G25eG25aG26aG26cG265G25aG26aG275GaaG24dG261G25dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG23dG268G26bG26bG26cG25a

26、G267G25eG25aG26aG26cG3G24dG264G26aG25aG262G267G275G17G3G247G25aG26bG26cG268G279G273G262G263G3G26bG26cG25aG267G25eG25aG26aG26cG3G262G25eG25fG267G26cG262G271G25fG267G3G266G25fG260G25eG26dG267G25aG26aG268G25eG267G268G266G26dG3G26bG26cG25aG267G25eG25aG26aG26cG26dG3G242G24bG248G3G14G17G19G17G17G10G14Gb2G

27、1cG1cG3Ga9G251G262G26bG26cG275G25fG3G269G268G266G25fG273G25fG10G267G262G279G3G262G3G26bG25cG279G261G25aG267G267G275G25fG3G26bG3G267G262G266G262G3G264G268G267G26cG26aG268G265G262G26aG26dG25fG266G275G25fG3G26bG26aG25fG25eG275G11G3G251G25aG26bG26cG276G3G14G1dG3G244G265G25aG26bG26bG262G26eG262G264G25aG2

28、70G262G279G3G271G262G26bG26cG268G26cG275G3G25cG268G261G25eG26dG26fG25aGaaG3GbG26G4fG48G44G51G55G52G52G50G56G44G51G47G3G44G56G56G52G46G4cG44G57G48G47G3G46G52G51G57G55G52G4fG4fG48G47G3G48G51G59G4cG55G52G51G50G48G51G57G56G3Gb2G3G33G44G55G57G3G14G1dG3G26G4fG44G56G56G4cG49G4cG46G44G57G4cG52G51G3G52G49G3G

29、44G4cG55G3G46G4fG48G44G51G4fG4cG51G48G56G56GcG249G268G26bG26cG25aG267G268G25cG265G25fG267G262G25fG266G3G23dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G268G25dG268G3G264G268G266G262G26cG25fG26cG25aG3G24aG268G26bG26bG262G263G26bG264G268G263G3G24eG25fG25eG25fG26aG25aG270G262G262G3G269G268G3G26bG26

30、cG25aG267G25eG25aG26aG26cG262G261G25aG270G262G262G3G262G3G266G25fG26cG26aG268G10G265G268G25dG262G262G3G268G26cG3G14G13G3G262G278G267G279G3G15G13G13G16G3G25dG11G3G28bG3G14G1cG13G10G26bG26cG3G266G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G275G263G3G26bG26cG25aG267G25eG25aG26aG26cG3G23

31、dG248G24bG24cG3G242G24bG248G3G14G17G19G17G17G10G14Gb2G15G13G13G15G3G25cG25cG25fG25eG25fG267G3G25cG25eG25fG263G26bG26cG25cG262G25fG3G26bG3G14G3G25aG269G26aG25fG265G279G3G15G13G13G17G3G25dG11G18G3G23cG23cG23fG23eG23fG247G3G23cG249G23fG24aG23cG255G23fG242G267G26eG268G26aG266G25aG270G262G279G3G268G3G25c

32、G25cG25fG25eG25fG267G262G262G3G25cG3G25eG25fG263G26bG26cG25cG262G25fG3GbG269G26aG25fG264G26aG25aG273G25fG267G262G262G3G25eG25fG263G26bG26cG25cG262G279GcG3G267G25aG26bG26cG268G279G273G25fG25dG268G3G26bG26cG25aG267G25eG25aG26aG26cG25aG3G262G3G262G261G266G25fG267G25fG10G267G262G263G3G264G3G267G25fG266G

33、26dG3G267G25aG3G26cG25fG26aG26aG262G26cG268G26aG262G262G3G26dG264G25aG261G25aG267G267G275G26fG3G25cG275G272G25fG3G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG3G269G26dG25bG265G262G264G26dG25fG26cG26bG279G3G25cG3G26dG264G25aG261G25aG26cG25fG265G279G26fG3G267G25aG270G262G268G267G25aG265G276G267G275G26fGbG

34、25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G275G26fGcG3G26bG26cG25aG267G25eG25aG26aG26cG268G25cGfG3G262G261G25eG25aG25cG25aG25fG266G275G26fG3G25cG3G277G26cG262G26fG3G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25aG26fG11G242G267G26eG268G26aG266G25aG270G262G279G3G268G25bG3G262G261G266G25fG267G25f

35、G267G262G279G26fG3G264G3G267G25aG26bG26cG268G279G273G25fG266G26dG3G26bG26cG25aG267G25eG25aG26aG26cG26dG3G269G26dG25bG265G262G264G26dG25fG26cG26bG279G3G25cG3G26dG264G25aG261G25aG26cG25fG265G25fG3GbG264G25aG26cG25aG265G268G25dG25fGcG3Ga9G246G25fG260G10G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G2

36、67G275G25fG3G26bG26cG25aG267G25eG25aG26aG26cG275GaaGfG3G25aG3G26cG25fG264G26bG26cG3G262G261G266G25fG267G25fG267G262G263G3Gb2G3G25cG3G262G267G26eG268G26aG266G25aG270G262G268G267G267G275G26fG3G26dG264G25aG261G25aG26cG25fG265G279G26fG3Ga9G246G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG10G25cG25fG267G2

37、67G275G25fG3G26bG26cG25aG267G25eG25aG26aG26cG275GaaG11G3G23cG3G26bG265G26dG271G25aG25fG3G269G25fG26aG25fG26bG266G268G26cG26aG25aG3G262G265G262G3G268G26cG266G25fG267G275G3G267G25aG26bG26cG268G279G273G25fG25dG268G3G26bG26cG25aG267G25eG25aG26aG26cG25aG3G3G26bG268G268G26cG25cG25fG26cG26bG26cG25cG26dG278

38、G273G25aG279G262G267G26eG268G26aG266G25aG270G262G279G3G25bG26dG25eG25fG26cG3G268G269G26dG25bG265G262G264G268G25cG25aG267G25aG3G25cG3G262G267G26eG268G26aG266G25aG270G262G268G267G267G268G266G3G26dG264G25aG261G25aG26cG25fG265G25fG3Ga9G246G25fG260G25dG268G26bG26dG25eG25aG26aG26bG26cG25cG25fG267G267G275G

39、25fG3G26bG26cG25aG267G25eG25aG26aG26cG275GaaG8bG3G242G249G244G3G242G261G25eG25aG26cG25fG265G276G26bG26cG25cG268G3G26bG26cG25aG267G25eG25aG26aG26cG268G25cGfG3G15G13G13G16G23cG3G24aG268G26bG26bG262G263G26bG264G268G263G3G24eG25fG25eG25fG26aG25aG270G262G262G3G267G25aG26bG26cG268G279G273G262G263G3G26bG26

40、cG25aG267G25eG25aG26aG26cG3G267G25fG3G266G268G260G25fG26cG3G25bG275G26cG276G3G269G268G265G267G268G26bG26cG276G278G3G262G265G262G3G271G25aG26bG26cG262G271G267G268G3G25cG268G26bG269G26aG268G262G261G10G25cG25fG25eG25fG267GfG3G26cG262G26aG25aG260G262G26aG268G25cG25aG267G3G262G3G26aG25aG26bG269G26aG268G2

41、6bG26cG26aG25aG267G25fG267G3G25cG3G264G25aG271G25fG26bG26cG25cG25fG3G268G26eG262G270G262G25aG265G276G267G268G25dG268G3G262G261G25eG25aG267G262G279G3G25bG25fG261G3G26aG25aG261G26aG25fG272G25fG267G262G279G3G23dG268G26bG26bG26cG25aG267G25eG25aG26aG26cG25aG24aG268G26bG26bG262G262G23dG248G24bG24cG3G242G2

42、4bG248G3G14G17G19G17G17G10G14Gb2G15G13G13G15G2cG2cG24bG268G25eG25fG26aG260G25aG267G262G25fG14G3G248G25bG265G25aG26bG26cG276G3G269G26aG262G266G25fG267G25fG267G262G279G3 G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G1

43、1G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G14G15G3G24cG25fG26aG266G262G267G275G3G262G3G268G269G26aG25fG25eG25fG265G25fG267G262G279G3G11G3G11G3G11G3G11G3G1

44、1G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G14G16G3G244

45、G265G25aG26bG26bG275G3G271G262G26bG26cG268G26cG275G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11

46、G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G16G17G3G249G26aG268G25cG25fG26aG264G25aG3G26bG268G268G26cG25cG25fG26cG26bG26cG25cG262G279G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G

47、11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G17G249G26aG262G265G268G260G25fG267G262G25fG3G23aG3G23dG26aG25aG26eG262G271G25fG26bG264G268G25fG

48、3G269G26aG25fG25eG26bG26cG25aG25cG265G25fG267G262G25fG3G264G265G25aG26bG26bG268G25cG3G271G262G26bG26cG268G26cG275G3 G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G18G249G26aG262G265G268G

49、260G25fG267G262G25fG3G23cG3G246G25fG26cG268G25eG262G264G25aG3G268G269G26aG25fG25eG25fG265G25fG267G262G279G3G264G265G25aG26bG26bG268G25cG3G271G262G26bG26cG268G26cG275G3G269G26aG262G3G269G268G266G268G273G262G3G25eG262G26bG264G26aG25fG26cG267G268G25dG268G3G26bG271G25fG26cG271G262G264G25aG3G271G25aG26bG

50、26cG262G270G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G3G26bG3G26aG25aG26bG26bG25fG279G267G262G25fG266G3G26bG25cG25fG26cG25aG3 G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G3G11G