1、 2 EN 1012-2:1996Compressors and vacuum pumps Safety precautions Part 2: Vacuum pumps(MOD) 62006/151 526152006( 1012-2:1996) 27 2002 . 184- , 1.02004 . 1 - , 4, 2 249 3 - 20 2006 . 321-4 1012-2:1996 2: (N 1012-2:1996 Compressors and vacuum pumps Safety precautions Part 2: Vacuumpumps). , , , , - / ,
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3、47.6 .158 .168.1 .16 526152006III8.2 .168.3 168.4 .168.5 .168.6 16 () , 18 () , 21 22 526152006IV 2 Compressors and vacuum pumps. Safety requirements. Part 2. Vacuum pumps 200703011 , , ( ). , , - , , , - . , 75 ( , -). .2 : 12.4.0262001 . , . . - . 5133499 . 5133699 . . . - 5133799 . . - 5134299 .
4、. 60204.199 . . 1. 2.6012006 . - 12.1.01290 . . 519785 . 306912001 . 1 526152006( 10122:1996) / 12100-12001 . , - . 1. , / 12100-22002 . , - . 2. - - , 1 - , , - . (), () . , -, , , .3 5197 / 12100-1, - :3.1 (vacuum): , . (), () 1 = 100 , 1 . = 133,322 .3.2 (vacuum pump): , , .3.3 (backing vacuum pu
5、mp): , - , .3.4 (rough vacuum pump): , - , - .3.5 (high vacuum pump): , - , . - .3.6 (vacuum system): -, , , - . - .3.7 (positive displacement pump): , , , -.3.8 (vapour jet pump): , - , .3.9 (cryopump): , , , () ( - ). 120 .3.10 (getter pump): , . , .3.11 (sputter ion pump): - , .2 5261520063.12 (m
6、olecular drag pump): , , - .3.13 (turbo-molecular pump): , . . , . - , .3.14 (pump inlet): , .3.15 (pump outlet): .3.16 (maximum starting pressure): , .3.17 (maximum backing pressure): , .3.18 (vacuum pump throughput): , - .3.19 (maximum tolerable working pressure): - , . , - , .3.20 (minimum tolera
7、ble working pressure): - , .3.21 (warm-up): .3.22 (substances being pumped): , : , .3.23 (operation materials): , : (, , , .), -, , , .4 , 4.1 4.1.1 , , - :- , , - , , . (5.1.1.1);- - , , - , , . (5.1.1.2);- (5.1.1.3);- -, (5.1.1.4);- , - :) (7.3.1);) (5.1.1.5);) , (5.1.1.6);) (7.3.1);) (5.1.1.7);- (5.1.1.8);- (5.1.1.9);-
